JPH0220823Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] The present invention applies photoresist to a photomask substrate in which a light-shielding film is coated on a transparent glass plate, and a semiconductor oxide film is coated on a semiconductor substrate. After coating the photoresist, the photoresist is exposed to light in a predetermined pattern.The spray equipment used in the pattern forming process of these substrates, such as the development process and etching process, is especially easy to use regardless of changes in substrate size and thickness. In addition, the ejected liquid can be uniformly spread over the entire surface of the substrate.

[Conventional technology]

Conventionally, this type of spray device is shown in Figs.
As shown in the figure, supports 2 are provided to support the four corners of the substrate 1 according to various sizes (for example, 6, 5, 4, and 3 inches). That is, this support 2 has a contact surface 3 that contacts the end surface 1a of the largest (6 inch square) substrate 1, and a mounting surface 4 on which the bottom surface portion is placed. As the board size becomes smaller, the support part consisting of the contact surface 5 and the mounting surface 6, the contact surface 7 and the mounting surface 8, and the contact surface 9 and the mounting surface 10 are arranged in a stepped manner. It is formed to be deep. The support 2 is attached to the rotating shaft 11 via the coupling 12, and is rotated at a constant speed (during development and etching: 100 to 500 rpm) by the drive of a motor (not shown), and is in this rotating state. A jetting liquid 15 such as a developing solution or an etching solution is jetted toward the substrate 1 from a jetting hole 14 installed on the ceiling of the chamber 13 . At this time, when the substrate 1 is stationary, the ejected liquid 15 is directed toward the diagonal direction of the substrate 1 as shown by the broken line in FIG. The center of the region 16 coincides with the central axis of rotation), and the rotation of the substrate 1 causes the ejected liquid 15 to spread uniformly over the entire surface of the substrate 1.

[Problem that the invention attempts to solve]

However, in such a conventional spray device, when the size of the substrate 1 is changed and, for example, the smallest substrate 1' is installed as shown in FIG. 7, the installation position of the support 2 in the height direction is Therefore, even if the ejection hole 14 is directed to the center of the largest substrate 1, it will not be directed to the center of the smaller substrate 1', and the center of the ejection area 16 will be shifted by Δ from the rotation center axis. 8th episode again
As shown in the figure, in the case of supporting the four corners of the substrate 1, the length of the support 2 is longer than that in the case of supporting the center portion of each side. Furthermore, when the smallest substrate 1' is installed as shown in FIG. 9, the portion 2a of the support 2 that protrudes from below the substrate 1' along its main surface also becomes longer, making it difficult to rotate the substrate 1'. Therefore, when the support 2 is rotated, the portion 2a disturbs the air within the chamber 13 and adversely affects the flow of the ejected liquid 15. As a result, even if the substrate 1' is rotated, the ejected liquid 15 cannot be uniformly spread over the entire surface of the substrate 1', and this causes a pattern with a uniform line width in the pattern forming process of the substrate 1'. could not be formed. Further, even if the size is the same, if the plate thickness changes, the center of the ejected region 16 will be shifted from the rotational center axis as described above, making it impossible to spread the ejected liquid 15 uniformly.

[Means for solving problems]

The spray device according to the present invention was made to solve the above-mentioned problems, and includes a substrate placed on a support provided in a chamber and rotated by a drive device, and a spray device provided in the chamber. A spray device in which a jet liquid is jetted from a jet hole toward the substrate, and the jet liquid is spread almost uniformly over the entire surface of the substrate by rotation of the support,
The support includes at least one support rod, and a pair of holders that are detachably attached to the support rod and hold the substrate, and the support rod has a longitudinal center as a center of rotation, and the support rod has a longitudinal center as a rotation center. A plurality of sets of holder locking portions each consisting of a pair are provided on both sides of the substrate at symmetrical positions with respect to the rotation center according to various sizes of the substrate, and each holder locking portion is arranged in a row in the height direction. The holder has a plurality of locking portions provided to selectively lock the holder, and the holder has a contact surface that contacts an end surface portion of the substrate and a support surface that supports a bottom surface near the end surface portion. a main body having a main body, a pair of left and right legs vertically provided on both sides of the lower surface of the main body, and a plurality of locking portions of each of the holder locking portions protruding from the inner surfaces of the pair of legs. The device is equipped with a pair of engaging portions that selectively engage with each other.

