JPH02222760A - Device for cleaning and deburring work - Google Patents
Device for cleaning and deburring workInfo
- Publication number
- JPH02222760A JPH02222760A JP4312889A JP4312889A JPH02222760A JP H02222760 A JPH02222760 A JP H02222760A JP 4312889 A JP4312889 A JP 4312889A JP 4312889 A JP4312889 A JP 4312889A JP H02222760 A JPH02222760 A JP H02222760A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- cleaning
- liquid
- gas
- jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、洗浄液内に置いたワークに超高圧ジェット噴
流液を当ててワークの洗浄・バリ取りを行なうワーク洗
浄・バリ取り装置に関するものである。[Detailed Description of the Invention] (Field of Industrial Application) The present invention relates to a workpiece cleaning/deburring device that cleans and deburrs a workpiece by applying an ultra-high pressure jet liquid to the workpiece placed in a cleaning liquid. be.
（発明の背景）
樹脂封止したＩＣ（集積回路）の製造過程において、リ
ードフレームにボンディングしたＩＣを樹脂封止する際
にパリが発生する。このようなワークに生じたパリを除
去したりワークを洗浄するために、水や洗浄液などの超
高圧ジェット噴流を直接当てることが考えられるが、こ
の場合にはジェット噴流を高圧にしなければならず（９
００〜１５００ Ｋ ｇ ／ ｃ ｍ ２） 、ワーク
を傷めるおそれがある。(Background of the Invention) In the manufacturing process of resin-sealed ICs (integrated circuits), pars occur when the IC bonded to a lead frame is resin-sealed. In order to remove debris or wash the workpiece, it is possible to directly apply an ultra-high pressure jet of water or cleaning fluid to the workpiece, but in this case, the jet must be under high pressure. (9
00 to 1500 Kg/cm2), there is a risk of damaging the workpiece.
そこでワークを洗浄液中に置き、洗浄液上方の空気中か
ら超高圧ジェット噴流（１００〜８００Ｋ ｇ ／ ｃ
ｍ ” ）をワークに向って噴射しつつ走査する方法
が提案された。第７図はこの従来装置を示す図であり、
符号１は洗浄液槽、２はこの中の洗浄液、３はこの洗浄
液内に置かれたＩＣなどのワークである。４は上方から
下向きに洗浄液を噴射するノズルであり、このノズル４
が゛噴射する超高圧ジェット噴流５は洗浄液２の液面に
当って空気を巻き込み、空気の気泡と共にワークに当た
る。この装置によれば、この混入した空気泡がワーク３
に当って急激な圧縮・膨張を繰り返し、いわゆるキャビ
テーションを発生する。また、ジェット噴流５がワーク
３に当たる際の直射力による物理的衝撃も発生する。こ
れらの相乗効果により、洗浄・バリ取り効果が向上する
と考えられる。Therefore, the workpiece is placed in the cleaning liquid, and an ultra-high pressure jet (100 to 800 kg/c) is applied from the air above the cleaning liquid.
A method was proposed in which the workpiece is scanned while being injected with a jet (m'') toward the workpiece. FIG. 7 is a diagram showing this conventional device.
Reference numeral 1 is a cleaning liquid tank, 2 is a cleaning liquid therein, and 3 is a work such as an IC placed in this cleaning liquid. 4 is a nozzle that sprays cleaning liquid downward from above, and this nozzle 4
The ultra-high pressure jet stream 5 ejected hits the surface of the cleaning liquid 2, draws in air, and hits the workpiece together with air bubbles. According to this device, the mixed air bubbles are removed from the workpiece 3.
This causes repeated rapid compression and expansion, resulting in so-called cavitation. In addition, a physical impact is also generated due to the direct force when the jet stream 5 hits the workpiece 3. It is thought that these synergistic effects improve the cleaning and deburring effects.
しかしこの方法は洗浄液の液面上からジェット噴流を当
てねばならず、その配置上の関係からワークに対するジ
ェット噴流の噴射方向設定上の自由度が制限されるとい
う問題があった。このため洗浄・バリ取り能率が悪いと
いう問題があった。However, in this method, the jet must be applied from above the surface of the cleaning liquid, and there is a problem in that the degree of freedom in setting the jetting direction of the jet to the workpiece is limited due to the arrangement thereof. For this reason, there was a problem that cleaning and deburring efficiency was poor.
