JPH0220710B2 - - Google Patents

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Publication number
JPH0220710B2
JPH0220710B2 JP17074986A JP17074986A JPH0220710B2 JP H0220710 B2 JPH0220710 B2 JP H0220710B2 JP 17074986 A JP17074986 A JP 17074986A JP 17074986 A JP17074986 A JP 17074986A JP H0220710 B2 JPH0220710 B2 JP H0220710B2
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JP
Japan
Prior art keywords
annealing
silicon steel
steel plate
steel sheet
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17074986A
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Japanese (ja)
Other versions
JPS62103374A (en
Inventor
Masao Iguchi
Isao Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
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Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Publication of JPS62103374A publication Critical patent/JPS62103374A/en
Publication of JPH0220710B2 publication Critical patent/JPH0220710B2/ja
Granted legal-status Critical Current

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  • Chemical Treatment Of Metals (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Description

【発明の詳細な説明】[Detailed description of the invention]

(産業上の利用分野) 一方向性けい素鋼板の電気・磁気的特性の改善
のうち、鉄損の低減に係わる極限的な要請を満た
そうとする近年来の目覚ましい開発努力について
は、逐次その実を挙げつつある。 この明細書では、上記特性のうち、とくに一方
向性けい素鋼板における磁歪の圧縮応力特性につ
いて、上記要請を有利に充足し得る新たな方途を
拓くことについての開発研究の成果に関連して以
下に述べる。 さて一方向性けい素鋼板は、よく知られている
とおり製品の2次再結晶粒を(011)〔001〕、すな
わちゴス方位に、高度に集積させたもので、主と
して変圧器その他の電気機器の鉄心とし使用され
電気・磁気的特性として、製品の磁束密度(B10
値で代表される)が高く、しかも、鉄損(W17/50
値で代表される)の低いことに加えて、とくに磁
歪特性が優れていることも要求される。 この一方向性けい素鋼板は複雑多岐にわたる工
程を経て製造され、それにつきこれまでもおびた
だしい改善が加えられ、今日では板厚0.30mmの製
品の磁気特性が、B10値:1.90T以上、W17/50値:
1.05w/Kg以下、また板厚0.23mmの製品の磁気特
性がB10値:1.89T以上、W17/50値:0.90w/Kg以
下の超低鉄損一方向性けい素鋼板も製造されるよ
うになつて来ている。このようにすぐれB10およ
びW17/50のレベルにおいて、一方向性けい素鋼板
の磁歪の圧縮応力特性をもあわせ向上するのに有
用な極薄張力被膜が、順におつて以下説明するよ
うにこの発明により、新たに究明されたのであ
る。 一般にけい素鋼板の磁歪は、鋼板を磁化した際
に鋼板が伸縮振動する現象であり、変圧器騒音の
最も大きな原因となつている。 この磁歪挙動は鋼板の磁化過程が90゜磁壁移動
および回転磁化を含むことに起因し、鋼板にかか
る圧縮応力に応じて磁歪は増大する。 変圧器の組立時には不可避的に鋼板に圧縮応力
が加わるところ、あらかじめ、鋼板に張力を与え
ておけば磁歪の圧縮応力特性の面で有利である。
勿論鋼板に張力が与えられることは方向性けい素
鋼板の鉄損の改善にも有効でその効果が顕著であ
る。 一般に方向性けい素鋼板は、通常2次再結晶前
の脱炭・1次再結晶焼鈍時に鋼板表面に形成され
るフアイヤライト(Fe2SiO4)と呼ばれる鉄酸化
物とMgOを主体とする焼鈍分離剤との仕上げ焼
鈍の際における高温反応によつて生成されたフオ
ルステライト質下地被膜とさらにその上にりん酸
塩とコロイダルシリカを主成分とする2重の被膜
によつて張力が加えられ、磁歪特性の改善が行わ
れてはいるがこのような在来手法による磁歪の圧
縮応力特性の改善は必ずしも充分とはいえない。 (従来の技術) 磁歪特性を改善するため鋼板表面に弾性張力を
かけることのできる絶縁被膜の開発(例えば特公
昭56−521117号あるいは特公昭和53−28375号公
報参照)が行われたがなお依然として実効に乏し
い。 (発明が解決しようとする問題点) 一方向性けい素鋼板における磁歪の圧縮特性の
一層有利な向上を、鉄損の有効な低減にあわせ実
現することができる張力被膜を与えて、該鋼板の
電気、磁気特性の充実を実際的に可能にすること
がこの発明の目的であり、次に述べるほう化物、
けい化物、リン化物ならびに硫化物の薄層が、一
方向性けい素鋼板の板面上における強固な密着の
下での被覆によつて、磁歪の圧縮特性の改善を鉄
損の低減にあわせ達成し得ることの新規知見に由
来している。 (問題点を解決するための手段) この発明は仕上焼鈍済みの一方向性けい素鋼板
