JPH02225306A - Production of easily sinterable silicon nitride powder - Google Patents

Production of easily sinterable silicon nitride powder

Info

Publication number
JPH02225306A
JPH02225306A JP4743289A JP4743289A JPH02225306A JP H02225306 A JPH02225306 A JP H02225306A JP 4743289 A JP4743289 A JP 4743289A JP 4743289 A JP4743289 A JP 4743289A JP H02225306 A JPH02225306 A JP H02225306A
Authority
JP
Japan
Prior art keywords
silicon nitride
powder
nitride powder
silicon
easily sinterable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4743289A
Other languages
Japanese (ja)
Other versions
JPH0791044B2 (en
Inventor
Yoshiyuki Nakamura
中村 美幸
Masahiko Nakajima
征彦 中島
Koichi Uchino
内野 紘一
Hideki Hirotsuru
秀樹 広津留
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP4743289A priority Critical patent/JPH0791044B2/en
Publication of JPH02225306A publication Critical patent/JPH02225306A/en
Publication of JPH0791044B2 publication Critical patent/JPH0791044B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)

Abstract

PURPOSE:To obtain easily sinterable silicon nitride powder utilized for high- temperature structural material such as gas turbine part material exhibiting strength at high temperature by adding oxide of silicon to silicon nitride powder, mixing and heat-treating. CONSTITUTION:Fine powder (preferably >=10m<2>/g specific surface area) of oxide of silicon such as aerosil or white carbon is added to silicon nitride powder and heat-treated in non-oxidizing atmosphere such nitrogen or argon at 1500-1800 deg.C for 3-15 hour to obtain easily sinterable silicon nitride powder. Adding amount of fine powder of oxide of silicon is usually <=6wt.%. Sintered material of the aimed silicon nitride powder has >=800MPa bending strength at 1200 deg.C.

Description

【発明の詳細な説明】 〔賄栗上の利用分野〕 本分、明は、h温構造材料として、がスタービン部材、
ノズル、@受等に利用される窒化ケイ素粉末% Vこ易
焼結性で且つ高温強度ヶ発現する窒化ケイ累粉木の製造
方法に関する。
[Detailed description of the invention] [Field of application of the material] Mainly, as an h-temperature structural material, it is used as a turbine member,
This invention relates to a method for producing silicon nitride powder wood that is easily sinterable and exhibits high-temperature strength, and is used for nozzles, receivers, etc.

(従来の技術〕 恢米、窒化ケイ来粉木の製法としては、(1)金槁ケイ
系直接窒化法、(2)ソリ力還元窒化伝、(3)ハロケ
ゞン化グイ糸法か知らgている。こILらの方法でつく
り扛る粉末は、製造履歴〃・典なるためか、金tζ噴・
・縄物儀や酸系曖或いは粒径、比表面積かIWI札度で
あって本、粉末の焼結性や焼結後の炉結捧の特性例えは
曲げ強度に大きな違いがある。
(Prior technology) Methods for producing wood made from silica nitride powder include (1) direct nitriding based on metal nitride, (2) sled force reduction nitriding, and (3) halocarbonized yarn method. The powder produced by the method of these IL et al.
・There are big differences in bending strength, such as the sinterability of powder and the properties of furnace bonding after sintering, depending on rope, acidity, particle size, specific surface area, and IWI size.

一般的には、(11の方法で製造された粉末は易・に結
性であるが高温曲げ強度が低い、(2)の方法の粉末は
難焼結性であるが高温曲げ強度か高い、(3)の方法の
粉末は中間的な性能を示すといわれて(・る。
In general, (the powder produced by method 11 is easily sinterable but has low high-temperature bending strength; the powder produced by method (2) is difficult to sinter but has high high-temperature bending strength; The powder obtained by method (3) is said to exhibit intermediate performance.

特に、(1)の方法で製造された窒化ケイ素粉末は他の
2法に比べて粉砕に伴う歪を粉体の表面で受けて(・る
ので、その歪エネルギー全解放してやることにより伺ん
らかの特徴を物体に与えることの切究がなされている。
In particular, the silicon nitride powder produced by method (1) suffers more strain from pulverization on the surface of the powder than the other two methods, so by releasing all of that strain energy, Efforts are being made to impart these characteristics to objects.