（発明の目的）
本発明はこのような事情に鑑みなされたものであり、ワ
ークに対するジェット噴流の噴射方向設定の自由度が増
大し、作業能率が向上するワーク洗浄・バリ取り装置を
提供することを目的とする。(Objective of the Invention) The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a workpiece cleaning/deburring device that increases the degree of freedom in setting the jet direction of a jet stream to a workpiece and improves work efficiency. With the goal.
（発明の構成）
本発明によればこの目的は、洗浄液槽内に置いたワーク
に超高圧ジェット噴流液を当ててワークを洗浄・バリ取
りするワーク洗浄・バリ取り装置において、洗浄液槽内
に置かれたワークに洗浄液槽内から超高圧ジェット噴流
液を噴射するノズルと、洗浄液中にあってこの超高圧ジ
ェット噴流液に気体を混入する気体混入手段とを備え、
前記気体混入手段から供給される気体を超高圧ジェット
噴流液と共にワークに当てるようにしたことを特徴とす
るワーク洗浄・バリ取り装置により達成される。(Structure of the Invention) According to the present invention, this object is achieved in a workpiece cleaning/deburring apparatus that cleans and deburrs a workpiece by applying ultra-high pressure jet liquid to the workpiece placed in a cleaning liquid tank. A nozzle for injecting an ultra-high pressure jet liquid onto a washed workpiece from within a cleaning liquid tank, and a gas mixing means for mixing gas into the ultra-high pressure jet liquid in the cleaning liquid,
This is achieved by a workpiece cleaning and deburring apparatus characterized in that the gas supplied from the gas mixing means is applied to the workpiece together with an ultra-high pressure jet liquid.
ここに気体混入手段は、液中を上昇する気体にジェット
噴流を当ててこの気体をジェット噴流に混入させる構成
が可能である。Here, the gas mixing means can be configured to apply a jet stream to the gas rising in the liquid and mix this gas into the jet stream.
またノズル前端に気室を設け、この気室を通るジェット
噴流に気体を混入させるもの、さらにはベンチュリ管に
ジェット噴流を通し、このベンチュリ管の狭窄部に気体
を供給することにより気体を混入するものなどが可能で
ある。In addition, an air chamber is provided at the front end of the nozzle, and gas is mixed into the jet stream passing through this air chamber.Furthermore, gas is mixed in by passing the jet stream through a venturi tube and supplying gas to the narrowed part of this venturi tube. things etc. are possible.
（実施例）
第２図は本発明の一実施例を示す図である。この図で１
０はノズルであり、洗浄液２中に置かれてワーク３に向
うジェット噴流液１２を噴射する。この実施例の気体供
給手段１４はジェット噴流液の下方に位置する送気口１
６と、この送気口１６に空気や不活性ガス（Ｎ、など）
などの気体を送るポンプ１８とを備える。(Example) FIG. 2 is a diagram showing an example of the present invention. In this diagram 1
A nozzle 0 is placed in the cleaning liquid 2 and sprays a jet liquid 12 toward the workpiece 3. The gas supply means 14 in this embodiment is an air supply port 1 located below the jet liquid.
6, and air or inert gas (N, etc.) to this air supply port 16.
A pump 18 for sending gas such as the like is provided.
従って送気口１６から液中を上昇する気泡はジェット噴
流液１２に巻き込まれて細かい気泡となり、ワーク３に
当たる。この時のキャビテーション作用と、ジェット噴
流液１２自身が持つ物理的な直射力とにより、ワーク３
の洗浄・バリ取りが行なわれる。Therefore, the air bubbles rising in the liquid from the air supply port 16 are caught up in the jet liquid 12, become fine air bubbles, and hit the workpiece 3. Due to the cavitation effect at this time and the physical direct force of the jet liquid 12 itself, the workpiece 3
Cleaning and deburring are performed.
第２図と第３図はそれぞれ他の実施例を示す図である。FIG. 2 and FIG. 3 are diagrams showing other embodiments, respectively.