表面上の非金属物質を除去した後、研磨処理によ
り平滑に仕上げた表面に、 Si,Ti,Nb,Ta,Al,Zr,Hf,V及びWの
ほう化物、 Mo,W,Ti,Zr及びVのけい化物、 B及びSiのりん化物並びに Fe及びZnの硫化物 より成る群のうちから選んだ少なくとも1種から
なり、 それらの地鉄との混合相を介し鋼板表面へ強固
に被着した極薄層、またさらには該極薄層上に重
ねて被着した絶縁性塗布焼付層を具備することを
特徴とする、磁気特性とくに磁歪の圧縮応力特性
に優れた一方向性けい素鋼板である。 この発明の成功を由来した実験経緯から説明を
進める。 C:0.043重量%(以下単に%で示す)、Si:
3.36%,Mn:0.062%,Se:0.021%,Sb:0.025
%,Mo:0.025%を含有するけい素鋼連鋳スラブ
を1360℃で4時間加熱後熱間圧延して2.4mm厚の
熱延板とした。 その後900℃で3分間の均一化焼鈍後、950℃で
3分間の中間焼鈍をはさむ2回の冷間圧延を施し
て0.23mm厚の最終冷延板とした。 その後820℃の湿水素中で脱炭.1次再結晶焼
鈍を施した後、鋼板表面にAl2O3(70%)とMgO
(30%)を主成分とする焼鈍分離剤を塗布し、つ
いて850℃で50時間の2次再結晶焼鈍と1200℃で
乾水素中で5時間の純化焼鈍を施した。 その後はまず70℃のHCl液中で酸洗して鋼板表
面の酸化物を除去した後、3%HFとH2O2の溶液
中で化学研磨し鋼板表面を中心線平均粗さが
0.05μmの鏡面状態に仕上げた。 その後CVD装置を用いてTiCl4とH2とBCl3
混合ガス雰囲気中850℃で、15時間にわたる鋼板
表面上でのCVD反応により0.8μm厚のTiB2の張
力薄膜を形成させた。 その後鋼板表面上にりん酸塩とコロイダルシリ
カを主成分とする絶縁被膜を焼付により形成させ
た後、800℃で2時間の歪み取り焼鈍を行つて製
品とした。 この製品の磁歪の圧縮応力特性ならびに磁気特
性を第1図にて通常工程材(比較材)と比較して
示す。 なおこのときの比較材は上記の0.23mm厚の最終
冷延板の一部に820℃の湿水素中で脱炭・1次再
結晶焼鈍を施した後、鋼板表面上でとくにMgO
を主成分とする焼鈍分離剤を塗布したほかはその
後850℃で50時間の2次再結晶焼鈍と1200℃での
乾水素中での5時間の純化焼鈍についても、また
このとき鋼板表面上に形成されるフオルステライ
ト下地被膜に重ねるりん酸塩とコロイダルシリカ
を主成分とする絶縁被膜の焼付けについても上掲
供試材と同様な手順とした。 第1図から明らかなようにこの発明のTiB2
薄張力被膜を被成した製品の磁気特性はB10値が
1.925T,W17/50値が0.73W/Kgときわめて良好
で、しかも圧縮応力0.4Kg/mm2で磁気ひずみλpp
が0.20×10-6、また圧縮応力を0.6Kg/mm2に増加
しても磁気ひずみλppは0.65×10-6でであり、磁
気ひずみの増加がきわめて少ない。 これに対して通常工程材(比較材)による製品
の磁気特性はB10値が1.90T,W17/50値が0.87W/
Kgで、圧縮応力を加えると磁気ひずみλppが著し
く増加し、例えば圧縮応力σが0.4Kg/mm2で磁気
ひずみλppが3.2×10-6のように大きな値を示す。 引続き発明者らは、製品板厚の異なる場合にも
上記の磁歪の圧縮応力特性の優れた超低鉄損一方
向性けい素鋼板が得られるかどうについて広範囲
な実験を行つた。すなわちC:0.042%,Si:3.38
%,Mn:0.062%,Se:0.021%,Sb:0.025%,
Mo:0.025%を含有するけい素鋼連鋳スラブを
1360℃で5時間加熱後熱間圧延して1.8〜3.0mm厚
の熱延板とした。 その後厚さの異なる熱延板を何れも900℃で3
分間の均一化焼鈍後、950℃で3分間の中間焼鈍
を挟む2回の冷間圧延を施して0.17,0.20,0.23,
0.27,0.30及び0.35mm厚にグループ分けし最終冷
延板を得た。 その後820℃の湿水素中で脱炭・1次再結晶焼
鈍を施した後、鋼板表面上にAl2O3(70%)と
MgO(30%)を主成分とする焼鈍分離剤を塗布し
次で850℃で50時間の2次再結晶焼鈍と1200℃で
乾水素中で5時間の純化焼鈍を施した。 その後はまず70℃のHCl液中で酸洗して鋼板表
面の酸化物を除去した後、3%HFとH2O2の溶液
中で化学研磨し鋼板表面を中心線平均粗さ
0.05μmの鏡面状態に仕上げた。 その後PVD(イオンプレーテイング)装置を用
いてこれの鋼板表面上に0.05〜3μmの範囲で種々
に厚みの異なるTiSiの極薄張力被膜を形成させ
た。 その後鋼板表面上にりん酸塩とコロイダルシリ
カを主成分とする絶縁被膜を焼付により形成させ
た後、800℃で2時間のひずみを取り焼鈍を行つ
て製品とし、そのときの磁歪の圧縮応力特性なら
びに磁気特性の測定を行つた結果を第2図にまと
めて示した。 第2図には圧縮応力が0.4Kg/mm2での製品の磁
歪が0.6×10-6λpp以下となる、製品板厚−張力被
膜厚の対応を各製品板厚における鉄損値とともに
示した。 第2図から明らかなように磁歪特性が鉄損値と
共に優れた一方向性けい素鋼板を得るためには、
製品板厚とTiSiの膜厚とは相関があり、製品板
厚の薄い製品では、TiSiの膜厚を薄く、製品板
厚の厚い製品ではTiSiの膜を厚くする必要のあ
ることがわかる。 (作用) 上記のような仕上げ焼鈍済一方向性けい素鋼板
の鏡面化後における極薄張力被膜形成による磁歪
の圧縮応力特性及び磁気特性の改善が達成される
理由、鏡面化により磁壁の移動おを容易にした状
態で、鋼板との密着性の優れたTiB2あるいは
TiSiの張力被膜を形成することによつて鋼板に
強力な弾性張力が与えられたためであると考えら
れる。 またTiB2あるいはTiSiの張力被膜は製品板厚
によつて最適膜厚が存在し、板厚の厚い製品では
TiB2あるいはTiSiの膜厚を厚くして張力を大き
くする必要がある。 このようにけい素鋼板に与えられた引張応力は
磁歪だけでなく、鉄損の改善にも有効であり、特
にゴス方位に強く集積した実磁束密度一方向性け
い素鋼板の場合にはその効果が顕著である。 次にこの発明による、一方向性けい素鋼板およ
びそ製造工程について説明する。 出発素材は従来公知の一方向性けい素鋼板素材
