JPH02207588A - Metallized paste and manufacture of ceramic circuit board using same - Google Patents

Metallized paste and manufacture of ceramic circuit board using same

Info

Publication number
JPH02207588A
JPH02207588A JP2802689A JP2802689A JPH02207588A JP H02207588 A JPH02207588 A JP H02207588A JP 2802689 A JP2802689 A JP 2802689A JP 2802689 A JP2802689 A JP 2802689A JP H02207588 A JPH02207588 A JP H02207588A
Authority
JP
Japan
Prior art keywords
copper powder
plated
powder
gold
conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2802689A
Other languages
Japanese (ja)
Other versions
JP2760542B2 (en
Inventor
Yoichi Harayama
洋一 原山
Masaaki Yoshitani
吉谷 昌明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Industries Co Ltd
Original Assignee
Shinko Electric Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP1028026A priority Critical patent/JP2760542B2/en
Publication of JPH02207588A publication Critical patent/JPH02207588A/en
Application granted granted Critical
Publication of JP2760542B2 publication Critical patent/JP2760542B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Parts Printed On Printed Circuit Boards (AREA)
  • Pigments, Carbon Blacks, Or Wood Stains (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Conductive Materials (AREA)
  • Non-Insulated Conductors (AREA)

Abstract

PURPOSE:To preferably use copper as a conductor for metallized paste for simultaneous firing of ceramics at low temperature by employing as conductor powder plated powder yield by applying plating with oxidization resistance and heat resistance to copper powder. CONSTITUTION:Copper powder is stirred in alcohol, washed, and dispersed, and is then transferred into a gold plating solution kept at 70 deg.C. The copper powder in the solution is stirred with addition of a reducing agent for plating. The copper powder after so plated is taken out and washed to provide gold- plated copper powder. The resulting gold-plated copper powder is dispersed in a vehicle comprising an organic solvent and an organic binder to provide metallized paste, which paste is in turn subjected to screen printing on a glass ceramic green sheet. A plurality of those sheets are laminated by thermocompression bonding. The resulting laminate is unbound in the oxidative atmosphere at 300-400 deg.C to complete burn the binder in the green sheet without oxidizing the involved copper.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は低温焼成セラミック回路基板の同時焼成で用い
るメタライズペーストおよびこのメタライズペーストを
用いたセラミック回路基板の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a metallization paste used in co-firing a low-temperature fired ceramic circuit board and a method for manufacturing a ceramic circuit board using this metallization paste.

(背景技術) 1000℃程度で焼成される低温焼成セラミック回路基
板において、基板と導体部とを同時焼成で形成する際に
用いるメタライズペーストとしては、従来、金、銀、銀
・パラジウム等を導体とするものが用いられている。金
、銀は加熱に対して安定で、導体としての電気的特性も
優れているからである。
(Background Art) In low-temperature fired ceramic circuit boards fired at about 1000°C, metallization pastes used when simultaneously firing the board and conductor parts have conventionally been made of gold, silver, silver/palladium, etc. as conductors. Those that do are used. This is because gold and silver are stable against heating and have excellent electrical properties as conductors.

しかし、金は高価であり、銀糸はエレクトロマイグレー
ションの問題があり導体部の信頼性に欠けるため、導体
としてこれらのかわりに銅を用いたものが一部で使用さ
れている。銅は安価であるとともに、導体としての導電
性の面で金よりも優れるものである。しかしながら、銅
は120〜150℃程度で酸化がはじまり、金、銀とく
らべるとはるかに酸化しやすく、酸化によって導電性が
低下するという難点がある。そのため、セラミック回路
基板の同時焼成で用いる際には、銅が酸化しないように
しなければならない。
However, gold is expensive, and silver threads have problems with electromigration and lack reliability in conductor parts, so copper is used in some cases as a conductor instead. Copper is inexpensive and has better conductivity than gold as a conductor. However, copper begins to oxidize at about 120 to 150°C, and is far more easily oxidized than gold or silver, and has the disadvantage that its conductivity decreases due to oxidation. Therefore, when used in co-firing a ceramic circuit board, it is necessary to prevent copper from oxidizing.

