JPH0222418U - - Google Patents

Info

Publication number
JPH0222418U
JPH0222418U JP10123888U JP10123888U JPH0222418U JP H0222418 U JPH0222418 U JP H0222418U JP 10123888 U JP10123888 U JP 10123888U JP 10123888 U JP10123888 U JP 10123888U JP H0222418 U JPH0222418 U JP H0222418U
Authority
JP
Japan
Prior art keywords
sliding body
guide shaft
piston
static pressure
pressure gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10123888U
Other languages
English (en)
Other versions
JPH0650654Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988101238U priority Critical patent/JPH0650654Y2/ja
Publication of JPH0222418U publication Critical patent/JPH0222418U/ja
Application granted granted Critical
Publication of JPH0650654Y2 publication Critical patent/JPH0650654Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例１の静圧気体軸受摺動
体の駆動装置の縦断面図、第２図は本考案の実施
例２の同駆動装置の縦断面図、第３図は従来例を
示すボールネジ方式を採用した同駆動装置の側面
図、第４図は従来例を示すリニアモータ方式を示
す同駆動装置の斜視図、第５図は従来のワイヤー
とプーリーとにより駆動伝達する方式の同駆動装
置の側面図である。 １，２１……筒状ガイド軸、２，２２……静圧
間隙、４，２４……摺動体、５，２５……ピスト
ン、８，９，２８，２９……側板、１６，３６…
…流体制御回路、３３……スリツト、Ａ，Ｂ，Ｃ
，Ｄ……空気室、Ｓ……空気供給源。

Claims (1)

    【実用新案登録請求の範囲】
  1. 筒状のガイド軸内に流体制御により駆動するピ
    ストンと、前記ガイド軸上に静圧気体で浮上する
    摺動体とを設け、前記ピストンと摺動体とを駆動
    連結して、前記ピストンを流体制御することによ
    つて摺動体をガイド軸上に移動する様にしたこと
    を特徴とする静圧気体軸受摺動体の駆動装置。
JP1988101238U 1988-07-29 1988-07-29 静圧気体軸受摺動装置 Expired - Lifetime JPH0650654Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988101238U JPH0650654Y2 (ja) 1988-07-29 1988-07-29 静圧気体軸受摺動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988101238U JPH0650654Y2 (ja) 1988-07-29 1988-07-29 静圧気体軸受摺動装置

Publications (2)

Publication Number Publication Date
JPH0222418U true JPH0222418U (ja) 1990-02-14
JPH0650654Y2 JPH0650654Y2 (ja) 1994-12-21

Family

ID=31330052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988101238U Expired - Lifetime JPH0650654Y2 (ja) 1988-07-29 1988-07-29 静圧気体軸受摺動装置

Country Status (1)

Country Link
JP (1) JPH0650654Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014002165A (ja) * 2013-08-08 2014-01-09 Nippon Thompson Co Ltd 小型スライド装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512002U (ja) * 1978-06-10 1980-01-25
JPS5516165U (ja) * 1978-07-19 1980-02-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512002U (ja) * 1978-06-10 1980-01-25
JPS5516165U (ja) * 1978-07-19 1980-02-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014002165A (ja) * 2013-08-08 2014-01-09 Nippon Thompson Co Ltd 小型スライド装置

Also Published As

Publication number Publication date
JPH0650654Y2 (ja) 1994-12-21

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