JPH02222802A - Sample fine slider for scan type tunnel microscope - Google Patents

Abstract

PURPOSE:To enable the moving of a sample observing point from one to others by getting an actuator mounting base comprising a permanent magnet attracted on a base to mount a piece-electric actuator thereon. CONSTITUTION:An actuator mounting base 1 and sample base 2 are attracted on a base 4 by a magnetic force to be used. Both the members 1 and 2 use the same permanent magnet material to make weights thereof and contact areas thereof with the base 4 larger in the mounting base 1 than those in the sample base 2 so that an attracting force of the mounting base 1 is stronger than that of the sample base 2. A piezoe-electric actuator 12 gets both the electrodes 122 in contact with each other being short-circuited to be equal in the potential to perform a parallel type operation with a bimorph type actuator in which a potential difference is applied to an elastic metal plate 123 with respect to the potential. Then, when a positive or negative DC voltage is applied to the electrodes 122, the actuator 12 is deformed to displace a free end 12a. Thus, the mounting base 1 receives a driving force and moves through a contact point 2a with the displacement of the free end 12a to move the sample on the sample base 2.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a scanning tunneling microscope sample having a function of minutely moving the sample in order to change the observation point of the sample to be subjected to the scanning tunneling microscope. This invention relates to a micro-sliding device.

(Prior Art) Conventionally, as a sample micro-moving device for this type of scanning tunneling microscope, there have been, for example, the following devices.

(1) An inchworm-like mechanism using the expansion and contraction of a piezoelectric element and electrostatic adsorption with an electrically insulating film interposed (Ch, Gerb
er, G, B1nn1g, H, I'1uchs, 0. M
arti, and H, Rohrer: Rev, sci.
, Instrum, , Vol. 5? , pp. 2
21-224 (1982) ) (2) Mechanisms CD, W, and P in which an elastic metal plate is bent by the expansion and contraction of a piezoelectric element and a support is provided at the end of this elastic metal plate.

Old: 5urface 5ctence, Vol, 181
．． pp, 174-175 (1987) ) (3) Mechanism using expansion/contraction and shear deformation of a piezoelectric element [in, Nakaa
oto+and K, Fujioka: Jpn, J, A
ppl, Phys.

Vol.2? , pp. L123-Ll26 (1988)
) These are all for moving the probe in the (Z) direction perpendicular to the sample surface and bringing the distance between the probe and the sample closer to the tunnel region.

By the way, when observing a sample using such a scanning tunneling microscope, as a result of performing various observations on the sample after mounting the sample, we find that there are some points that are slightly distant from the observation point,
It often happens that observations are made even if the distance or direction to other observation points does not have to be determined accurately.

For this reason, two-dimensional (XY
) Change the two-dimensional scanning range and expand the range of observation points by changing the triangular wave voltage applied to drive the piezoelectric element during scanning, or the bias voltage superimposed on this. Or, they are moving throughout the fixed observation range itself.

In addition, if you want to move beyond the two-dimensional scanning range unique to the piezoelectric element and change to another observation point, you can change the position of the sample under the probe by re-mounting the sample and change the observation point. Ta.

[Problem to be solved by the invention] However, when it is desired to move the observation point of the sample to another observation point, the conventional means of changing the two-dimensional (XY) scanning range or moving the entire area requires the following method. There are some drawbacks.

In other words, even if a probe attached to a cylindrical piezoelectric element or a cross-shaped piezoelectric element is used for two-dimensional (XY) scanning, the possible range of two-dimensional scanning is narrow, and the most structural Easy to use and has high mechanical rigidity (cylindrical piezoelectric element CG capable of three-dimensional scanning, Binnigan D
,P,E,Sm1th:Rev,Sci,Instru
m.