セラミックを焼成する際には、通常300〜400℃の
酸化性雰囲気中でグリーンシートの脱バインダを行った
後、昇温させて焼成するのであるが、導体粉末として銅
をメタライズペーストに用いた場合は、酸化を避けるた
め酸素濃度を数ppm以下にした非酸化性雰囲気中で脱
バインダを行う必要がある。しかし、非酸化性雰囲気中
ではグリーンシートに含まれた有機バインダが完全に燃
焼せず、有機バインダがカーボンとなってセラミック中
に残存してしまうという問題点がある。このように、銅
を導体粉末としたメタライズペーストを用いた場合には
、銅の酸化を避けなければならないという困難さがあっ
た。
When firing ceramics, the binder is removed from the green sheet in an oxidizing atmosphere at 300 to 400°C, and then the temperature is raised and fired, but when copper is used as the conductive powder in the metallizing paste, In order to avoid oxidation, it is necessary to remove the binder in a non-oxidizing atmosphere with an oxygen concentration of several ppm or less. However, there is a problem in that the organic binder contained in the green sheet is not completely burned in a non-oxidizing atmosphere, and the organic binder becomes carbon and remains in the ceramic. As described above, when a metallizing paste containing copper as conductive powder is used, there is a difficulty in avoiding oxidation of the copper.

そこで1本発明はこの問題点を解消し、低温焼成セラミ
ックの同時焼成用メタライズペーストの導体として銅を
好適に使用できるメタライズペーストを提供するもので
あり、このメタライズペーストを用いて焼成するセラミ
ック回路基板の製造方法を提供しようとするものである
Therefore, the present invention solves this problem and provides a metallization paste in which copper can be suitably used as a conductor in a metallization paste for simultaneous firing of low-temperature fired ceramics, and a ceramic circuit board fired using this metallization paste. The present invention aims to provide a method for manufacturing.

(課題を解決するための手段) 本発明は上記目的を達成するため次の構成をそなえる。(Means for solving problems) The present invention has the following configuration to achieve the above object.

すなねち、メタライズペーストとして、導体粉末に有機
溶剤、有機バインダを加えて成る低温焼成セラミック回
路基板の同時焼成で用いるメタライズペーストにおいて
、前記導体粉末として、銅粉末に300〜400℃にお
いて耐酸化性および耐熱性を有するめっきを施して成る
めっき銅粉末を用いたことを特徴とし、前記めっき銅粉
末が、銅粉末に金めつきを施して成る金めつき銅粉末で
ある場合とくに有効である。
In other words, in a metallizing paste used in the simultaneous firing of a low-temperature firing ceramic circuit board made by adding an organic solvent and an organic binder to a conductive powder, the conductive powder is a copper powder that is oxidation resistant at 300 to 400°C. It is characterized by using a plated copper powder which is plated with heat resistance and heat resistance, and is particularly effective when the plated copper powder is a gold-plated copper powder which is formed by plated copper powder with gold. .

また、セラミック回路基板の製造方法としては。Also, as a method for manufacturing ceramic circuit boards.

銅粉末に300〜400℃において耐酸化性および耐熱
性を有するめっきを施しためっき銅粉末に有機溶剤およ
び有機バインダを添加して成るメタライズペーストを、
低温焼成セラミックグリーンシート上に塗布し、酸化性
雰囲気中で、300〜400℃にグリーンシートを加熱
して脱バインダを行った後、非酸化性雰囲気中において
所定のセラミック基板の焼成温度にて焼成することを特
徴とする。
A metallized paste made by plating copper powder with oxidation resistance and heat resistance at 300 to 400°C and adding an organic solvent and an organic binder to the plated copper powder,
After coating on a low-temperature fired ceramic green sheet and removing the binder by heating the green sheet to 300 to 400°C in an oxidizing atmosphere, it is fired at a predetermined ceramic substrate firing temperature in a non-oxidizing atmosphere. It is characterized by