[Effect]

In this invention, the mounting height of the holder can be changed depending on the thickness of the board, so even boards of various sizes and thicknesses can be installed at almost the same height. The length of the support rod can be made shorter than when supporting the corners, which can suppress air turbulence within the chamber and evenly apply the ejected liquid to the entire surface of various substrates. can be done.

〔Example〕

Hereinafter, the present invention will be described in detail by way of examples when used in a photomask substrate development process.

FIG. 1 is a partially exploded perspective view of the support that characterizes the present invention, FIGS. 2 and 3 are partially cutaway side views of the support rod, and FIGS. 4 and 5 are the lines and lines in FIG. The line sectional view and FIG. 6 are bottom views of essential parts of the support. Note that the other structure of the spray device except for the support is the same as the conventional device shown in FIG. 7, so a description thereof will be omitted.

Further, the substrate 1 of this example is a quartz glass plate coated with a chromium film (thickness: 800 Å), and a photoresist (e.g. AZ1350 manufactured by Hoechst Co., Ltd.
This resist is coated with a film thickness of 4000 Å) and exposed to light in a predetermined pattern.
is sprayed by the spray device of the present invention. It goes without saying that it can be used not only for the development process but also for the etching process, cleaning process, and photoresist coating process by changing the ejected liquid.

Now, as shown in FIG. 1, the support 20 disposed on the rotating shaft 11 via the connector 12 is made of a material with excellent chemical resistance and corrosion resistance, such as tetrafluoroethylene, and has the same length. It is formed into a rectangular bar shape with a width of
so that they are perpendicular to each other in the center of their longitudinal direction,
Two support rods 21 and 22 are integrally connected so that their surfaces form the same plane, and a total of four holders are formed in the same shape and are attached to each of the support rods 21 and 22 in pairs facing each other. 23
(23A to 23D).

As shown in FIG. 2, a recess 24 having approximately the same length as the diameter of the pedestal 12A of the connector 12 is formed in the center of the bottom surface of one of the support rods 21, and furthermore, in the center of this recess 24, the other A recess 25 is formed having a length that is approximately the same as the width of the support rod 22 . On the other hand, the other support rod 2
As shown in FIG. 3, a recess 26 having a length approximately the same as the width of the support rod 21 is formed in the center of the surface of the support rod 21, and a recess 26 having a length approximately the same as the diameter of the pedestal 12A is formed in the center of the lower surface. A recess 27 is formed therein. When the center parts of the support rods 21 and 22 are overlapped with each other at right angles and the support rod 22 is fitted into the recess 25 and the support rod 21 is fitted into the recess 26,
Both support rods 21 and 22 are integrally connected by a clasp connection, so that the surfaces of both support rods form the same plane. Also, in this connected state, each support rod 2
When the pedestal 12A is fitted into the recesses 24 and 27 of the support rods 21 and 22, the rotation centers of the support rods 21 and 22 coincide with the center of the rotation shaft 11. And each support rod 2
1 and 22 are respectively attached to the pedestal 1 by a pair of set screws 28 (made of stainless steel), as shown in FIG.
Fixed on 2A. The head of the set screw 28 is coated with tetrafluoroethylene to prevent corrosion from the ejected liquid. In addition, in FIGS. 2 and 3, 29 is a mounting hole for the set screw 28.

