JPH02212624A - Air bearing for vacuum - Google Patents
Air bearing for vacuumInfo
- Publication number
- JPH02212624A JPH02212624A JP1032716A JP3271689A JPH02212624A JP H02212624 A JPH02212624 A JP H02212624A JP 1032716 A JP1032716 A JP 1032716A JP 3271689 A JP3271689 A JP 3271689A JP H02212624 A JPH02212624 A JP H02212624A
- Authority
- JP
- Japan
- Prior art keywords
- guide bar
- air
- labyrinth
- porous
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
- F16C32/0685—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load for radial load only
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/74—Sealings of sliding-contact bearings
- F16C33/741—Sealings of sliding-contact bearings by means of a fluid
- F16C33/748—Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2300/00—Application independent of particular apparatuses
- F16C2300/40—Application independent of particular apparatuses related to environment, i.e. operating conditions
- F16C2300/62—Application independent of particular apparatuses related to environment, i.e. operating conditions low pressure, e.g. elements operating under vacuum conditions
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Electron Beam Exposure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、半導体焼付装置や電子ビーム加工装置等の構
成要素の一つとして真空内において使用されるエアーベ
アリングに関し、特にラビリンス隔壁を、ガイドバーを
支持する多孔質部材と同の拐質で構成することにより、
焼き何ぎやかじりを防止し、ラビリンス効果を高め、か
つ加工および組立を容易にした真空用エアーベアリング
に関する。Detailed Description of the Invention [Field of Industrial Application] The present invention relates to an air bearing used in a vacuum as one of the components of semiconductor printing equipment, electron beam processing equipment, etc. By being made of the same material as the porous member that supports the bar,
This invention relates to a vacuum air bearing that prevents galling and galling, enhances the labyrinth effect, and facilitates processing and assembly.
［従来の技術］
従来、この種の真空チャンバで用いられるエアベアリン
グとしては、例えば、第２図に示すような構成のものが
知られている（特開昭６３−１９２８６４号公報参照）
。同図において、１はガイドバー、２および１１はハウ
ジング、３は多孔質ハツト、１３ａ〜１３ｃはガイドバ
ー１とノ間に微小な間隙を形成するラビリンス隔壁、１
８は摺動部材である。[Prior Art] Conventionally, as an air bearing used in this type of vacuum chamber, for example, one having a configuration as shown in FIG.
. In the figure, 1 is a guide bar, 2 and 11 are housings, 3 is a porous hat, 13a to 13c are labyrinth partition walls that form minute gaps between the guide bar 1, and 1
8 is a sliding member.
この構成において、給気用通路４を通して供給された空
気は多孔質バット３において絞られ、ポケット部１２に
排出される。In this configuration, air supplied through the air supply passage 4 is squeezed in the porous batt 3 and discharged into the pocket portion 12.
ポケット部１２に排出された空気は排気用通路１５およ
び２１を通り、真空チャンバ外部（大気）に排出される
。排出されなかった微量の空気はガイドバー１とラビリ
ンス隔壁１３ ａ〜１３ｃとのわずかな間隙により絞ら
れ、さらに通路１６．２２および１７．２３を介してロ
ータリーポンプ２４．２５で吸引される。このように、
ラビリンスによる絞りとロータリーポンプによる強制排
気によって真空ヂャンハへの空気流出を防止しているの
である。The air discharged into the pocket portion 12 passes through the exhaust passages 15 and 21 and is discharged to the outside of the vacuum chamber (atmosphere). The small amount of air that has not been discharged is squeezed out by a small gap between the guide bar 1 and the labyrinth partitions 13a to 13c, and is further sucked in by the rotary pump 24.25 via the passages 16.22 and 17.23. in this way,
Air leakage to the vacuum chamber is prevented by a labyrinth restriction and a rotary pump for forced exhaust.
これによれは、ラビリンス隔壁１３ａ〜１３ｃとガイド
バー１との間隙が微小であるため、ハウジング１１が傾
いたとき、ラビリンス隔壁１３ａ〜１３ｃとカイトバー
１とか接触し、破損する可能性かあるか、これを摺動部
材１８により防いている。This is because the gaps between the labyrinth partition walls 13a to 13c and the guide bar 1 are minute, so when the housing 11 is tilted, there is a possibility that the labyrinth partition walls 13a to 13c and the kite bar 1 will come into contact and be damaged. This is prevented by the sliding member 18.
