JPH02225534A - Ultra-thin inorganic particle film and its manufacturing method, magnetic recording medium using the same, and its manufacturing method - Google Patents

Ultra-thin inorganic particle film and its manufacturing method, magnetic recording medium using the same, and its manufacturing method

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Publication number
JPH02225534A
JPH02225534A JP1045999A JP4599989A JPH02225534A JP H02225534 A JPH02225534 A JP H02225534A JP 1045999 A JP1045999 A JP 1045999A JP 4599989 A JP4599989 A JP 4599989A JP H02225534 A JPH02225534 A JP H02225534A
Authority
JP
Japan
Prior art keywords
inorganic fine
fine particles
organic compound
ultra
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1045999A
Other languages
Japanese (ja)
Other versions
JPH0686535B2 (en
Inventor
Norihisa Mino
規央 美濃
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4599989A priority Critical patent/JPH0686535B2/en
Priority to US07/361,261 priority patent/US4985273A/en
Priority to EP19890305701 priority patent/EP0346074B1/en
Priority to DE68924198T priority patent/DE68924198T2/en
Publication of JPH02225534A publication Critical patent/JPH02225534A/en
Priority to US07/606,620 priority patent/US5277980A/en
Publication of JPH0686535B2 publication Critical patent/JPH0686535B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Composite Materials (AREA)
  • Mathematical Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Laminated Bodies (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Magnetic Record Carriers (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)

Abstract

PURPOSE:To make it possible to obtain a high-density magnetic recording medium by spreading fine inorganic particles on each of whose surfaces a monomolecular film comprising molecules of an organic compound is formed on a gas- water interface, transferring the formed film to a substrate and treating it chemically or physically. CONSTITUTION:A monomolecular film comprising molecules (A) of an organic compound is formed on te surfaces of fine inorganic particles (B) on each of which an oxide film of the constituent element is optionally formed, and the particles are spread on a gas-water interface. The formed film is transferred on a substrate to be treated chemically or physically for chemically combining components A with each other to obtain the title ultrathin film comprising component B fixed in a thin film and a thin organic film of component A formed on the surface of component B, wherein one terminal group of component A and component B are bonded together to form a siloxane bond of formula I or a bond of formula II and component A is chemically combined with each other.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は無機物微粒子からなる超薄膜およびその製造方
法に関し、さらにその応用として、前記無機物微粒子か
らなる超薄膜を記録層とする磁気記録媒体およびその製
造方法に関するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an ultra-thin film made of inorganic fine particles and a method for manufacturing the same, and as an application thereof, a magnetic recording medium having a recording layer made of the ultra-thin film made of the inorganic fine particles and its manufacture. It is about the method.

従来の技術 従来より、無機物微粒子超薄膜は配線材料、加工材料、
記録材料、印刷材料などとして広く用いられている。以
下、従来の技術の一例として磁気記録媒体およびその製
造方法について説明する。
Conventional technology Conventionally, inorganic fine particle ultra-thin films have been used as wiring materials, processing materials,
It is widely used as recording material, printing material, etc. A magnetic recording medium and a method for manufacturing the same will be described below as an example of a conventional technique.

従来の磁気記録媒体の製造方法は、磁性無機物微粒子を
バインダーと呼ばれる合成樹脂の中に分散させて磁性ペ
イントを作成し、この磁性ペイントを基板上に薄く均一
に塗工することにより記録層を形成する方法が多く用い
られている。また、保磁力を大きくするために、磁性ペ
イントを基板上に塗工してから乾く前に磁場をかけて磁
性無機物微粒子の配向を揃える工程がある。
The conventional manufacturing method for magnetic recording media is to create a magnetic paint by dispersing magnetic inorganic fine particles in a synthetic resin called a binder, and then to form a recording layer by coating this magnetic paint thinly and uniformly on a substrate. Many methods are used. Furthermore, in order to increase the coercive force, there is a step of applying a magnetic field to align the orientation of the magnetic inorganic particles after applying magnetic paint onto the substrate and before it dries.

発明が解決しようとする課題 しかしながら、従来の磁気記録媒体の製造方法では、磁
性のない合成樹脂からなるバインダーが多く含まれてお
り高密度化には好ましくなかった。
Problems to be Solved by the Invention However, conventional methods for manufacturing magnetic recording media contain a large amount of binder made of non-magnetic synthetic resin, which is not suitable for achieving high density.

また、バインダーの粘性のため磁性無機物微粒子の配向
を完全に揃えることは容易ではなかった。
Furthermore, due to the viscosity of the binder, it is not easy to align the magnetic inorganic particles perfectly.

さらに、磁気記録媒体の表面は平坦でかつ滑らかである
必要があるが、従来の製造方法では平坦でかつ滑らかな
表面を得ることが難しかった。
Furthermore, the surface of a magnetic recording medium needs to be flat and smooth, but it has been difficult to obtain a flat and smooth surface using conventional manufacturing methods.

課題を解決するための手段 本発明の無機物微粒子超薄膜は、薄膜状に固定された無
機物微粒子と、前記無機物微粒子の表面に形成された有
機化合物分子よりなる有機薄膜とからなり、かつ前記有
機化合物分子同志が化学結合していることを特徴とする
ものである。
Means for Solving the Problems The ultra-thin film of inorganic fine particles of the present invention consists of inorganic fine particles fixed in the form of a thin film, and an organic thin film made of organic compound molecules formed on the surface of the inorganic fine particles, and It is characterized by chemical bonds between molecules.

上記構成の無機物微粒子超薄膜を製造するために、本発
明の無機物微粒子超薄膜の製造方法は、無機物微粒子表
面に均一に有機化合物分子からなる単分子膜を形成する
工程と、前記無機物微粒子を気水界面に展開し基板に移
し取る工程と、前記基板に移し取られた前記無機物微粒
子に前記有機化合物分子同志を化学結合させるための化
学的処理または物理的処理を施す工程とからなることを
特徴とするものである。
In order to produce an ultra-thin film of inorganic fine particles having the above structure, the method for producing an ultra-thin film of inorganic fine particles of the present invention includes the steps of uniformly forming a monomolecular film of organic compound molecules on the surface of the inorganic fine particles, and It is characterized by comprising a step of developing it on a water interface and transferring it to a substrate, and a step of subjecting the inorganic fine particles transferred to the substrate to chemical treatment or physical treatment for chemically bonding the organic compound molecules to each other. That is.

