JPH02223009A - magnetic recording medium - Google Patents
magnetic recording mediumInfo
- Publication number
- JPH02223009A JPH02223009A JP1870990A JP1870990A JPH02223009A JP H02223009 A JPH02223009 A JP H02223009A JP 1870990 A JP1870990 A JP 1870990A JP 1870990 A JP1870990 A JP 1870990A JP H02223009 A JPH02223009 A JP H02223009A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic recording
- film layer
- recording medium
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
(技術分野)
本発明はFeを使用した金属薄膜型の磁気記録媒体の改
良に関する。DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to improvement of a metal thin film type magnetic recording medium using Fe.
(従来技術)
非磁性基体上に、真空蒸着、スパッタリングイオンブレ
ーティング等の手段により強磁性金属の薄膜を形成した
、いわゆる金属薄膜型の磁気記録媒体は、通常の、バイ
ンダーを使用する型の磁気記録媒体にくらべて記録密度
を高くとることができる他、種々の利点を有しているた
め、実用化への努力が払われている。(Prior art) A so-called metal thin film type magnetic recording medium, in which a thin film of ferromagnetic metal is formed on a nonmagnetic substrate by means such as vacuum evaporation or sputtering ion blating, is a magnetic recording medium that uses a binder. Efforts are being made to put it into practical use because it has various advantages in addition to being able to achieve higher recording density than recording media.
このような金属薄膜型の磁気記録媒体を作成するのに使
用される金属としてはFa、 Co5Ni、Cr等の強
磁性金属や、これら強磁性金属を主体とする合金が使用
されることが多いが、その中でもCoの単独あるいはC
oを主体とする合金は磁気記録媒体として高性能である
のでしばしば使用される。Ferromagnetic metals such as Fa, Co5Ni, and Cr, and alloys mainly composed of these ferromagnetic metals are often used as metals to create such metal thin film type magnetic recording media. , among which Co alone or C
O-based alloys are often used as magnetic recording media because of their high performance.
一方、上記の強磁性金属のうちでもFeは、C。On the other hand, among the above-mentioned ferromagnetic metals, Fe is C.
やGoの合金にくらべて材料費が安り、磁気記録媒体と
したときにS/N比がすぐれており、しかも歪率が低い
等の種々の利点がある反面、抗磁力(llc)の膜厚依
存性が大きく、かつ、角型比が小さく、しかも、耐腐食
性が充分でない欠点を有している。Although it has various advantages such as lower material cost, better S/N ratio when used as a magnetic recording medium, and lower distortion rate than alloys of It has the drawbacks of large thickness dependence, small squareness ratio, and insufficient corrosion resistance.
(発明の目的)
従って、本発明の目的は、安価である強磁性金属Feの
抗磁力の膜厚依存性の点を考慮し、所望の磁気的出力を
確保するとともに、角型比、抗磁力の劣化を少なくする
ためにFe薄膜層を2層以上にすること、及びFeが上
記の必要な膜厚を得たとき、Feの角型比、抗磁力等の
特性低下を補うため強磁性体金属であるCoの単独ある
いはCoを主体とする合金を中間層として設けることに
より、Fe自体の有する上記特性低下を解消し、Feの
利点を最大限に引き出した磁気記録媒体を提供すること
にある。(Objective of the Invention) Therefore, the object of the present invention is to take into account the film thickness dependence of the coercive force of the inexpensive ferromagnetic metal Fe, secure the desired magnetic output, and improve the squareness ratio and coercive force. In order to reduce the deterioration of the Fe thin film layer, it is necessary to have two or more Fe thin film layers, and when the above-mentioned required Fe film thickness is obtained, a ferromagnetic material is used to compensate for the decrease in characteristics such as the squareness ratio and coercive force of Fe. The object of the present invention is to provide a magnetic recording medium that eliminates the above-mentioned deterioration of the characteristics of Fe itself and maximizes the advantages of Fe by providing the metal Co alone or an alloy mainly composed of Co as an intermediate layer. .
(発明の構成)
本発明の磁気記録媒体は、非磁性基体上に2以上のFe
薄膜層と、各FeFiflu層間に挿入されたCoの単
独あるいはCoを主体とする合金の薄膜層とが積層され
ていることを特徴とするものである。(Structure of the Invention) The magnetic recording medium of the present invention has two or more Fe layers on a non-magnetic substrate.