［発明が解決しようとする課題］
しかしながら、このような従来例においては以下に示す
ような欠点がある。[Problems to be Solved by the Invention] However, such conventional examples have the following drawbacks.
（１）端部に摺動部材１８を設けるため、全長が長くな
り大型化する。(1) Since the sliding member 18 is provided at the end, the overall length becomes longer and the size increases.
（２）ガイドバー１に自重たわみ等曲げ方向のたわみか
発生した場合、ガイドバー１か摺動部材１８たけてなく
ラビリンス隔壁１３ａ、１３ｂにも接触し、焼付やかじ
りの原因となっている。(2) When the guide bar 1 is deflected in the bending direction, such as by its own weight, the guide bar 1 does not extend to the sliding member 18 and comes into contact with the labyrinth partition walls 13a and 13b, causing seizure or galling.
（３）多孔質パッド３とラビリンス隔壁１．３ ａ〜１
３ｃは材質か異なり、同時研削がてきないため、両者の
芯出しやクリアランス調整か難しい。(3) Porous pad 3 and labyrinth partition wall 1.3 a~1
3c is made of different materials and cannot be ground at the same time, making it difficult to center them and adjust their clearance.
（４）（３）の理由により、浮上量（約５μｍ）を確保
するには、ラビリンス隔壁１３ａ〜１３ｃのクリアラン
スは８μｍ位が限界になってしまう。(4) Due to the reason (3), in order to ensure the flying height (approximately 5 μm), the clearance between the labyrinth partition walls 13a to 13c is limited to about 8 μm.
（５）ラビリンス隔壁１３ａ〜１３ｃがハウシング１１
と一体になっているため、多孔質バット３を圧入するに
はハウジング１１を分割しなくてはならない。(5) The labyrinth partition walls 13a to 13c are the housing 11
Since the housing 11 is integrated with the housing 11, the housing 11 must be divided in order to press-fit the porous batt 3.
（６）（５）の理由から、分割したハウシング１１の芯
出しか難しくなる。(6) For the reason (5), only centering of the divided housing 11 becomes difficult.
本発明の目的は、このような従来技術の欠点に鑑み、真
空用エアーベアリングにおいて、焼付やかじりを防止す
るとともに気密性や加工・組立の容易性を向上させるこ
とにある。SUMMARY OF THE INVENTION In view of the drawbacks of the prior art, it is an object of the present invention to prevent seizure and galling and to improve airtightness and ease of processing and assembly in vacuum air bearings.
［課題を解決するための手段］
上記目的を達成するため本発明では、自身を経て供給さ
れる空気を介してガイドバーを支持する多孔質パッドと
、ガイドバーに対し微小隙間を介して対向し、該空気か
ガイドバーに沿って流出するのを防止するラビリンス隔
壁とを備えた、真空内で使用されるエアーベアリングに
おいて、該ラビリンス隔壁は該多孔質パッドと同一の耐
摩耗性多孔質材で構成するようにしている。[Means for Solving the Problems] In order to achieve the above object, the present invention provides a porous pad that supports a guide bar through air supplied through the porous pad, and a porous pad that faces the guide bar through a small gap. , and a labyrinth partition to prevent the air from escaping along the guide bar, the labyrinth partition being made of the same wear-resistant porous material as the porous pad. I am trying to configure it.
［作用］
この構成において、ガイドバーは多孔質パッドにより供
給空気を介して摺動可能に支持され、この供給空気は、
ラビリンス隔壁のため真空中に流出することなく、吸引
ポンプ等によって回収されるが、ラビリンス隔壁の材質
か多孔質パッドと同じ自己潤滑性を有する耐摩耗性多孔
質部材であるため、金属同士の接触か存在せず、したが
って焼イ」やかじり等を生ずることなく、ガイドバーは
案内される。[Function] In this configuration, the guide bar is slidably supported by the porous pad through the supply air, and the supply air is
Because of the labyrinth partition wall, it does not leak into the vacuum and is collected by a suction pump, etc. However, since the material of the labyrinth partition wall is a wear-resistant porous member that has the same self-lubricating properties as the porous pad, metal-to-metal contact does not occur. Therefore, the guide bar can be guided without any scorching, galling, etc.