成分、例えば、 C:0.01〜0.06%,Si:2.0〜4.0%, Mn:0.01〜0.2%,Mo:0.003〜0.1%, Sb:0.005〜0.2%,S又はSeの1種あるいは2
種合計で、0.005〜0.05%を含有する組成 C:0.01〜0.06%,Si:2.0〜4.0%, Mn:0.01〜0.2%,N:0.001〜0.01%, Al:0.005〜0.06%,Sn:0.01〜0.5%, Cu:0.01〜0.3%,Mn:0.01〜0.2%, S又はSeの1種又は2種合計で0.005〜0.05%
を含有する組成 C:0.01〜0.06%,Si:2.0〜4.0%, B:0.0003〜0.02%,N:0.001〜0.01%, Mn:0.01〜0.2%,S又はSeの1種又は2種合
計で0.005〜0.05%を含有する組成 C:0.01〜0.06%,Si:2.0〜4.0%, Mn:0.01〜0.2%,Sb:0.005〜0.2%, S又はSeの1種又は2種合計で0.005〜0.05%
を含有する組成 C:0.01〜0.06%,Si:2.0〜4.0%, Mn:0.01〜0.2%,S又はSeの1種又は2種合
計で0.005〜0.05%を含有する組成 の如きにおいて適用可能である。 次に熱延板は800〜1100℃の均一化焼鈍を経て
1回の冷間圧延で最終板厚とする1回冷延法か又
は、通常850℃から1050℃の中間焼鈍をはさんで
さらに冷延する2回冷延法にて、後者の場合最初
の圧下率は50%から80%程度、最終の圧下率は50
%から85%程度で0.15mmから0.35mm厚の最終冷延
板厚とする。 最終冷延を終り製品板厚に仕上げた鋼板は、表
面脱脂後750℃から850℃の湿水素中で脱炭・1次
再結晶焼鈍処理を施す。 その後鋼板表面にAl2O3,ZrOあるいはTiO2
MgO等を主成分とする焼鈍分離剤を塗布する。
この発明の場合は、フオルステライトが形成され
た場合であつても、形成されない場合であつても
適用可能である。 従来仕上げ焼鈍後の形成を不可穴としていたフ
オルステライトはとくに形成させない方がその後
の鋼板の鏡面処理を簡便にするのに有効であるの
で、焼鈍分離剤としてAl2O3,ZrO2,TiO2等を
50%以上MgOに混入して使用するのが好ましい。 その後2次再結晶焼鈍を行うが、この工程は
{100}〈001〉方位の2次再結晶粒を充分発達させ
るために施されるもので通常箱焼鈍によつて直ち
に1000℃以上に昇温し、その温度に保持すること
によつて行われる。 この場合{100}〈001〉方位に、高度に揃つた
2次再結晶粒組織を発達させるためには820℃か
ら900℃の低温で保定焼鈍する方が有利であり、
そのほか例えば0.5〜15℃/hの昇温速度の徐熱
焼鈍でもよい。 2次再結晶焼鈍後の純化焼鈍は、乾水素中で
1100℃以上で1〜20時間焼鈍を行つて、鋼板の純
化を達成することが必要である。 この純化焼鈍後に鋼板表面の酸化物被膜を公知
の酸洗などの化学的除去法や切削、研磨などの機
械的除去法又はそれらの組合わせにより除去す
る。 この酸化物除去処理の後、化学研磨、電解研磨
などの化学的研磨や、ハブ研磨などの機械的研磨
あるいはそれらの組合わせなど従来の手法により
鋼板表面を鏡面状態つまり中心線平均粗さ0.4μm
以下に仕上げる。 このような鏡面研磨後、CVD、イオンプレー
テイングあるいはイオンインプランテテーシヨン
などによりすでに述べたTiB2,TiSiの場合と同
じようにしてSi,Nb,Ta,Al,Zr,Hf,V及
びWのほう化物、Mo,W,Zr,及びVのけい化
物、B及びSiのりん化物ないしはFe,及びZnの
硫化物のうちから選んだ少なくとも1種からなる
極薄張力被膜を形成させることによつて、同等の
効果がもたらされらる。この場合各張力被膜の最
適膜厚についても、すでに第2図で述べたTiSi
の場合と同じく製品板厚によつて異なり、製品板
厚の厚い製品では膜厚を厚く製品板厚の薄い製品
では膜厚を薄くする。 上記のように生成させた張力被膜にはりん酸塩
とコロイダルシリカを主成分とする絶縁被膜を焼
付し、さらに600〜900℃の温度範囲で歪み取り焼
鈍を施して製品とする。 (実施例) (実施例 1) C:0.055%,Si:3.19%,Mn:0.069%,Al:
0.026%,S:0.026%,Cu:0.09%,Sn:0.07%
を含有する一方向性珪素鋼を1460℃で3時間加熱
した後、熱間圧延して2.0mm厚の熱延板とした。 その後1050℃で3分間の均一化焼鈍を施した後
急冷処理した。その後300℃での温度圧延を施し
た後0.20厚の最終冷延板とした。 その後840℃の湿水素中で脱炭を兼ねる1次再
結晶焼鈍を施した後、Al2O3(60%)、MgO(35
%)、TiO2(2%)、ZrO2(3%)の焼鈍分離剤を
塗布した後、850℃から8℃/hrで昇温して2次
再結晶させた後、1200℃で8時間H2ガス中で純
化焼鈍を行なつた。 そのあと酸洗により鋼板表面上に酸化物を除去
した後、電解研磨を行つて鋼板表面を鏡面状態に
仕上げた。 その後CVD装置を用いてTiCl4とH2とBCl3
混合ガス雰囲気中880℃で15時間にわたる鋼板表
面上でのCVD反応により1.0μm厚のTiB2の張力
皮膜を形成させた。 そのときの製品の磁歪の圧縮応力特性ならびに
磁気特性の測定を行なつた結果は次のようであつ
た。 圧縮応力が0.4Kg/mm2での製品の磁歪λpp:0.5
×0-6以下、 磁気特性 B10:1.94T,W17/50:0.71W/Kg (実施例 2) C:0.043%,Si:3.37%,Mn:0.063%,
Mo:0.025%,Se:0.022%,Sb:0.025%を含有
する熱延板を用意した。 この熱延板は900℃で3分間の均一化焼鈍後、
950℃の中間焼鈍をはさんで2回の冷間圧延を施
して0.23mm厚の最終冷延板とした。 その後820℃の湿水素中で脱炭焼鈍後、鋼板表
面にAl2O3(75%),MgO(20%),ZrO2(5%)を
主成分とする焼鈍分離剤を塗布した後850℃で50
時間の2次再結晶焼鈍および1200℃で8時間の
H2中で純化焼鈍を行つた。 その後酸洗により鋼板表面上の酸化被膜を除去
し、次いで3%HFとH2O2液中で化学研磨して鏡