その1例か′#f囲昭53−88011号公報である。One example is '#f Box No. 88011/1983.

この先行技術は、窒化ケイ素粉末を1,400〜1.9
00℃の温度で加熱処理し、窒化ケイ素中rこ含まれて
いる酸素?l−8iOとして除去すると共に、一部の酸
素を窒化ケイ素粉5体の表面に固俗せしめ、焼結助剤と
のぬれ注に6%することにより焼結庫中の粒界相の址′
?I:減少せしめる技術であり、その結果、烏温島強度
か発境するというもので≧うる。
This prior art uses silicon nitride powder between 1,400 and 1.9
After heat treatment at a temperature of 00°C, the oxygen contained in silicon nitride is removed. In addition to removing the oxygen as 1-8iO, some of the oxygen is solidified on the surface of the silicon nitride powder, and by adding 6% of the oxygen to the sintering aid, the grain boundary phase in the sintering chamber is removed.
? I: It is a technique that reduces the strength of Karasunoshima Island.

しかし、この方法は、出発yA′I#+の窒化ケイ系物
体の表面における物質移動を利用したものであるので、
自ずと出発原料が限定される、すなわち、微粉か又は高
酸素の原料であることが要求されるという問題かある。
However, since this method utilizes mass transfer on the surface of the silicon nitride-based object of starting yA'I#+,
The problem is that starting materials are naturally limited, ie, fine powder or high oxygen content is required.

従って、粉体の改質にも限度かめり、その結果の1例が
ホットプレスのみの使用でめって、完全に粉体特性を把
握できなかった点に問題が残されていた。
Therefore, the modification of the powder was limited, and one example of the results was the use of only a hot press, which left a problem in that the powder characteristics could not be fully grasped.

〔発明が解決しようとする静聴〕[Static listening that the invention attempts to solve]

本発明者らは、特開昭53−88011号公報における
以上の間組点會念頭に入れ、粉体改良の方法と改良され
た粉体の結ひつきを極々検討した結果、出発原料にこだ
わることなく窒化ケイ累粉末にケイ素酸化物微粉七飽加
混合し、非酸化性券1気下、1,500〜1.800℃
の温度で熱処理をすれは常圧焼結にも通用可能な粉体と
なることを児い出し、本発明を完成した。
The inventors of the present invention have carefully studied methods for improving powder and the binding of improved powder, keeping in mind the above assembling meeting in Japanese Patent Application Laid-open No. 53-88011. Mix fine silicon oxide powder with silicon nitride powder to saturation, and heat at 1,500 to 1,800℃ at 1 atmosphere of non-oxidizing temperature.
The present invention was completed by developing a powder that can be used for pressureless sintering after heat treatment at a temperature of .

〔課組を解決するための手段〕[Means for resolving division issues]

すなわち、本発明は、窒化ケイ木粉末にケイ素酸化物微
粉(il−添加混合し、非酸化性雰−気下、1.500
〜1,800℃の温度で熱処理することt%徴とする易
焼結性窒化ケイ素粉末の製造方法である。
That is, in the present invention, silicon oxide fine powder (il-added and mixed with silicon nitride powder, 1.500%
This is a method for producing easily sinterable silicon nitride powder, which is heat treated at a temperature of ~1,800°C.

以下、さらに詐しく本発明について説明すると、本発明
において、ケイ素酸化物I徽粉全開城する理由は、窒化
ケイ素粉末中の酸素か微粉に偏ると窒化ケイ素粉体の表
面改質が微粉のみで行われ、酸素の少ないと考えられる
粗粒例えは5〜10μm程度の粉末が改質から収り残さ
れる恐れがあることに鑑みたものである。すなわち、本
発明では、!*極的にケイ素酸化物微粉を添加し窒化ケ
イ素粉体の表面と反応させることによりこの間組全解消
しようとするものでめる。
Hereinafter, to explain the present invention further, in the present invention, the reason why the silicon oxide powder is fully exposed is that if the oxygen in the silicon nitride powder is biased towards the fine powder, the surface modification of the silicon nitride powder is only caused by the fine powder. The coarse grain example, which is considered to be low in oxygen, is based on the possibility that powder of about 5 to 10 μm may be left behind after modification. That is, in the present invention,! *The attempt is made to completely eliminate this interpolation by adding silicon oxide fine powder and causing it to react with the surface of the silicon nitride powder.