Vol, 57. pp, 1688-1689 (1986
)), a cross-structure piezoelectric element (S, Q), which is said to have good scanning symmetry with respect to the probe (S, Q)),
c, Sci, Technol, A, Vol, 6+I) I
), 440444 (198B) ), but at most 1O
xlO (8M), and it is difficult to move the observation point of the sample outside this range for observation. Moreover, the wider the two-dimensional scanning range is by increasing the voltage value of, for example, a triangular wave voltage applied to a piezoelectric element equipped with a probe for two-dimensional scanning, the lower the horizontal resolution of observation.

In addition, when changing the bias voltage in order to move the observation point of the sample to another point while maintaining high observation resolution, it is necessary to apply an extremely large drive voltage to the piezoelectric element, which is a superimposition of the bias voltage on the voltage for two-dimensional scanning. must be applied. However, there is an upper limit to the drive voltage that can be applied to a piezoelectric element in order to prevent the piezoelectric element from being destroyed, and it is not possible to apply a voltage that exceeds this limit. It is necessary to strengthen the insulation. In addition, there are other drawbacks such as distortion of the observed image of the sample surface due to scanning asymmetry and nonlinearity.

In addition, when remounting the sample, the mounting work is too macroscopic compared to the scale handled by a scanning tunneling microscope, so the observation points after remounting tend to be significantly different. This has been a disadvantage when it is desired to change the observation point to a position a little further away from the current position, such as the complication of having to redo the work many times.

[Means to solve the problem]

The sample micro-sliding device for a scanning tunneling microscope according to the present invention includes a base made of a magnetic material and capable of holding a sample movably, and an actuator mount made of a permanent magnet is attracted onto the base, and the actuator A piezoelectric actuator that moves the sample minutely is attached to the mount.

[For production]

In the present invention, the observation location of the sample on the base can be changed using the piezoelectric actuator.

〔Example〕

First, the basic structure and operation of the present invention will be briefly explained using FIG.

FIG. 1 is a perspective view showing an embodiment of a sample microsliding device for a scanning tunneling microscope according to the present invention.

In the figure, numerals 1 and 2 are an actuator mounting base and a sample stage made of permanent magnets, 11 is a notch provided in the actuator mounting base 1, Ha is a notch starting end which is the outermost part of the notch 11, and llb is a notch start end which is the outermost part of the notch 11. The notch end is the innermost part of the notch 11, 12 is a piezoelectric actuator, 12a is a free end of the piezoelectric actuator 12 located on the notch starting end 11a side, and 12b is located on the notch end 11b side and is attached to this part. Fixed end of piezoelectric actuator 12, 1
21 is a piezoelectric material, 122 is two electrodes for operating the piezoelectric actuator 12, 123 is an elastic metal plate that also serves as another electrode for operating the piezoelectric actuator 12, 3 is a sample, and 4 is an actuator made of a magnetic material. The base 2a holds the mounting table 1 and the sample table 2, and 2a is the sample table 2 on which the sample 3 is placed, and the free end 1 of the piezoelectric actuator 12.
This is the contact point of 2a.

The actuator mount 1 and the sample stage 2 are used by being magnetically attracted onto the base 4. Both members 1 and 2 are made of the same permanent magnet material, and the weight and the contact area with the base 4 are made larger for the actuator mount 1 than for the sample mount 2, so that the attraction force of the actuator mount 1 is greater than that of the sample mount. The adsorption force is stronger than 2.

The cutout 11 is, for example, a rectangular parallelepiped actuator mounting base l.
It is formed into a U-shape by deforming it.

The shape of the sample stage 2 on which the sample 3 is placed is, for example, a rectangular parallelepiped.

The piezoelectric material 121 has a rectangular plate shape, and electrodes 122 are formed on both sides having a large area. This piezoelectric material 121 is
The electric field direction of the piezoelectric material 12 is perpendicular to the electrode 122 surface (Y) direction.
Polarization processing is performed with the longitudinal (X) direction of 1 as the strain direction.

The piezoelectric actuator 12 is a bimorph actuator that short-circuits the picture electrodes 122 to have the same potential and applies a potential difference to the elastic metal plate 123 with respect to this potential, and performs a parallel operation. When no voltage is applied to the electrode 122, the piezoelectric actuator 12 has a shape as shown by the solid line.
A is kept in contact with the contact point 2a.