It is characterized in that a thin film layer and a thin film layer of Co alone or an alloy mainly composed of Co inserted between each FeFiflu layer are laminated.
以下、図面を用いながら本発明の詳細な説明すると、第
1図に示すように本発明の磁気記録媒体1は例えば非磁
性基体2上に第1のPe薄膜層3、coの単独あるいは
Coを主体とする合金薄膜層4、および第2のFef!
WA115の各層が順次積層されている。この第1図の
例では2つのPe薄膜層と、2つの薄膜層の間に挿入さ
れたCoの単独あるいはCoを主体とする合金薄膜層と
からなっているが、Fe薄膜層を3層以上形成し、各F
e ’iii @li間にGoの単独あるいはCoを
主体とする合金薄膜層を挿入してもよい。Hereinafter, the present invention will be described in detail with reference to the drawings. As shown in FIG. The main alloy thin film layer 4 and the second Fef!
Each layer of WA 115 is sequentially laminated. The example shown in Fig. 1 consists of two Pe thin film layers and a Co single or Co-based alloy thin film layer inserted between the two thin film layers, but three or more Fe thin film layers are used. form each F
A thin film layer of Go alone or an alloy mainly composed of Co may be inserted between e 'iii @li.
上記における非磁性基体2としては耐熱性を有する合成
樹脂フィルム、例えばポリエチレンテレフタレートフィ
ルム、ポリイミドフィルムもしくはポリカーボネートフ
ィルム等、金属箔、例えばアルミニウム箔、非磁性二・
ンケル箔、銅箔もしくはステンレス箔等、或いはガラス
やセラミックを用いることができる。これらのうち、磁
気記録媒体をテープ状に製造する際には耐熱性、抗張力
、及び寸法安定性の点で厚み4μ〜25μのポリエチレ
ンテレフタレートフィルムを用いるとよい。The non-magnetic substrate 2 mentioned above may be a heat-resistant synthetic resin film such as a polyethylene terephthalate film, a polyimide film or a polycarbonate film, a metal foil such as an aluminum foil, or a non-magnetic dielectric film such as a polyethylene terephthalate film, a polyimide film or a polycarbonate film.
It is possible to use copper foil, copper foil, stainless steel foil, etc., or glass or ceramic. Among these, when producing a magnetic recording medium in the form of a tape, it is preferable to use a polyethylene terephthalate film having a thickness of 4 μm to 25 μm in terms of heat resistance, tensile strength, and dimensional stability.
第1のFe薄膜層と第2のFe薄膜層とは原則的には同
様の条件のものである。また、第1のFsEl膜層と第
2のFe薄膜層を設ける理由としては、Fe薄膜の場合
、所望の磁気的出力を得るにはある一定の膜厚(少なく
とも500Å以上、望ましくは2000Å以上)が必要
であり、Fe薄膜層を一度に形成すると、所望の磁気的
出力を出す膜厚は確保されるが、角型比、抗61力等の
特性で良い結果は得られないからである。その第1及び
第2のPa薄膜層は、Feを蒸着源とする蒸着等の手段
により設けることができ、所望の磁気的出力を得るため
の膜厚を確保しながら、角型比、抗磁力等の特性を満足
させる手段を用いる。The first Fe thin film layer and the second Fe thin film layer are basically under similar conditions. Furthermore, the reason for providing the first FsEl film layer and the second Fe thin film layer is that in the case of an Fe thin film, a certain film thickness (at least 500 Å or more, preferably 2000 Å or more) is necessary to obtain the desired magnetic output. This is because, if the Fe thin film layer is formed all at once, a film thickness that produces the desired magnetic output can be ensured, but good results cannot be obtained in terms of characteristics such as squareness ratio and resistive 61 force. The first and second Pa thin film layers can be provided by means such as vapor deposition using Fe as a vapor deposition source, and while ensuring the film thickness to obtain the desired magnetic output, the squareness ratio and coercive force are Use means that satisfy the following characteristics.