The support rod 21 has four sets of holder locking portions 31A and 31B, 32A and 3, each consisting of a left and right pair.
2B, 33A and 33B, and 34A and 34B are formed at symmetrical positions with respect to the rotation center of the support rod 21, respectively. These holder locking portions 31A and 31B...34A and 34B are formed on both sides of the support rod 21 in accordance with the dimensions of the substrate 1, and each consist of a vertical groove and a horizontal groove, and are located at the center of rotation. The holder locking portions 31A and 31B closest to the center are for 4-inch substrates, and the farther away from the center of rotation they are, the holder locking portions for 5-inch, 6-inch, and 7-inch substrates are configured.
The structure of the holder locking part 31A will be described in more detail. It consists of a vertical groove 36a and two upper and lower horizontal grooves 36b and 36c, each of which has one end communicating with the vertical groove 36a. The horizontal grooves 36b and 36c selectively hold the holder 23 It constitutes a locking part. In this case, the upper lateral groove 36b constitutes a locking portion for a substrate thickness of 0.09 inch, and the lower lateral groove 36c constitutes a locking portion for a substrate thickness of 0.25 inch. The lateral grooves 36b and 36c are arranged in parallel so that the 0.09-inch-thick substrate surface and the 0.25-inch-thick substrate surface are at the same height. Similarly, other holder locking parts 31B,
32A, 32B, 33A, 33B, 34A, 34
B also has vertical grooves and horizontal grooves 37, respectively, as shown in Figure 2.
a~37c, 38a~38c, 39a~39c,
40a-40c, 41a-41c, 42a-42
c, 43a to 43c. however,
Horizontal grooves 36b, 36c, 38b, 38c, 40b,
40c, 42b, 42c and 37b, 37c, 39
b, 39c, 41b, 41c, 43b, and 43c are formed symmetrically so that they are opposite in direction and face the opposite direction to the center side of the support rod 21.

Further, on both sides of the support rod 21, there are a pair of left and right passages 4 extending long from each end of the support rod toward the center.
5A, 45B are formed, and these passages 4
5A and 45B have the respective holder locking parts 31A and 3.
1B...Vertical grooves 36a, 38a of 34A and 34B,
40a, 42a and 37a, 39a, 41a,
The upper ends of 43a are in communication with each other. The width W ₄ and depth D of those passages 45A and 45B are the same as the depth D ₃ of the vertical grooves 36a to 43a and the horizontal groove 36.
Width W ₆ and depth of b ~ 43b, 36c ~ 43c
It is set the same as D ₃ .

The support rod 22 also has a third support rod similar to the support rod 21.
As shown in the figure, four sets of holder locking parts 50A and 50
B, 51A and 51B, 52A and 52B and 53
A and 53B are formed on both sides of the support rod 22 at symmetrical positions with respect to the center of rotation. Holder locking parts 50A and 50B are for 4 inch boards,
A vertical groove and two horizontal grooves 55a to 55c, 56, respectively.
Consisting of a to 56c, holder locking parts 51A and 51
B is for a 5-inch board, each consisting of a vertical groove and two horizontal grooves 57a to 57c, 58a to 58c, and the holder locking parts 52A and 52B are for a 6-inch board;
A vertical groove and two horizontal grooves 59a to 59c, 60, respectively.
It consists of a to 60c. And holder locking part 53A
and 53B are for 7-inch boards, with vertical grooves and 2
It is constituted by two horizontal grooves 61a to 61c and 62a to 62c. Horizontal grooves 55b, 55c...62
b and 62c constitute a locking portion that selectively locks the holder 23. In addition, the horizontal grooves 55b, 55
c, 57b, 57c, 59b, 59c, 61b,
61c and 56b, 56c, 58b, 58c, 60
b, 60c, 62b, and 62c are formed symmetrically so that they are opposite in direction and face the opposite direction to the center side of the support rod 22.