Here, when a positive or negative DC voltage is applied to the electrode 122, the piezoelectric actuator 12 is deformed as shown by the broken line, and the free end 12a is displaced as shown by the arrow P. Therefore, the actuator mount 1 has this free end 12a.
With the displacement of , a driving force is applied via the contact point 2a, and the sample on the sample stage 2 moves as shown by the arrow S.

Under the condition that one end is fixed as shown in FIG.
When + is the piezoelectric constant 1, the thickness of the elastic metal plate 123 is rs, and the applied voltage is ■, the displacement U of the free end 12a of the non-negative commercial
0 is 11o=6d! +(L/T)”(1+Ts/T)V
α(1). Here, α is the nonlinear correction coefficient and α#
It is l.

For example, L = 5 w, W = 2 w, T =
0.5 m, d31- 200 XIO” (se/V)
, Ts = 0.11 m, the displacement 1 uo per 1 cm of applied voltage when α-1 is approximately 0.14 μm, and when operated at an applied voltage of 100 V, the free end 12a is 14 μm.
Displaced by.

The generated force F when the amount of displacement of the free end 12a is completely restrained is F b =6d+(L/T)''(1+Ts/T)V
α/Sn (21. Here, S7 is the compliance of the bimorph and the Young's modulus of the piezoelectric material 21 (
cz) t, and the electromechanical coupling coefficient is 31, then S, = (4/W) (L/T)''/ ((C, I) '
(1-+1)) (3).

For example, (Cz) ' 6 X 10'. (N/m)
, when 3+ = 0.35, the generated force F per 1 cm of applied voltage is approximately 0.4 g, and becomes 40 g at an applied voltage of 100 V.

These displacement u0 and generated force F were also confirmed through experiments using a bimorph piezoelectric actuator having the various constants described above.

Anisotropic Alnico 8 was used as the magnetic material for the actuator mounting base 1, and Imphal was used as the material for the base 4, and the surface roughness of the contacting surfaces of both was 0.83 (JIS B
0601), the weight of the actuator mount 1 is Ig, and its bottom area, that is, the contact area with the base 4 is 2.
5 m'', the suction force of the actuator mount 1 was 45 g in the direction of sliding the actuator mount 1 on the base 4.

Therefore, the weight of the sample stage 2 including the sample 3.

If the bottom area is, for example, 172 or less of the weight and bottom area of the actuator mounting base 1, the sample stage 2 (sample 3 ) can be slid.

That is, an actuator mount 1 on which a piezoelectric actuator 12 is attached, and a sample mount 2 on which a sample 3 is placed.
By configuring a sample micro-sliding mechanism, it is possible to move the sample from one observation point to another even if the distance or direction is somewhat inaccurate.

Next, the structure of the present invention will be explained in detail with reference to the embodiment shown in FIGS. 2(al) and (bl).

FIGS. 2(a) and 2(b) are perspective views showing a sample micro-sliding device for a scanning tunneling microscope according to the present invention and a perspective view showing an example of its use. are given the same reference numerals, and detailed explanation will be omitted.

In the figure, what is indicated by the reference numeral 100 is a micro-sliding mechanism;
124 is an adhesive for fixing the fixed end 12b of the piezoelectric actuator 12 to the notch end 11b of the actuator mounting base 1; 125 is an adhesive from one of the electrodes 122 and the elastic metal plate 123 for applying voltage to the piezoelectric material 121; The lead wire 126 to be taken out is the lead wire 125 cut out from the notch 11.
This is a through hole for drawing out the space. This through hole 1
Adhesive 124 is filled in 26 and one end of lead wire 125 is fixed. Reference numeral 127 denotes a short-circuiting metal film 128 for short-circuiting the two electrodes 122 on the free end 12a side of the piezoelectric actuator in order to make the piezoelectric actuator 12 perform a parallel operation as a bimorph type actuator.
129 is an insulating camp made of an electrode insulator formed on the short-circuiting metal film 127, and 129 is a neutral solder core.