すなわち、−度に所望の膜厚を形成せずに、上記角型比
、抗磁力等の特性の劣化しない範囲の膜厚を2回に分け
て形成する方法を用いる。また蒸着を行う際、被蒸着基
材の法線と金属蒸着流とのなす角度を0°よりも大きく
とって、いわゆる斜方蒸着とするのがよい。本発明者等
の研究によれば、前記の角度が45°〜80°の間で形
成されたFe薄膜は膜厚が200Å〜2000人である
とき、より好ましくは300Å〜1000人であるとき
にその磁気特性がすぐれていることが判明した。ここで
200人未満では薄膜の形成が未熟で充分な磁束が得ら
れず、その上、抗磁力の向上を左右する因子の1つであ
る形状異方性効果の働きが小さいので抗磁力が小さいし
、又、2000人を越えるとFefjl膜の傾斜柱が成
長しすぎ、隣接する傾斜柱の頂上どうしが癒着してしま
いいずれにせよ、上記の範囲外では角型比・抗磁力共低
下するものである。That is, instead of forming the desired film thickness in one step, a method is used in which the film thickness is formed in two steps without deteriorating the characteristics such as the squareness ratio and coercive force. Further, when performing vapor deposition, it is preferable to set the angle between the normal line of the substrate to be vapor-deposited and the metal vapor deposition flow to be larger than 0°, so as to perform so-called oblique vapor deposition. According to the research conducted by the present inventors, the Fe thin film formed at the angle between 45° and 80° has a thickness of 200 Å to 2000 Å, more preferably 300 Å to 1000 Å. It was found that its magnetic properties are excellent. If the number of people is less than 200, the thin film is not formed properly and sufficient magnetic flux cannot be obtained, and furthermore, the shape anisotropy effect, which is one of the factors that affects the improvement of coercive force, has a small effect, so the coercive force is small. However, if the number exceeds 2,000, the tilted pillars of the Fefjl film will grow too much, and the tops of adjacent tilted pillars will coalesce, and in any case, outside the above range, both the squareness ratio and coercive force will decrease. It is.
上記第1のFe薄膜層と第2のFe薄膜層の間の中間層
であるCoの単独あるいはCoを主体とする合金薄膜層
は、Fe薄膜層を分離する中間層となる。また、この時
併せて強磁性体金属であるCoの単独あるいはCoを主
体とする合金のもつ良い磁気特性(抗磁力及び角型比が
大きい等)が作用し、記録層全体の磁気特性が向上する
ため、第1のPe薄膜層と第2のFe薄膜層の間にこの
C。The intermediate layer between the first Fe thin film layer and the second Fe thin film layer, which is made of Co or an alloy thin film layer mainly composed of Co, serves as an intermediate layer that separates the Fe thin film layers. In addition, at this time, the good magnetic properties of the ferromagnetic metal Co alone or in an alloy mainly composed of Co (such as high coercive force and squareness ratio) come into play, improving the magnetic properties of the entire recording layer. Therefore, this C is formed between the first Pe thin film layer and the second Fe thin film layer.
の単独あるいはCoを主体とする合金中間層を設ける。An intermediate layer of Co alone or an alloy mainly composed of Co is provided.
さらに、上記のCoの単独あるいはGoを主体とする合
金薄膜層はCoの単独の他、Go−Ni、Go−CrS
Co−Cu、 co−Au、 Co −Y、、Co−L
a、 C。Furthermore, the above-mentioned Co alone or Go-based alloy thin film layer may include Co alone, Go-Ni, Go-CrS, etc.
Co-Cu, co-Au, Co-Y, Co-L
a.C.
−Pr、Go−GdS Co−3II、Co−PL、C
o−Dy、C。-Pr, Go-GdS Co-3II, Co-PL, C
o-Dy, C.
訃、Co V等のCoを一つの成分とする合金を使用
し、公知の手段により形成すればよいが、第1及び第2
のPe薄膜層と同様、角度が45°〜80”の斜方蒸着
により、前記理由により厚み200Å〜2000人にな
るよう形成するとよい。なお、上記のうちでもCoを主
体とし、NiをCo/N1=9515〜65/35<重
量比)になるよう添加したものが価格面等を考慮すれば
好ましく、又、Co系金属薄膜層の抗磁力が、他のFe
薄膜層の抗磁力とほぼ一致するよう斜方蒸着の角度を適
宜に定めるのが好ましい。The first and second
Similarly to the Pe thin film layer, it is preferably formed by oblique evaporation at an angle of 45° to 80'' to a thickness of 200 Å to 2,000 Å for the above-mentioned reasons. It is preferable to add N1 so that N1=9515~65/35<weight ratio) in consideration of price, and the coercive force of the Co-based metal thin film layer is higher than that of other Fe.