第２図の気体供給手段１４Ａは、ノズル１０の前端にこ
のノズル１０の噴口な囲む気室２０と、この気室２０に
気体を供給するポンプ２２とを有する。この実施例によ
れば気室２０を通過するジェット噴流液２４に気体が混
入し、気体がジェット噴流液によりワーク３に運ばれる
。The gas supply means 14A in FIG. 2 has an air chamber 20 surrounding the nozzle 10 at the front end of the nozzle 10, and a pump 22 for supplying gas to the air chamber 20. According to this embodiment, gas is mixed into the jet liquid 24 passing through the air chamber 20, and the gas is carried to the workpiece 3 by the jet liquid.
第３図の実施例の気体供給手段１４Ｂは、ノズル１０の
前方に置かれたベンチュリ管２６と、このベンチュリ管
２６の狭窄部２８に連通ずる送気管３０とを有する。こ
の送気管３０の他端は大気中に開口している。この実施
例によればジェット噴流液３２が狭窄部２８を通過する
時に発生する負圧により送気管２８から空気をジェット
噴流液３２中に取り込み、この気泡と共にジェット噴射
液３２がワーク３に当たる。The gas supply means 14B of the embodiment shown in FIG. 3 includes a venturi tube 26 placed in front of the nozzle 10 and an air supply tube 30 communicating with the narrowed portion 28 of the venturi tube 26. The other end of this air pipe 30 is open to the atmosphere. According to this embodiment, air is drawn into the jet liquid 32 from the air pipe 28 due to the negative pressure generated when the jet liquid 32 passes through the narrowed portion 28, and the jet liquid 32 hits the workpiece 3 together with the air bubbles.
第４．５．６図はこの装置の使用例を示す図である。第
４図のものは、ワーク３の上方からは第７図に示す従来
装置によりジェット噴流液５を当てる一方、ワーク３の
下面には本発明に係るノズル１０を配置する。第５図の
ものはワーク３の左右両側に本発明に係るノズル１０．
１０を対向配置する。第６図のものは第４．５図のもの
を組合せたものである。なおこれらの図では気体供給手
段は示されていないが、第１〜３図に示した供給手段を
適宜適用すれば良いのは勿論である。Figure 4.5.6 shows an example of the use of this device. In the case shown in FIG. 4, a jet liquid 5 is applied from above the workpiece 3 using the conventional device shown in FIG. 7, while a nozzle 10 according to the present invention is arranged on the lower surface of the workpiece 3. The one in FIG. 5 has nozzles 10 according to the present invention on both the left and right sides of the workpiece 3.
10 are arranged facing each other. The one in Figure 6 is a combination of the ones in Figures 4.5. Although the gas supply means is not shown in these figures, it goes without saying that the supply means shown in FIGS. 1 to 3 may be applied as appropriate.
このように本発明によればワーク３の上面だけでなく側
面や下面からも同時に並行してパリ取り作業を行なうこ
とができ、作業能率が向上する。As described above, according to the present invention, it is possible to carry out the deburring operation not only from the upper surface of the workpiece 3 but also from the side and lower surfaces simultaneously, thereby improving the work efficiency.
（発明の効果）
本発明は以上のように、ノズルを洗浄液中に置き、この
ノズルから噴射される超高圧ジェット噴流液に気体供給
手段から供給される気体を混入してワークに当てるもの
であるから、ワークとノズルとの配置関係の自由度が増
え、ワークの側方や下方からもジェット噴流液を当てて
能率良（ワークの洗浄・バリ取り作業を行なうことが可
能となる。(Effects of the Invention) As described above, the present invention places a nozzle in a cleaning liquid, and mixes the gas supplied from the gas supply means into the ultra-high pressure jet liquid injected from the nozzle, and applies the mixture to the workpiece. This increases the degree of freedom in the arrangement of the workpiece and the nozzle, and enables efficient cleaning and deburring of the workpiece by applying jet liquid from the sides and bottom of the workpiece.
第１〜３図は本発明の実施例を示す図、第４〜６図はそ
の適用例を示す図、第７図は従来装置を示す図である。
である。
１・・・洗浄液槽、
２・・・洗浄液、
３・・・ワーク、
ｌＯ・・・ノズル、
１２．２４．３２・・・ジェット噴流液、１４．１４Ａ
、１４Ｂ・・・気体供給手段。
特許出願人 株式会社 芝浦製作所1 to 3 are diagrams showing an embodiment of the present invention, FIGS. 4 to 6 are diagrams showing an example of its application, and FIG. 7 is a diagram showing a conventional device. It is. 1...Cleaning liquid tank, 2...Cleaning liquid, 3...Work, lO...Nozzle, 12.24.32...Jet jet liquid, 14.14A
, 14B... Gas supply means. Patent applicant: Shibaura Seisakusho Co., Ltd.