面仕上げした。その後CVD、(表1中の無印)イ
オンプレーテイング(表1中の○印)およびイオ
ンインプランテーシヨン(表1中の△印)により
種々の化合物薄膜を何れも0.7〜0.9μm厚で形成さ
せた。 その後これらの処理をした試料は表面にりん酸
塩とコロイダルシリカを主成分とする絶縁被膜を
焼付処理した後、800℃で2時間のひずみ取り焼
鈍を行つた。 そのときの製品の磁気特性および磁歪の圧縮応
力特性、(圧縮応力σが0.4および0.6Kg/mm2での
磁気ひずみの値λpp)を表1にまとめて示す。
(Field of industrial application) Among the improvements in the electrical and magnetic properties of grain-oriented silicon steel sheets, remarkable development efforts in recent years have been made to meet the extreme requirements of reducing iron loss. are being listed. In this specification, the following is related to the results of development research to open up a new method that can advantageously satisfy the above requirements, particularly regarding the magnetostrictive compressive stress properties of unidirectional silicon steel sheets among the above properties. I will explain. As is well known, unidirectional silicon steel sheets are products in which secondary recrystallized grains are highly concentrated in the (011)[001], or Goss, orientation, and are mainly used in transformers and other electrical equipment. The magnetic flux density (B 10
) is high, and iron loss (W 17/50
In addition to having a low value (represented by the value of This unidirectional silicon steel sheet is manufactured through a complex and diverse process, and has undergone numerous improvements over the years. Today, products with a thickness of 0.30 mm have magnetic properties such as B10 value: 1.90T or more, W 17/50 value:
We also manufacture ultra-low iron loss unidirectional silicon steel sheets with magnetic properties of 1.05w/Kg or less, and magnetic properties of B10 value: 1.89T or more and W17 /50 value: 0.90w/Kg or less for products with a thickness of 0.23mm. It is becoming more and more common. Thus, at the excellent B 10 and W 17/50 levels, ultra-thin tensile coatings useful for improving the magnetostrictive compressive stress properties of unidirectional silicon steel sheets have been developed as described below in order. This invention has led to a new investigation. In general, magnetostriction in silicon steel sheets is a phenomenon in which the steel sheet expands and contracts when it is magnetized, and is the largest cause of transformer noise. This magnetostrictive behavior is due to the fact that the magnetization process of the steel sheet includes 90° domain wall movement and rotational magnetization, and the magnetostriction increases in accordance with the compressive stress applied to the steel sheet. When assembling a transformer, compressive stress is inevitably applied to the steel plate, so it is advantageous in terms of magnetostrictive compressive stress characteristics if tension is applied to the steel plate in advance.