In the same figure (bl), 5 is a conductive adhesive that fixes the sample 3 on the sample stage 2 and electrically connects it, and 6 is a probe for detecting tunneling current.

The material of the actuator mounting base 1 and the sample stage 2 is, for example, anisotropic alnico 8 (81, Ni, Co, Ti, F).
e) Use precipitation hardened magnet alloys such as e). This magnetic property has a coercive force (He) of 110 (kA/m), residual magnetization (
Br) 0.9T, maximum energy product (814), 4
0 (kJ/rrr), and the piezoelectric actuator 12 can be attracted to the base 4 via the actuator mount 1. In addition, since Alnico 8 has electrical conductivity, it is possible to electrically connect the sample 3 and the base 4 via the conductive adhesive 5, and the micro-sliding mechanism 100 of the scanning tunneling microscope
It is suitable as

The outermost shape of the actuator mounting base l is a rectangular parallelepiped. For example, its dimensions are 5 cranes in height, 10 cranes in length, and 8 meters in diameter.
The weight is Alnico 8 (^l, Ni.

In the case of Co, Ti, Fe), it is approximately 3 g. Notch 1
1 is formed by grinding an actuator mounting base l whose outermost shape is a rectangular parallelepiped into a U-shape. This notch 11 has a width of 1 square and a length of 7 f in the length direction of the actuator mounting base 1, for example.
It is cut with l.

The dimensions of the piezoelectric actuator 12 are: total length 10 mm, width 2
The crane has a thickness of 0.5 m, with a total length of 5 cranes being the movable part, and the remaining 5N being the fixed part attached to the actuator mounting base 1. Therefore, the piezoelectric actuator 12 is mounted so as to be housed between the upper and lower surfaces of the actuator mounting base l, and its height is smaller than the height of the rectangular parallelepiped actuator mounting base 1, so that when it is mounted on the base 4, there is no gap. The dimensions are such that it occurs.

As for the material of the piezoelectric material 121, the piezoelectric strain constant dffl=
200
Os ) and an elastic metal plate 1. It is formed into a rectangular plate shape with .

The electrodes 122 are formed by coating both large-area surfaces of the piezoelectric material 121 with silver (Ag) baking 1 or nickel (Ni) electroless plating with a thickness of, for example, 3 μm.

The elastic metal plate 23 is made of phosphor bronze (with a thickness of 0.1 m, for example).
It is made of a spring material such as Sn, P, Cu).

The adhesive 124 is thixotropic (Lh) to prevent dripping.
ixotropic) and an aromatic amine-based curing agent.

The lead wire 125 has a number of strands/wire diameter of 710.05 mm.
PTFE (Polytetrafluor) is added to the mild steel stranded wire.
outer diameter 0.3 coated with insulation
It belongs to fi. One of these lead wires 125 is connected to the electrode 1
22, and the other one is a neutral glue solder 129 between the elastic metal plate 123 and the fixed end 12b side of the piezoelectric actuator 12.
electrically connected by. And lead wire 125
One end is drawn out of the space of the notch 11 from the through hole 126, and is fixed in the through hole 126 filled with adhesive 124.

The short-circuiting metal film 127 is coated over the picture electrode 122 by baking Ag or electroless plating with nickel (Ni) so as not to come into contact with the elastic metal plate 123 .

The insulating cap 128 is connected to the short-circuiting metal film 127 . Contact point 2at sample stage 2. This is an electrical insulator formed on the shorting metal film 127 to prevent electrical leakage to the sample 3 via the conductive adhesive 5. This is done by coating the shorting metal film 127 with a material having good electrical insulation, such as epoxy resin for electronic equipment.

The sample stand 2 has a lower weight than the actuator mounting stand 1.
The contact area with the base 4 is reduced.