(作用) メタライズペーストの導体粉末として、銅粉末に耐酸化
性および耐熱性を有するめっき処理を施しためっき銅粉
末を用いて、酸化性雰囲気中での加熱時における銅粉末
の酸化を防止する。これにより、酸化性雰囲気中におい
てグリーンシートの脱バインダができ、バインダ成分の
除去が十分になされる。また、導体粉末の主成分として
銅を用いているから、上記メタライズペーストを用いる
ことにより、セラミック回路基板で、良好な導電性を有
する導体部が得られる。
(Function) As the conductor powder of the metallized paste, plated copper powder is used to prevent the copper powder from being oxidized during heating in an oxidizing atmosphere by using plating treatment on the copper powder to have oxidation resistance and heat resistance. As a result, the binder can be removed from the green sheet in an oxidizing atmosphere, and the binder component can be sufficiently removed. Further, since copper is used as the main component of the conductor powder, by using the metallization paste, a conductor portion having good conductivity can be obtained in a ceramic circuit board.

〔実施例1〕 以下、本発明の好適な実施例を詳細に説明する。[Example 1] Hereinafter, preferred embodiments of the present invention will be described in detail.

メタライズペーストの導体として使用する銅粉末に対し
、以下のように金めつきを施した。
Gold plating was applied to the copper powder used as the conductor of the metallized paste as follows.

銅粉末として、粒径1.0〜2.0μmの球状銅粉末を
用い、この銅粉末をアルコール中で攪拌し、洗浄および
分散を行った0次に、70℃に保った金めつき液中に銅
粉末を移し、攪拌しながら還元剤を添加してめっきを施
した。めっき後の銅粉末を取り出し、洗浄して金めつき
銅粉末を得た。
Spherical copper powder with a particle size of 1.0 to 2.0 μm was used as the copper powder. This copper powder was stirred in alcohol, washed and dispersed, and then placed in a gold plating solution kept at 70°C. Copper powder was transferred to a container, and a reducing agent was added while stirring to perform plating. The copper powder after plating was taken out and washed to obtain gold-plated copper powder.

得られた金めつき銅粉末を、有機溶剤と有機バインダと
からなるビヒクル中に分散させ、メタライズペーストと
した。有機溶剤、有機バインダとしては通常メタライズ
ペーストで用いる有機溶剤、有機バインダが用いられる
。有機溶剤としてはたとえばテルピネオール等、有機バ
インダとしてはエチルセルロース等がある。
The obtained gold-plated copper powder was dispersed in a vehicle consisting of an organic solvent and an organic binder to form a metallizing paste. As the organic solvent and organic binder, the organic solvent and organic binder that are normally used in metallizing paste are used. Examples of the organic solvent include terpineol, and examples of the organic binder include ethyl cellulose.

第1図は、上記実施例で得られた金めつき銅粉末の耐酸
化性を示すグラフで、比較例として金めつきを施してい
ない通常の銅粉末について測定した結果を第2図に示す
、いずれも、ペースト化する前の粉末について、試料を
昇温させた際の銅粉末の重量増加を計測したものである
0図中でグラフaは試料の温度を示し、グラフbは試料
の重量を示す、縦軸が試料温度および試料重量である。
Fig. 1 is a graph showing the oxidation resistance of the gold-plated copper powder obtained in the above example, and Fig. 2 shows the results measured on ordinary copper powder without gold plating as a comparative example. In both figures, graph a shows the temperature of the sample, and graph b shows the weight of the sample. The vertical axis represents the sample temperature and sample weight.

試料はおよそ10℃/minの割合でほぼ一定に昇温さ
せた。
The sample was heated almost constantly at a rate of about 10° C./min.

試料の重量増加は銅粉末が酸化して重量増加したことを
示すが、上記実施例の金めつき銅粉末では300℃程度
まで温度上昇させても重量増加はほとんど見られず、3
50℃付近から重量増加がはじまっている。これに対し
、比較例の銅粉末では、200℃付近からすでに重量増
加が見られる。このit++定結果から、本実施例の金
めつき銅粉末は従来の銅粉末と比較して耐酸化性が大き
く改善されていることがわかる。
The increase in weight of the sample indicates that the copper powder was oxidized and increased in weight, but with the gold-plated copper powder of the above example, almost no weight increase was observed even when the temperature was raised to about 300 ° C.
The weight starts to increase around 50°C. On the other hand, in the copper powder of the comparative example, an increase in weight is already observed from around 200°C. The it++ results show that the gold-plated copper powder of this example has greatly improved oxidation resistance compared to conventional copper powder.

