JPH0223511A - Thin metallic film type magnetic recording medium - Google Patents

Thin metallic film type magnetic recording medium

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Publication number
JPH0223511A
JPH0223511A JP17329388A JP17329388A JPH0223511A JP H0223511 A JPH0223511 A JP H0223511A JP 17329388 A JP17329388 A JP 17329388A JP 17329388 A JP17329388 A JP 17329388A JP H0223511 A JPH0223511 A JP H0223511A
Authority
JP
Japan
Prior art keywords
magnetic
film
metallic film
recording
recording medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17329388A
Other languages
Japanese (ja)
Inventor
Toshiaki Morichika
森近 俊明
Toshio Tani
谷 登志夫
Chiaki Sakai
酒井 千明
Hideji Tamenaga
為永 秀司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kubota Corp
Original Assignee
Kubota Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kubota Corp filed Critical Kubota Corp
Priority to JP17329388A priority Critical patent/JPH0223511A/en
Publication of JPH0223511A publication Critical patent/JPH0223511A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To obtain the thin metallic film type magnetic recording medium for high-density recording which is lowered in recording and reproducing noises as low as possible and has well balanced resolving power and noises and low peak shift by forming a magnetic metallic film having a specific compsn. on a nonmagnetic substrate. CONSTITUTION:The magnetic metallic film formed on the nonmagnetic substrate consisting of an aluminum alloy plate, etc., is the quaternary alloy having the compsn. expressed by Co1-x-y-zNixTaz (where x, y, z denote atomic ratios) formed by adding Ta to a CoNiCr. The weatherability of the magnetic film is poor when the atomic ratio (x) of the Ni in this compsn. is below 0.05. Conversely, the saturation magnetic flux density decreases and the good magnetic characteristics and electric characteristics are not obtainable if the ratio exceeds 0.25. The weatherability of the magnetic film is insufficient if the atomic ratio Y of the Cr is below 0.07 and the good magnetic characteristics and electric characteristics are not assured if the ratio exceeds 0.14. The sufficient effect of decreasing the magnetization transition width is assured by specifying the lower limit of the Ta to 0.01 and the degradation in the magnetic characteristics and electric characteristics is suppressed by specifying the upper limit to 0.03.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は金属薄膜型磁気記録媒体に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to a metal thin film magnetic recording medium.

〔従来の技術〕[Conventional technology]

磁気記録装置における記録媒体として、従来より、非磁
性基体の表面に、酸化鉄粉末と有機バインダとからなる
磁性膜を形成した所謂塗布型磁気記録媒体が使用されて
きたが、近時は磁気記録の高密度化の要請から強磁性金
属薄膜を磁性膜とする金属薄膜型磁気記録媒体へと変わ
りつつある。
So-called coated magnetic recording media, in which a magnetic film made of iron oxide powder and an organic binder is formed on the surface of a non-magnetic substrate, have traditionally been used as recording media in magnetic recording devices. Due to the demand for higher recording density, a shift is being made to metal thin film type magnetic recording media in which a ferromagnetic metal thin film is used as the magnetic film.

その非磁性基体に形成される磁性膜の成分組成は、磁気
的性質、記録再生特性、耐候性等を総合的に評価して決
定されるが、一般的にCo、CoNi系、CoCr系、
またはCoNiCr系合金が使用されている。
The component composition of the magnetic film formed on the nonmagnetic substrate is determined by comprehensively evaluating magnetic properties, recording/reproducing characteristics, weather resistance, etc., but generally Co, CoNi, CoCr, etc.
Alternatively, a CoNiCr alloy is used.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記金属薄膜型磁気記録媒体は、これまでの塗布型磁気
記録媒体にまさる高密度の記録が可能であるが、記録再
生ノイズが大きいため、これ以上の高密度化は期待し難
い。その記録密度の向上を実現するためには、再生ノイ
ズを低減し、ノイズによる再生波形のピークシフトを少
なくすることが必要である。
The metal thin film type magnetic recording medium allows for higher density recording than conventional coating type magnetic recording media, but it is difficult to expect higher densities due to the large recording and reproduction noise. In order to improve the recording density, it is necessary to reduce reproduction noise and reduce the peak shift of the reproduced waveform due to noise.