さらに本発明の磁気記録媒体は、無機物微粒子として磁
性無機物微粒子を用いて本発明の無機物微粒子超薄膜を
形成し、前記超薄膜を記録層としたものである。
Further, in the magnetic recording medium of the present invention, the ultra-thin film of the inorganic fine particles of the present invention is formed using magnetic inorganic fine particles as the inorganic fine particles, and the ultra-thin film serves as a recording layer.

作用 本発明の無機物微粒子超薄膜およびその製造方法は上記
の構成によって、より新しく容易な無機物微粒子の取扱
方法により無機物微粒子の超薄膜を形成することが出来
る。さらに、本発明の磁気記録媒体およびその製造方法
は、バインダーにあたるものがまったく無いため高密度
化が実現でき、かつ磁性無機物微粒子の配向を揃えるこ
とも容易である。
Effect: The ultra-thin film of inorganic fine particles and the method for producing the same according to the present invention have the above-described configuration, and can form an ultra-thin film of fine inorganic particles using a newer and easier method for handling inorganic fine particles. Furthermore, since the magnetic recording medium of the present invention and its manufacturing method do not contain any binder, it is possible to achieve high density, and it is also easy to align the orientation of the magnetic inorganic particles.

実施例 以下、本発明の無機物微粒子超薄膜の一実施例を第1図
および第2図を用いて詳細に説明する。
EXAMPLE Hereinafter, one example of the ultra-thin inorganic particle film of the present invention will be described in detail with reference to FIGS. 1 and 2.

ここで、第1図は無機物微粒子超薄膜の模式断面図であ
り、第2図は第1図の円Aで囲む部分の拡大図である。
Here, FIG. 1 is a schematic cross-sectional view of an ultra-thin film of inorganic fine particles, and FIG. 2 is an enlarged view of the part surrounded by circle A in FIG. 1.

1は直径的10OAの無機物微粒子である。無機物微粒
子1の周囲には前記無機物の構成元素の酸化物膜が形成
されており、前記酸化物膜上には直鎖状炭化水素基を有
する有機化合物分子2が吸着している。前記直鎖状炭化
水素基を有する有機化合物分子2は隣接している直鎖状
炭化水素基を有する有機化合物分子と互いに化学結合し
ている。
1 is an inorganic fine particle with a diameter of 10 OA. An oxide film of a constituent element of the inorganic substance is formed around the inorganic fine particles 1, and organic compound molecules 2 having a linear hydrocarbon group are adsorbed onto the oxide film. The organic compound molecules 2 having linear hydrocarbon groups are chemically bonded to adjacent organic compound molecules having linear hydrocarbon groups.

3はエチレン結合からなる化学結合部をさす。4は基板
である。第2図で示すように直鎖状炭化水素基を膏する
有機化合物分子2は無機物微粒子1と なるシロキサン結合5を形成している。従って、無機物
微粒子1は直鎖状炭化水素基を存する有機化合物分子2
で固定されており、また、直鎖状炭化水素基を有する有
機化合物分子2はエチレン結合からなる化学結合部3で
固定されている。そのため、無機物微粒子1の保持性が
優れている。また、ラングミュア・プロジェット法を使
用できるため無機物微粒子超薄膜を層状に形成でき、そ
の厚みを一様にすることができる。
3 refers to a chemical bond consisting of an ethylene bond. 4 is a substrate. As shown in FIG. 2, organic compound molecules 2 containing linear hydrocarbon groups form siloxane bonds 5 that form inorganic fine particles 1. Therefore, inorganic fine particles 1 are organic compound molecules 2 containing linear hydrocarbon groups.
Further, the organic compound molecule 2 having a linear hydrocarbon group is fixed by a chemical bond 3 consisting of an ethylene bond. Therefore, the retention of the inorganic fine particles 1 is excellent. Furthermore, since the Langmuir-Prodgett method can be used, an ultra-thin film of inorganic fine particles can be formed in a layered manner, and the thickness can be made uniform.

なお、本実施例では無機物微粒子超薄膜は一層だけの例
を示したが、必要に応じて累積層にしてもよい。
In this example, the inorganic fine particle ultra-thin film has only one layer, but it may be formed into a cumulative layer if necessary.

また、本実施例では直鎖状炭化水素基を有する有機化合
物分子同志の結合がエチレン結合である例を示したが、
これだけに限らないことは言うまでもない。
In addition, in this example, an example was shown in which the bond between organic compound molecules having a linear hydrocarbon group is an ethylene bond,
Needless to say, this is not the only option.

さらに、本実施例では無機物微粒子と直鎖状炭化水素基
を仔する有機化合物分子との結合がシロキサン結合であ
る例を示したが、他の結合、例えば、−8−無機物結合
などであっても構わない。
Furthermore, although this example shows an example in which the bond between the inorganic fine particles and the organic compound molecule having a linear hydrocarbon group is a siloxane bond, other bonds such as -8-inorganic bond may be used. I don't mind.

以下、本発明の無機物微粒子超薄膜の製造方法の第1の
実施例を第3図を用いて段階的に詳細に説明する。なお
、第3図はすべて断面図である。
Hereinafter, the first embodiment of the method for producing an ultra-thin inorganic particle film of the present invention will be described in detail step by step with reference to FIG. Note that all of FIG. 3 are sectional views.