Furthermore, a pair of left and right passages 65A, 65B are formed on both sides of the support rod 22, each extending from the end of the support rod 22 toward the center. Holder locking parts 50A and 50B...vertical grooves 55 of 53A and 53B
a, 57a, 59a, 61a and 56a, 58
The upper ends of a, 60a, and 62a are in communication with each other. The width W ₄ and depth D of these passages 65A and 65B are the depth D ₃ of the vertical grooves 55a to 62a and the width W ₆ of the horizontal grooves 55b to 62b and 55c to 62c.
and the same depth _D3 , and the same as the passages 45A and 45B of the support rod 21.

The holders 23, 23A to 23D are the support rods 2
Like Nos. 1 and 22, it is manufactured integrally from tetrafluoroethylene or the like, and as shown in FIG. a pair of leg pieces 71 facing each other,
72, and the respective holder locking portions 31A, 31B, .
and 34B, that is, lateral grooves 36b and 36c... rectangular parallelepiped-shaped engaging portions 73, 74 that selectively engage with either one of 43b and 43c.
are protruding from each other, with their tip surfaces facing each other. The main body 70 has a flat base 76
It integrally includes a pair of left and right side walls 78, 79 protruding from both sides of the surface of the base 76, and a substantially square columnar mounting table 80 protruding from one end surface of the base 76. The upper surface of 80 constitutes a horizontal mounting surface 82 that supports the bottom surface near the side end of the substrate 1, and the end surface of each of the side walls 78 and 79 on the mounting table side is a contact surface that abuts the end surface of the substrate 1. 84, which are perpendicular to the mounting surface 82. Contact surface 84
The height of is set to be approximately equal to or smaller than the maximum thickness of the substrate 1. The base 76
The surface of is sloped so that the end on the side of the mounting table is higher than the end on the opposite side. Further, the upper surfaces of the side walls 78 and 79 are also inclined so as to be substantially parallel to the surface of the base 76.

The distance W between the pair of leg pieces 71 and 72 is the same as that of the support rod 2.
The width is set to be approximately equal to or slightly larger than the width of 1 and 22. The protrusion dimension d of each of the engaging portions 73 and 74 is determined by the holder locking portions 31A and 31B of the support rods 21 and 22...34A and 34B and the passage 4.
The depth is set to be approximately equal to or slightly smaller than the depth of 5A and 45B. In addition, each engaging portion 73, 74
The width W ₁ is the vertical groove 3 of each holder locking portion 31A and 31B of the support rods 21 and 22...34A and 34B.
Widths of 6a to 43a and horizontal grooves 36b, 36c...
The lengths (in the left-right direction) of 43b and 43c are set to be approximately equal to or slightly smaller. and,
The plate thickness t of each engaging portion 73, 74 is the horizontal groove 36b,
36c...The width (in the vertical direction) of 43b, 43c and the width of the passages 45A, 45B are set to be approximately equal to or slightly smaller. Therefore, each engaging portion 73, 74 is connected to the passage 45A of the support rods 21, 22.
Or each holder locking part 31A and 31B from 45B
. . . can be freely inserted into any of the horizontal grooves 36b, 36c, . . . 43b, 43c through the longitudinal grooves 36a to 43a of 34A and 34B.