本ベアリングの加工および組立においては、多孔質バッ
トとラビリンス隔壁は同じ材質なので同時に研削され、
ラビリンス隔壁とガイドバーとの間隙を多孔質バットと
ガイドバーとの間隙と同程度まで小さくなるように加工
されて気密性か高められる。しかも、ガイドバーとラビ
リンス隔壁との接触を防ぐための摺動部材を設ける必要
もないのでその分小型に構成され、また、ハウシングを
分割する必要なく多孔質パッドは圧入等により組み込ま
れる。When processing and assembling this bearing, the porous butt and labyrinth partition wall are made of the same material, so they are ground at the same time.
The gap between the labyrinth partition wall and the guide bar is processed to be as small as the gap between the porous bat and the guide bar, thereby improving airtightness. Furthermore, since there is no need to provide a sliding member to prevent contact between the guide bar and the labyrinth partition wall, the structure can be made smaller accordingly, and the porous pad can be incorporated by press-fitting or the like without having to separate the housing.
［実施例］ 以下、図面を用いて本発明の詳細な説明する。[Example] Hereinafter, the present invention will be explained in detail using the drawings.
第１図は本発明の一実施例に係るエアーベアリングの断
面図である。第２図と共通ずる部分は同一符号て示しで
ある。FIG. 1 is a sectional view of an air bearing according to an embodiment of the present invention. Components common to those in FIG. 2 are designated by the same reference numerals.
第１図において、１０２はハウジング、１１３ａ〜１１
３Ｃは多孔質バット３と同材質の自己潤滑性を有する耐
摩耗性多孔質部材で構成したラビリンス隔壁である。す
なわち、ハウジングが１つの部材で分割することなく構
成されており、ラビリンス隔壁が多孔質パッドと同じ月
貿であり、そして摺動部材がない点が第２図の従来例と
特に異なる。In FIG. 1, 102 is a housing, 113a to 11
3C is a labyrinth partition made of a wear-resistant porous member having self-lubricating properties and made of the same material as the porous bat 3. That is, the present invention is particularly different from the conventional example shown in FIG. 2 in that the housing is constructed as a single member without being divided, the labyrinth partition wall has the same shape as the porous pad, and there is no sliding member.
この構成において、通路４を介して供給される空気は多
孔質バッド３で絞られてポケット１２に到達する。その
後、通路１５および２１を通り、真空チャンバ外部に排
気される。この際、微量の空気はラビリンス隔壁１１３
ａとガイドバー１０１との間のわずかな間隙を通過して
次のポケット１４．ａに到達する。ここでは、吸引ポン
プ２４によって吸引されているため、その空気は通路１
６および２２を通って強制的に排出される。In this configuration, the air supplied via the passage 4 is squeezed by the porous pad 3 and reaches the pocket 12. Thereafter, it passes through passages 15 and 21 and is exhausted to the outside of the vacuum chamber. At this time, a small amount of air is removed from the labyrinth partition wall 113.
a and the guide bar 101 to the next pocket 14. Reach a. Here, since the air is sucked by the suction pump 24, the air is
6 and 22.
同様にポケット１４ｂに到達した空気は吸引ポンプ２５
によフて通路１７および２３を介して吸弓され、最終的
に真空ヂャンバー内にリークする量は、ラビリンス隔壁
１１３Ｃとガイドバー１との間隙を通過する極めて微量
なものとなる。空気が真空ヂャンバー内にリークする量
を極力微量にするため、ラビリンス隔壁１１３ａ〜１１
３Ｃとガイドバー１とで形成される間隙は多孔質バッド
３とガイドバー１とて形成される間隙（約５μｍ）とほ
ぼ同程度になっている。Similarly, the air that has reached the pocket 14b is pumped to the suction pump 25.