For example, it uses Alnico 8 in the shape of a rectangular parallelepiped, and has dimensions of height 2, length 5, width 4, and its weight is 1/9 of the actuator mounting base 1. The contact area is 1/3. Actuator mounting base 1. The surface roughness of the surface where the sample stage 2 and the base 4 contact each other is, for example, about BS (JIS B 060
1) It is Toshishita.

Sample 3 is, for example, an epoxy resin in which silver (Ag) powder is dispersed and mixed, and has a volume resistance of 104 (Ω value) and an ion concentration of Na.
2 (ppm), has good conductivity, and has a shearing force of 320 (k).
g/cj) and is fixed onto the sample stage 2 with a conductive adhesive 5 having a large adhesive force.

The material of the base 4 has a small coefficient of thermal expansion, so it is useful as a constituent material of scanning tunneling microscopes, and it is also a ferromagnetic material, for example, a material with a coefficient of thermal expansion of 2xlOh (1/'c) at a temperature of 30 to 100°C. ) below Imphal (Pa:
64%, Ni: 32%, Co: 5%) or temperature 3
The thermal expansion coefficient is 1.3 xlO' (1/
'c) Super Imphal (Fe: 63%, Ni
:32%, Co:5%).

The probe 6 is formed into a sharp tip by machining or electropolishing the tip of a tungsten (-) or platinum-iridium alloy (Pt: 90%, Ir: 10%) wire with a diameter of 0.25 mm. This probe 6 is attached to one end of a cylindrical piezoelectric element (not shown), and its tip is three-dimensional (XYZ
) is configured to be able to scan.

Scanning of the sample microsliding device of the scanning tunneling microscope configured as described above is performed as follows.

First, the sample stage 2 is attracted onto the base 4 so that the sample 3 is positioned below the tip of the probe 6.

Next, place the actuator mounting base 1 on the sample stage 2, and while observing the distance between both members 1 and 2 using a stereomicroscope, mount the actuator mounting base 1 on the sample stage 2 with the tip of a pisset, or for precision, use the tip of a differential micrometer. Move and squeeze. Then, the most advanced insulating cap 128 of the piezoelectric actuator 12 and the sample stage 2 are kept in contact with each other, or placed in a state immediately before contact.

After that, normal scanning as a scanning tunneling microscope is performed. That is, a bias voltage is applied between the sample 3 and the probe 6 to obtain a tunnel current, and the probe 6 is moved in two dimensions (
XY) While scanning, the tunnel current is constant, that is, the probe 6
The tip of the probe 6 is controlled in the Z direction so that the distance between the tip and the surface of the sample 3 is constant. The surface shape of the sample 3 is observed by displaying the uneven state using, for example, a CRT using these XY constant scanning and Z direction control amounts.

When it is desired to observe the surface shape of the sample 3 beyond the two-dimensional (XY) scanning dimension range, a DC voltage is applied to the lead wire 125 with an electric polarity that causes the free end 12a of the piezoelectric actuator 12 to displace to the right in the figure. , displaces the insulating cap 128 together with the free end 12a in the rightward direction of arrow P. Then, actuator mounting base 1 will not move, but
The sample stage 2 receives a driving force through the contact point 2a with the insulating camp 128, slides on the base 4, and the sample 3 moves together with the sample stage 2, so that the position of the sample 3 directly below the tip of the probe 6 is adjusted. Arrow S
move in the direction. - That is, the observation point of the sample 3 can be moved.

Here, by changing the voltage applied to the piezoelectric actuator 12, for example, from O to 100v, the insulating cap 128
can be displaced by 0-14μ so.

Normally, the amount of displacement of the sample 3 located directly below the tip of the probe 6 has a rotational component, so it is not the amount of displacement of the insulating cap 128 itself. However, even if the displacement decreases at a rate of 1/100, 0 to 14 μs + (0 to 14
0n*), and if you want to identify and observe individual atomic arrangements (atomic spacing is approximately a few tenths of a nanometer) with a display device such as a CRT, and observe a point a little far from this initial observation position, you can move it sufficiently. becomes.