In the support 20 having such a configuration,
Holder locking portions 31A and 31 of each support rod 21, 22
B...34A and 34B and 50A and 50B...
53A and 53B are selected according to the size of the substrate 1, and the four holders 23 are detachably attached to the selected holder locking portions as described below. In this case, in this embodiment, the substrate size is 7
An example is shown in which an inch square board 1 is installed, so the holder locking part 34A for a 7 inch square board,
34B, 53A, and 53B are selected, and each of the holders 23A to 23D is attached to these holder locking portions from the end surface side of each support rod 21, 22, facing inward so that the contact surfaces 84 face each other. This installation involves attaching the pair of engaging portions 73 and 74 to each support rod 2.
1, 22 passages 45A, 45B, 65A, 65B
and further each holder locking part 34A, 34
Vertical grooves 42a, 43a, 61 of B, 53A, 53B
Depending on the thickness of the board 1 from a, 62a, for example, if the board thickness is 0.09 inch, the upper lateral grooves 42b, 43
b, 61b, 62b, respectively, and in the case of 0.25 inch, the lower horizontal grooves 42c, 43c, 61
c and 62c, the 0.09-inch board and the 0.25-inch board will be at the same height. Then, place the center portion of each end surface of the substrate 1 into each holder 23.
The substrate 1 is held by the four holders 23A to 23D when the bottom surface near the end surface portion is placed on the mounting surface 82 while making contact with the contact surfaces 84 of A to 23D, respectively. In this case, each holder 23A to 23
D, the engaging portions 73 and 74 are connected to the lateral grooves 42b,
43b, 61b, 62b or 42c, 43c, 6
1c and 62c prevents movement in the vertical direction, and these horizontal grooves are inserted into the vertical grooves 4.
By being formed outside of 2a, 43a, 61a, and 62a, movement toward the outside due to centrifugal force during rotation of the support 20 is also prevented. On the other hand, the horizontal grooves 42b, 43b, 61b, 62b (42c, 43
c, 61c, 62c) length ₅ (Figure 1)
and the width W ₁ of the engaging portions 73 and 74 as W ₁ <
By setting ₅ < W ₁ +2 (mm), a slight movement in the left and right direction is allowed. This is to prevent it from becoming difficult to lower the board 1 to the mounting surface 82 with the end surface of the board 1 in contact with the contact surface 84 when installing the board 1 on the support 20. It is said to be effective for improving the conformability of the board 1 during installation and for smooth installation.

Thus, according to such a support 20, when substrates 1 of various sizes and thicknesses are installed, their centers rotate to coincide with the center of the rotating shaft 11. That is, even if the boards have different sizes, they can be installed on the same plane as long as the board thickness is the same, and even if the board thicknesses are different, each holder locking part 31A and 31B...34A and 3
4B, 50A and 50B... 2 horizontal grooves 36b, 36c, 53A and 53B... 43b, 43c, 55
b, 55c... By selecting either one of 62b and 62c according to the board thickness, they can be installed on almost the same plane, so the jet hole always points to the center of the board of various sizes, and As a result, the ejected liquid can be uniformly spread over the entire surface of the substrate.

In addition, since the holders 23, 23A to 23D are only detachably attached to the support rods 21, 22 and are not fixed with set screws, etc., the mounting position of the holders can be changed due to changes in the size and thickness of the board 1. This can be done simply and easily in a short time, improving ease of handling and improving the operating rate of the device.

Further, since the four corners of the substrate 1 are not supported, but the center portion of each side is supported, the lengths of the support rods 21 and 22 can be shortened. Therefore, when the smallest 4-inch square board is installed, the support rod 21 protrudes from below the board parallel to the main surface,
The protruding dimension of 22 can be shortened. Therefore, even when the support 20 is rotated, there is little turbulence in the air within the chamber, and if there is little turbulence in the air, there is little disturbance in the flow of the ejected liquid, so the ejected liquid can be spread uniformly over the entire surface of the substrate. It can be passed on.

Furthermore, if the height h of the abutting surface 84 is set smaller than the thickness T of the substrate 1, the ejected liquid on the surface of each end surface of the substrate 1 will not be blocked by the abutting surface 84, and will be affected by centrifugal force. Therefore, it can be thrown well.
That is, if h>T, the contact surface 84 protrudes above the surface of the substrate 1, and the ejected liquid hits this protrusion and stays there, and is not blown away by the centrifugal force, so that the ejected liquid Although there is a possibility that the film thickness of the liquid may become non-uniform, in this embodiment, since h<T is set, such a problem can be prevented. However, the same effect can be obtained even when h=T.

Furthermore, since the upper surfaces of the base 76 and side walls 78, 79 are sloped, the ejected liquid that falls onto these upper surfaces can easily flow and be blown off quickly.

