JPH0221328U - - Google Patents
Info
- Publication number
- JPH0221328U JPH0221328U JP10023988U JP10023988U JPH0221328U JP H0221328 U JPH0221328 U JP H0221328U JP 10023988 U JP10023988 U JP 10023988U JP 10023988 U JP10023988 U JP 10023988U JP H0221328 U JPH0221328 U JP H0221328U
- Authority
- JP
- Japan
- Prior art keywords
- side member
- slider
- guide shaft
- air slide
- static pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003068 static effect Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
第１図は本考案のエアースライドの全体斜視図
、第２図は第１図の―線断面図、第３図は第
２図の要部拡大図、第４図は本考案の他の実施例
を示す要部拡大図、第５図はさらに本考案の他の
実施例を示す要部拡大図、第６図は本考案のエア
ースライドにおけるスライダーの側部材の変位量
を示す特性図、第７図は従来例のエアーライドに
おけるスライダーの側部材の変位量を示す特性図
、第８図は従来例におけるエアースライドの全体
斜視図、第９図は第８図の―線断面、第１０
図は第９図の要部拡大断面図である。
１，１１，２１…スライダー、２，１２，２２
…ガイド軸、３，１３，２３…第１側部材、４，
１４，２４…第２側部材、Ａ，Ｂ，Ｃ…静圧間隙
。
Fig. 1 is an overall perspective view of the air slide of the present invention, Fig. 2 is a sectional view taken along the line - - in Fig. 1, Fig. 3 is an enlarged view of the main part of Fig. 2, and Fig. 4 is another implementation of the present invention. FIG. 5 is an enlarged view of the main part showing another embodiment of the present invention. FIG. 6 is a characteristic diagram showing the amount of displacement of the side member of the slider in the air slide of the present invention. Fig. 7 is a characteristic diagram showing the amount of displacement of the side member of the slider in the conventional air slide, Fig. 8 is an overall perspective view of the air slide in the conventional example, Fig. 9 is a cross section taken along the line - - in Fig. 8, and Fig. 10
The figure is an enlarged sectional view of the main part of FIG. 9. 1, 11, 21...Slider, 2, 12, 22
...Guide shaft, 3, 13, 23...First side member, 4,
14, 24...Second side member, A, B, C...Static pressure gap.
Claims (1)
隙を介して浮上させ移動自在としたエアースライ
ドの構造において、前記スライダーはセラミツク
スを素材とし、かつ前記ガイド軸の一辺に対応す
る第１側部材と、残りの各辺に対応し一体的に形
成した第２側部材とからなり、これら第１側部材
及び第２側部材とを螺着一体化したことを特徴と
するエアースライド。 In an air slide structure in which a slider is floated and movable on a guide shaft having a polygonal cross-sectional shape through a static pressure gap, the slider is made of ceramics and has a first side member corresponding to one side of the guide shaft. , and a second side member integrally formed corresponding to each of the remaining sides, the first side member and the second side member being integrally screwed together.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10023988U JPH0221328U (en) | 1988-07-28 | 1988-07-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10023988U JPH0221328U (en) | 1988-07-28 | 1988-07-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221328U true JPH0221328U (en) | 1990-02-13 |
Family
ID=31328142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10023988U Pending JPH0221328U (en) | 1988-07-28 | 1988-07-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221328U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001057409A1 (en) * | 2000-02-01 | 2001-08-09 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device |
| JP2002188631A (en) * | 2000-12-22 | 2002-07-05 | Toto Ltd | Static pressure gas bearing used under vacuum environment, and gass collecting method for the same |
| KR100419378B1 (en) * | 2000-11-29 | 2004-02-19 | 주식회사 에스에프에이 | Divider apparatus |
| WO2016158381A1 (en) * | 2015-03-31 | 2016-10-06 | 住友重機械工業株式会社 | Static pressure gas bearing |
-
1988
- 1988-07-28 JP JP10023988U patent/JPH0221328U/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001057409A1 (en) * | 2000-02-01 | 2001-08-09 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device |
| US7052182B2 (en) | 2000-02-01 | 2006-05-30 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for the hydrostatic gas bearing device |
| US7189002B2 (en) | 2000-02-01 | 2007-03-13 | Toto Ltd. | Hydrostatic gas bearing, hydrostatic gas bearing device for use in vacuum environment, and gas recovering method for hydrostatic gas bearing device |
| KR100419378B1 (en) * | 2000-11-29 | 2004-02-19 | 주식회사 에스에프에이 | Divider apparatus |
| JP2002188631A (en) * | 2000-12-22 | 2002-07-05 | Toto Ltd | Static pressure gas bearing used under vacuum environment, and gass collecting method for the same |
| WO2016158381A1 (en) * | 2015-03-31 | 2016-10-06 | 住友重機械工業株式会社 | Static pressure gas bearing |
| JP2016191434A (en) * | 2015-03-31 | 2016-11-10 | 住友重機械工業株式会社 | Static pressure gas bearing |
| CN107429742A (en) * | 2015-03-31 | 2017-12-01 | 住友重机械工业株式会社 | Hydrostatic Gas Bearings |