ケイ素酸化物の添加倉は、以下の目的と原料窒化ケイ素
粉末の酸素を考慮して決定されるが、通常は6]LIL
′%以内である。すなわち、その目的の1つは、#I焼
結性を付与した粉体の改良でりって、他の1つは低酸素
化及び微粉同士の再配列化である。前者は、ケイ素酸化
物微粉を23!L墓%以内のみ加とし、比較的低温例え
は1600℃程度lでの温度で熱処理を行って粉体表面
のぬれak改善しようとするものである。一方、後者は
、特願昭63−2773+50号明細書の技術内容を狙
ったものであって、高温例えは1750℃程度の熱処理
であって、ケイ素酸化物微粉も出来るだけ多く添加し、
積極的に反応せしめ、脱酸素を行い、低酸系化は勿論の
こと、微粉同士の再配列化も行い、微粉を減少させよう
とするものである。熱処理特出jとしては温度にも影響
するか6〜15時巾]程S二であれば十分である。
The amount of silicon oxide to be added is determined by considering the following objectives and the oxygen content of the raw material silicon nitride powder, but it is usually 6]LIL.
’% or less. That is, one of the purposes is to improve the powder with #I sinterability, and the other purpose is to reduce oxygen and rearrange the fine powders. The former uses silicon oxide fine powder at 23! It is intended to improve the wettability of the powder surface by applying heat only to within L% and performing heat treatment at a relatively low temperature, for example, about 1600°C. On the other hand, the latter is aimed at the technical contents of Japanese Patent Application No. 63-2773+50, and involves heat treatment at a high temperature of, for example, about 1750°C, adding as much silicon oxide fine powder as possible,
The purpose is to actively react, deoxidize, and reduce the amount of fine powder by not only reducing the acid content but also rearranging the fine powder. It is sufficient that the heat treatment is about 6 to 15 hours, depending on the temperature.

ケイ素酸化物の粒度は、前述のように、積極的に窒化ケ
イ素粉体の表面と反応させることを目的としているので
小さい方が好ましい。X体重には原料窒化ケイ累粉末の
比衣面槓より大きいOとが望ましく 、10 rn2/
7以上の微粉であるこ、とか好都合である。このような
ケイ素酸化物微粉の具体例としてはアエロシェル、ホワ
イトカーボン等がろけられる。
As mentioned above, the particle size of the silicon oxide is preferably small because it is intended to actively react with the surface of the silicon nitride powder. It is desirable that the weight of
It is convenient that it is a fine powder of 7 or more. Specific examples of such fine silicon oxide powder include Aeroshell, White Carbon, and the like.

熱処理の雰囲気についてに、低酸系化【目的にし1いる
ので、非酸化性券−気下、例えは、家系。
Regarding the heat treatment atmosphere, the purpose is to create a low-acid atmosphere, so the atmosphere is non-oxidizing, for example, a family tree.

アルゴン、水素、アンモニア等の雰囲気が好適である。An atmosphere of argon, hydrogen, ammonia, etc. is suitable.

また、熱処理温度については1,500〜L800℃が
最通である。1.500°C未満であるとケイ素酸化物
微粉と窒化ケイ素粉体との反応すなわち物質移動か十分
に起こらないので粉体の改質ができない。一方、i、s
oo℃を越えると窒化ケイ素自身の昇華転移及び一部分
解が生じる。
Further, the heat treatment temperature is usually 1,500 to 800°C. If the temperature is less than 1.500°C, the reaction between the silicon oxide fine powder and the silicon nitride powder, that is, the mass transfer, will not occur sufficiently, so that the powder cannot be modified. On the other hand, i, s
When the temperature exceeds 00°C, sublimation transition and partial decomposition of silicon nitride itself occur.