In addition, in the above embodiment, the support tool 2 is made up of two support rods 21 and 22 that intersect in a cross shape and four holders 23.
0, but the present invention is not limited to this, and depending on the substrate size, the width dimension of the holder 23, the rotation speed of the support 20 itself, etc., one support rod and two holders may be used. It is possible to configure the support with.

Further, in the above embodiment, the holder 23 is connected to the passages 45A, 45B, 65 from the end surface side of each support rod 21, 22.
A, 65B, but each holder locking part 31A, 31B...34A, 34B,
50A, 50B... 53A, 53B vertical groove 36a
By extending 43a, 55a to 62a to the upper surfaces of the support rods 21 and 22, the passages described above are unnecessary and installation from above is possible.

Further, in the above embodiment, two contact surfaces 84 are provided for the substrate 1, but the number may be one or three or more by increasing or decreasing the number of side walls 78 and 79.

[Effect of idea]

As established above, the spray device according to the present invention has a holder detachably attached to the support rod, so it can quickly and easily respond to changes in board size and board thickness, and is easy to handle. and the operating rate can be improved. Further, since the mounting height of the holder can be changed according to the thickness of the board, both boards can be installed on the same plane. Therefore, the central axis of the ejected region does not deviate from the rotation center axis, and the ejected liquid can be uniformly spread over the entire surface of the substrate. Furthermore, since the end surface portion of the substrate is held, the length of the support rod can be made shorter than when holding the corner portion. As a result, air turbulence within the chamber is reduced and the ejected liquid can be applied more uniformly. Therefore, especially when used in a series of steps such as development, etching, and cleaning after resist exposure, a pattern with uniform line width can be formed, and its practical effects are very large.

[Brief explanation of the drawing]

FIG. 1 is a partially exploded perspective view showing the support of the spray device according to the present invention, FIGS. 2 and 3 are partially cutaway side views of the support rod, and FIGS. 4 and 5, respectively.
The figures are Figure 2 - line and - line sectional view, Figure 6
The figure is a bottom view of the main parts of the support, FIGS. 7 to 9 show a conventional spray device, FIG. 7 is an overall configuration diagram, and FIG. 8 is a plan view of the substrate installed on the support.
FIG. 9 is a plan view of the support. 1...Substrate, 13...Chamber, 14...Ejection hole, 15...Ejected liquid, 20...Support, 21,
22...Support rod, 23, 23A-23D...Holder, 31A, 31B-34A, 34B...Holder locking portion, 36a-43a...Vertical groove, 36b, 36
c~43b, 43c...Horizontal structure (locking part), 45A,
45B...Aisle, 50A, 50B to 53A, 53
B...Holder locking portion, 55a to 62a...Vertical groove,
55b, 55c to 62b, 62c... Horizontal groove (locking part), 65A, 65B... Passage, 70... Holder body, 71, 72... Leg piece, 73, 74... Engagement part, 82... Mounting Placement surface, 84...Abutment surface.

Claims (1)

[Scope of utility model registration request] A substrate is placed on a support provided in a chamber and rotated by a drive device, and a jet liquid is jetted toward the substrate from a jet hole provided in the chamber, and is jetted by rotation of the support. In the spray device that spreads the liquid almost uniformly over the entire surface of the substrate, the support includes at least one support rod and a pair of holders that are respectively detachably attached to the support rod and hold the substrate. The support rod has a longitudinal center as a center of rotation,
Further, on both sides of the support rod, a plurality of pairs of holder locking portions are provided at symmetrical positions with respect to the rotation center according to various sizes of the substrate, and each holder locking portion is The holder has a plurality of locking parts that are arranged in parallel in the height direction and selectively lock the holder, and the holder supports a contact surface that contacts the end surface portion of the substrate and a bottom surface near the end surface portion. a main body having a mounting surface, a pair of left and right legs vertically provided on both sides of the lower surface of the main body, and a pair of legs protruding from the inner surfaces of each of the holder locking parts. A spray device comprising: a pair of engaging portions that selectively engage with a plurality of locking portions.