Note that if it is difficult to keep the insulating cap 128 at the leading edge of the piezoelectric actuator 12 in contact with the sample stage 2 or in a state immediately before contact,
A DC voltage is applied to the lead wire 125 with an electric polarity such that the free end 12a is displaced to the left in the figure, and the insulating cap 128 is displaced to the left, opposite to the direction of arrow P, so that the distance between the two can be easily determined. Leave it in place.

In addition, if the insulating cap 128 and the sample stage 2 remain in contact and there is a risk of creep of the piezoelectric actuator 12 or drift of the observation position due to temperature changes,
After applying a DC voltage to the lead vA 125 with an electric polarity that displaces the insulating cap 128 to the right and causing it to be displaced, applying a DC voltage to the lead wire 125 with the opposite electric polarity to displace the insulating cap 128 to the left, It is sufficient to cut off contact between the insulation camp 128 and the sample stage 2.

Furthermore, in this embodiment, as shown in FIG. By pressing the sample 3, the function of sample micro-sliding can be exhibited.As an example of this application, for example, as shown in the figure, the upper surface S1 is mirror-finished, and the lower surface S2 has an average grain size of 5.
Dimension a = 12m, which is the surface lapped by the μ layer of abrasive material
, b=3u+, c=0.7 Sample 3 of Tsuru's silicon piece is used. In this sample 3, the surface roughness of the Imphal base 4 was 0. It is placed on the table surface S of the BS. Then, point A, which is d = 3 m from the back end of the sample 3, is held at the tip of the hair pin-shaped sample holder 7 made of piano wire with a diameter of 0.511 by approximately 8.
When pressing with a force of 0 g and applying a driving force of Fa = 10 g to point F, which is e w 3 am away from point A, sample 3
easily slid around point A. Therefore, by operating the exemplary piezoelectric actuator 12 with an applied voltage of 25 V or more, the generated force is increased by the insulating cap 128.
The sample 3 can be sufficiently slid and moved via the contact point 3a. Here, the displacement at point F causes the sample 3 to rotate around point A, but does not impede the effectiveness of the sample micro-sliding mechanism 100 as described above.

Furthermore, if the size of the sample 3 is small and the space around the tip of the probe 6 is wide, the sample stage 2 can be moved as shown in FIG. 3(C).
A sample holder 7 is provided on the top, and the sample 3 is held by this sample holder 7.
is pressed and fixed to the sample stage 2, and can perform the function of micro-sliding the sample. In this embodiment, it is not necessary to fix the sample 3 on the sample stage 2 with the conductive adhesive 5, and the sample 3 can be attached and detached using the sample holder 7, so that the sample 3 can be easily replaced.

FIG. 4 is a partial sectional view and a perspective view showing another embodiment.

In this embodiment, by changing the surface roughness of the bottom surface of the actuator mount 1, the bottom surface of the sample stage 2, and the top surface of the base 4, the coefficient of dynamic friction and the attraction force due to magnetic force can be changed. In the example shown in FIG. 2(a), the actuator mounting base
The surface roughness of the bottom surface is 2s. Figure (a)
Although one set is illustrated here, multiple actuator mounting stands 1 and sample stands 2 with different bottom surface roughnesses are used.
If these are prepared and selected appropriately, an appropriate combination corresponding to the dimensions and weight of the sample 3 can be obtained.

In addition, in the example shown in FIG. 6('b), a plurality of actuator mounts l with different surface roughnesses are suctioned on the surface of the base 4 directly under the probe 6 so that the surface roughness is 4s I + 4sz * 4sx + 4sa. is provided. In this example, by selecting an appropriate set of surface roughness on the actuator mount l, the bottom surface of the sample stage 2, and the surface of the base 4, the weight of the sample 3 placed on the sample stage 2 can be reduced, for example. When the size is large, optimum conditions can be obtained such that the actuator mount 1 can be firmly fixed on the base 4 and the sample stage 2 can easily slide on the base 4.