の欠点例えは酸素を多く含んでいる等の欠点をケイ素酸
化物微粉を積極的に添加して易焼結性と尚温強度の発現
が容易な窒化ケイ木粉末に改質したものであり、本発明
の基本思想は、下記(11式及び(21式に示す反応に
もとづいている。
An example of this is that the disadvantages of wood, such as its high content of oxygen, have been modified into silicon nitride wood powder, which is easily sinterable and exhibits high temperature strength, by actively adding silicon oxide fine powder. The basic idea of the present invention is based on the reactions shown in the following formulas (11 and 21).

(X−813N4  + 8102−p2SL2ON2
     (12Bi2ON2−pβ−8i3N4  
+ 5ill     (2)〔実施例〕 以下、実施例と比較例をあゆでちら1(具体的に本発明
勿説明する。
(X-813N4 + 8102-p2SL2ON2
(12Bi2ON2-pβ-8i3N4
+ 5ill (2) [Examples] Examples and comparative examples will be described below (the present invention will be specifically explained).

実施例1〜11.比@例1〜4 市販品の窒化ケイ素粉末1001景部に比表面積50 
m2/ fiの5i02を第1表に示す割合で添加混合
した。この混合粉末をカーボンルツボに入れ、第1表に
示す熱処理条件で加熱し、窒化ケイ素粉末を製造した。
Examples 1-11. Ratio @ Examples 1 to 4 Commercially available silicon nitride powder 1001 area to specific surface area 50
5i02 of m2/fi was added and mixed in the proportions shown in Table 1. This mixed powder was placed in a carbon crucible and heated under the heat treatment conditions shown in Table 1 to produce silicon nitride powder.

得られた窒化ケイ素粉末の特性を第1表に示す。Table 1 shows the properties of the obtained silicon nitride powder.

次に、以上のように熱処理して得られた旨化ケイ素粉末
に、Y2O3(s+L均粒子径1.ろμrn )、A1
203(平均粒子径1.4μm)、νgo (平均粒子
径1.2μm)及び)vjgo−AJ203(平均粒子
径1.2μrn)を第2表に示すようVC種々の割合で
内側配合し1.1 、1 、1− ト!Jクロロエタン
を加えて4時間ボールミルで湿式混合し、乾燥後、10
0にη−2の成形圧で6X10x6011Im形状に金
型成形した後、2700に9/儒2の成形圧でCIP成
形した。これらの成杉体をカーボンルツボに七ツl’L
、 ”2がス雰囲気中、第2衣に示す条件で焼成して焼
結体を社すた。得られた焼結体は他制後、相対密度及び
當温(6RT )と1200℃(σ1200)の曲は強
度を徂]定した。その結果を第6衣に示す。
Next, Y2O3 (s+L average particle size 1.μrn), A1
203 (average particle diameter 1.4 μm), νgo (average particle diameter 1.2 μm) and )vjgo-AJ203 (average particle diameter 1.2 μrn) were mixed inside the VC at various ratios as shown in Table 2. ,1,1-t! Add J chloroethane and wet mix in a ball mill for 4 hours. After drying,
After molding with a mold into a 6×10×6011 Im shape at a molding pressure of 0 to η-2, CIP molding was performed at a molding pressure of 2700 to 9/F2. These cedar bodies were placed in a carbon crucible.
, 2 was fired in a gas atmosphere under the conditions shown in No. 2 to produce a sintered body. ), the intensity was increased.The results are shown in Figure 6.

なお第1表と第6表に示した測定値は次の方法によった
The measured values shown in Tables 1 and 6 were determined by the following method.

(1[酸素(lk!%) : LECO社製TC−13
6型0/N同時分析計による。
(1 [Oxygen (lk!%): TC-13 manufactured by LECO
Using a Type 6 0/N simultaneous analyzer.

(2)比表面積(m”/&):湯浅アイオニクス社製の
カンタ−ソーブJr BET 1点法に よる。
(2) Specific surface area (m”/&): Based on the Cantersorb Jr. BET 1 point method manufactured by Yuasa Ionics.

(3)α分率(%) :理学を機社製のガイが−フシッ
クス)’IAD −It B型のX蛛回折による。
(3) α fraction (%): Based on X-type diffraction of Rigaku wo Kisha's Gai-Fusix)'IAD-It B type.