It is preferable to appropriately determine the angle of oblique deposition so as to substantially match the coercive force of the thin film layer.
本発明はFe薄膜層間にCoの単独あるいはCoを主体
とする合金薄膜層を設けたので磁気特性及び耐腐食性が
向上する。まず、抗磁力の特性が向上する理由は、各F
e″Fl膜層が中間層を介することにより互いに独立す
るので、各Fefl膜層の磁気特性が加算された効果を
生むためと考えられる。Fen膜層を単に厚くしても抗
磁力、角型比が低下してしまうのは前記した通りである
が、前記した厚みの範囲のFen膜層を2工程に分けて
2層積層しても、やはり抗磁力、角型比が低下する。こ
れは、下層のFe薄膜の傾斜柱状構造を延長する傾向で
次のFe薄膜層が形成されるので、同じトータル厚みを
1工程で形成した場合と同様になってしまい、前記した
好ましい厚みの範囲を越えてしまうためであろうと考え
られる。In the present invention, since a thin film layer of Co alone or an alloy mainly composed of Co is provided between the Fe thin film layers, magnetic properties and corrosion resistance are improved. First, the reason why the coercive force characteristics improve is that each F
This is thought to be because the magnetic properties of each Fefl film layer produce an additive effect because the e''Fl film layers are independent of each other through the intermediate layer. Even if the Fen film layer is simply thickened, the coercive force and square shape As mentioned above, the ratio decreases, but even if two layers of Fen film layers having the above thickness range are laminated in two steps, the coercive force and squareness ratio will still decrease. , the next Fe thin film layer is formed with a tendency to extend the inclined columnar structure of the underlying Fe thin film, resulting in the same total thickness as if it were formed in one step, exceeding the above-mentioned preferred thickness range. It is thought that this is because the
又、本発明において抗磁力、角型比が向上する理由は、
Coの単独あるいはCoを主体とする合金薄膜層自身の
抗磁力、角型比が良好であるため、磁気記録媒体全体の
抗磁力、角型比が向上するためと考えられる。In addition, the reason why the coercive force and squareness ratio are improved in the present invention is as follows.
This is thought to be because the coercive force and squareness ratio of the Co alone or Co-based alloy thin film layer itself are good, so that the coercive force and squareness ratio of the entire magnetic recording medium are improved.
更に、耐腐食性が向上する理由は、Goの単独あるいは
Coを主体とする合金とPeの電気化学的性質が似てお
り、かつ、Coの単独あるいはCoを主体とする合金を
用いた方がFeの場合よりも傾斜柱が稠密に形成される
ためと考えられる。Furthermore, the reason why the corrosion resistance is improved is that the electrochemical properties of Pe are similar to those of Go alone or an alloy mainly composed of Co, and it is better to use Co alone or an alloy mainly composed of Co. This is thought to be because the inclined columns are formed more densely than in the case of Fe.
以上、第1図に示すものを中心に説明したが、更に磁気
記録媒体の表面に保護層を形成する等の手段を付加して
もよい。Although the explanation has been given above mainly on the one shown in FIG. 1, means such as forming a protective layer on the surface of the magnetic recording medium may be added.
(発明の効果)
本発明の磁気記録媒体はこのようにFe薄膜層間に中間
層を介在させているので、従来Fe単独で一定の膜厚を
得たときに生じていた抗磁力低下を主に抑えることがで
き、さらに、角型比の低下も抑えられる。(Effects of the Invention) Since the magnetic recording medium of the present invention has an intermediate layer interposed between the Fe thin film layers, it can mainly suppress the decrease in coercive force that conventionally occurs when a constant film thickness is obtained using Fe alone. Furthermore, a decrease in the squareness ratio can also be suppressed.