FIG. 5 is a perspective view showing another embodiment. In this embodiment, the notch II of the actuator mounting base 1 is
As shown in the figure, there is an opening, and as shown in the same figure, there is no opening. The piezoelectric actuator 12 is installed so as to be housed between the upper and lower surfaces of the actuator mount l, and its outer diameter is set to a size that creates a gap when the actuator mount 1 is attracted to the base 4. . If the contact area of the actuator mount 1 with the base 4 becomes small and the suction force of the actuator mount 1 to the base 4 weakens, the material of the actuator mount 1 may be changed to a material such as rare earth cobalt fa stone. It is desirable to form it from a strong magnetic material.

According to this embodiment, the piezoelectric actuator 12 can be easily attached to the actuator mounting base l. Further, it is possible to easily remove magnetic dust that has been attracted to the actuator mounting base 1 in the vicinity of the notch starting end 11a and the proximal portion 11c, which obstructs the displacement operation of the piezoelectric actuator 12.

FIG. 6 is a perspective view showing another embodiment. In this embodiment, the surface side of the base 4 as shown in +8) in the same figure.

The yX magnetic plate 14 is provided on the actuator mounting base 1 except for the movable part notch starting end 11a of the piezoelectric actuator 12 and the vicinity of the through hole 1262. This magnetic shielding plate 14 is made of, for example, Mumetal (Cu, C
High permeability material such as Ni), thickness 0.1~0.
Use the 2fi one. Further, the dimensions are set such that a gap is formed between the lower end of the magnetic shielding plate 14 and the base 4 when the actuator mounting base 1 is attracted to the base 4. Then, the magnetic shielding plate 14 and the actuator mounting base 1
are separated and fixed by an adhesive 124. In this embodiment, since the magnetic field lines from the actuator mounting base 1 can be shielded by the magnetic shielding plate 14, for example, the structure 2 explained in FIGS. 3 is placed directly on the surface of the base 4, the influence of the magnetic field on the sample 3 can be avoided. Further, adsorption of dust to the actuator mounting base 1 can also be prevented. moreover,
As shown in Figure 1), by surrounding the sample stage 2 with a magnetic shielding plate 4 and mounting the sample 3 on the magnetic shielding plate 14, the influence of the magnetic field can be reduced even when the sample stage 2 is used. be able to.

FIG. 7 is a partial plan view showing another embodiment.

In this embodiment, as shown in figure fa), in the insulating cap 128 attached to the piezoelectric actuator 12, the portion that comes into contact with the sample stage 2 has a recess 128a shaped like a U-shape or a Y-shape when viewed from above, for example. is formed. This recess 128a is used by placing the corner of the sample stage 2 inside it. In FIG. 2B, a recess 128a and a convex portion 2a+ facing inward are formed in a part of the sample stage 2.

In the same figure (C), the insulating cap 12B is the sample stage 2.
A cylindrical and a spherical concave portion 128a! A cylindrical, spherical protrusion 2at facing into the recess 12Baz is formed in a part of the sample stage 2. In these embodiments, the play between the actuator mounting base l and the sample stage 2 can be set to be small. In addition, in these examples, the convex portion and the concave portion are connected to the sample stage 2.
Although an example in which this is formed on the insulating cap 128 is shown, the same figure (
They may be replaced as shown in d). In addition, if a machinable ceramic material such as Macor, which is an electrical insulator and non-magnetic material, is used as the material of the insulating cap 128, the convex portion and the concave portion can be formed on the outer diameter of 2 to 3 mm. The insulating cap 128 can be easily manufactured by surface finishing. Further, as shown in FIG. 2(d), for example, perfluoropolyether (Perf.
The displacement of the insulating cap 128 can be smoothly transmitted to the sample stage 2 by interposing the lubricant 128L made of a binder of 100% polyurethane and a thickener of fluororesin.

In the embodiments described above, a plate-shaped bimorph type piezoelectric actuator 12 that can easily obtain a relatively large displacement was used as the piezoelectric actuator 12, but the present invention may be applied to other laminated type piezoelectric actuators 12, or a bar type piezoelectric actuator 12.

