JPH0221649U - - Google Patents

Info

Publication number
JPH0221649U
JPH0221649U JP9838788U JP9838788U JPH0221649U JP H0221649 U JPH0221649 U JP H0221649U JP 9838788 U JP9838788 U JP 9838788U JP 9838788 U JP9838788 U JP 9838788U JP H0221649 U JPH0221649 U JP H0221649U
Authority
JP
Japan
Prior art keywords
frame
pellicle
flange portion
mounting
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9838788U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9838788U priority Critical patent/JPH0221649U/ja
Publication of JPH0221649U publication Critical patent/JPH0221649U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の実施例を示す図、第２図は従
来のペリクル取り付け構造を示す図である。 図において、１０はペリクル膜、１１はペリク
ル枠、１２は取り付け枠、１３は固定枠、１４は
接着剤、１５はマスク又はレチクル、を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. 下部にフランジ部１１ａを有するペリクル枠１
    １の上面にペリクル膜１０を張り付け、マスク又
    はレチクル１５には前記ペリクル枠１１のフラン
    ジ部１１ａの外周を取り巻き且つ該フランジ部１
    １ａと同じ厚さの枠状の取り付け枠１２を接着固
    定し、該取り付け枠１２にねじ止めできる固定枠
    １３で前記ペリクル枠１１のフランジ部１１ａを
    押圧固定したことを特徴とするペリクル取り付け
    構造。
JP9838788U 1988-07-27 1988-07-27 Pending JPH0221649U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9838788U JPH0221649U (ja) 1988-07-27 1988-07-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9838788U JPH0221649U (ja) 1988-07-27 1988-07-27

Publications (1)

Publication Number Publication Date
JPH0221649U true JPH0221649U (ja) 1990-02-14

Family

ID=31324605

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9838788U Pending JPH0221649U (ja) 1988-07-27 1988-07-27

Country Status (1)

Country Link
JP (1) JPH0221649U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100796343B1 (ko) * 2006-03-27 2008-01-21 권선용 펠리클 프레임용 내경 고정지그
JP2014228868A (ja) * 2013-05-21 2014-12-08 上海和輝光電有限公司Ｅｖｅｒｄｉｓｐｌａｙ Ｏｐｔｒｏｎｉｃｓ （Ｓｈａｎｇｈａｉ） Ｌｉｍｉｔｅｄ ペリクルフレーム、フォトマスク、及びその取り付け方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100796343B1 (ko) * 2006-03-27 2008-01-21 권선용 펠리클 프레임용 내경 고정지그
JP2014228868A (ja) * 2013-05-21 2014-12-08 上海和輝光電有限公司Ｅｖｅｒｄｉｓｐｌａｙ Ｏｐｔｒｏｎｉｃｓ （Ｓｈａｎｇｈａｉ） Ｌｉｍｉｔｅｄ ペリクルフレーム、フォトマスク、及びその取り付け方法

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