Of course, applying tension to the steel plate is also effective in improving the iron loss of the grain-oriented silicon steel plate, and the effect is remarkable. In general, grain-oriented silicon steel sheets undergo annealing separation mainly consisting of iron oxide called fireite (Fe 2 SiO 4 ) and MgO, which are formed on the steel sheet surface during decarburization and primary recrystallization annealing before secondary recrystallization. Tension is applied by a forsterite undercoating produced by a high-temperature reaction during final annealing with the agent, and a double coating consisting of phosphate and colloidal silica on top of the forsterite base coating, which causes magnetostriction. Although the characteristics have been improved, the improvement of the compressive stress characteristics of magnetostriction by such conventional methods is not necessarily sufficient. (Prior art) Insulating coatings that can apply elastic tension to the surface of steel sheets have been developed in order to improve magnetostrictive properties (see, for example, Japanese Patent Publication No. 56-521117 or Japanese Patent Publication No. 53-28375). It still lacks effectiveness. (Problems to be Solved by the Invention) It is possible to provide a tensile coating that can further advantageously improve the compressive properties of magnetostriction in a unidirectional silicon steel sheet, together with an effective reduction in core loss. The purpose of this invention is to make it practically possible to improve electrical and magnetic properties, and the following borides,
A thin layer of silicide, phosphide, and sulfide is coated on the surface of the unidirectional silicon steel sheet under strong adhesion to improve the magnetostrictive compressive properties while reducing iron loss. It is derived from new knowledge of what is possible. (Means for Solving the Problems) This invention removes non-metallic substances on the surface of a finish-annealed unidirectional silicon steel sheet, and then polishes the surface to make it smooth. At least one selected from the group consisting of borides of Ta, Al, Zr, Hf, V and W, silicides of Mo, W, Ti, Zr and V, phosphides of B and Si, and sulfides of Fe and Zn. An ultra-thin layer made of one type of metal and firmly adhered to the surface of the steel plate through a mixed phase with the base iron, and an insulating coated and baked layer that is superimposed and adhered on the ultra-thin layer. This is a unidirectional silicon steel sheet with excellent magnetic properties, especially magnetostrictive compressive stress properties. The explanation will begin with the experimental history that led to the success of this invention. C: 0.043% by weight (hereinafter simply expressed as %), Si:
3.36%, Mn: 0.062%, Se: 0.021%, Sb: 0.025
%, Mo: 0.025% was heated at 1360°C for 4 hours and then hot-rolled to form a hot-rolled sheet with a thickness of 2.4 mm. Thereafter, after uniform annealing at 900°C for 3 minutes, cold rolling was performed twice with intermediate annealing at 950°C for 3 minutes to obtain a final cold-rolled plate with a thickness of 0.23 mm. Then decarburized in wet hydrogen at 820℃. After primary recrystallization annealing, Al 2 O 3 (70%) and MgO are added to the surface of the steel sheet.
(30%) was applied as a main component, followed by secondary recrystallization annealing at 850°C for 50 hours and purification annealing at 1200°C in dry hydrogen for 5 hours. After that, the steel plate surface was first pickled in HCl solution at 70℃ to remove oxides on the steel plate surface, and then chemically polished in a solution of 3% HF and H 2 O 2 to improve the center line average roughness of the steel plate surface.
Finished with a mirror finish of 0.05μm. Thereafter, using a CVD device, a 0.8 μm thick TiB 2 tension thin film was formed by a CVD reaction on the steel plate surface for 15 hours at 850°C in a mixed gas atmosphere of TiCl 4 , H 2 , and BCl 3 . Thereafter, an insulating film mainly composed of phosphate and colloidal silica was formed on the surface of the steel plate by baking, and then strain relief annealing was performed at 800°C for 2 hours to produce a product. Figure 1 shows the magnetostrictive compressive stress characteristics and magnetic characteristics of this product in comparison with a normally processed material (comparative material). In this case, the comparison material was a part of the final cold-rolled sheet with a thickness of 0.23 mm, which was subjected to decarburization and primary recrystallization annealing in wet hydrogen at 820°C, and then MgO
In addition to applying an annealing separator mainly composed of The same procedure as for the above-mentioned sample material was used for baking the insulating film mainly composed of phosphate and colloidal silica, which was superimposed on the formed forsterite base film. As is clear from Figure 1, the magnetic properties of the product coated with the TiB 2 ultra-thin tensile coating of this invention have a B10 value.
1.925T, W 17/50 value is extremely good at 0.73W/Kg, and magnetostriction λpp is low at compressive stress of 0.4Kg/ mm2.
is 0.20×10 −6 , and even if the compressive stress is increased to 0.6 Kg/mm 2 , the magnetostriction λpp is 0.65×10 −6 , and the increase in magnetostriction is extremely small. On the other hand, the magnetic properties of products made from conventional process materials (comparison materials) have a B 10 value of 1.90T and a W 17/50 value of 0.87W/
Kg, when compressive stress is applied, the magnetostriction λpp increases significantly, and for example, when the compressive stress σ is 0.4 Kg/mm 2 , the magnetostriction λpp shows a large value such as 3.2×10 -6 . Subsequently, the inventors conducted extensive experiments to determine whether an ultra-low iron loss unidirectional silicon steel sheet having excellent magnetostrictive compressive stress characteristics as described above could be obtained even when the product sheet thickness was different. That is, C: 0.042%, Si: 3.38
%, Mn: 0.062%, Se: 0.021%, Sb: 0.025%,
Continuously cast silicon steel slab containing Mo: 0.025%
After heating at 1360° C. for 5 hours, hot rolling was performed to obtain a hot rolled sheet having a thickness of 1.8 to 3.0 mm. After that, hot-rolled sheets with different thicknesses were heated to 900℃ for 3
After homogenization annealing for 3 minutes, cold rolling was performed twice at 950℃ with 3 minutes of intermediate annealing in between.
The final cold-rolled sheets were obtained by grouping into 0.27, 0.30, and 0.35 mm thicknesses. After decarburization and primary recrystallization annealing in wet hydrogen at 820°C, Al 2 O 3 (70%) is deposited on the surface of the steel sheet.
An annealing separator mainly composed of MgO (30%) was applied, followed by secondary recrystallization annealing at 850°C for 50 hours and purification annealing at 1200°C in dry hydrogen for 5 hours. After that, the steel plate surface was first pickled in HCl solution at 70℃ to remove oxides on the steel plate surface, and then chemically polished in a solution of 3% HF and H 2 O 2 to improve the center line average roughness of the steel plate surface.