Claims (4)
液を当ててワークを洗浄・バリ取りするワーク洗浄・バ
リ取り装置において、 洗浄液槽内に置かれたワークに洗浄液槽内から超高圧ジ
ェット噴流液を噴射するノズルと、洗浄液中にあってこ
の超高圧ジェット噴流液に気体を混入する気体混入手段
とを備え、前記気体混入手段から供給される気体を超高
圧ジェット噴流液と共にワークに当てるようにしたこと
を特徴とするワーク洗浄・バリ取り装置。(1) In a workpiece cleaning/deburring device that cleans and deburrs a workpiece placed in a cleaning liquid tank by applying an ultrahigh-pressure jet liquid to the workpiece, an ultrahigh-pressure jet is applied to the workpiece placed in the cleaning liquid tank from inside the cleaning liquid tank. A nozzle that injects a jet liquid, and a gas mixing means that is in the cleaning liquid and mixes gas into the ultra-high pressure jet liquid, and the gas supplied from the gas mixing means is applied to the work together with the ultra-high pressure jet liquid. A workpiece cleaning/deburring device characterized by:
ら気泡を供給する送気口と、この送気ロへ気体を供給す
るポンプとを備えることを特徴とする請求項（１）記載
のワーク洗浄・バリ取り装置。(2) The gas mixing means includes an air supply port that supplies air bubbles from below the ultra-high pressure jet liquid, and a pump that supplies gas to this air supply port. Workpiece cleaning/deburring equipment.
気室と、この気室に気体を供給するポンプとを備えるこ
とを特徴とする請求項（１）記載のワーク洗浄・バリ取
り装置。(3) The workpiece cleaning/deburring apparatus according to claim (1), wherein the gas mixing means includes an air chamber provided at the front end of the nozzle, and a pump that supplies gas to the air chamber. .
ベンチュリ管と、このベンチュリ管の狭窄部に連通する
送気管とを備え、前記狭窄部に生じる負圧により気体を
超高圧ジェット噴流液に混入することを特徴とする請求
項（１）記載のワーク洗浄・バリ取り装置。(4) The gas mixing means includes a venturi pipe disposed in front of the nozzle and an air supply pipe communicating with the narrowed part of the venturi pipe, and the negative pressure generated in the narrowed part causes the gas to flow into an ultra-high pressure jet jet. The workpiece cleaning/deburring device according to claim 1, wherein the workpiece cleaning/deburring device is mixed into a liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1043128A JP2762098B2 (en) | 1989-02-27 | 1989-02-27 | Work cleaning and deburring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1043128A JP2762098B2 (en) | 1989-02-27 | 1989-02-27 | Work cleaning and deburring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02222760A true JPH02222760A (en) | 1990-09-05 |
| JP2762098B2 JP2762098B2 (en) | 1998-06-04 |
Family
ID=12655206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1043128A Expired - Lifetime JP2762098B2 (en) | 1989-02-27 | 1989-02-27 | Work cleaning and deburring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2762098B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5305361A (en) * | 1992-01-24 | 1994-04-19 | Hitachi, Ltd. | Method of and apparatus for water-jet peening |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916195U (en) * | 1972-03-17 | 1974-02-09 | ||
| JPS4922426A (en) * | 1972-06-22 | 1974-02-27 | ||
| JPS4928671U (en) * | 1972-06-12 | 1974-03-12 | ||
| JPS4982178A (en) * | 1972-12-15 | 1974-08-07 |
-
1989
- 1989-02-27 JP JP1043128A patent/JP2762098B2/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4916195U (en) * | 1972-03-17 | 1974-02-09 | ||
| JPS4928671U (en) * | 1972-06-12 | 1974-03-12 | ||
| JPS4922426A (en) * | 1972-06-22 | 1974-02-27 | ||
| JPS4982178A (en) * | 1972-12-15 | 1974-08-07 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5305361A (en) * | 1992-01-24 | 1994-04-19 | Hitachi, Ltd. | Method of and apparatus for water-jet peening |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2762098B2 (en) | 1998-06-04 |
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