セラミック回路基板を焼成する際は、上記金めっき銅粉
末を導体として用いたメタライズペーストをガラスセラ
ミックグリーンシート上にスクリーン印刷し、複数枚を
熱圧着により積層した。これを酸化性雰囲気中300℃
で12時間脱バインダを行った後、窒素雰囲気中におい
て950℃で焼成した。
When firing the ceramic circuit board, a metallization paste using the gold-plated copper powder as a conductor was screen printed on a glass ceramic green sheet, and a plurality of sheets were laminated by thermocompression bonding. This was heated to 300°C in an oxidizing atmosphere.
After removing the binder for 12 hours, it was fired at 950° C. in a nitrogen atmosphere.

金めつき銅粉末は、金めつき皮膜によって銅粉末が被覆
されているので、酸化性雰囲気中で加熱しても銅粉末は
酸化から保護され、銅を酸化することなくグリーンシー
ト中のバインダを完全に燃焼させることができた。
With gold-plated copper powder, the copper powder is coated with a gold-plated film, so even when heated in an oxidizing atmosphere, the copper powder is protected from oxidation, and the binder in the green sheet is removed without oxidizing the copper. I was able to burn it completely.

また、ガラスセラミック上に同時焼成によって形成した
導体部の導電性についてみても、金めつきを施していな
い銅粉末を用いたものと比較してさほど劣らない結果が
得られた。導体抵抗は銅粉末を用いた場合の約1.5倍
程度で、従来の金粉末を導体とするメタライズペースト
を用いた場合とほぼ同程度であった。
Also, regarding the conductivity of the conductor portion formed on the glass ceramic by co-firing, results were obtained that were not significantly inferior to those using copper powder without gold plating. The conductor resistance was about 1.5 times that when copper powder was used, and almost the same as when a conventional metallized paste using gold powder as a conductor was used.

〔実施例2〕 上記と同様の銅粉末に対し、N 1−Cu−Pの合金め
っきを施した。
[Example 2] N1-Cu-P alloy plating was applied to the same copper powder as above.

得られためっき銅粉末は酸化性雰囲気中で、約320℃
まで安定であった。
The resulting plated copper powder was heated at approximately 320°C in an oxidizing atmosphere.
It was stable until then.

また、このめっき銅粉末を用いて同様に形成したメタラ
イズペーストをガラスセラミック上にスクリーン印刷し
て上記と同様に積層し、酸化性雰囲気中300℃で脱バ
インダを行った後、950℃で焼成してセラミック回路
基板を得た。得られた導体部の導電性は上記実施例1と
比較して若干劣るものの1回路基板の導体部としては十
分良好な導電性が得られた。
In addition, a metallized paste formed in the same manner using this plated copper powder was screen printed on glass ceramic and laminated in the same manner as above, and after removing the binder at 300°C in an oxidizing atmosphere, it was fired at 950°C. A ceramic circuit board was obtained. Although the conductivity of the obtained conductor portion was slightly inferior to that of Example 1, sufficiently good conductivity was obtained as a conductor portion of one circuit board.

〔実施例3〕 上記実施例と同様の銅粉末を用い、この銅粉末レニニッ
ケルめっきを施し、その上層にロジウムめっきを施し、
さらに上層に金めつきを施した。この多層めっきを施し
ためっき銅粉末は酸化性雰囲気中で約400℃まで安定
であった。
[Example 3] Using the same copper powder as in the above example, this copper powder was plated with reni-nickel, and the upper layer was plated with rhodium,
Furthermore, the upper layer was plated with gold. This multilayer plated copper powder was stable up to about 400°C in an oxidizing atmosphere.

