JPH022218B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium, and particularly to a magnetic recording medium with excellent mechanical durability.

Conventionally, a magnetic recording medium having a magnetic thin film is produced by subjecting a substrate of aluminum or mylar sheet to an appropriate surface treatment, and then adhering a metal magnetic material or metal oxide magnetic material by a method such as sputtering or plating. For example, in a magnetic recording medium for perpendicular recording, the magnetic thin film is made of Co-Cr and has a thickness of 0.5 to 1.0 μm. When reading or writing information recorded on a magnetic recording medium having such a magnetic thin film, a sliding type or floating type magnetic head is used. A sliding magnetic head reads or writes information by sliding on a magnetic thin film. The floating magnetic head does not slide against the magnetic thin film while reading or writing information, but it contacts and slides against the magnetic thin film during start and stop times. The surface of the magnetic head facing the magnetic recording medium is made of a material whose main component is a metal oxide such as ferrite or barium titanate, so it is extremely hard and has strong mechanical durability. When such a magnetic head slides on the surface of a magnetic thin film of a magnetic recording medium, scratches occur on the magnetic thin film, which is softer than the magnetic head, resulting in the problem of damaging the recorded information. Attempts have been made to apply a lubricant to the surface of the magnetic thin film, but it has poor adhesion to the magnetic material and has not always been successful, and the manufacturing method is extremely complicated and expensive, making it impractical. The disadvantage is that it is not suitable.

The present invention eliminates the above-mentioned drawbacks and provides a magnetic recording medium that does not cause damage to the magnetic thin film even when it slides against a magnetic head when reading recorded information or writing information, and has excellent durability. It is something.

The magnetic recording medium of the present invention includes a magnetic thin film formed on a substrate, holes of a minute area uniformly distributed in the magnetic thin film, and holes filled with holes at the same height as the surface of the magnetic thin film or at the same height as the surface of the magnetic thin film. and a metal oxide provided slightly higher than the surface.

Next, embodiments of the present invention will be described using the drawings.

FIG. 1 is a partially sectional perspective view of an embodiment of the present invention.

Assume that aluminum is used as the substrate 1. A magnetic thin film 2 is formed on the surface of a substrate 1 using a magnetic metal or a magnetic metal oxide. This magnetic thin film 2 is provided with holes 3 of minute area in a uniformly distributed manner. The diameter of the holes 3 is about 1 μm, and they are uniformly distributed at a density of about 5 holes per 10 μm×10 μm area. Uniform here means that there is no bias, such as holes concentrated in a certain area and absent in a certain area, and does not require that they be evenly spaced. . If the distribution of holes is uneven,
This is because noise is generated when reading information. This hole 3 is filled with metal oxide 4. Alumina, silica, etc. are suitable as metal oxides. The metal oxide filling is made to be at the same height as the surface of the magnetic thin film or slightly higher (about 100 Å). Practically speaking, a slightly higher value is preferable in terms of durability of the magnetic thin film 2.

With this structure, the magnetic head comes into contact with the metal oxide 4 during reading or writing,
Since the magnetic thin film 2 is not in direct contact with the magnetic thin film 2,
will not cause any damage. Therefore, there is no destruction or reading error of information stored on the magnetic recording medium.
A magnetic recording medium with excellent durability can be obtained.

Next, a method for manufacturing a magnetic recording medium according to the present invention will be explained.

FIGS. 2a to 2d are cross-sectional views shown in order of steps to explain the method of manufacturing a magnetic recording medium according to the present invention.

First, as shown in Figure 2a, aluminum,
A magnetic thin film 2 is deposited on a substrate 1 such as a Mylar sheet by sputtering or plating. A photoresist film 5 is applied thereon, and openings 6 are formed by a normal exposure and development method. The diameter of the opening 6 is approximately 1 μm.

Next, as shown in FIG. 2B, etching is performed using a method such as ion beam etching to remove the exposed portion of the magnetic thin film 2 and form a hole 3 in the magnetic thin film 2.

Next, as shown in FIG. 2c, alumina is deposited as the metal oxide 4 by sputtering. As described above, the thickness of the metal oxide 4 is made to be the same as the thickness of the magnetic thin film 2 or slightly thicker (about 100 Å). When using the sputtering method, it is preferable to perform the sputtering while applying a bias voltage because the quality of the formed film is uniform and there is less stress.

Next, as shown in FIG. 2d, when the photoresist film 5 is removed together with the metal oxide 4 thereon, the metal oxide 4 remains only in the holes 3, and the magnetic recording medium of the present invention is obtained.

In the above description, a photoresist film is used, but depending on the type of magnetic thin film and the type of metal oxide, metal may also be used in consideration of the etching rate and film thickness.

As explained in detail above, according to the present invention,
This is highly effective because it does not cause damage even if it comes into contact with a magnetic head during reading or writing of information, and a magnetic recording medium with excellent durability can be obtained.

[Brief explanation of drawings]

FIG. 1 is a partially sectional perspective view of an embodiment of the present invention;
FIGS. 2a to 2d are cross-sectional views shown in order of steps for explaining the method of manufacturing a magnetic recording medium of the present invention. 1... Substrate, 2... Magnetic thin film, 3... Hole, 4...
...Metal oxide, 5...Photoresist film, 6...Opening.

Claims (1)

[Claims] 1 A magnetic thin film formed on a substrate, holes of minute area evenly distributed in the magnetic thin film, and holes filled in the holes so as to be at the same height as the surface of the magnetic thin film or slightly higher than the surface. A magnetic recording medium comprising: a metal oxide provided in the magnetic recording medium;