JPH0221148A - Clean room - Google Patents

Abstract

PURPOSE:To prevent dust, that passes through a conduit pipe or is of a falling- off filler, from dispersing into a clean room by filling sealant between conduit pipe and wire at a lead-in point from which the wire is introduced into a clean room, and providing an air intake hole near by the lead-in point. CONSTITUTION:A filler 7 is filled between a conduit pipe 5 and wire 6 at a lead-in point from which the wire is pulled into a clean room 1 to prevent air from passing through. The end of the conduit pipe 5 from which the wire 6 is pulled in is extended to near a suction port 8A or 8B of an air duct 2 so that dust is removed by a filter 4 through the air duct 2 even when a portion of the sealant falls off and dust enters the clean room.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a clean room, and particularly to a clean room in which electric wires are drawn into the room.

[Conventional technology]

Among conventional clean rooms: 1. Contamination concentration to, oo.

A case will be described in which electrical wires are led into a clean room with moderate turbulence.

As shown in FIG. 2, air intake holes 18A and 18B are provided on the wall of the clean room 11, and the air inside the clean room 11 is sucked through an air duct 12 by a fan 13, and the air is passed through a filter 14 to remove dust and returned to the clean room. A method is adopted in which the liquid is discharged into the 11. In this case, since the filter 14 discharges air from the ceiling of the clean room 1, the air spreads radially and the flow velocity near the filter 14 increases, creating turbulent flow and filling the entire clean room 11. Of course, as the air moves away from the filter 14, the flow velocity of the air decreases and becomes close to laminar flow.

Next, when the electric wire 16 is drawn into the clean room 11, the electric wire 16 is drawn through the electric conduit 15 that houses the electric wire 16 that penetrates the wall surface of the clean room 11. If the electrical conduit 15 is quite long and the gap between its inner diameter and the outer diameter of the electrical wire 16 is small, the amount of dust sucked in from the outside air will be small, and even if it is, it will be absorbed through the intake hole 18B and filtered by the filter 14. However, if the pressure inside the clean room 11 is positive with respect to the outside air, there is a possibility that air containing dust may enter through the electric conduit 15.

[Problem to be solved by the invention]

In the clean room according to the above-mentioned conventional technology, the electric wires are led through the open electric conduit, so that dust from the outside air enters the clean room through the gap between the electric conduit and the electric wire, increasing the amount of dust.

The object of the present invention is to provide a clean room that overcomes the above-mentioned drawbacks.

[Means to solve the problem]

The cooling room of the present invention cleans the indoor air by sucking indoor air and discharging it back into the room through a filter, and also introduces electric wires into the room through electric conduits. A filler is filled in the gap between the electric wire and the electric conduit in contact with the opening in the chamber, and the tip of the electric conduit is disposed near the intake hole in the chamber.

〔Example〕

Next, the present invention will be explained in detail with reference to the drawings.

FIG. 1 is a sectional view showing the structure of a first embodiment of the present invention.

As shown in Figure 1, air intake hole 8A is installed on the wall of clean room 1.
・8B is installed to suck the air in the clean room 1 through the air duct 6 with the fan 3, and the filter 4
The structure and operation of removing dust through the air and discharging it into the clean room 1 again are the same as those of the conventional technology.

When drawing an electric wire into the clean room 1, the electric wire 6 is drawn through the electric conduit 5 that houses the electric wire 6 that penetrates the wall of the clean room 1, and the necessary connections are made to the electric wire to supply power or signals to the clean room 1. .

Further, a filler material 7 is filled between the electric wire 6 and the electric wire 6 at a portion where the electric wire 6 is drawn into the clean room 1 from the electric wire conduit 5, thereby interrupting air circulation. In addition, the part where the electric wire 6 is drawn from the electric conduit 7 should be extended to the vicinity of the intake holes 8A or 8B of the air ducts 1 and 2.
Even if a part of the air filter is missing and dust enters, this dust is removed by the filter 4 through the air duct 2.

Furthermore, as an example of the filler 7, a silicone resin is most convenient, and when strong adhesion to the electric conduit 5 and the electric wire 6 is required, an epoxy or polyester resin may be used. Therefore, the electric wire 6 has already passed through the electric conduit 5.
When additional electric wires are installed while the electric wire is being drawn in, it is possible and easy to remove the filler 7, pass the additional electric wire through, and then fill the filler 7 again.

〔Effect of the invention〕

As explained above, in the present invention, a filler is filled between the conduit and the wires at the point where the wires are introduced into the clean room through the conduit, and the intake hole of the clean room is located in the vicinity. Therefore, the infiltration of dust generated through the electrical conduit is prevented, and even if the filling material should be missing, the dust will not spread inside the clean room, and electrical wires can be easily added.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view showing the configuration of an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing the configuration of an example of a clean room according to the prior art. 1...Clean room, 2...Air duct, 3...
・Fan, 4...filter, 5...conduit, 6...
・Electric wire, 7...Filling material, 8A/8B...Intake hole.

Claims (1)

[Claims] In a clean room where indoor air is sucked and discharged back into the room through a filter to purify the air inside the room, and an electric wire is introduced into the room through a conduit, the electric wire is placed in contact with an opening in the room. A clean room characterized in that a gap between the electric wire and the electric conduit is filled with a filler material, and a tip of the electric conduit is disposed near an intake hole in the room.