上記例と同様に、このめっき銅粉末を用いてメタライズ
ペーストを作製し、ガラスセラミック上に印刷して積層
し、酸化性雰囲気中300℃で脱バインダを行った後、
約950℃で焼成してセラミック回路基板を得た。得ら
れた導体部の特性は回路基板の導体部として十分な導電
性を有するものであった。
Similar to the above example, a metallization paste was prepared using this plated copper powder, printed and laminated on glass ceramic, and after debinding at 300°C in an oxidizing atmosphere,
A ceramic circuit board was obtained by firing at about 950°C. The characteristics of the obtained conductor part were such that it had sufficient conductivity as a conductor part of a circuit board.

上記各実施例において示したメタライズペーストは、ペ
ーストの導体として用いる銅粉末に、あらかじめめっき
を施し、銅粉末の表面を耐酸化性。
In the metallizing paste shown in each of the above examples, the copper powder used as the conductor of the paste is plated in advance to make the surface of the copper powder oxidation resistant.

耐熱性を有するめっき膜で被覆しているから、銅粉末の
耐酸化性が向上でき、300〜400℃の酸化性雰囲気
中でも十分に使用できるペーストとなった。この結果、
脱バインダが酸化性雰囲気中ででき、バインダ成分を除
去することが効率的になされる。
Since the copper powder is coated with a heat-resistant plating film, the oxidation resistance of the copper powder can be improved, resulting in a paste that can be used satisfactorily even in an oxidizing atmosphere at 300 to 400°C. As a result,
Binder removal can be performed in an oxidizing atmosphere, and binder components can be removed efficiently.

また、得られたセラミック回路基板を導体部の特性で比
較すると、本実施例では導電性に優れためっき銅粉末を
導体粉末として用いているので、良好な導電性を有する
導体部が形成でき、従来の金粉末を導体粉末として用い
た金メタライズペーストによって得られる導体部の導電
性と同程度かそれ以上の特性を得ることが可能となった
。また、導体部は銅を主材料としているので、金を導体
として使用していたものと比較してはるかに低コストに
することができる。
Furthermore, when comparing the characteristics of the conductor parts of the obtained ceramic circuit boards, it was found that in this example, since plated copper powder with excellent conductivity was used as the conductor powder, a conductor part with good conductivity could be formed. It has become possible to obtain conductivity characteristics comparable to or higher than that of a conductor part obtained by a conventional gold metallized paste using gold powder as a conductor powder. Furthermore, since the conductor portion is mainly made of copper, the cost can be much lower than that using gold as the conductor.

なお、銅粉末にあらかじめ施すめっきは、上記のめっき
に限定されるものではなく、300〜400℃において
耐酸化性、耐熱性を有するめっき皮膜が形成できるめっ
きであれば同様に適用できる。
Note that the plating applied to the copper powder in advance is not limited to the above-mentioned plating, and any plating that can form a plating film having oxidation resistance and heat resistance at 300 to 400° C. can be similarly applied.

たとえば、N1−P、N1=B等のめっきでも同様な効
果が得られる。
For example, similar effects can be obtained with plating such as N1-P and N1=B.

以上、本発明について好適な実施例を挙げて種々説明し
たが、本発明はこの実施例に限定されるものではなく1
発明の精神を逸脱しない範囲内で多くの改変を施し得る
のはもちろんのことである。
The present invention has been variously explained above using preferred embodiments, but the present invention is not limited to these embodiments.
Of course, many modifications can be made without departing from the spirit of the invention.

(発明の効果) 上述したように、本発明に係るメタライズペーストでは
銅粉末に耐酸化性および耐熱性を有するめっき処理を施
しためっき銅粉末を導体粉末として用いるから、単に銅
粉末を用いた場合と比較してはるかに銅粉末の耐酸化性
を向上させることができる。これにより、セラミック回
路基板を焼成する際、グリーンシートの脱バインダを酸
化性雰囲気中で行うことができ、バインダ成分の除去を
効果的に行うことができ、セラミック回路基板の焼成を
きわめて容易にすることができる。
(Effects of the Invention) As described above, in the metallizing paste according to the present invention, plated copper powder obtained by plating copper powder with oxidation resistance and heat resistance is used as the conductor powder. The oxidation resistance of copper powder can be improved much compared to that of copper powder. As a result, when firing a ceramic circuit board, the binder from the green sheet can be removed in an oxidizing atmosphere, and the binder component can be effectively removed, making firing the ceramic circuit board extremely easy. be able to.