The amount that is absorbed through the passages 17 and 23 and finally leaks into the vacuum chamber is extremely small as it passes through the gap between the labyrinth partition wall 113C and the guide bar 1. In order to minimize the amount of air leaking into the vacuum chamber, the labyrinth partition walls 113a to 11
The gap formed between the porous pad 3 and the guide bar 1 is approximately the same as the gap formed between the porous pad 3 and the guide bar 1 (approximately 5 μm).
また、ラビリンス隔壁１１３ａ〜１１３Ｃはその内部を
空気か通過しないように側面を接着剤等の塗布によりシ
ールしている。Furthermore, the sides of the labyrinth partition walls 113a to 113C are sealed by applying an adhesive or the like to prevent air from passing through the inside thereof.
ラビリンス隔壁１１３ａ〜１１３Ｃは圧入、焼ばめある
いは、接着等によりハウジング１０２に取り付けられる
が、筒状の多孔質体を、取りイ」りてからポケット１４
ａ、１４ｂの部分を切削等により加工するようにしても
よい。この場合、多孔質体をハウジング１０２の部分に
至るまで削り取って各隔壁１１３ａ〜１１３Ｃが第１図
に示すように独立するようにしてから各側面をシールす
ることにより、多孔質体内部を通過する気体の洩れを防
止することができる。The labyrinth partition walls 113a to 113C are attached to the housing 102 by press fitting, shrink fitting, adhesive, etc., but after removing the cylindrical porous body, the pocket 14 is attached.
The portions a and 14b may be processed by cutting or the like. In this case, by scraping the porous body down to the housing 102 so that the partition walls 113a to 113C are independent as shown in FIG. Gas leakage can be prevented.
なお、ここでは第１図に示したようなラジアル軸受に本
発明を適用した例を説明したか、アキシャル軸受または
ラジアルとアキシャルとを糾み合わせた軸受等において
も同様に本発明を適用することができる。また、バット
およびラビリンス隔壁は、多孔質材に限らず、固体潤滑
性の材料で構成してもよい。さらに、エアーの絞り方式
としては、自戒絞り、オリフィス絞りあるいは表面絞り
等の方式を用いてもよい。Note that although an example in which the present invention is applied to a radial bearing as shown in FIG. 1 has been described here, the present invention can also be similarly applied to an axial bearing or a bearing that combines radial and axial bearings. Can be done. Further, the bat and the labyrinth partition wall are not limited to porous materials, but may be made of solid lubricating materials. Further, as a method of restricting the air, methods such as self-control, orifice restriction, or surface restriction may be used.
［発明の効果］
以上説明したように本発明によれば、真空内で使用され
るエアーヘアリングにおいて、パッドを形成する固体潤
滑材料の多孔質材とラビリンス隔壁とを同材質にしたこ
とによって、ガイドバーとラビリンス隔壁との間の接触
による焼き付き、かじり等を防止することかできる。[Effects of the Invention] As explained above, according to the present invention, in an air hair ring used in a vacuum, by making the porous material of the solid lubricant material forming the pad and the labyrinth partition wall the same material, It is possible to prevent seizure, galling, etc. due to contact between the guide bar and the labyrinth partition wall.
また、同じ理由から、バットとラビリンス隔壁を同時加
工てきるため、ラビリンス隔壁とガイドバーとの間隙を
多孔質バットとガイドバーとの間隙と同寸法にまで小さ
くすることができ、より大きなラビリンス効果が得られ
る。In addition, for the same reason, since the bat and labyrinth partition are processed simultaneously, the gap between the labyrinth partition and the guide bar can be reduced to the same size as the gap between the porous bat and the guide bar, resulting in a greater labyrinth effect. is obtained.
さらに、ハウジングを分割する必要がなくなるため、芯
出し工程が不要となり、加工、組立てが簡単になる。Furthermore, since there is no need to divide the housing, there is no need for a centering process, which simplifies processing and assembly.
