JPH02217801A - Optical element consisting of multilayered films of curved type - Google Patents

Abstract

PURPOSE:To obtain the optical element consisting of multilayered films of a curved type which can accurately condense and spectrally split light by periodically laminating plural metals on a substrate in such a manner that the laminated surfaces thereof respectively have a recessed shape, thereby constituting the curved type crystal without exerting force thereto from the outside. CONSTITUTION:The plural metals 1a to 1d are periodically laminated on the substrate 2 in such a manner that the laminated surfaces thereof respectively have the recessed shape. The materials are iron for, for example, the 1st layer 1a and the 3rd layer 1c and magnesium for the 2nd layer 1b and the 4th layer 1d. The 2nd layer 1b to the 4th layer 1d are uniformly constituted to about 10Angstrom layer thickness. The 1st layer 1a is so formed to the recessed shape on the substrate 2 as to constitute the recessed shape of the laminated surfaces of the 2nd layer 1b to the 4th layer 1d. Only the waves meeting Bragg conditions receive diffraction when an X-ray having a certain angle of diversion is made incident to this optical element. Since the laminated surfaces are curved to the recessed shape, the beam of the X-ray after receiving the diffraction is eventually stopped down. The optical element of the curved type is constituted in this way without keeping the pressure to be applied from the outside and the optical element consisting of the multilayered films of the curved type which can be improved in the accuracy is obtd.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a curved multilayer optical element, for example, SOR.
It relates to things used for condensing and spectroscopy of light.

[Conventional technology]

As a conventional optical element, magazines (Monochrons
torsfor X-rB 5ynchrotron
radiationsComm1ssionof t
he European C()mmunltle@＋
J-R-C-1@pra*l5pra+ Italy
) is shown in side view (2) of FIG. 4(a).

In the figure, 111 is a crystal, (Im) * (lb
)-(lc).

(1d) each shows an atomic sequence. This crystal (1
) has, for example, four layers of atomic arrays.

Next, the operation will be explained. The fourth IN (a
). In FIG. 4(b), a force as indicated by arrow A is applied to the crystal 11+, forming a crystal (1) having a curved surface. When X-rays with a certain divergence angle are incident on the thus curved crystal 11), only the waves that meet the Black condition undergo diffraction. At this time, if the lattice spacing of the diffraction plane of the crystal tll is uniform, X-rays hitting any part of the curved crystal will be diffracted at the same glancing angle. Here, the crystal (II) is curved, and each part of the crystal has a certain angle with respect to the horizontal plane.Therefore, even though the glancing angle is the same, the diffracted waves are at different angles with respect to the horizontal plane.Arrows Due to the pressure applied in the input direction, the angle of the outside of the crystal fi+ with respect to the horizontal plane is increased, so the X-ray beam after passing through the diffraction ring is narrowed down.

[Problem to be solved by the invention]

As described above, in the conventional curved multilayer optical element, a flat crystal is pressed to form a curved/bent crystal. Therefore, a curved crystal could not be formed unless pressure was constantly applied from the outside. Therefore, an apparatus for using this element becomes complicated. Further, there were other problems such as it was very difficult to form a curved surface with high precision.

This invention was made to solve the above-mentioned problems, and it provides a curved multilayer optical element that can create a curved optical element without continuously applying pressure from the outside and that can also improve accuracy. The purpose is to obtain.

[Means to solve the problem]

The curved multilayer film optical element according to the present invention is one in which a plurality of metals are periodically laminated on a substrate so that the laminated surfaces of the metals each have a concave shape.

[Effect]

Each Sμ constituting the multilayer film according to this invention,
Due to the concave shape, a curved crystal can be formed without applying external pressure.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings. 1st
The figure is a side view showing a curved multilayer optical element according to an embodiment of the present invention. In the figure, (2) is a flat substrate such as glass, and (1m) to (1d) respectively indicate the atomic arrays of metal laminated on this substrate (21).In this example, there are four layers. They are laminated, and each laminated surface has a concave shape, and the overall structure is periodic.The materials are, for example, the first layer (Ig), the third @ (lc) is iron, and the second layer (Ib). .

The fourth layer (1d) is magnesium, and the 21st layer
1 (lb) to 4th II (ld) HIOA, the layer thickness is uniform. The first layer (1m) is formed in a concave shape on the substrate (21) so as to form a concave shape on one side of the stack of the second layer (1b) to the fourth layer (1d). This can be achieved using the IFB Act or the IFB Act.

In addition, the concave shape of this laminated surface has a radius of curvature of about 103 to 104 m when calculated using reflection from silicon 101 when the wavelength of incident X-rays is 0.71 A, for example.
It is preferable to configure it to approximately fII+.

When X-rays having a certain divergence angle are incident on this optical element, only waves that meet the Black condition undergo diffraction. Since each of the laminated surfaces is concave and curved, the X-ray beam after undergoing diffraction is narrowed.

In this embodiment, a curved optical element can be obtained without applying pressure from the outside, and a conventional pressure device is not required. Moreover, since the curved surfaces are formed in the manufacturing process of the optical element, the concave shape of each laminated surface, that is, the angle with respect to the horizontal plane can be formed with high precision.

In the above embodiment, metal is laminated on a flat plate-shaped substrate (2), but as shown in FIG. 2, the substrate f21 is formed in advance to have a concave surface, and a plurality of The layers (1a) to (1d) are laminated with a uniform thickness,
It is also possible to make each of the laminated surfaces of the multilayer film concave.◇ Also, if you want to obtain diffraction waves at different angles in each part of the crystal depending on the method of using the optical element, you can make the multilayer film concave as shown in Figure 3.
The I films (1M) to (ld) may be formed with different thicknesses so that the 8f layer surface has a concave shape.

Further, in the above embodiment, four to five metal layers are laminated, but in reality, in order to eliminate the influence of the substrate +21, it is calculated that about 100 metal layers need to be directly laminated.

〔Effect of the invention〕

As described above, according to the present invention, by synchronously laminating a plurality of metals on a substrate so that their respective laminated surfaces are concave, a curved crystal FT can be constructed without applying any external force. This has the effect of making it possible to obtain a curved multilayer film optical element that can accurately focus 9 light beams.

[Brief explanation of the drawing]

FIG. 1 is a side view showing a curved multilayer optical element according to one embodiment of the present invention, and FIGS. 2 and 3 are side views showing curved multilayer optical elements according to other embodiments of the invention. FIG. 4(8)l(b) is a side view showing a conventional 74-curve multilayer film optical element. (1a) to (1d)...metal, (2)...substrate. In addition, in the figures, the same reference numerals indicate the same or equivalent parts. Figure 1 Figure 2 Figure 1, Small i! 1; Indication of Patent Application No. 1-38667 Name of the invention Curved multilayer optical element 3 Representative of the person making the amendment Figure 4 (b) 5. Detailed description of the invention in the specification to be amended and drawings. 6. Contents of amendment (1) From page 1, line 20 to page 2, line 1 of the specification, "each has..." was changed to "schematically represents a certain crystal plane." correct. (2) Figure 4 of the drawings will be corrected as shown in the attached sheet. 7. Attached document catalog drawing (Figure 4) 1 copy or more

Claims (1)

[Claims] A curved multilayer optical element in which a plurality of metals are periodically laminated on a substrate so that each layer has a concave surface.