無機物微粒子に吸着させる有機化合物分子として、例え
ば、 CH3−CEC−(CH2)+v−8i Clsのよう
なりロルシラン基およびアセチレン結合を含む直鎖状炭
化水素基を存する有機化合物分子10をクロロホルムを
主体とする非水系溶媒に溶かし、その中に無機物微粒子
11を入れて攪拌する。無機物微粒子11の周囲に形成
された前記無機物の構成元素の酸化物膜にクロルシラン
基が反応し、シロキサン結合が形成され、直鎖状炭化水
素基を有する有機化合物10が吸着される。吸着処理を
施した無機物微粒子11を気水界面12上に展開し、バ
リア13によって無機物微粒子11をかき集め、さらに
、適宜な圧力を加え無機物微粒子超薄膜14を形成する
。前記無機物微粒子超薄膜14を任意の基板15例えば
シリコン基板に移し取る。ここで、無機物微粒子11の
周囲に吸着された直鎖状炭化水素基を育する有機化合物
分子10はもちろん無機物微粒子11の周囲全面にわた
って形成されるが図面では煩雑になるため三次元的に記
載していない(第3図(A))。
As the organic compound molecule to be adsorbed to the inorganic fine particles, for example, an organic compound molecule 10 containing a linear hydrocarbon group containing a lorsilane group and an acetylene bond, such as CH3-CEC-(CH2)+v-8i Cls, is mainly composed of chloroform. The inorganic fine particles 11 are dissolved in a non-aqueous solvent and stirred. The chlorosilane group reacts with the oxide film of the constituent element of the inorganic substance formed around the inorganic fine particles 11 to form a siloxane bond, and the organic compound 10 having a linear hydrocarbon group is adsorbed. The inorganic particles 11 subjected to the adsorption treatment are spread on the air-water interface 12, the inorganic particles 11 are collected by the barrier 13, and an appropriate pressure is applied to form an ultra-thin inorganic particle film 14. The inorganic fine particle ultra-thin film 14 is transferred to an arbitrary substrate 15, for example, a silicon substrate. Here, the organic compound molecules 10 that grow linear hydrocarbon groups adsorbed around the inorganic fine particles 11 are of course formed all over the periphery of the inorganic fine particles 11, but they are not depicted three-dimensionally to avoid complication in the drawing. (Figure 3 (A)).

次に、前記基板15上に形成された無機物微粒子超薄膜
14に不活性ガス雰囲気中でエネルギービーム16例え
ば電子線を照射する(第3図(B))。
Next, the ultra-thin inorganic particle film 14 formed on the substrate 15 is irradiated with an energy beam 16, for example, an electron beam, in an inert gas atmosphere (FIG. 3(B)).

電子線等のエネルギービーム16を照射することにより
無機物微粒子11の周囲に吸着した直鎖状炭化水素基を
有する有機化合物分子10のアセチレン結合が隣接する
直鎖状炭化水素基を育する有機化合物分子10のアセチ
レン結合と化学反応を生じ、エチレン結合17を形成す
る。ここで、エチレン結合17は同一の無機物微粒子1
1の周囲に吸着した直鎖状炭化水素基を有する有機化合
物分子10のアセチレン結合間、または、隣接する無機
物微粒子11の周囲に吸着した直鎖状炭化水素基を有す
る有機化合物分子10のアセチレン結合間の反応で形成
されるが、図面では煩雑になるため模式的に示しである
(第3図(C))。
An organic compound molecule in which an acetylene bond of an organic compound molecule 10 having a linear hydrocarbon group adsorbed around an inorganic fine particle 11 grows an adjacent linear hydrocarbon group by irradiation with an energy beam 16 such as an electron beam. A chemical reaction occurs with the acetylene bond 10 to form an ethylene bond 17. Here, the ethylene bond 17 is the same as the inorganic fine particle 1.
1 or between the acetylene bonds of organic compound molecules 10 having linear hydrocarbon groups adsorbed around adjacent inorganic fine particles 11, or between the acetylene bonds of organic compound molecules 10 having linear hydrocarbon groups adsorbed around adjacent inorganic fine particles 11. Although it is formed by a reaction between the two, it is shown schematically because it is complicated in the drawing (Fig. 3(C)).

なお、本実施例では無機物微粒子超薄膜を一層だけ形成
したが、同様の方法を用いて累積膜にすることもできる
Although only one layer of the ultra-thin inorganic particle film was formed in this example, a cumulative film can also be formed using the same method.

また、本実施例では直鎖状炭化水素基を有する有機化合
物分子中の不飽和結合基としてアセチレン結合を用いた
が、他の不飽和結合基、例えばエチレン結合、ジアセチ
レン結合などであってもよさらに、本実施例では直鎖状
炭化水素基を有する有機化合物分子として末端基がクロ
ルシラン基であるものを使用したが、他に例えば、トリ
アジンジチオール誘導体を使うことも可能である。トリ
アジンジチオール誘導体を使用する時は非水系溶剤を使
う必要もなく、また、シロキサン結合を形成しない。
Furthermore, in this example, an acetylene bond was used as an unsaturated bond group in an organic compound molecule having a linear hydrocarbon group, but other unsaturated bond groups such as an ethylene bond or a diacetylene bond may also be used. Furthermore, in this example, an organic compound molecule having a linear hydrocarbon group whose terminal group is a chlorosilane group is used, but it is also possible to use, for example, a triazinedithiol derivative. When using triazinedithiol derivatives, there is no need to use nonaqueous solvents, and siloxane bonds are not formed.

さらになお、本実施例では基板に無機物微粒子を移し取
った後にエネルギービームを照射したが、気水界面上で
エネルギービームを照射し、その後移し取ってもよい。
Furthermore, in this example, the energy beam was irradiated after the inorganic fine particles were transferred to the substrate, but the energy beam may be irradiated on the air-water interface and then transferred.

さらにまた、無機物微粒子の配向性を高めるため、無機
物微粒子が磁場に感応するときは気水界面上で超薄膜を
形成するとき、もしくはエネルギービームを照射すると
きに磁場もしくは電場をかけてもよい。
Furthermore, in order to improve the orientation of the inorganic fine particles, a magnetic field or an electric field may be applied when the inorganic fine particles are sensitive to a magnetic field, when forming an ultra-thin film on the air-water interface, or when irradiating with an energy beam.