第１図は、本発明の一実施例に係るエアーベアリングの
断面図、そして
第２図は、従来例に係るエアーベアリングの断面図であ
る。
１ニガイトバー、１０２，２．１１ ・ハウジング、３
：多孔質バット、１１３ａ〜１１３ｃ、 １３ａ〜１
３ｃ ラビリンス隔壁、１８．摺動部材。
特許出願人 キャノン株式会社FIG. 1 is a sectional view of an air bearing according to an embodiment of the present invention, and FIG. 2 is a sectional view of an air bearing according to a conventional example. 1 Nigaitobar, 102, 2.11 ・Housing, 3
: Porous bat, 113a-113c, 13a-1
3c Labyrinth septum, 18. sliding member. Patent applicant Canon Co., Ltd.
Claims (1)
支持する多孔質パッドと、ガイドバーに対し微小隙間を
介して対向し、該空気がガイドバーに沿って流出するの
を防止するラビリンス隔壁とを備えた、真空内で使用さ
れるエアーベアリングにおいて、該ラビリンス隔壁は該
多孔質パッドと同一の耐摩耗性多孔質材で構成したこと
を特徴とする真空用エアーベアリング。(1) A porous pad that supports the guide bar through air supplied through it, and a labyrinth that faces the guide bar through a small gap and prevents the air from flowing out along the guide bar. 1. An air bearing for vacuum use, comprising a partition wall and used in a vacuum, wherein the labyrinth partition wall is made of the same wear-resistant porous material as the porous pad.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1032716A JP2775454B2 (en) | 1989-02-14 | 1989-02-14 | Air bearing for vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1032716A JP2775454B2 (en) | 1989-02-14 | 1989-02-14 | Air bearing for vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02212624A true JPH02212624A (en) | 1990-08-23 |
| JP2775454B2 JP2775454B2 (en) | 1998-07-16 |
Family
ID=12366562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1032716A Expired - Fee Related JP2775454B2 (en) | 1989-02-14 | 1989-02-14 | Air bearing for vacuum |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2775454B2 (en) |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0643348U (en) * | 1992-11-24 | 1994-06-07 | 新明和工業株式会社 | Air spindle |
| WO2001057409A1 (en) * | 2000-02-01 | 2001-08-09 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device |
| JP2002188631A (en) * | 2000-12-22 | 2002-07-05 | Toto Ltd | Static pressure gas bearing used under vacuum environment, and gass collecting method for the same |
| JP2002276660A (en) * | 2001-01-09 | 2002-09-25 | Toto Ltd | Static pressure air bearing |
| JP2002349569A (en) * | 2001-05-25 | 2002-12-04 | Canon Inc | Hydrostatic bearing device and stage device using the same |
| US6559456B1 (en) | 1998-10-23 | 2003-05-06 | Canon Kabushiki Kaisha | Charged particle beam exposure method and apparatus |
| US6932873B2 (en) * | 2002-07-30 | 2005-08-23 | Applied Materials Israel, Ltd. | Managing work-piece deflection |
| EP1350997A3 (en) * | 2002-04-05 | 2010-09-08 | Ebara Corporation | Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
| JP2013002590A (en) * | 2011-06-20 | 2013-01-07 | Ulvac Japan Ltd | Vacuum device |
| JP5178507B2 (en) * | 2006-03-22 | 2013-04-10 | 京セラ株式会社 | Static pressure slider, conveying device and processing device provided with the same |
| JP2013181648A (en) * | 2012-03-05 | 2013-09-12 | Fujifilm Corp | Labyrinth seal, cleaning device, cleaning method and solution film-forming method |
| US9136151B2 (en) | 2010-06-29 | 2015-09-15 | Asml Netherlands B.V. | Actuator |
| CN107100933A (en) * | 2017-04-13 | 2017-08-29 | 南方科技大学 | Active sealing type aerostatic bearing |
| US10267360B2 (en) | 2010-06-23 | 2019-04-23 | Asml Holding N.V. | Pneumatic bearing with bonded polymer film wear surface and production method thereof |
| JP2021011834A (en) * | 2019-07-04 | 2021-02-04 | 日本精工株式会社 | Spindle device |
| CN113547341A (en) * | 2021-09-22 | 2021-10-26 | 北京博鲁斯潘精密机床有限公司 | Guide rail pair of ultra-precise cylindrical static pressure numerical control machine tool |