Finished with a mirror finish of 0.05μm. Then, using a PVD (ion plating) device, ultrathin TiSi tensile films with various thicknesses ranging from 0.05 to 3 μm were formed on the surface of the steel plate. After that, an insulating film mainly composed of phosphate and colloidal silica is formed on the surface of the steel plate by baking, and then annealed at 800°C for 2 hours to remove strain, resulting in a product with magnetostrictive compressive stress characteristics. The results of measurements of magnetic properties are summarized in Figure 2. Figure 2 shows the relationship between product thickness and tension coating thickness, together with the iron loss value for each product thickness, so that the magnetostriction of the product is 0.6×10 -6 λpp or less when the compressive stress is 0.4Kg/ mm2 . . As is clear from Figure 2, in order to obtain a unidirectional silicon steel sheet with excellent magnetostrictive properties as well as iron loss value,
It can be seen that there is a correlation between the product board thickness and the TiSi film thickness, and it is necessary to reduce the TiSi film thickness for products with thin product board thickness, and to increase the TiSi film thickness for products with thick product board thickness. (Function) The reason why the magnetostrictive compressive stress characteristics and magnetic properties are improved by the formation of an ultra-thin tension coating after mirror polishing of a finish annealed unidirectional silicon steel sheet as described above, TiB 2 or TiB 2, which has excellent adhesion to the steel plate,
This is thought to be due to the strong elastic tension given to the steel plate by forming the TiSi tension film. In addition, there is an optimum film thickness for TiB 2 or TiSi tension coating depending on the thickness of the product.
It is necessary to increase the tension by increasing the thickness of the TiB 2 or TiSi film. The tensile stress applied to silicon steel sheets in this way is effective not only for improving magnetostriction but also for improving core loss, and this effect is especially effective in the case of unidirectional silicon steel sheets with real magnetic flux density strongly concentrated in the Goss orientation. is remarkable. Next, a unidirectional silicon steel sheet and its manufacturing process according to the present invention will be explained. The starting materials are conventionally known unidirectional silicon steel sheet material components, such as C: 0.01-0.06%, Si: 2.0-4.0%, Mn: 0.01-0.2%, Mo: 0.003-0.1%, Sb: 0.005-0.2 %, one or two of S or Se
Composition containing 0.005-0.05% in total of species C: 0.01-0.06%, Si: 2.0-4.0%, Mn: 0.01-0.2%, N: 0.001-0.01%, Al: 0.005-0.06%, Sn: 0.01 ~0.5%, Cu: 0.01~0.3%, Mn: 0.01~0.2%, 0.005~0.05% in total of one or both of S or Se
Composition containing C: 0.01 to 0.06%, Si: 2.0 to 4.0%, B: 0.0003 to 0.02%, N: 0.001 to 0.01%, Mn: 0.01 to 0.2%, one or two of S or Se in total Composition containing 0.005 to 0.05% C: 0.01 to 0.06%, Si: 2.0 to 4.0%, Mn: 0.01 to 0.2%, Sb: 0.005 to 0.2%, 0.005 to 0.05 in total of one or both of S or Se %
It is applicable to compositions containing C: 0.01 to 0.06%, Si: 2.0 to 4.0%, Mn: 0.01 to 0.2%, and compositions containing one or both of S or Se in a total of 0.005 to 0.05%. be. Next, the hot-rolled sheet is either uniformly annealed at 800-1100°C and then cold-rolled once to achieve the final thickness, or it is usually subjected to intermediate annealing at 850-1050°C and further processed. In the two-step cold rolling method, in the latter case, the initial rolling reduction is about 50% to 80%, and the final rolling reduction is 50%.
The final cold-rolled plate thickness is 0.15mm to 0.35mm at a rate of 85% to 85%. After final cold rolling, the steel plate finished to the product thickness is surface degreased and then subjected to decarburization and primary recrystallization annealing in wet hydrogen at 750°C to 850°C. After that, Al 2 O 3 , ZrO or TiO 2 was added to the surface of the steel plate.
Apply an annealing separator mainly composed of MgO, etc.
The present invention is applicable regardless of whether forsterite is formed or not. It is especially effective not to form forsterite, which was conventionally impossible to form after finishing annealing, in order to simplify the subsequent mirror finishing of the steel sheet, so Al 2 O 3 , ZrO 2 , TiO 2 are used as annealing separators. etc.
It is preferable to use 50% or more of MgO mixed with MgO. After that, secondary recrystallization annealing is performed, but this step is carried out to sufficiently develop secondary recrystallized grains with {100}<001> orientation, and the temperature is usually raised to 1000℃ or higher immediately by box annealing. This is done by holding the temperature at that temperature. In this case, in order to develop a highly aligned secondary recrystallized grain structure in the {100}<001> orientation, it is advantageous to perform retention annealing at a low temperature of 820°C to 900°C.
In addition, slow heat annealing at a heating rate of 0.5 to 15° C./h may also be used. Purification annealing after secondary recrystallization annealing is performed in dry hydrogen.
It is necessary to perform annealing at 1100°C or higher for 1 to 20 hours to achieve purification of the steel plate. After this purification annealing, the oxide film on the surface of the steel sheet is removed by known chemical removal methods such as pickling, mechanical removal methods such as cutting and polishing, or a combination thereof. After this oxide removal treatment, conventional methods such as chemical polishing such as chemical polishing and electrolytic polishing, mechanical polishing such as hub polishing, or a combination thereof are used to polish the steel plate surface to a mirror-like state, that is, to a center line average roughness of 0.4 μm.