以下、本発明の無機物微粒子超薄膜の製造方法の第2の
実施例を第8図を用いて段階的に詳細に説明する。なお
、第3図はすべて断面図である。
Hereinafter, a second embodiment of the method for producing an ultra-thin inorganic particle film of the present invention will be described in detail step by step with reference to FIG. Note that all of FIG. 3 are sectional views.

ここで、無機物微粒子の周囲に直鎖状炭化水素基を有す
る有機化合物分子を吸着させる工程、並びに、気水界面
上に前記無機物微粒子の超薄膜を形成し、基板に移し取
る工程は第1の実施例と同じであるので省略する。
Here, the step of adsorbing organic compound molecules having linear hydrocarbon groups around the inorganic fine particles, and the step of forming an ultra-thin film of the inorganic fine particles on the air-water interface and transferring it to the substrate are the first steps. Since this is the same as the example, the description will be omitted.

次に、5族もしくは6族遷移金属もしくは前記金属の化
合物よりなる触媒、例えば塩化タンタルを適宜非水系溶
媒に溶解し、その中に前記基板上に形成された無機物微
粒子超薄膜を浸漬する。浸漬によって直鎖状炭化水素基
を有する有機化合物分子中のアセチレン結合は隣接する
直鎖状炭化水素基を有する有機化合物分子中のアセチレ
ン結合と化学反応を生じ、エチレン結合を形成する(第
3図(C))。
Next, a catalyst made of a group 5 or 6 transition metal or a compound of the metal, such as tantalum chloride, is appropriately dissolved in a non-aqueous solvent, and the ultra-thin film of inorganic fine particles formed on the substrate is immersed therein. By immersion, the acetylene bonds in the organic compound molecules having linear hydrocarbon groups undergo a chemical reaction with the acetylene bonds in the adjacent organic compound molecules having linear hydrocarbon groups, forming ethylene bonds (Figure 3). (C)).

なお、本実施例では5族もしくは6族遷移金属もしくは
前記金属の化合物よりなる触媒を用いたが、有機化合物
分子同志を化学結合させるための触媒ならばいずれを使
用してもよい。
In this example, a catalyst made of a group 5 or 6 transition metal or a compound of the metal is used, but any catalyst may be used as long as it is capable of chemically bonding organic compound molecules.

また、無機物微粒子の配向性を高めるため、無機物微粒
子が磁場に感応するときは気水界面上で超薄膜を形成す
るとき、もしくは触媒溶液に浸漬するときに磁場もしく
は電場をかけてもよい。
Furthermore, in order to improve the orientation of the inorganic fine particles, a magnetic field or an electric field may be applied when the inorganic fine particles are sensitive to a magnetic field, when forming an ultra-thin film on the air-water interface, or when immersing them in a catalyst solution.

以下、本発明の磁気記録媒体の一実施例を第4図および
第5図を用いて説明する。なお、第4図は磁気記録媒体
の模式断面図であり、第5図は第4図の円Bで囲む部分
の拡大図である。
An embodiment of the magnetic recording medium of the present invention will be described below with reference to FIGS. 4 and 5. 4 is a schematic cross-sectional view of the magnetic recording medium, and FIG. 5 is an enlarged view of the portion surrounded by circle B in FIG. 4.

20は直径約10OAの磁性無機物微粒子である。磁性
無機物微粒子20の周囲には前記磁性無機物の構成元素
の酸化物膜が形成されており、前記酸化物膜上には直鎖
状炭化水素基を有する有機化合物分子21が吸着してい
る。前記直鎖状炭化水素基を有する有機化合物分子21
は隣接している直鎖状炭化水素基を有する有機化合物分
子と互いに化学結合している。22は前記直鎖状炭化水
素基を有する有機化合物分子21間のエチレン結合から
なる化学結合部をさす。また、23は前記直鎖状炭化水
素基を有する有機化合物分子21の末端部に設けられた
フッ素置換部である。24は基板である。第5図で示す
ように直鎖状炭化水素基を有する有機化合物分子21は
磁性無機物微粒子20と なるシロキサン結合25を形成している。従って、磁性
無機物微粒子20は直鎖状炭化水素基を有する有機化合
物分子21で固定されており、また、直鎖状炭化水素基
を有する有機化合物分子21はエチレン結合からなる化
学結合部22で固定されている。そのため、磁性無機物
微粒子の保持性が優れている。また、ラングミュア・プ
ロジェット法を使用できるため磁性無機物微粒子超薄膜
を層状に形成でき、その厚みを一様にすることができる
20 is a magnetic inorganic fine particle having a diameter of about 10 OA. An oxide film of a constituent element of the magnetic inorganic substance is formed around the magnetic inorganic fine particles 20, and organic compound molecules 21 having a linear hydrocarbon group are adsorbed onto the oxide film. Organic compound molecule 21 having the linear hydrocarbon group
are chemically bonded to adjacent organic compound molecules having linear hydrocarbon groups. Reference numeral 22 indicates a chemical bond formed by an ethylene bond between the organic compound molecules 21 having the linear hydrocarbon group. Further, 23 is a fluorine-substituted moiety provided at the end of the organic compound molecule 21 having the linear hydrocarbon group. 24 is a substrate. As shown in FIG. 5, organic compound molecules 21 having linear hydrocarbon groups form siloxane bonds 25 that become magnetic inorganic fine particles 20. As shown in FIG. Therefore, the magnetic inorganic fine particles 20 are fixed with organic compound molecules 21 having a linear hydrocarbon group, and the organic compound molecules 21 having a linear hydrocarbon group are fixed with a chemical bond 22 consisting of an ethylene bond. has been done. Therefore, the retention of magnetic inorganic fine particles is excellent. Furthermore, since the Langmuir-Prodgett method can be used, an ultra-thin film of magnetic inorganic particles can be formed in a layered manner, and the thickness can be made uniform.