さらに、中間層に強磁性体のCoの単独あるいはCoを
主体とする合金を用いたことにより、記録層全体として
の抗磁力、角型比の特性が向上し、また耐腐食性も向上
するという効果を得るものである。Furthermore, by using the ferromagnetic Co alone or an alloy mainly composed of Co in the intermediate layer, the coercive force and squareness characteristics of the entire recording layer are improved, and the corrosion resistance is also improved. It is effective.
以下に本発明をより具体的に示すための実施例を掲げる
。Examples are given below to more specifically illustrate the present invention.
11皇
基体としては厚み6μのポリエチレンテレフタレートフ
ィルムを用い、フィルム上に最低入射角を65°とした
斜方蒸着法により、まず、厚み850人のPe薄膜を設
けた。次に、Fe薄膜上にCo : Ni−80: 2
0 (重量比)のGo−Ni合金を用い、最低入射角を
45°とする斜方蒸着法により厚み400人のCo−N
i合金の中間膜を設けた。更に、Co−Ni合金薄膜上
に前記したFe薄膜形成と同様にしてFe薄膜を設けた
。A polyethylene terephthalate film with a thickness of 6 μm was used as the substrate, and a Pe thin film with a thickness of 850 μm was first formed on the film by oblique vapor deposition with a minimum incident angle of 65°. Next, Co:Ni-80:2 was deposited on the Fe thin film.
Co-N with a thickness of 400 mm was obtained by oblique evaporation using a Go-Ni alloy with a weight ratio of 0 (weight ratio) and a minimum incident angle of 45°.
An interlayer film of i-alloy was provided. Furthermore, an Fe thin film was provided on the Co--Ni alloy thin film in the same manner as in the above-described Fe thin film formation.
一比1L医」−
基体は実施例1におけるものと同様とし、実施例1にお
けるのと同様にして厚み850人のPa薄膜層を2度形
成した。- The substrate was the same as in Example 1, and a 850-thick Pa thin film layer was formed twice in the same manner as in Example 1.
上1iJLL
中間膜を厚み300人のアルミニウム蒸着膜トし、その
他は実施例1と同様にした。Upper 1iJLL The intermediate film was an aluminum vapor-deposited film having a thickness of 300 mm, and the other conditions were the same as in Example 1.
上記の実施例及び各比較例で得られた磁気記録媒体の磁
気特性・耐腐食性を評価した結果を表1および表2に示
す。Tables 1 and 2 show the results of evaluating the magnetic properties and corrosion resistance of the magnetic recording media obtained in the above Examples and Comparative Examples.
表 磁気特性table magnetic properties
第 1図は本発明の磁気記録媒体の実施例の断面図である。 磁気記録媒体 非磁性基体 3 。 Fa薄膜層 ・Coの単独あるいは Coを主体とする合金薄膜層 No. FIG. 1 is a sectional view of an embodiment of the magnetic recording medium of the present invention. magnetic recording medium non-magnetic substrate 3. Fa thin film layer ・Co alone or Co-based alloy thin film layer
Claims (2)
膜層間に挿入されたCoの単独あるいはCoを主体とす
る合金の薄膜層とが積層されていることを特徴とする磁
気記録媒体。(1) Magnetic recording characterized by laminating two or more Fe thin film layers on a nonmagnetic substrate and a thin film layer of Co alone or an alloy mainly composed of Co inserted between each Fe thin film layer. Medium.
ることを特徴とする特許請求の範囲第(1)項記載の磁
気記録媒体。(2) The magnetic recording medium according to claim (1), wherein each Fe thin film layer has a thickness of 200 Å to 2000 Å.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1870990A JPH02223009A (en) | 1990-01-29 | 1990-01-29 | magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1870990A JPH02223009A (en) | 1990-01-29 | 1990-01-29 | magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02223009A true JPH02223009A (en) | 1990-09-05 |
| JPH0472286B2 JPH0472286B2 (en) | 1992-11-17 |
Family
ID=11979182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1870990A Granted JPH02223009A (en) | 1990-01-29 | 1990-01-29 | magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02223009A (en) |
-
1990
- 1990-01-29 JP JP1870990A patent/JPH02223009A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0472286B2 (en) | 1992-11-17 |
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