Finish as below. After such mirror polishing, Si, Nb, Ta, Al, Zr, Hf, V, and W are polished by CVD, ion plating, or ion implantation in the same manner as in the case of TiB 2 and TiSi. By forming an ultra-thin tension coating consisting of at least one selected from borides, silicides of Mo, W, Zr, and V, phosphides of B and Si or sulfides of Fe, and sulfides of Zn. , the same effect is brought about. In this case, the optimum film thickness of each tension coating is also determined by the TiSi
As in the case of , it differs depending on the product board thickness, and for products with a thick product board, the film thickness is thicker, and for products with a thin product board thickness, the film thickness is thinner. An insulating film containing phosphate and colloidal silica as main components is baked onto the tension film produced as described above, and then strain relief annealing is performed at a temperature range of 600 to 900°C to produce a product. (Example) (Example 1) C: 0.055%, Si: 3.19%, Mn: 0.069%, Al:
0.026%, S: 0.026%, Cu: 0.09%, Sn: 0.07%
The unidirectional silicon steel containing the following was heated at 1460° C. for 3 hours and then hot rolled into a 2.0 mm thick hot rolled sheet. Thereafter, it was homogenized annealed at 1050°C for 3 minutes and then rapidly cooled. After that, it was subjected to temperature rolling at 300°C to obtain a final cold-rolled plate with a thickness of 0.20. After that, primary recrystallization annealing was performed in wet hydrogen at 840°C, which also served as decarburization, and Al 2 O 3 (60%), MgO (35
%), TiO 2 (2%), and ZrO 2 (3%) annealing separators were applied, the temperature was raised from 850°C to 8°C/hr for secondary recrystallization, and then at 1200°C for 8 hours. Purification annealing was performed in H2 gas. Thereafter, oxides were removed from the surface of the steel plate by pickling, and then electrolytic polishing was performed to finish the surface of the steel plate to a mirror finish. Thereafter, using a CVD device, a 1.0 μm thick TiB 2 tension film was formed by a CVD reaction on the steel plate surface at 880°C for 15 hours in a mixed gas atmosphere of TiCl 4 , H 2 , and BCl 3 . The results of measuring the magnetostrictive compressive stress characteristics and magnetic characteristics of the product at that time were as follows. Magnetostriction λpp of product at compressive stress of 0.4Kg/ mm2 : 0.5
×0 -6 or less, magnetic properties B 10 : 1.94T, W 17/50 : 0.71W/Kg (Example 2) C: 0.043%, Si: 3.37%, Mn: 0.063%,
A hot rolled sheet containing Mo: 0.025%, Se: 0.022%, and Sb: 0.025% was prepared. This hot-rolled sheet was uniformly annealed at 900℃ for 3 minutes,
Cold rolling was performed twice with intermediate annealing at 950° C. to obtain a final cold rolled sheet with a thickness of 0.23 mm. After decarburization annealing in wet hydrogen at 820℃, an annealing separator containing Al 2 O 3 (75%), MgO (20%), and ZrO 2 (5%) as main components was applied to the surface of the steel sheet. 50℃
Secondary recrystallization annealing for 1 hour and 8 hours at 1200℃
Purification annealing was performed in H2 . Thereafter, the oxide film on the surface of the steel plate was removed by pickling, and then chemically polished in a 3% HF and H 2 O solution to give a mirror finish. After that, thin films of various compounds were formed by CVD (no mark in Table 1), ion plating (○ mark in Table 1), and ion implantation (△ mark in Table 1), each with a thickness of 0.7 to 0.9 μm. I let it happen. After that, the surface of these treated samples was baked with an insulating coating mainly composed of phosphate and colloidal silica, and then subjected to strain relief annealing at 800°C for 2 hours. The magnetic properties and magnetostrictive compressive stress properties of the product at that time (magnetostrictive values λpp when the compressive stress σ is 0.4 and 0.6 Kg/mm 2 ) are summarized in Table 1.

【表】【table】

【表】 (実施例 3) C:0.056%,Si:3.29%,Mn:0.078%,Al:
0.025%,S:0.030%,Cu:0.1%,Sn:0.05%を
含有する一方向性けい素鋼板を1440℃で5時間加
熱した後、熱間圧延して1.6〜2.7mm厚の熱延板と
した。 その後1100℃で3分間の均一化焼鈍を施した後
急冷処理した。その後350℃での温間圧延を施し
て0.20,0.23,0.27および0.30mm厚の最終冷延板
とした。 その後850℃の湿水素中で脱炭を兼ねる1次再
結晶焼鈍を施した後、Al2O3(70%),MgO(20
%),TiO2(5%),ZrO2(5%)の焼鈍分離剤を
塗布した後、850℃で50時間の2次再結晶焼鈍後、
1200℃で5時間乾Hzガス中で純化焼鈍を行つた。 そのあと酸洗により鋼板表面上の酸化物を除去
した後、電解研磨を行つて鋼板表面を鏡面状態に
仕上げた。 その後PVD(イオンプレーテイング装置)を用
いてZrSiの薄膜を形成させた後、りん酸塩とコロ
イダルシリカを主成分とする絶縁被膜の焼付処理
をした後、800℃で3時間のひずみ取り焼鈍を行
つた。そのときの製品の板厚別磁気特性、ZrSi薄
膜の膜厚および磁歪の圧縮応力特性(圧縮応力σ
が0.4Kg/mm2および0.6Kg/mm2での磁気ひずみ
λppの値)を表2に示す。
[Table] (Example 3) C: 0.056%, Si: 3.29%, Mn: 0.078%, Al:
A unidirectional silicon steel sheet containing 0.025%, S: 0.030%, Cu: 0.1%, and Sn: 0.05% is heated at 1440°C for 5 hours and then hot rolled to produce a hot rolled sheet with a thickness of 1.6 to 2.7 mm. And so. Thereafter, it was homogenized annealed at 1100°C for 3 minutes and then rapidly cooled. Thereafter, warm rolling was performed at 350°C to produce final cold-rolled sheets with thicknesses of 0.20, 0.23, 0.27, and 0.30 mm. After that, primary recrystallization annealing was performed in wet hydrogen at 850°C, which also served as decarburization, and then Al 2 O 3 (70%), MgO (20
%), TiO 2 (5%), and ZrO 2 (5%) annealing separators, and after secondary recrystallization annealing at 850℃ for 50 hours,
Purification annealing was performed at 1200°C for 5 hours in dry Hz gas. Thereafter, oxides on the surface of the steel plate were removed by pickling, and then electrolytic polishing was performed to finish the surface of the steel plate to a mirror finish. After that, a thin ZrSi film was formed using PVD (ion plating equipment), and an insulating film containing phosphate and colloidal silica as main components was baked, followed by strain relief annealing at 800°C for 3 hours. I went. At that time, the product's magnetic properties by plate thickness, ZrSi thin film thickness, and compressive stress properties of magnetostriction (compressive stress σ
The values of magnetostriction λpp at 0.4 Kg/mm 2 and 0.6 Kg/mm 2 are shown in Table 2.

