JPH0221730U - - Google Patents
Info
- Publication number
- JPH0221730U JPH0221730U JP9984088U JP9984088U JPH0221730U JP H0221730 U JPH0221730 U JP H0221730U JP 9984088 U JP9984088 U JP 9984088U JP 9984088 U JP9984088 U JP 9984088U JP H0221730 U JPH0221730 U JP H0221730U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- wall
- diffusion
- thickness
- insulating collar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009792 diffusion process Methods 0.000 claims description 9
- 238000009413 insulation Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000002131 composite material Substances 0.000 claims 2
- 239000011162 core material Substances 0.000 claims 2
- 239000003365 glass fiber Substances 0.000 claims 2
- 239000012784 inorganic fiber Substances 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000002759 woven fabric Substances 0.000 claims 1
Landscapes
- Thermal Insulation (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Furnace Charging Or Discharging (AREA)
Description
第１図は本考案の一実施例を示す斜視図であり
、ａは帯状体、ｂはリング状体のものである。第
２図は本考案の断熱カラーの使用状況を示す断面
図である。
１……断熱カラー、２……拡散炉、３……拡散
チユーブ。
FIG. 1 is a perspective view showing an embodiment of the present invention, in which a is a band-shaped body and b is a ring-shaped body. FIG. 2 is a sectional view showing how the heat insulating collar of the present invention is used. 1...Insulation collar, 2...Diffusion furnace, 3...Diffusion tube.
Claims (1)
に拡散チユーブを支持し該炉の両端を断熱する断
熱カラーであつて、前記炉内の高い作動温度に耐
え得る無機繊維の複合体で形成され、炉内に挿入
される部分と、該部分と連続しかつ炉の外壁に密
着する部分とを有する二段構造を有することを特
徴とする拡散炉断熱カラー。 (2) 上記二段構造において、上記炉内に挿入さ
れる部分の厚さが拡散チユーブの外壁と炉内壁と
の間隙と同等又は若干小さく、上記炉の外壁に密
着する部分の厚さが上記炉内に挿入される部分の
厚さの１〜２倍であることを特徴とする請求項１
記載の拡散炉断熱カラー。 (3) 形状が帯状であることを特徴とする請求項
１ないし２記載の拡散炉断熱カラー。 (4) 前記無機繊維の複合体が、高純度な石英ガ
ラス繊維の集合体をコア材として、その外周部を
高純度な石英ガラス繊維の織布で包被した構造で
あることを特徴とする請求項１記載の拡散炉断熱
カラー。[Claims for Utility Model Registration] (1) An insulating collar that supports a diffusion tube in a furnace where semiconductors, integrated circuits, etc. are manufactured and insulates both ends of the furnace, which can withstand the high operating temperature inside the furnace. 1. A diffusion furnace heat insulating collar, characterized in that it is formed of a composite of inorganic fibers obtained and has a two-stage structure including a part inserted into the furnace and a part continuous with the part and in close contact with the outer wall of the furnace. (2) In the two-stage structure, the thickness of the part inserted into the furnace is equal to or slightly smaller than the gap between the outer wall of the diffusion tube and the inner wall of the furnace, and the thickness of the part that is in close contact with the outer wall of the furnace is the same as that of the gap between the outer wall of the diffusion tube and the inner wall of the furnace. Claim 1 characterized in that the thickness is 1 to 2 times the thickness of the part inserted into the furnace.
Diffusion furnace insulation collar listed. (3) The diffusion furnace heat insulating collar according to claim 1 or 2, characterized in that it has a band-like shape. (4) The inorganic fiber composite is characterized in that it has a structure in which an aggregate of high-purity quartz glass fibers is used as a core material, and the outer periphery of the core material is covered with a woven fabric of high-purity quartz glass fibers. The diffusion furnace insulation collar according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9984088U JPH0737308Y2 (en) | 1988-07-29 | 1988-07-29 | Diffusion furnace insulation collar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9984088U JPH0737308Y2 (en) | 1988-07-29 | 1988-07-29 | Diffusion furnace insulation collar |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0221730U true JPH0221730U (en) | 1990-02-14 |
| JPH0737308Y2 JPH0737308Y2 (en) | 1995-08-23 |
Family
ID=31327373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9984088U Expired - Lifetime JPH0737308Y2 (en) | 1988-07-29 | 1988-07-29 | Diffusion furnace insulation collar |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737308Y2 (en) |
-
1988
- 1988-07-29 JP JP9984088U patent/JPH0737308Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737308Y2 (en) | 1995-08-23 |