JPH0222984Y2 - - Google Patents

Description

[Detailed explanation of the idea] (Industrial application field) The present invention relates to a door device.

(Prior Art) A shutter device for a diffusion furnace used for diffusion processing of semiconductor wafers is installed in a box that can exhaust gas and heat from the entrance of the furnace core tube. As shown in the figure, a diffusion furnace 1 and an exhaust box 2
A door 4 is provided at the upper end of the furnace core tube 3 that passes through the furnace core tube 3 so as to be rotatable about the horizontal axis, and a door 4 is opened and closed to allow workpieces such as wafers to be taken in and out of the furnace.

(Problem to be solved by the invention) However, in this conventional example, when the door 4 is opened to the state 4A to take in and take out the wafer, the arrow
The gas flow flowing in the A5 direction enters the clean room 6 through the door 4A and contaminates the clean room 6. Moreover, if the door 4 is opened downwardly, it will interfere with the loader that takes in and out wafers.

Furthermore, since this device has only one door 4 and is rotatable about the horizontal axis, a space equal to at least the length l of the door 4 is required from the end of the furnace core tube 3, which increases the required space. Tend.

A possible solution to these problems is to use double doors.

However, when constructed with a double door, the quartz glass of the reaction tube and the quartz glass of the door are damaged by the impact when they are closed, which not only generates dust but also degrades airtightness.

The present invention has been developed in response to the above-mentioned problems, and even if the door is made of fragile quartz glass, it will not break when closed and will not generate dust or deteriorate airtightness. It provides equipment.

(Means for Solving the Problems) This invention includes first and second doors that set the open/close state by rotational movement, and first and second doors that transmit the rotational movement to the first and second doors, respectively. a second mounting plate, a rotating shaft on which the first and second mounting plates are supported, and first and second mounting plates that engage the first and second doors and the first and second mounting plates; 2 shafts, a mechanism for fixing the first and second doors to these shafts, and a spring for movably mounting the first and second mounting plates to the first and second shafts. It is characterized by the following:

Furthermore, the present invention resides in a door device for a diffusion furnace whose door is made of quartz glass.

Furthermore, the present invention resides in a door device characterized in that the first and second doors are driven to open and close by a single motor, and one of the doors opens and closes first.

(Function) In this invention, a mounting plate is fixed to the rotating shaft that drives the opening and closing, and the door is engaged with this mounting plate, and the opening and closing operation is performed by the joint action of the mounting plate and the spring, thereby alleviating the impact when opening and closing the door. It was designed to do so.

(Example) Next, an example in which the device of the present invention is applied to a lid of a diffusion furnace will be described.

On both sides of the end of the furnace core tube 11 protruding into the exhaust box 10 are shutters 1 of length L made of quartz glass or the like.
2 is provided.

This shutter 12 is connected to the mounting plate 1 via a shaft 13.
4, but by closing the furnace core tube 11
When the spring 15 comes into contact with the shaft 13, the spring 15 acts and absorbs the impact, weakening it.Furthermore, after the contact, the spring 15 provided on the shaft 13 causes the furnace core tube 11 to
It is pressed against the edge of the

The mounting plate 14 is fixed to a vertical shaft 17 connected to a gear 16. When the drive shaft 18 is rotated in the direction of arrow A18 by a motor (not shown), the gears 22 and 2 of the gear boxes 20 and 21 fixed to the mounting base 19 are rotated.
3 rotates, and the vertical shaft 17 is rotated through the gear 16 in the opposite directions A22 and A23. When the vertical shaft 17 rotates, the shutters 12a and 12b also rotate in the same direction, and the furnace core tube 11 becomes, for example, in a state of 12A.
will be opened. Next, when the motor is rotated in the opposite direction to arrow A18, the shutter 12 is
a and 12b rotate to close the furnace core tube 11, but since the two drive shafts 18a and 18b are fixed to the coupling ring 24 with a slight shift, the shutters 12a and 12b rotate with a slight shift. move.

Therefore, after the shutter 12a contacts the furnace core tube 11, the shutter 12b contacts the furnace core tube,
The engaging portion 25 of the shutter 12b is overlapped with the shutter 12a.

As explained above, according to this embodiment, since the shutters are provided on both sides of the end of the furnace core tube so as to be rotatable about the vertical axis, the space for opening and closing the shutters is smaller than that of the conventional one-piece shutter. can do.

Furthermore, even if the shutter is opened, the gas flow is not protected by the shutter, so it flows in the direction of arrow A11 and is discharged outside the machine. Therefore, the gas flow does not enter the clean room adjacent to the furnace.

[Effect]

According to this invention, since the door is driven to open and close through the mounting plate, it is possible to obtain a door device that reduces the impact when opening and closing the door and has high adhesion.

[Brief explanation of the drawing]

Figure 1 is a diagram showing a device equipped with the present invention;
The figure is a plan view of an embodiment of the present invention, FIG. 3 is a front view of FIG. 2, and FIG. 4 is a diagram showing a conventional example. 11... Furnace core tube, 12... Shutter, 18...
Drive shaft, 22, 23...gear.

Claims (1)

[Scope of Claim for Utility Model Registration] (1) In a diffusion furnace apparatus in which a door provided at the end of a furnace core tube is opened to carry in and carry out semiconductor wafers, and the door is closed for diffusion processing, the door is closed as follows. The constructed diffusion furnace device. first and second doors that set the opening and closing states by rotationally moving to the outside of the furnace core tube; and first and second doors that are provided opposite to the first and second doors and that transmit the rotational movement, respectively. a second mounting plate, a rotating shaft on which the first and second mounting plates are supported, and first and second mounting plates that engage the first and second doors and the first and second mounting plates; 2 shafts, a mechanism for fixing the first and second doors to these shafts, and a spring for movably mounting the first and second mounting plates to the first and second shafts. Diffusion furnace equipment. (2) The diffusion furnace apparatus according to claim 1, wherein the first and second doors are made of quartz glass and are configured as doors of the diffusion furnace. (3) The scope of the utility model registration claim, in which the first and second doors are configured to be driven to open and close by a single motor, and a mechanism is provided in which one door closes first and then the other door closes. The diffusion furnace apparatus according to item 1.