本発明は上記に鑑み、記録再生ノイズを可及的に低くし
て分解能とノイズのつり合いのとれたピークシフトの低
い高密度記録用金属薄膜型磁気記録媒体を提供すること
を目的としている。
In view of the above, it is an object of the present invention to provide a metal thin film type magnetic recording medium for high-density recording with low peak shift and a good balance between resolution and noise by reducing recording and reproducing noise as much as possible.

〔問題点を解決するための手段および作用〕本発明の金
属薄膜型磁気記録媒体は、その金属系磁性膜が、 Co1−X−Y−ZN i xCr vT a z〔但
し、x、y、zは原子比を示し、Xは0.05〜0.2
5、yは0.07〜0.14、Zは0.01〜0.03
である〕で示される組成を有することを特徴としている
。
[Means and effects for solving the problems] In the metal thin film magnetic recording medium of the present invention, the metal magnetic film is Co1-X-Y-ZN i xCr vT az [However, x, y, z indicates the atomic ratio, and X is 0.05 to 0.2
5, y is 0.07-0.14, Z is 0.01-0.03
It is characterized by having the composition shown below.

本発明の磁気記録媒体の金属系磁性膜は、上記のように
、CoNiCr系合金にTaが添加された4元合金であ
る。CoNiCr系3元合金は、磁性膜として望まれる
高保磁力(Hc)および高残留磁束密度(Br)を有す
る合金であり、本発明に従ってこれに第4元素として適
量のTaを添加することにより、CoNiCr系3元合
金磁性膜の磁気特性・電気特性を損なうことになく、記
録再生ノイズ特性の顕著な改善効果が得られる。これは
Taの適量添加に伴って磁性膜の結晶磁気異方性の変化
、結晶粒の微細化、Crの粒界析出等が生じ、その結果
として磁区が微細化・孤立化され、磁化遷移幅が減少す
るものと考えられる。
As described above, the metal-based magnetic film of the magnetic recording medium of the present invention is a quaternary alloy in which Ta is added to a CoNiCr-based alloy. CoNiCr-based ternary alloy is an alloy that has high coercive force (Hc) and high residual magnetic flux density (Br) that are desired as a magnetic film, and by adding an appropriate amount of Ta as a fourth element to it according to the present invention, CoNiCr A remarkable improvement in recording and reproducing noise characteristics can be obtained without impairing the magnetic properties and electrical properties of the ternary alloy magnetic film. This is due to the addition of an appropriate amount of Ta, which causes changes in the magnetocrystalline anisotropy of the magnetic film, refinement of crystal grains, grain boundary precipitation of Cr, etc. As a result, the magnetic domain becomes finer and more isolated, and the magnetic transition width increases. is expected to decrease.

本発明において磁性膜のCoNiCrTa系合金の成分
組成につき、Niの原子比(X)を0.05〜0.25
としたのは、0.05に満たないと、磁性膜の耐候性が
悪くなり、他方0.25をこえると、飽和磁束密度(B
s)が減少し、良好な磁気特性および電気特性が得られ
なくなるからである。またCrの原子比(Y)を0.0
7〜0.14としたのは、0.07未満では、磁性膜の
耐候性が不足し、他方0.14より多くなると、良好な
磁気特性・電気特性を確保できなくなるからである。
In the present invention, in the composition of the CoNiCrTa alloy of the magnetic film, the atomic ratio (X) of Ni is set to 0.05 to 0.25.
The reason for this is that if it is less than 0.05, the weather resistance of the magnetic film will deteriorate, while if it exceeds 0.25, the saturation magnetic flux density (B
s) decreases, making it impossible to obtain good magnetic and electrical properties. In addition, the atomic ratio (Y) of Cr is 0.0
The reason why it is set to 7 to 0.14 is because if it is less than 0.07, the weather resistance of the magnetic film will be insufficient, and if it is more than 0.14, it will not be possible to ensure good magnetic and electrical properties.