【表】 (発明の効果) この発明は、一方向性けい素鋼板として、磁気
特性がとくに磁歪の圧縮応力特性も含めて著しく
改善され、有用である。
[Table] (Effects of the Invention) The present invention is useful as a unidirectional silicon steel sheet, as the magnetic properties are significantly improved, especially including the magnetostrictive compressive stress properties.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はTiB2極薄張力被膜を形成したけい素
鋼板と通常工程材(比較材)のけい素鋼板の磁気
特性と磁歪の圧縮応力特性を示すグラフ、第2図
は鉄損と磁歪特性が共に良好な製品板厚とTiSi
薄膜厚の関係を示す図表である。
Figure 1 is a graph showing the magnetic properties and compressive stress characteristics of magnetostriction of a silicon steel plate with a TiB 2 ultra-thin tension coating and a silicon steel plate of a conventional process material (comparison material). Figure 2 is a graph showing iron loss and magnetostriction properties. Good product thickness and TiSi
It is a chart showing the relationship between thin film thicknesses.

Claims (1)

【特許請求の範囲】 1 仕上焼鈍済みの一方向性けい素鋼板表面上の
非金属物質を除去した後、研磨により平滑に仕上
げた表面に、 Si,Ti,Nb,Ta,Al,Zr,Hf,V及びWの
ほう化物、 Mo,W,Ti,Zr及びVのけい化物、 B及びSiのりん化物並びに Fe及びZnの硫化物 より成る群のうちから選んだ少なくとも1種から
なり、それらの地鉄との混合相を介し鋼板表面へ
強固に被着した極薄層を具備することを特徴とす
る磁気特性の優れた一方向性けい素鋼板。 2 仕上焼鈍済みの一方向性けい素鋼板表面上の
非金属物質を除去した後、研磨により平滑に仕上
げた表面に、 Si,Ti,Nb,Ta,Al,Zr,Hf,V及びWの
ほう化物、 Mo,W,Ti,Zr及びVのけい化物、 B及びSiのりん化物並びに Fe及びZnの硫化物 より成る群のうちから選んだ少なくとも1種から
なり、それらの地鉄との混合相を介し鋼板表面へ
強固に被着した極薄層を具備し、該極薄層上に重
ねて被着した、絶縁性塗布焼付層をも具備するこ
とを特徴とする磁気特性の優れた一方向性けい素
鋼板。
[Claims] 1. After removing non-metallic substances on the surface of a finish-annealed unidirectional silicon steel sheet, Si, Ti, Nb, Ta, Al, Zr, Hf are applied to the polished and smooth surface. , borides of V and W, silicides of Mo, W, Ti, Zr and V, phosphides of B and Si, and sulfides of Fe and Zn; A unidirectional silicon steel sheet with excellent magnetic properties characterized by having an ultra-thin layer firmly adhered to the surface of the steel sheet through a mixed phase with base iron. 2 After removing the non-metallic substances on the surface of the finish-annealed unidirectional silicon steel sheet, Si, Ti, Nb, Ta, Al, Zr, Hf, V and W are applied to the polished and smooth surface. oxide, silicides of Mo, W, Ti, Zr and V, phosphides of B and Si, and sulfides of Fe and Zn, and a mixed phase of these with base iron. A unidirectional magnetic material with excellent magnetic properties, characterized by comprising an ultra-thin layer firmly adhered to the surface of a steel plate through a wafer, and an insulating coated baking layer overlaid on the ultra-thin layer. silicon steel plate.
JP61170749A 1985-07-23 1986-07-22 Grain-oriented silicon steel sheet having superior magnetic characteristic Granted JPS62103374A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60-161221 1985-07-23
JP16122185 1985-07-23

Publications (2)

Publication Number Publication Date
JPS62103374A JPS62103374A (en) 1987-05-13
JPH0220710B2 true JPH0220710B2 (en) 1990-05-10

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ID=15730922

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Country Link
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CN100503894C (en) 2006-12-21 2009-06-24 武汉科技大学 A kind of preparation method of high silicon oriented silicon steel sheet
JP6828820B2 (en) * 2017-07-13 2021-02-10 日本製鉄株式会社 Manufacturing method of grain-oriented electrical steel sheet and grain-oriented electrical steel sheet
WO2020149346A1 (en) * 2019-01-16 2020-07-23 日本製鉄株式会社 Method for manufacturing grain-oriented electrical steel sheet
CN120882902A (en) * 2023-04-12 2025-10-31 日本制铁株式会社 Method for forming directional electromagnetic steel sheet and insulating film

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