JPH0220340U - - Google Patents
Info
- Publication number
- JPH0220340U JPH0220340U JP1988098012U JP9801288U JPH0220340U JP H0220340 U JPH0220340 U JP H0220340U JP 1988098012 U JP1988098012 U JP 1988098012U JP 9801288 U JP9801288 U JP 9801288U JP H0220340 U JPH0220340 U JP H0220340U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- thin film
- film material
- holding member
- holding surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988098012U JPH0220340U (de) | 1988-07-22 | 1988-07-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988098012U JPH0220340U (de) | 1988-07-22 | 1988-07-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220340U true JPH0220340U (de) | 1990-02-09 |
Family
ID=31323897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988098012U Pending JPH0220340U (de) | 1988-07-22 | 1988-07-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220340U (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06288047A (ja) * | 1993-03-31 | 1994-10-11 | Shintaro Sato | ブロック覆工構造 |
| JP2009238869A (ja) * | 2008-03-26 | 2009-10-15 | Ulvac Japan Ltd | 搬送トレー及びこの搬送トレーを用いた真空処理装置 |
-
1988
- 1988-07-22 JP JP1988098012U patent/JPH0220340U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06288047A (ja) * | 1993-03-31 | 1994-10-11 | Shintaro Sato | ブロック覆工構造 |
| JP2009238869A (ja) * | 2008-03-26 | 2009-10-15 | Ulvac Japan Ltd | 搬送トレー及びこの搬送トレーを用いた真空処理装置 |