更に、Ta量について、その原子比の下限を0、Olと
したのは、Ta添加による磁化遷移幅の十分な減少効果
を確保するためであり、他方0.03を上限としたのは
、それをこえて添加しても上記効果の増加はなく、却っ
て磁気特性・電気特性の低下を招くからである。
Furthermore, regarding the amount of Ta, the lower limit of the atomic ratio was set to 0 and Ol in order to ensure a sufficient reduction effect on the magnetization transition width by Ta addition, and the upper limit was set to 0.03 because it This is because, even if added in excess of 50%, the above-mentioned effects will not increase, and on the contrary, the magnetic and electrical properties will deteriorate.

本発明の金属薄膜型磁気記録媒体は、磁気ディスクをは
じめ、各種磁気ドラム、磁気テープ、磁気シート等を包
含する。これらは、いずれもその磁性膜が前記組成を有
するCoNiCrTa系4元合金からなる点を除いて、
公知の一般的な工程および条件に従って製作することが
できる。例えば、面内記録用磁気ディスクについて述べ
れば、アルミニウム合金板等を基体とし、その表面に無
電解めっきにより硬質のN1−Pめっき膜(膜厚:例え
ば15〜25μm)を設け、めっき膜面にテキスチャ処
理を施したのち、磁性膜に面内異方性を与えるための下
地層として、適宜の膜厚(例えば、500〜3000人
)のCr膜を形成する。そのCr膜面上に、前記組成を
もつCoNiCrTa系4元合金磁性膜(膜厚は、例え
ば500〜2000人)を成膜する。ついで磁性膜の摩
耗・損傷を防止するための保護膜として、潤滑性と耐摩
耗性を備えた被膜、例えば炭素質膜(膜厚:例えば15
0〜600人)を形成することにより、多層積層構造を
有する面内記録用磁気ディスクを得る。
The metal thin film magnetic recording medium of the present invention includes magnetic disks, various magnetic drums, magnetic tapes, magnetic sheets, and the like. These are all except that their magnetic films are made of a CoNiCrTa-based quaternary alloy having the above composition.
It can be manufactured according to known general processes and conditions. For example, regarding a magnetic disk for in-plane recording, the substrate is made of an aluminum alloy plate, etc., and a hard N1-P plating film (film thickness: e.g. 15 to 25 μm) is provided on the surface by electroless plating, and the plating film surface is After the texture treatment, a Cr film having an appropriate thickness (for example, 500 to 3,000 thick) is formed as an underlayer for imparting in-plane anisotropy to the magnetic film. A CoNiCrTa based quaternary alloy magnetic film (film thickness, for example, 500 to 2000 layers) having the above composition is formed on the Cr film surface. Next, as a protective film to prevent wear and damage of the magnetic film, a film having lubricity and wear resistance, such as a carbonaceous film (thickness: e.g. 15
0 to 600 persons), a magnetic disk for longitudinal recording having a multilayer laminated structure is obtained.

なお、その積層構造は上記の例に限定されず、例えば、
磁性膜の上に、炭素質膜を成膜するに先立って、約10
0〜500人の膜厚のCr膜を形成することにより、磁
気ディスクの耐候性をさらに高めることもできる。また
、磁性膜面に炭素質膜を形成したうえ、更にその表面に
潤滑剤(膜厚:例えば10〜100人)を設けて、磁気
ヘッドに対する保護潤滑機能をより良好なものとするこ
ともできる。
Note that the laminated structure is not limited to the above example; for example,
Prior to forming the carbonaceous film on the magnetic film, about 10
By forming a Cr film with a thickness of 0 to 500 nm, the weather resistance of the magnetic disk can be further improved. Furthermore, in addition to forming a carbonaceous film on the magnetic film surface, a lubricant (film thickness: for example, 10 to 100) can be provided on the surface to improve the protective lubrication function for the magnetic head. .

なお、各層の成膜は、スパッタリング法、イオンブレー
ティング法、真空蒸着法などにより行うことができる。
Note that each layer can be formed by a sputtering method, an ion blating method, a vacuum evaporation method, or the like.

〔実施例〕〔Example〕

災施桝上 CI)供試磁気ディスクの製作 アルミニウム合金基板(外径130−1内径40酎、厚
さ1.9mm)の表面に、N1−P無電解めっき膜(膜
厚20μm)を形成し、表面にポリッシュとテキスチャ
処理を行ったのち、マグネトロンスパッタリング法(但
し、アルゴン雰囲気圧: 0.7 Xl0−2torr
)により、まずCr膜(膜厚: 2500人)を形成し
、ついでCoNiCrTa系4元合金をターゲットとし
て磁性膜を形成した。磁性膜の組成はCo11,?O5
N t o、 Ib5Cr o、++T a o、oz
であり・膜厚は1000人である。更に、その磁性膜面
上に保護膜として膜厚300人の炭素質膜を形成して供
試磁気ディスク1 (130[11111型)を得た。
CI) Production of test magnetic disk A N1-P electroless plating film (film thickness 20 μm) was formed on the surface of an aluminum alloy substrate (outer diameter 130 mm, inner diameter 40 mm, thickness 1.9 mm). , after polishing and texturing the surface, magnetron sputtering method (argon atmosphere pressure: 0.7 Xl0-2 torr)
), a Cr film (film thickness: 2,500 layers) was first formed, and then a magnetic film was formed using a CoNiCrTa based quaternary alloy as a target. The composition of the magnetic film is Co11,? O5
N t o, Ib5Cr o, ++T a o, oz
・The film thickness is 1000 people. Furthermore, a carbonaceous film having a thickness of 300 mm was formed as a protective film on the magnetic film surface to obtain a test magnetic disk 1 (130 [11111 type)].

その保磁力(HC)は11000e、残留磁束密度と膜
厚の積(Br・δ)は500G・μである。
Its coercive force (HC) is 11,000e, and the product of residual magnetic flux density and film thickness (Br·δ) is 500G·μ.

また、比較例として、CoNiCr系3元合金をターゲ
ットとし、Coo、yN io、xc ro、を合金磁
性膜を形成した点を除いて上記と同じ工程を経て供試磁
気ディスク2を得た。
In addition, as a comparative example, a test magnetic disk 2 was obtained through the same process as above except that a CoNiCr-based ternary alloy was used as a target and an alloy magnetic film of Coo, yNio, and xcro was formed.

なお、供試磁気ディスク1および2のノイズ特性の正当
な比較のために、供試磁気ディスク2のCr膜および磁
性膜は、前記供試磁気ディスク1と同じHcおよびBr
・δとなるように成膜した。
In order to properly compare the noise characteristics of the magnetic disks 1 and 2 under test, the Cr film and magnetic film of the magnetic disk 2 under test had the same Hc and Br as those of the magnetic disk 1 under test.
・The film was formed so that δ was obtained.

(n)ノイズ特性の比較試験 各供試磁気ディスク1および2について薄膜型ヘッドを
用いて記録再生(磁気記録密度?19KFCI)を行い
、フェイズマージンアナライザによるピークシフト(n
 5ec)、およびスペクトルアナライザによるノイズ
特性の比較を行った。
(n) Comparison test of noise characteristics Recording and reproduction (magnetic recording density: 19 KFCI) were performed using a thin film head for each test magnetic disk 1 and 2, and the peak shift (n
5ec) and noise characteristics using a spectrum analyzer.

(a)ピークシフト ピットエラーレートIQ−10におけるピークシフトを
測定。
(a) Measurement of peak shift in peak shift pit error rate IQ-10.

供試ディスク    ピークシフト(15ec)磁気デ
ィスクl(発明例)      12.0磁気デイスク
2(比較例”)      14.5(b)ノイズ特性 スペクトルアナライザ 中心周波数:5MHz、周波数スパン:10Mtlz。
Test disks Peak shift (15ec) magnetic disk 1 (invention example) 12.0 magnetic disk 2 (comparative example) 14.5 (b) Noise characteristics Spectrum analyzer center frequency: 5 MHz, frequency span: 10 Mtlz.

分解能30 K Hz 磁気ディスク1(発明例)の測定結果を第1図に、磁気
ディスク2(比較例)のそれを第2図に示す、 図中、
A1は記録周波数7.5 MH2のときの変調ノイズ、
Atは同5.01vHlzのときの変調ノイズ、A、は
同2.5 MHzのときの変調ノイズであり、Bはシス
テムノイズである。
Resolution: 30 KHz The measurement results for magnetic disk 1 (invention example) are shown in Figure 1, and those for magnetic disk 2 (comparative example) are shown in Figure 2.
A1 is the modulation noise when the recording frequency is 7.5 MH2,
At is the modulation noise at 5.01 vHlz, A is the modulation noise at 2.5 MHz, and B is the system noise.

上記試験結果から明らかなように、発明例の磁気ディス
クは、ノイズが低く、ノイズによるピークシフトが大き
く改善されていることがわかる。
As is clear from the above test results, the magnetic disk of the invention example has low noise, and the peak shift due to noise is greatly improved.

〔発明の効果〕〔Effect of the invention〕

本発明の磁気記録媒体は、CoNLCra元合金磁性膜
のすぐれた磁気特性・電気特性と、その3元合金磁性膜
を凌ぐ良好なノイズ特性を有しており、再生波形相互の
干渉によるピークシフトに変化を与えずに、ノイズによ
るピークシフトが大幅に改善され、従って磁気記録の−
そうの高密度化、磁気記録媒体のコンパクト化、高品質
・高性能化を可能とするものである。
The magnetic recording medium of the present invention has excellent magnetic and electrical properties of the CoNLCra-based alloy magnetic film, as well as good noise characteristics superior to that of the ternary alloy magnetic film, and is resistant to peak shifts due to mutual interference of reproduced waveforms. The peak shift due to noise is significantly improved without any change, and therefore the −
This makes it possible to increase the density of magnetic recording media, make magnetic recording media more compact, and improve quality and performance.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図、第2図は、磁気ディスクの記録再生時のバック
グランドノイズスペクトル分析を示すグラフである。 第1図
FIGS. 1 and 2 are graphs showing background noise spectrum analysis during recording and reproduction of a magnetic disk. Figure 1

Claims (1)

【特許請求の範囲】 1、非磁性基体上に金属系磁性膜が形成された磁気記録
媒体において、該金属系磁性膜が、Co_1_−_X_
−_Y_−_ZNi_XCr_YTa_Z〔但し、x、
y、zは原子比を示し、xは0.05〜0.25、yは
0.07〜0.14、Zは0.01〜0.03である〕
で示される組成を有することを特徴とするノイズ特性に
すぐれた金属薄膜型磁気記録媒体。
[Claims] 1. In a magnetic recording medium in which a metal-based magnetic film is formed on a non-magnetic substrate, the metal-based magnetic film is Co_1_-_X_
-_Y_-_ZNi_XCr_YTa_Z [However, x,
y and z indicate the atomic ratio, x is 0.05 to 0.25, y is 0.07 to 0.14, and Z is 0.01 to 0.03]
A metal thin film magnetic recording medium with excellent noise characteristics, characterized by having a composition represented by:
JP17329388A 1988-07-11 1988-07-11 Thin metallic film type magnetic recording medium Pending JPH0223511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17329388A JPH0223511A (en) 1988-07-11 1988-07-11 Thin metallic film type magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17329388A JPH0223511A (en) 1988-07-11 1988-07-11 Thin metallic film type magnetic recording medium

Publications (1)

Publication Number Publication Date
JPH0223511A true JPH0223511A (en) 1990-01-25

Family

ID=15957760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17329388A Pending JPH0223511A (en) 1988-07-11 1988-07-11 Thin metallic film type magnetic recording medium

Country Status (1)

Country Link
JP (1) JPH0223511A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237925A (en) * 1988-03-18 1989-09-22 Mitsubishi Electric Corp Magnetic recording medium

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01237925A (en) * 1988-03-18 1989-09-22 Mitsubishi Electric Corp Magnetic recording medium

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