さらに、直鎖状炭化水素基を有する有機化合物分子21
の末端部の水素原子をフッ素原子で置換しておくことに
より磁性無機物微粒子超薄膜の表面が常にフッ素原子で
覆われているため、磁気ヘッドなどの摩擦に対する耐摩
耗性が優れている。
Furthermore, organic compound molecule 21 having a linear hydrocarbon group
By replacing the hydrogen atoms at the terminal ends with fluorine atoms, the surface of the ultra-thin film of magnetic inorganic fine particles is always covered with fluorine atoms, resulting in excellent wear resistance against friction in magnetic heads, etc.

さらにまた、層状に磁性無機物微粒子超薄膜を形成でき
るため、必要とする磁気特性を得易い。
Furthermore, since an ultra-thin film of magnetic inorganic fine particles can be formed in a layered manner, it is easy to obtain the required magnetic properties.

また、本実施例では直鎖状炭化水素基を存する有機化合
物分子間の結合がエチレン結合である例を示したが、こ
れだけに限らないことは言うまでもない。
Further, in this example, an example in which the bond between organic compound molecules having a linear hydrocarbon group is an ethylene bond is shown, but it goes without saying that the bond is not limited to this.

以下、本発明の磁気記録媒体の製造方法の一実施例を第
6図を用いて段階的に詳細番こ゛説明する。
Hereinafter, one embodiment of the method for manufacturing a magnetic recording medium of the present invention will be explained step by step in detail with reference to FIG.

なお、第6図はすべて断面図である。In addition, all FIG. 6 is a sectional view.

磁性無機物微粒子に吸着させる有機化合物分子として、
例えば、 CFz−CEC−(CHa )+t−8)CIaのよう
なりロルシラン基、 トリフルオロメチル基およびアセ
チレン結合を含む直鎖状炭化水素基を有する有機化合物
分子30をクロロホルムを主体とする溶媒に溶かし、そ
の中に磁性無機物微粒子31を入れて攪拌する。磁性無
機物微粒子31の周囲に形成された前期磁性無機物の構
成元素の酸化物膜にクロルシラン基が反応し、シロキサ
ン結合が形成され、直鎖状炭化水素基を有する有機化合
物分子30が吸着される。吸着処理を施した磁性無機物
微粒子31を気水界面32上に展開し、バリア33によ
って磁性無機物微粒子31をかき集め、さらに、適宜な
圧力を加え磁性無機物微粒子超薄膜34を形成する。こ
のとき、さらに、磁性無機物微粒子31の配向性をよく
するため磁場35を加える。前記磁性無機物微粒子超薄
膜34を任意の基板36例えばシリコン基板に移し取る
As an organic compound molecule adsorbed to magnetic inorganic fine particles,
For example, an organic compound molecule 30 having a linear hydrocarbon group containing a lorsilane group, a trifluoromethyl group, and an acetylene bond, such as CFz-CEC-(CHa)+t-8)CIa, is dissolved in a solvent mainly composed of chloroform. The magnetic inorganic fine particles 31 are placed therein and stirred. The chlorosilane group reacts with the oxide film of the constituent element of the magnetic inorganic material formed around the magnetic inorganic fine particles 31 to form a siloxane bond, and the organic compound molecule 30 having a linear hydrocarbon group is adsorbed. Magnetic inorganic fine particles 31 subjected to adsorption treatment are spread on an air-water interface 32, magnetic inorganic fine particles 31 are collected by a barrier 33, and an appropriate pressure is further applied to form an ultra-thin film of magnetic inorganic fine particles 34. At this time, a magnetic field 35 is further applied to improve the orientation of the magnetic inorganic fine particles 31. The magnetic inorganic fine particle ultra-thin film 34 is transferred to an arbitrary substrate 36, for example, a silicon substrate.

ここで、磁性無機物微粒子31の周囲に形成された直鎖
状炭化水素基を存する有機化合物分子30はもちろん磁
性無機物微粒子31の周囲全面にわたって形成されるが
図面では煩雑になるため三次元的に記載していない(第
6図(A))。
Here, the organic compound molecules 30 having a linear hydrocarbon group formed around the magnetic inorganic fine particles 31 are of course formed over the entire circumference of the magnetic inorganic fine particles 31, but they are depicted three-dimensionally to avoid complication in the drawing. No (Figure 6(A)).

次に、前記基板36上に形成された磁性無機物微粒子超
薄膜34にエネルギービーム37例えば電子線を照射す
る(第8図(B))。
Next, the ultra-thin magnetic inorganic particle film 34 formed on the substrate 36 is irradiated with an energy beam 37, for example, an electron beam (FIG. 8(B)).

電子線等のエネルギービーム37を照射することにより
磁性無機物微粒子31の周囲に吸着した直鎖状炭化水素
基を存する有機化合物分子30のアセチレン結合が隣接
する直鎖状炭化ん素基を有する有機化合物分子30のア
セチレン結合と化学反応を生じ、エチレン結合38を形
成する。ここで、エチレン結合38は同一の磁性無機物
微粒子31の周囲に吸着した直鎖状炭化水素基を存する
有機化合物分子30のアセチレン結合間、または、隣接
する磁性無機物微粒子31の周囲に吸着した直鎖状炭化
水素基を有する有機化合物分子30のアセチレン結合間
の反応で形成されるが、図面では煩雑になるため模式的
に示しである(第6図(C))。
An organic compound having a linear hydrocarbon group adjacent to an acetylene bond of an organic compound molecule 30 having a linear hydrocarbon group adsorbed around the magnetic inorganic fine particles 31 by irradiation with an energy beam 37 such as an electron beam. A chemical reaction occurs with the acetylene bond of molecule 30 to form ethylene bond 38. Here, the ethylene bond 38 is between the acetylene bonds of the organic compound molecule 30 having a linear hydrocarbon group adsorbed around the same magnetic inorganic fine particle 31, or the linear chain adsorbed around the adjacent magnetic inorganic fine particle 31. Although it is formed by a reaction between the acetylene bonds of the organic compound molecule 30 having a hydrocarbon group, it is shown schematically because the drawing is too complicated (FIG. 6(C)).

次に、第6図(A)および(B)で示したのと同様の方
法により磁性無機物微粒子超薄膜34を被着した基板3
6上にさらに磁性無機物微粒子超薄膜34を被着し、累
積膜を形成して本実施例の磁気記録媒体が作成される(
第8図(D))。
Next, a substrate 3 on which an ultra-thin magnetic inorganic particle film 34 is deposited by the same method as shown in FIGS. 6(A) and 6(B).
The magnetic recording medium of this example is created by further depositing an ultra-thin magnetic inorganic particle film 34 on the magnetic inorganic particle 6 to form a cumulative film (
Figure 8(D)).

なお、本実施例ではエネルギービームによるエチレン結
合形成の例を示したが、無機物微粒子超薄膜の製造方法
の実施例で示すように金属もしくは前記金属の化合物よ
りなる触媒による方法を用いてもよい。
Although this example shows an example of ethylene bond formation using an energy beam, a method using a catalyst made of a metal or a compound of the metal may also be used, as shown in the example of the method for producing an ultra-thin film of inorganic fine particles.

また、本実施例では基板に磁性無機物微粒子を移し取っ
た後にエネルギービームを照射したが、気水界面上でエ
ネルギービームを照射し、その後移し取ってもよい。
Further, in this example, the energy beam was irradiated after transferring the magnetic inorganic fine particles to the substrate, but the energy beam may be irradiated on the air-water interface and then transferred.

さらに、本実施例では直鎖状炭化水素基を有する有機化
合物中の不飽和結合基としてアセチレン結合を用いたが
、他の不飽和結合基例えばエチレン結合、ジアセチレン
結合などであってもよい。
Further, in this example, an acetylene bond was used as an unsaturated bond group in an organic compound having a linear hydrocarbon group, but other unsaturated bond groups such as an ethylene bond or a diacetylene bond may be used.

さらになお、本実施例では配向性を高めるための磁場を
気水界面上に磁性無機物微粒子超薄膜を形成したときに
かけたが、エネルギービームを照射するときにもかけて
もよい。
Furthermore, in this example, a magnetic field for enhancing orientation was applied when forming an ultra-thin film of magnetic inorganic fine particles on the air-water interface, but it may also be applied when irradiating an energy beam.

さらにまた、本実施例では磁場を用いたが電場であって
もよい。
Furthermore, although a magnetic field is used in this embodiment, an electric field may also be used.

発明の効果 本発明の無機物微粒子超薄膜およびその製造方法は無機
物微粒子の新しい取扱方法を提供するものである。さら
にその応用として、前記無機物微粒子からなる超薄膜を
記録層とする磁気記録媒体およびその製造方法は従来の
磁気記録媒体の持つ問題点であるバインダーにあたるも
のがまったくないため高密度化が実現できる。さらに、
無機物微粒子の保持性に優れており、かつ、従来の潤滑
剤にあたるものを新たに添加する必要がない。さらにま
た、無機物微粒子は撥水性の単分子膜で覆われているた
めに耐候性が非常に高い。さらにまた、本発明を垂直磁
気記録媒体に用いると高性能の磁気記録媒体を得ること
ができ、その製造も非常に容易になる。また、本発明の
無機物微粒子超薄膜およびその製造方法を用いる磁気記
録媒体以外の応用として配線材料、砥石などの加工材料
、感光性記録材料、印刷材料などの用途が考えられる。
Effects of the Invention The ultra-thin film of inorganic fine particles and the method for producing the same of the present invention provide a new method for handling inorganic fine particles. Further, as an application thereof, a magnetic recording medium having a recording layer made of an ultra-thin film made of inorganic fine particles and a method for manufacturing the same can achieve high density since there is no binder, which is a problem with conventional magnetic recording media. moreover,
It has excellent retention of inorganic particles and does not require the addition of conventional lubricants. Furthermore, since the inorganic fine particles are covered with a water-repellent monolayer, they have very high weather resistance. Furthermore, when the present invention is applied to a perpendicular magnetic recording medium, a high-performance magnetic recording medium can be obtained, and its manufacture becomes extremely easy. In addition, applications other than magnetic recording media using the inorganic fine particle ultra-thin film of the present invention and its manufacturing method include applications such as wiring materials, processing materials such as grindstones, photosensitive recording materials, and printing materials.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の無機物微粒子超薄膜の一実施例の模式
断面図、第2図は第1図の円Aで囲む部分の拡大図、第
3図は本発明の無機物微粒子超薄膜の製造方法の一実施
例を段階的に説明する模式断面図、第4図は本発明の磁
気記録媒体の一実施例を説明する模式断面図、第5図は
第4図の円Bで囲む部分の拡大図、第8図は本発明の磁
気記録媒体の製造方法の一実施例を段階的に説明する模
式断面図である。 1.11・・・・無機物微粒子、2,10,21.30
・・・・直鎖状炭化水素基を有する有機化合物分子、3
.22・・・・化学結合部、5.25・・・・シロキサ
ン結合、18.37・・・・エネルギービーム、17゜
38・・・・エチレン結合、20.31・・・・磁性無
機物微粒子、23・・・・フッ素置換部、35・・・・
磁場。 代理人の氏名 弁理士 粟野重孝 ほか1名第 図 第 第 図 図 (C) #、機¥S雀又仁子 17エチレン討暑) 第 図 第 図 (A) 第 図 目1も悪堺♂弁閃位子 (A) (B) 第 図 <C)
FIG. 1 is a schematic cross-sectional view of one embodiment of the inorganic fine particle ultra-thin film of the present invention, FIG. 2 is an enlarged view of the part surrounded by circle A in FIG. 1, and FIG. 3 is the production of the inorganic fine particle ultra-thin film of the present invention. FIG. 4 is a schematic cross-sectional view explaining an example of the magnetic recording medium of the present invention step by step. FIG. 5 is a schematic cross-sectional view explaining an example of the magnetic recording medium of the present invention. FIG. The enlarged view and FIG. 8 are schematic sectional views illustrating step-by-step an embodiment of the method for manufacturing a magnetic recording medium of the present invention. 1.11...Inorganic fine particles, 2,10,21.30
...Organic compound molecule having a linear hydrocarbon group, 3
.. 22...Chemical bond, 5.25...Siloxane bond, 18.37...Energy beam, 17°38...Ethylene bond, 20.31...Magnetic inorganic fine particles, 23...Fluorine substitution part, 35...
magnetic field. Name of agent: Patent attorney Shigetaka Awano and one other person (C) #, machine ¥S Suzume Mata Jinko 17 Ethylene Heat) (A) Position (A) (B) Diagram <C)

Claims (15)

【特許請求の範囲】[Claims] (1)薄膜状に固定された無機物微粒子と、前記無機物
微粒子の表面に形成された有機化合物分子よりなる有機
薄膜とを含み、かつ前記有機化合物分子同志が化学結合
していることを特徴とする無機物微粒子超薄膜。
(1) It is characterized by comprising inorganic fine particles fixed in the form of a thin film and an organic thin film made of organic compound molecules formed on the surface of the inorganic fine particles, and the organic compound molecules are chemically bonded to each other. Ultra-thin film of inorganic particles.
(2)無機物微粒子表面に、前記無機物の構成元素の酸
化物膜が形成されていることを特徴とする請求項1に記
載の無機物微粒子超薄膜。
(2) The ultra-thin film of inorganic fine particles according to claim 1, wherein an oxide film of a constituent element of the inorganic substance is formed on the surface of the inorganic fine particles.
(3)有機化合物分子の一方の末端基と無機物微粒子と
の化学結合が ▲数式、化学式、表等があります▼ 結合(シロキサン結合)または −S−無機物 結合であることを特徴とする請求項1もしくは2に記載
の無機物微粒子超薄膜。
(3) Claim 1 characterized in that the chemical bond between one end group of the organic compound molecule and the inorganic fine particle is a ▲numerical formula, chemical formula, table, etc.▼ bond (siloxane bond) or -S-inorganic bond. or the inorganic fine particle ultra-thin film described in 2.
(4)無機物微粒子表面に均一に有機化合物分子よりな
る単分子膜を形成する工程と、前記無機物微粒子を気水
界面に展開し基板に移し取る工程と、前記基板に移し取
られた前記無機物微粒子に前記有機化合物分子同志を化
学結合させるための化学的処理または物理的処理を施す
工程とを含むことを特徴とする無機物微粒子超薄膜の製
造方法。
(4) A step of uniformly forming a monomolecular film made of organic compound molecules on the surface of the inorganic fine particles, a step of developing the inorganic fine particles on the air-water interface and transferring them to the substrate, and a step of transferring the inorganic fine particles to the substrate. A method for producing an ultra-thin film of inorganic fine particles, comprising the step of: performing a chemical treatment or a physical treatment for chemically bonding the organic compound molecules to each other.
(5)無機物微粒子表面に有機化合物分子よりなる単分
子膜を形成する工程が化学吸着法を用いた工程であるこ
とを特徴とする請求項4に記載の無機物微粒子超薄膜の
製造方法。
(5) The method for producing an ultra-thin film of inorganic fine particles according to claim 4, wherein the step of forming a monomolecular film made of organic compound molecules on the surface of the inorganic fine particles is a step using a chemisorption method.
(6)有機化合物分子が、CH_2基の数が10以上で
、かつ中に重合反応を行なう基を有する直鎖状炭化水素
基と、前記有機化合物分子の一方の末端に無機物微粒子
表面と吸着反応を行なう基とを有することを特徴とする
請求項4もしくは5に記載の無機物微粒子超薄膜の製造
方法。
(6) An organic compound molecule has a linear hydrocarbon group having 10 or more CH_2 groups and has a group that performs a polymerization reaction therein, and one end of the organic compound molecule has an adsorption reaction with the surface of an inorganic fine particle. The method for producing an ultra-thin film of inorganic fine particles according to claim 4 or 5, wherein the inorganic fine particle ultra-thin film has a group that performs the following.
(7)無機物微粒子表面と吸着反応を行なう基が(モノ
、ジもしくはトリ)クロルシラン基もしくはトリアジン
ジチオール基であることを特徴とする請求項6に記載の
無機物微粒子超薄膜の製造方法。
(7) The method for producing an ultra-thin film of inorganic fine particles according to claim 6, wherein the group that performs an adsorption reaction with the surface of the inorganic fine particles is a (mono-, di-, or tri)chlorosilane group or a triazinedithiol group.
(8)重合反応を行なう基が不飽和結合基であることを
特徴とする請求項6もしくは7に記載の無機物微粒子超
薄膜の製造方法。
(8) The method for producing an ultra-thin film of inorganic fine particles according to claim 6 or 7, wherein the group that performs the polymerization reaction is an unsaturated bonding group.
(9)無機物微粒子を基板上に移し取る工程がラングミ
ュア・プロジェット法を用いた工程であることを特徴と
する請求項4から8のいずれかに記載の無機物微粒子超
薄膜の製造方法。
(9) The method for producing an ultra-thin inorganic particle film according to any one of claims 4 to 8, wherein the step of transferring the inorganic particles onto the substrate is a step using the Langmuir-Prodgett method.
(10)有機化合物分子同志を化学結合させるための物
理的処理を施す工程が紫外線、遠紫外線、電子線、X線
等のエネルギービームを照射する工程であることを特徴
とする請求項4から9のいずれかに記載の無機物微粒子
超薄膜の製造方法。
(10) Claims 4 to 9, characterized in that the step of performing physical treatment to chemically bond organic compound molecules is a step of irradiating energy beams such as ultraviolet rays, deep ultraviolet rays, electron beams, and X-rays. A method for producing an ultra-thin film of inorganic fine particles according to any one of the above.
(11)有機化合物分子同志を化学結合させるための化
学的処理を施す工程が触媒反応を施す工程であることを
特徴とする請求項4から9のいずれかに記載の無機物微
粒子超薄膜の製造方法。
(11) The method for producing an ultra-thin film of inorganic fine particles according to any one of claims 4 to 9, characterized in that the step of performing a chemical treatment for chemically bonding organic compound molecules is a step of performing a catalytic reaction. .
(12)薄膜状に固定された磁性無機物微粒子と、前記
磁性無機物微粒子の表面に形成された有機化合物分子よ
りなる有機薄膜とを含み、かつ前記有機化合物分子同志
が化学結合していることを特徴とする磁気記録媒体。
(12) It includes magnetic inorganic fine particles fixed in the form of a thin film, and an organic thin film made of organic compound molecules formed on the surface of the magnetic inorganic fine particles, and the organic compound molecules are chemically bonded to each other. magnetic recording media.
(13)有機化合物分子が、中に重合反応を行なう基を
有する直鎖状炭化水素基を有し、かつ前記有機化合物分
子の一方の末端基と磁性無機物微粒子との化学結合が ▲数式、化学式、表等があります▼ 結合(シロキサン結合)または −S−無機物 結合であり、もう一方の末端におけるメチル基の水素原
子がフッ素原子に1つ以上置換されており、かつ前記重
合反応を行なう基間で重合反応して化学結合しているこ
とを特徴とする請求項12に記載の磁気記録媒体。
(13) The organic compound molecule has a linear hydrocarbon group having a group that performs a polymerization reaction therein, and the chemical bond between one end group of the organic compound molecule and the magnetic inorganic fine particles is expressed by ▲ mathematical formula, chemical formula , tables, etc. ▼ It is a bond (siloxane bond) or -S- inorganic bond, and one or more hydrogen atoms of the methyl group at the other end are replaced with fluorine atoms, and there is a bond between the groups that performs the polymerization reaction. 13. The magnetic recording medium according to claim 12, wherein the magnetic recording medium is chemically bonded through a polymerization reaction.
(14)磁性無機物微粒子表面に有機化合物分子よりな
る単分子膜を均一に形成する工程と、前記磁性無機物微
粒子を気水界面に展開し基板に移し取る工程と、前記基
板に移し取られた前記磁性無機物微粒子に前記有機化合
物分子同志を化学結合させるための化学的処理または物
理的処理を施す工程とを含むことを特徴とする磁気記録
媒体の製造方法。
(14) A step of uniformly forming a monomolecular film made of organic compound molecules on the surface of the magnetic inorganic fine particles, a step of developing the magnetic inorganic fine particles on the air-water interface and transferring them to the substrate, and a step of developing the magnetic inorganic fine particles on the air-water interface and transferring them to the substrate. A method for manufacturing a magnetic recording medium, comprising the step of subjecting magnetic inorganic fine particles to chemical treatment or physical treatment for chemically bonding the organic compound molecules to each other.
(15)有機化合物分子よりなる単分子膜で覆われた磁
性無機物微粒子を気水界面上に展開し基板に移し取る工
程において、気水界面上に展開する際に磁場をかけるこ
とを特徴とする請求項14に記載の磁気記録媒体の製造
方法。
(15) In the process of spreading magnetic inorganic fine particles covered with a monomolecular film made of organic compound molecules on an air-water interface and transferring them to a substrate, a magnetic field is applied when the particles are spread on the air-water interface. The method for manufacturing a magnetic recording medium according to claim 14.
JP4599989A 1988-06-07 1989-02-27 Ultrafine inorganic fine particle film, method for producing the same, magnetic recording medium to which the same is applied, and method for producing the same Expired - Lifetime JPH0686535B2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP4599989A JPH0686535B2 (en) 1989-02-27 1989-02-27 Ultrafine inorganic fine particle film, method for producing the same, magnetic recording medium to which the same is applied, and method for producing the same
US07/361,261 US4985273A (en) 1988-06-07 1989-06-05 Method of producing fine inorganic particles
EP19890305701 EP0346074B1 (en) 1988-06-07 1989-06-06 Mass of fine particles of inorganic material and method of producing the same, ultrathin film of the inorganic fine particles and method of making the same, magnetic recording medium and method of providing the same method of manufacturing patterns of inorganic material, and method of manufacturing wirings of inorganic material
DE68924198T DE68924198T2 (en) 1988-06-07 1989-06-06 Mass of fine particles of an inorganic material and process for its production, ultra-thin film of fine inorganic particles and process for its production, magnetic recording medium and process for its production, process for the production of motifs of inorganic material and process for the production of wirings made of inorganic material .
US07/606,620 US5277980A (en) 1988-06-07 1990-10-31 Mass of fine particles of inorganic material and a film of the fine inorganic particles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4599989A JPH0686535B2 (en) 1989-02-27 1989-02-27 Ultrafine inorganic fine particle film, method for producing the same, magnetic recording medium to which the same is applied, and method for producing the same

Publications (2)

Publication Number Publication Date
JPH02225534A true JPH02225534A (en) 1990-09-07
JPH0686535B2 JPH0686535B2 (en) 1994-11-02

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JP4599989A Expired - Lifetime JPH0686535B2 (en) 1988-06-07 1989-02-27 Ultrafine inorganic fine particle film, method for producing the same, magnetic recording medium to which the same is applied, and method for producing the same

Country Status (1)

Country Link
JP (1) JPH0686535B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258893B2 (en) 2001-05-08 2007-08-21 Fujitsu Limited Method of fabricating a magnetic recording medium
JP2010070786A (en) * 2008-09-17 2010-04-02 Shin-Etsu Chemical Co Ltd Metal surface treatment agent, surface-treated steel, method for treating the same, coated steel, and method for producing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7258893B2 (en) 2001-05-08 2007-08-21 Fujitsu Limited Method of fabricating a magnetic recording medium
JP2010070786A (en) * 2008-09-17 2010-04-02 Shin-Etsu Chemical Co Ltd Metal surface treatment agent, surface-treated steel, method for treating the same, coated steel, and method for producing the same

Also Published As

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