| JP2023516158A (en) * | 2020-03-12 | 2023-04-18 | ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | Bearing devices for turbo compressor shafts |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2834615C (en) * | 2013-08-28 | 2020-04-28 | Gedex Systems Inc. | Single axis rotational gas bearing with feed-through |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6368573U (en) * | 1986-10-23 | 1988-05-09 | ||
| JPS63120050A (en) * | 1986-11-06 | 1988-05-24 | Canon Inc | drive mechanism |
-
1989
- 1989-02-14 JP JP1032716A patent/JP2775454B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6368573U (en) * | 1986-10-23 | 1988-05-09 | ||
| JPS63120050A (en) * | 1986-11-06 | 1988-05-24 | Canon Inc | drive mechanism |
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0643348U (en) * | 1992-11-24 | 1994-06-07 | 新明和工業株式会社 | Air spindle |
| US6559456B1 (en) | 1998-10-23 | 2003-05-06 | Canon Kabushiki Kaisha | Charged particle beam exposure method and apparatus |
| US6864488B2 (en) | 1998-10-23 | 2005-03-08 | Canon Kabushiki Kaisha | Charged particle beam exposure method and apparatus |
| US7189002B2 (en) | 2000-02-01 | 2007-03-13 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device |
| WO2001057409A1 (en) * | 2000-02-01 | 2001-08-09 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device |
| US7052182B2 (en) | 2000-02-01 | 2006-05-30 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device |
| JP2002188631A (en) * | 2000-12-22 | 2002-07-05 | Toto Ltd | Static pressure gas bearing used under vacuum environment, and gass collecting method for the same |
| JP2002276660A (en) * | 2001-01-09 | 2002-09-25 | Toto Ltd | Static pressure air bearing |
| JP2002349569A (en) * | 2001-05-25 | 2002-12-04 | Canon Inc | Hydrostatic bearing device and stage device using the same |
| EP1350997A3 (en) * | 2002-04-05 | 2010-09-08 | Ebara Corporation | Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
| US8807914B2 (en) | 2002-04-05 | 2014-08-19 | Ebara Corporation | Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber |
| US6932873B2 (en) * | 2002-07-30 | 2005-08-23 | Applied Materials Israel, Ltd. | Managing work-piece deflection |
| JP5178507B2 (en) * | 2006-03-22 | 2013-04-10 | 京セラ株式会社 | Static pressure slider, conveying device and processing device provided with the same |
| US10267360B2 (en) | 2010-06-23 | 2019-04-23 | Asml Holding N.V. | Pneumatic bearing with bonded polymer film wear surface and production method thereof |
| US9136151B2 (en) | 2010-06-29 | 2015-09-15 | Asml Netherlands B.V. | Actuator |
| JP2013002590A (en) * | 2011-06-20 | 2013-01-07 | Ulvac Japan Ltd | Vacuum device |
| KR20130101454A (en) * | 2012-03-05 | 2013-09-13 | 후지필름 가부시키가이샤 | Labyrinth seal, cleaning unit and method, and solution film-forming method |
| CN103307285A (en) * | 2012-03-05 | 2013-09-18 | 富士胶片株式会社 | Labyrinth seal, cleaning unit and method, and solution film-forming method |
| JP2013181648A (en) * | 2012-03-05 | 2013-09-12 | Fujifilm Corp | Labyrinth seal, cleaning device, cleaning method and solution film-forming method |
| CN107100933A (en) * | 2017-04-13 | 2017-08-29 | 南方科技大学 | Active sealing type aerostatic bearing |
| JP2021011834A (en) * | 2019-07-04 | 2021-02-04 | 日本精工株式会社 | Spindle device |
| JP2023516158A (en) * | 2020-03-12 | 2023-04-18 | ロベルト・ボッシュ・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング | Bearing devices for turbo compressor shafts |
| CN113547341A (en) * | 2021-09-22 | 2021-10-26 | 北京博鲁斯潘精密机床有限公司 | Guide rail pair of ultra-precise cylindrical static pressure numerical control machine tool |
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|---|---|
| JP2775454B2 (en) | 1998-07-16 |
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| LAPS | Cancellation because of no payment of annual fees |