(4)相対密度(%):アルキメテ゛ス法による。(4) Relative density (%): Based on the Archimethes method.

(5;曲は強度(MPa) :呂律製作所製オートグラ
フA、0−2000 A型による。
(5; Strength of the song (MPa): Based on Autograph A, 0-2000 A type, manufactured by Rotsu Seisakusho.

〔発明の効果〕〔Effect of the invention〕

本発明により製造された窒化ケイ素粉末は、低における
尚温曲げ強度か890 MPa以上司能8なる。これは
焼結体のβ−柱状晶の発生とその成長に関係する粉体特
性を制御した結果によるものでおる。
The silicon nitride powder produced according to the present invention has a low temperature bending strength of 890 MPa or more. This is due to the control of the powder characteristics related to the generation and growth of β-columnar crystals in the sintered body.

時計出願人 電気化学工朶株式会社Watch applicant Denki Kagaku Kogyo Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] 1、窒化ケイ素粉末にケイ素酸化物微粉を添加混合し、
非酸化性雰囲気下、1,500〜1,800℃の温度で
熱処理することを特徴とする易焼結性窒化ケイ素粉末の
製造方法。
1. Add and mix silicon oxide fine powder to silicon nitride powder,
A method for producing easily sinterable silicon nitride powder, comprising heat treatment at a temperature of 1,500 to 1,800°C in a non-oxidizing atmosphere.
JP4743289A 1989-02-28 1989-02-28 Method for producing easily sinterable silicon nitride powder Expired - Fee Related JPH0791044B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4743289A JPH0791044B2 (en) 1989-02-28 1989-02-28 Method for producing easily sinterable silicon nitride powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4743289A JPH0791044B2 (en) 1989-02-28 1989-02-28 Method for producing easily sinterable silicon nitride powder

Publications (2)

Publication Number Publication Date
JPH02225306A true JPH02225306A (en) 1990-09-07
JPH0791044B2 JPH0791044B2 (en) 1995-10-04

Family

ID=12774991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4743289A Expired - Fee Related JPH0791044B2 (en) 1989-02-28 1989-02-28 Method for producing easily sinterable silicon nitride powder

Country Status (1)

Country Link
JP (1) JPH0791044B2 (en)

Also Published As

Publication number Publication date
JPH0791044B2 (en) 1995-10-04

Similar Documents

Publication Publication Date Title
US4800182A (en) Silicon nitride-silicon carbide composite material and process for production thereof
US4908171A (en) Method of sintering articles of silicon nitride
US4902457A (en) Method for manufacturing a porous material or a composite sintered product comprising zirconium oxide and a carbide
JPS62182163A (en) Silicon nitride ceramic sintered body and manufacture
JP2585506B2 (en) Silicon carbide sintered body and method for producing the same
JP2649220B2 (en) Silicon nitride / silicon carbide composite powder, composite compact, method for producing them, and method for producing silicon nitride / silicon carbide composite sintered body
JP2874057B2 (en) Silicon nitride powder
JPH0791044B2 (en) Method for producing easily sinterable silicon nitride powder
JP4958353B2 (en) Aluminum nitride powder and method for producing the same
JPS61227908A (en) Preparation of raw material powder for sintered silicon nitride
JPS60204672A (en) Manufacture of ceramic powder material
JPH11335172A (en) Method for producing porous silicon carbide sintered body
JPH06279124A (en) Production of silicon nitride sintered compact
JP3564164B2 (en) Silicon nitride sintered body and method for producing the same
JPS60186473A (en) Silicon nitride sintered body and manufacture
JPS59116176A (en) Manufacture of ceramic sintered body
JPH03208864A (en) Production of mixed powder of boron nitride and aluminum nitride
JPS62167208A (en) Production of aluminum nitride powder
JPS6346029B2 (en)
JP2661743B2 (en) Method for producing silicon nitride ingot and silicon nitride powder
JPH0575688B2 (en)
JPS5930768A (en) Manufacture of high corrosion resistance silicon nitride reaction sintered body
JPS59152271A (en) Manufacture of high density silicon nitride reaction sintered body
JPS5891028A (en) Manufacture of silicon carbide powder
JPH04119908A (en) Silicon nitride powder and its production

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees