JPH0222597U - - Google Patents
Info
- Publication number
- JPH0222597U JPH0222597U JP10027988U JP10027988U JPH0222597U JP H0222597 U JPH0222597 U JP H0222597U JP 10027988 U JP10027988 U JP 10027988U JP 10027988 U JP10027988 U JP 10027988U JP H0222597 U JPH0222597 U JP H0222597U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- ceramic molded
- combination piece
- horizontal
- insulating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 2
- 238000002791 soaking Methods 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Resistance Heating (AREA)
- Chemical Vapour Deposition (AREA)
- Furnace Details (AREA)
Description
第１図は本考案成形ヒータの一実施例の構成を
一部を破断して示した側面図、第２図はその横断
面図、第３図は同じくその要部の側断面図、第４
図は従来成形ヒータの一例の構成を一部を破断し
て示した側面図、第５図はその横断面図、第６図
は同じくその一部の側断面図である。
１……ヒータエレメント、２……ヒータ内面（
ジルコン）コート、３……セラミツクフアイバー
ブロツク、４……断熱材、５……ヒータ端板、１
０……均熱管保持用組合せピース、１１……段差
。
FIG. 1 is a partially cutaway side view showing the configuration of an embodiment of the molded heater of the present invention, FIG. 2 is a cross-sectional view thereof, FIG. 3 is a side sectional view of the main parts, and FIG.
The figure is a partially cutaway side view of the structure of an example of a conventional molded heater, FIG. 5 is a cross-sectional view thereof, and FIG. 6 is a side cross-sectional view of a portion thereof. 1... Heater element, 2... Inner surface of heater (
Zircon) coat, 3...Ceramic fiber block, 4...Insulating material, 5...Heater end plate, 1
0... Combination piece for holding soaking tube, 11... Level difference.
Claims (1)
形ヒータ内部下面に、高絶縁物製の均熱管保持用
組合せピース１０を配置すると共にヒータ端板５
に段差１１を設け、ヒータ内面コート２上に組合
せピース１０とこの段差１１とで均熱管を保持せ
しめてなる横形セラミツク成形ヒータ。 A heat equalizing tube holding combination piece 10 made of a highly insulating material is disposed on the inside lower surface of a ceramic molded heater used in horizontal semiconductor manufacturing equipment, and a heater end plate 5 is also provided.
A horizontal ceramic molded heater is provided with a step 11 on the inner surface of the heater, and a soaking tube is held by the combination piece 10 and the step 11 on the inner surface coating 2 of the heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10027988U JPH0222597U (en) | 1988-07-27 | 1988-07-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10027988U JPH0222597U (en) | 1988-07-27 | 1988-07-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0222597U true JPH0222597U (en) | 1990-02-15 |
Family
ID=31328219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10027988U Pending JPH0222597U (en) | 1988-07-27 | 1988-07-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0222597U (en) |
-
1988
- 1988-07-27 JP JP10027988U patent/JPH0222597U/ja active Pending