また、導体粉末として導電性に優れためっき銅粉末を用
いたことにより、得られたセラミック回路基板の導体部
の導電性を向上させることができる。さらに、導体粉末
としてめっき銅粉末を用いるから、従来、導体粉末とし
て金を用いていたのにくらべてはるかに安価に製造する
ことができる等の著効を奏する。
Moreover, by using plated copper powder with excellent conductivity as the conductor powder, the conductivity of the conductor portion of the obtained ceramic circuit board can be improved. Furthermore, since plated copper powder is used as the conductor powder, it can be manufactured at a much lower cost than when gold is conventionally used as the conductor powder.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図および第2図は、それぞれ実施例および比較例の
銅粉末の耐酸化性を測定した結果を示すグラフである。
FIG. 1 and FIG. 2 are graphs showing the results of measuring the oxidation resistance of copper powders of Examples and Comparative Examples, respectively.

Claims (3)

【特許請求の範囲】[Claims] 1.導体粉末に有機溶剤、有機バインダを加えて成る低
温焼成セラミック回路基板の同時焼成で用いるメタライ
ズペーストにおいて、 前記導体粉末として、銅粉末に300〜400℃におい
て耐酸化性および耐熱性を有するめっきを施して成るめ
っき銅粉末を用いたことを特徴とするメタライズペース
ト。
1. In a metallizing paste used in the simultaneous firing of a low-temperature firing ceramic circuit board made by adding an organic solvent and an organic binder to a conductor powder, the conductor powder is a copper powder plated with oxidation resistance and heat resistance at 300 to 400°C. A metallizing paste characterized by using plated copper powder consisting of.
2.めっき銅粉末が、銅粉末に金めっきを施して成る金
めっき銅粉末である請求項1記載のメタライズペースト
2. 2. The metallizing paste according to claim 1, wherein the plated copper powder is a gold-plated copper powder obtained by subjecting copper powder to gold plating.
3.銅粉末に300〜400℃において耐酸化性および
耐熱性を有するめっきを施しためっき銅粉末に有機溶剤
および有機バインダを添加して成るメタライズペースト
を、低温焼成セラミックグリーンシート上に塗布し、 酸化性雰囲気中で、300〜400℃にグリーンシート
を加熱して脱バインダを行った後、非酸化性雰囲気中に
おいて所定のセラミッ ク基板の焼成温度にて焼成することを特徴とするセラミ
ック回路基板の製造方法。
3. Copper powder is plated with oxidation resistance and heat resistance at 300 to 400°C. A metallization paste, which is made by adding an organic solvent and an organic binder to plated copper powder, is coated on a low-temperature fired ceramic green sheet. A method for manufacturing a ceramic circuit board, which comprises heating a green sheet to 300 to 400°C in an atmosphere to remove the binder, and then firing the green sheet at a predetermined ceramic substrate firing temperature in a non-oxidizing atmosphere. .
JP1028026A 1989-02-07 1989-02-07 Manufacturing method of ceramic circuit board Expired - Lifetime JP2760542B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1028026A JP2760542B2 (en) 1989-02-07 1989-02-07 Manufacturing method of ceramic circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1028026A JP2760542B2 (en) 1989-02-07 1989-02-07 Manufacturing method of ceramic circuit board

Publications (2)

Publication Number Publication Date
JPH02207588A true JPH02207588A (en) 1990-08-17
JP2760542B2 JP2760542B2 (en) 1998-06-04

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP1028026A Expired - Lifetime JP2760542B2 (en) 1989-02-07 1989-02-07 Manufacturing method of ceramic circuit board

Country Status (1)

Country Link
JP (1) JP2760542B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53100468A (en) * 1977-02-14 1978-09-01 Tokyo Shibaura Electric Co Method of producing circuit board

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53100468A (en) * 1977-02-14 1978-09-01 Tokyo Shibaura Electric Co Method of producing circuit board

Also Published As

Publication number Publication date
JP2760542B2 (en) 1998-06-04

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