The piezoelectric actuator 12 may be a piezoelectric actuator 12 using a cylindrical piezoelectric material 121 in which the displacement direction of expansion and contraction is in the direction of the central axis of the rod 1 cylinder. Even in these cases, the sample 3 can be caused to minutely slide by displacement of the insulating cap 128. .

〔Effect of the invention〕

As explained above, according to the present invention, the base is formed of a magnetic material and holds the sample in a movable manner, and the actuator mount made of a permanent magnet is attracted onto the base.
Since a piezoelectric actuator that moves the sample minutely is attached to this actuator mount, it is possible to move the observation point of the sample to another observation point while maintaining high observation resolution. In addition, since the driving voltage applied to the piezoelectric element for two-dimensional scanning can be kept within the upper limit, there is no need for special reinforcement of electrical insulation for the piezoelectric element, and asymmetry and nonlinearity of scanning can be avoided. No distortion or the like appears in the observed image of the sample surface. Furthermore, since the actuator mounting base is attached by suction, it can be easily attached. Furthermore, since the piezoelectric element is used for microscopic sliding, microscopic sample movement is possible.
There is less need to re-attach the sample. In addition, since the displacement direction of the piezoelectric actuator can be changed by changing the electrode polarity,
Setting the distance between the sample and piezoelectric actuator.

Mechanical separation is easy.

[Brief explanation of the drawing]

Fig. 1 is a simplified perspective view of an embodiment of the sample micro-sliding device for a scanning tunneling microscope according to the present invention, and Fig. 2+
8) and (b) are perspective views showing a sample microsliding device for a scanning tunneling microscope according to the present invention and perspective views showing examples of its use, and FIGS. 3 to 7 show other embodiments and application examples. They are a perspective view and a partial sectional view. 1...Actuator mounting stand, 2...Sample stand,
3...sample, 4...base, 12...piezoelectric actuator. Agent Masuo Oiwa Figure 1 Figure A Figure 3 (Q) Figure (α) (b) Figure (a) (b) Figure (b) Written amendment to figure procedures (voluntary) 1. Special indication of the case Application No. 63-224205 2, Name of the invention, Sample micro-sliding device for scanning tunneling microscope 3, Person making the amendment 5, Column 6 for detailed explanation of the invention in the specification to be amended, Contents of the amendment + 11 Specification 8 Correct "No negative business" on page 18 line to "No load". (2) “r-200XIO” in the following part of the same book.
Correct J to r-200Xl0-” J. Page 9, line 4, page 13, line 16. (3) Correct “μtsuru” on page 9, line 6 of the same book to “μm”. (4) "Elastic metal plate, 23" on page 13, line 18 of the same book is corrected to "elastic metal plate 123." (5) "Elastic metal plate 23" in line 4 on page 14 of the same book is corrected to "elastic metal plate 123." (6) “8S” on page 15, line 18 of the same book is ro, 8sJ
and correct it. (7) rlO'J on line 20 of the same page in the same book as rlo-'J
and correct it. (8) Same book, page 16, line 1, rNa 2 (ppm) J
rNa”2 (ppm), Cj!-3<pps+)
Correct it with J. Correct r2 Same book, same page, line 8 r (Fe: 63%, Ni: 32%, C
o:5 is corrected as r (Fe: 64%, Ni: 36%). Same book, same page, line 9 rl, 3 xlO” (1/ 'c) j
is corrected as xlO-”(/”c) J. Same book, page 18, line 17 - Correct ``O~14'' in line 17 to [0~. "2 αψ%)" [1,3 0.14J or more

Claims (1)

[Claims] A base made of a magnetic material for movably holding a sample is provided, an actuator mount made of a permanent magnet is attracted to the base, and a piezoelectric actuator for minutely moving the sample is attached to the actuator mount. A specimen micro-sliding device for a scanning tunneling microscope featuring: