JPH02236405A - Image processing type measurement equipment - Google Patents

Abstract

PURPOSE:To clearly describe even a shallow edge part or the like by opposing a shape recognition means to an object to be measured placed on a placing table and elevating and lowering an illumination means. CONSTITUTION:A supporting stand 21 is erected on one side of the placing table 22 where the object to be measured 25 is placed and the shape recognition means 30 is provided to the supporting stand 21. The illumination mans 50 is provided so that it can be elevated and lowered with respect to the shape recognition means 30 and simultaneously the object to be measured 25 is irradiated by the illuminating light from a direction inclined by a prescribed angle. Besides, the irradiating angle can be changed by an angle changing means 70. Then, when the illumination means 50 is elevated and lowered by driving an elevating and lowering driving means 40 under the state that the object to be measured 25 is placed on the placing table 22 and the shape recognition means 30 is opposed to the object to be measured 25, the irradiating angle of the illumination means 50 is changed by the angle changing means 70 by interlocking with elevating and lowering the illumination means 50. Therefore, when the irradiating angle of the illumination means 50 is set at an optimum angle according to the shape of the edge part of the object to be measured 25 or the like, the description by the shape recognition means 30 is clearly executed by the proper illumination.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an image processing type measuring machine, and more particularly, the present invention relates to an image processing type measuring machine, and more particularly, the present invention relates to an image processing type measuring machine. Irradiate from the direction to the edge of the object to be measured.
This paper relates to an image processing type measuring device that can clearly photograph the shadows of objects. [Background Art] Conventionally, when measuring the dimensions, shape, etc. of an object to be measured, devices for measuring the dimensions, shape, etc. by irradiating the object with illumination light include, for example, a tool microscope, a projector, Various image processing measuring machines such as visual three-dimensional measuring machines are becoming popular. This type of image processing type measuring machine irradiates the object to be measured with illumination light from approximately perpendicularly above, and uses the illumination light to draw an image on a display device, etc., to determine its dimensions, shape, etc. Some models use a vertical epi-illumination method for measurement. This vertical epi-illumination method is often used when measuring objects with relatively simple shapes; however, objects with complex shapes, such as objects with many edges (
When measuring a step-shaped object, the shadow of its edge may not be depicted on a display device or the like.

Therefore, in order to depict the shadow of the edge, we adopted an oblique reflection method that detects the shadow of the edge by illuminating the object to be measured with illumination light from a direction inclined at a predetermined angle and receiving the reflected light. An image processing type measuring machine was devised, for example,
The technical idea is disclosed in US Patent No. 4,567,551. This technical idea is to output diverging light from a light source arranged in a substantially horizontal direction, reflect the diverging light diagonally downward with a fixed mirror, and then refract the diverging light with a glass plate, etc. It measures dimensions, shapes, etc. by shining light onto objects. [Problem to be Solved by the Invention] However, in this case, since the illumination angle with respect to the object to be measured is constant, if the object to be measured has a shallow edge portion, such as a coin, the edge portion The shadows of the parts cannot be clearly depicted. For this reason, the image depicted on a display device etc. loses its three-dimensional effect, and as a result, it becomes difficult to grasp the exact shape of the object to be measured, and it becomes difficult to accurately measure dimensions, etc. This will cause some inconvenience. An object of the present invention is to provide an image processing type measuring device that can clearly depict even shallow edges. [Means for Solving the Problems] The present invention has been made by focusing on the fact that when illuminating an object to be measured, the illumination angle can be changed depending on the shape of the edge portion of the object. Specifically, the present invention provides a workpiece stand on which an object to be measured is placed, a support stand installed upright as an example of this workpiece stand, and a method for recognizing the shape of the workpiece disposed on the support stand. The means and this shape! ! An illumination means that is arranged to be movable up and down with respect to the identification means, and that emits illumination light from a direction inclined at a predetermined angle to the object to be measured, and that the illumination angle can be changed; and an angle changing means that is driven in conjunction with the lifting and lowering of the illuminating means by the lifting driving means and that changes the irradiation angle of the illuminating means. This is an image processing type measuring device. In the present invention, it is preferable that the illumination means includes a movable mirror whose angle can be changed.

Further, in the present invention, it is preferable that the angle changing means includes a cam mechanism.

[Effect]

In such an image processing type measuring machine of the present invention, the object to be measured is placed on the stage, and the shape recognition means is caused to interrogate the object to be measured. In this state, when the elevating drive means is driven to raise and lower the illumination means, the illumination angle of the illumination means is changed by the angle changing means in conjunction with the raising and lowering of the illumination means. Therefore, if the amount of elevation of the illumination means is set so that the illumination angle of the illumination means is an optimal angle according to the shape of the edge of the proboscis to be measured, the edge of the object to be measured can also be properly illuminated. , the depiction by shape recognition means can also be made clearer.

〔Example〕

Embodiments of the present invention will be described below with reference to the drawings. A first embodiment of the present invention is shown in FIGS. 1 to 5, and the image processing type measuring instrument 10 of this embodiment includes a microscope 20, which is a so-called tool microscope, as shown in FIG. It is composed of an image display device 90.

The microscope 20 includes a support base 2l having an L-shaped side surface, and a stage 22 consisting of a so-called XY table is installed on a base 2LA of the support base 21 extending in the horizontal direction. This object stand 22 is movable in two orthogonal axes in a horizontal plane, that is, in the X-axis direction, which is the left-right direction, and in the Y-axis direction, which is the front-rear direction. These X. The amount of movement in the Y-axis direction can be set or measured by an X-axis micrometer head 23 and a Y-axis micrometer hand 24, respectively. Further, an object 25 to be measured, such as a coin, is placed on the object stand 22. A vertical movement guide 27 having a vertical movement knob 26 is attached to the upper front surface of the support base 2l. A support frame 31 having a U-shape on the side is supported on the vertical movement guide 27 so as to be vertically movable, and the vertical movement knob 26
By rotating the support frame 31, the support frame 31 is moved up and down by means of a rack, pinion mechanism, etc. (not shown). Cylindrical bodies 32 are interposed at both left and right ends of the front open end of the support frame 31 to reinforce the support frame 3l, and a thousand-sided U-shaped cover 33 is attached to the open side of the support frame 3l. It has become. At the center of the support frame 31, an objective lens 34 (see FIG. 2) protrudes downward from the support frame 31, an imaging lens 35 provided coaxially with the objective lens 34, and an imaging lens 35 provided coaxially with the objective lens 34. An optical system 37 consisting of a CCD camera 36 and a CCD camera 36 is provided coaxially with the support frame 31. A wiring cord 38 is connected to this CCD camera 36, and this wiring cord 38 is connected to the image display device 90.
It is connected to. Here, the support frame 3l,
The shape recognition means 30 is constituted by the cylindrical body 32, the cover 33, and the optical system 37. The support frame 31 includes
As shown in FIG. 2, the lifting shaft 43 is slidable in the vertical direction via a bearing plate 41 provided within the support frame 31 and a bearing sleeve 42 provided protruding from the lower surface of the support frame 31. is supported, and an L bracket 44 is supported at the lower end of this elevating shaft 43.
The illumination body 51 of the illumination means 50 is attached through the. Further, a rack 45 is provided on one side of the lifting shaft 43 located within the support frame 3l, and a pinion 47 fixed to the output shaft of a motor 46 with a reduction gear as a rotational drive source is provided on the rack 45. are engaged. Here, the elevating and lowering drive means 4 of the illumination means 50 is controlled by members numbered in a series from the temporary bearing 41 to the pinion 47.
0 is configured. As shown in FIG. 2.3, the illumination body 5l of the illumination means 50 is formed into a hollow disc shape, and an annular light power bar 52 is fixed to the upper surface of the illumination body 51. There is. Inside this light power bar 52, four light sources 54, each connected to a lead wire 53, are provided at equal intervals of 90'. At a position below these light sources 54, the illumination main body 5l is provided with a collimating lens 55 that converts the emitted light from the light B54 into parallel light. At the lower position of this collimating lens 55,
Fixed mirror 56 tilted at an angle of 40° with respect to the horizontal plane
is supported by the illumination main body 51, and reflects vertical light that has passed through the collimating lens 55 in a direction below the horizontal direction. A movable mirror 57 is arranged in the traveling direction of the illumination light reflected by the fixed mirror 56, and this movable mirror 57 is supported by a mirror holder 5. As shown in FIG. 5, the mirror holder 5 is supported by the upright portion 61A of the holding bracket 61 via support shafts 59 protruding from both front and rear ends so as to be swingable in the direction of the arrow in FIG. ing. Therefore, the tilt angle of the movable mirror 57 can be changed via the mirror holder 58, and by changing the tilt angle of the movable mirror 57, the irradiation angle of the illumination means 50 can be changed. Here, the fixed mirror 56 is moved about 4 times in the horizontal direction.
The reason why the angle is set to 0° is so that the light emitted from the light source 54 is reflected by the fixed mirror 56 and directed slightly downward. This is because if the fixed mirror 56 is set at an angle of 45 degrees or more with respect to the horizontal direction, the illumination light emitted from the fixed mirror 56 and reflected by the movable mirror 57 may interfere with the fixed mirror 56. However, if the distance between the fixed mirror 56 and the movable mirror 57 is set large, this interference will not occur, but this will have the disadvantage of increasing the size of the device. Further, the four light sources 54 are each configured independently, and the light amount of each can be freely controlled by operating a dimming device (not shown) connected via each lead m53. In addition, the collimating lens 55,
There are actually four sets of the fixed mirror 56, movable mirror 57, mirror holder 58, etc. that have the same elements, but only one set will be illustrated and explained here, and detailed explanations of the other three sets will be omitted. did. A shaft portion 58A protruding from the mirror holder 58 holding the movable mirror 57 is provided with an angle changing stage 70 that tilts the movable mirror 57 at a predetermined angle to change the irradiation angle of the illumination means 50. It looks like this. That is, as shown in FIGS. 3 to 5, the angle changing means 70 is rotatably supported by the illumination body 5l of the illumination means 50 via a plurality of balls 7l, and is moved up and down integrally with the illumination body 51. An annular rotating body 72 having a U-shaped cross section, and an illumination means 50 provided between the rotating body 72 and the support frame 31 of the shape recognition means 30 for the shape recognition means 30.
A first cam mechanism 75 is provided between the rotating body 72 and the mirror holder 58 of the illumination means 50, and a first cam mechanism 75 converts the vertical movement of the rotary body 72 into rotational movement of the rotary body 72. The second cam mechanism 8 changes the angle of the movable mirror 57 of 50, in other words, changes the illumination angle.
It is composed of 0 and 0. The first cam mechanism 75 includes an interlocking shaft 76 that is erected on the rotating body 72 and extends into the support frame 31 through an arc-shaped hole 31A formed on the lower side of the support frame 31.
A cam follower 77 protruding from the upper end of the interlocking shaft 76 is engaged with the cam follower 77, and as the cam follower 77 moves in the vertical direction, the cam follower 77
A curved cam plate 78 having a cam groove 78A that guides the rotary body 72 in the rotational direction. Further, the second cam mechanism 80 is provided in a protruding manner on the mirror holder 58 and is connected to a through hole 51 formed in the illumination main body 51.
A circular shape having a cam follower 81 rotatably supported on the upper end of a shaft portion 58A protruding through A, and a cam groove 82A that is fixed to the lower surface of the rotating body 72 and in which the cam follower 8I is engaged. A tension spring 84 is interposed between the annular cam plate 82, the stop pin 83 protruding from the illumination body 51, and the shaft portion 58A, and always urges the cam follower 81 toward one side edge of the cam groove 82A. It is composed of. At this time, four cam grooves 82A of the cam plate 82 are provided on the annular plate-shaped cam plate 82, each spaced apart by 90 degrees, and each cam groove 82A extends in the radial direction of the cam plate 82. The groove is inclined at a predetermined angle and directed from the inside to the outside, and as the cam plate 82 rotates with the rotation of the rotating body 72, the cam follower 8 is activated as indicated by the two-dot chain line in FIG. As shown, it is formed to be inclined against the tension spring 84 via the support shaft 59.

Therefore, due to the inclination of the cam follower 81, the shaft portion 58
The mirror holder 58 is tilted through A, and the movable mirror 57 supported by the mirror holder 5 is also tilted so that the angle of reflection of the illumination light coming from the fixed mirror 56 can be changed. In FIG. 1, the image display device 90 is
It is composed of a CRT 9I and a control device 92 that controls the drive of the motor 46, controls the light amount of each h of the four light sources 54, and displays the signal from the CCD camera 36 on the CRT 91. There is. This control device 92 is equipped with an operating section 93 consisting of knobs, switches, etc. for carrying out each of the above-mentioned controls on its front part. Next, the operation of this embodiment will be explained. In FIG. 1, the X-axis and Y-axis micrometer heads 23 and 24 of the stage 22 are moved so that the object to be measured 25 placed on the stage 22 is placed at a position opposite the objective lens 34. Turn to set. Next, the vertical movement knob 26 is moved to set the predetermined ridge position of the object to be measured 25 to be located at the focal position of the objective lens 34. When making these settings, please set the operation section 93 in advance.
The light source 54 of the illumination means 50 is turned on by operating the light source 54, the light from the light a54 is made into parallel light by the collimating lens 55, and the illumination light is inputted to the movable mirror 57 via the fixed mirror 56. Illumination light is radiated from the movable mirror 57 toward the object to be measured 25. If the edges of the object to be measured 25 are not properly illuminated after completing each of the above settings, operate the operating section 93 of the control device 92 to drive the motor 46 of the lifting drive means 40. , pinion 47, and rack 45 to lift shaft 43.
is moved up and down, and further, the lighting means 50 is moved up and down via the L bracket 44. At this time, the illumination means 50 is movable up and down from the top position shown by the solid line in FIG. 2 to the bottom position shown by the two-dot chain line. Further, at the uppermost position, the angle of the illumination light when irradiated from the movable mirror 57 onto the object 25 with respect to the horizontal direction is θ1 -60°. When the illumination stage 50 is at the position shown by the solid line in FIG. 2, and the illumination light from the movable mirror 57 is irradiated onto the object to be measured 25 at an angle of 60 degrees with respect to the horizontal direction, Due to reasons such as the shallow edge of the object to be measured 25, CR
If the image of the edge part is not accurately depicted in T9 1, operate the operation section 93 as described above to control the motor 46.
is driven to lower the illumination means 50 via the elevating shaft 43.

As the illumination means 50 descends, the rotating body 72 rotatably supported by the illumination body 51 also descends.
2, the interlocking shaft 76 installed vertically will also be lowered. As the interlocking shaft 76 descends, the cam follower 77 also tries to descend, but since the cam follower 77 is engaged with the cam groove 78A of the cam plate 78, the interlocking shaft 76 moves along the shape of the cam groove 78A. Through this, the rotating body 72 is rotationally driven in the direction of the arrow in FIG. 3, counterclockwise when viewed from above. As the rotating body 72 rotates, a cam plate 82 provided integrally with the rotating body 72 also rotates. The rotation of this temporary cam 82 also rotates the cam groove 82A formed on the cam plate 82, but as shown in FIG. In addition, since the cam groove 82A is formed in a direction that moves away from the center of the cam plate 82 with respect to rotation in the direction of the arrow, the cam follower 81 that is engaged with the cam groove 82A moves away from the cam plate 82.
As the cam plate 82 rotates, it is displaced radially outward. Therefore, as shown in FIG. 5, the shaft portion 58A of the mirror holder 58 to which the cam follower 81 is attached is inclined from the solid line position in FIG. 57 rotates clockwise in the figure. Due to this rotation of the movable mirror 57, the illumination light that enters from the fixed mirror 56, is reflected on the movable mirror 57, and is outputted has an angle that is successively smaller than the angle θ1 = 60° with respect to the horizontal direction. It will be done. In this way, when the illumination means 50 is successively lowered, the movable mirror 57 is tilted clockwise in FIG.
The illumination light reflected from the movable mirror 57 has an illumination angle that is gradually close to the horizontal direction, and at the lowest position of the illumination means 50 shown by the two-dot chain line in FIG. , angle θ! -30". Therefore, the inclination angle θ of the illumination light reflected by the movable mirror 57 can be adjusted within the range of -60° to 30". Therefore, as the inclination angle θ of the illumination light approaches the horizontal direction, the angle of incidence of the illumination light on the object to be measured 25 becomes shallower, so even if the mechanical part of the object to be measured 25 is shallow, C
The shadow of the edge portion of the object to be measured 25 is clearly depicted on RT91. Further, by lowering the illumination means 50, it becomes possible to more clearly depict the shadow of the shallow edge of the object to be measured 25, but if the light from the light source 54 is weak, operating the operation part 93 The light intensity of each of the four light sources 54 is controlled independently to appropriately set the illuminance of each part.

When the illumination angle and illumination light amount are properly set in this way, the image of the object to be measured 25 is clearly depicted on the CRT 91 of the image display device WL90, so while looking at this display, Perform dimension measurements, etc.

Note that the illumination light irradiated onto the object to be measured 25 is
5 and enters the CCD camera 36 via the objective lens 34 and the imaging lens 35, where the electrical signal is photoelectrically converted and sent to the image display device 90 via the wiring cord 38.
The image is displayed on the CRT 91 as described above by inputting the image manually to the control device 92. According to this embodiment as described above, there are the following effects. In this embodiment, the illumination means 50 is replaced by the shape recognition means 30.
In addition, the movable mirror 57 of the illumination means 50 is provided so as to be able to change the inclination angle, so that the illumination angle can be changed. It is possible to provide clear images of edges, etc. without compromising the three-dimensional effect. Further, since the inclination angle of the movable mirror 57 is made to incline in conjunction with the raising and lowering operation of the illumination means 50 by the action of the angle changing means 70, the object to be measured by the movable mirror 57 is tilted.
This has the effect of keeping the illumination position at 5 constant at all times.
Furthermore, the angle changing means 70 includes a rotary body 72 and a first and a second
Since the interlocking mechanism uses the cam mechanism 75 and 80, the angle of the movable mirror 57 can be changed with a simple structure, which also simplifies the assembly work and shortens the assembly time. Therefore, the microscope 20 can be provided at low cost.

Moreover, since the four light sources 54 of the illumination means 50 can each independently control the light amount, it is possible to perform appropriate illumination according to each part of the object 25 to be measured.

Furthermore, the shaft portion 58A of the mirror holder 58 has a tension spring 84.
Since the cam follower 81 provided on the shaft portion 58A is always in contact with the cam groove 82A of the cam plate 82 from one direction, the backlash between the cam follower 81 and the cam groove 82A is effectively reduced. can be prevented.

A second embodiment of the present invention is shown in FIG. 6, and this second embodiment differs from the previous embodiment in the configuration of the angle changing means 70. Here, the same reference numerals are used for the same or equivalent components as in the above embodiment, and the explanation thereof will be omitted or simplified. Angle change 7 in this example
0 is the support frame 3l of the shape recognition means 30 and the lighting stage 50
One cam mechanism 8 provided between the movable mirror 57 of
5. The cam mechanism 85 includes a cam follower 86 rotatably supported by a shaft portion 58A protruding from the mirror holder 58, and the cam follower 86 is allowed to come into contact with the cam follower 86, and the cam mechanism 85 is tilted downward to the right as it goes downward in the figure. The support frame 3 of the shape recognition means 30 has a cam surface 87A.
1 and the shaft portion 58A.
and a tension spring 8B that is interposed between the cam follower 86 and the illumination main body 51 and urges the cam follower 86 to always come into contact with the cam surface 87A of the cam 87.

Further, the lifting shaft 43 of the 1,000-stage lifting drive 4o is connected to the lighting means 50.
is fixed directly to the top surface of the

Incidentally, the mirror holder 5B has the same features as in the embodiment described above.
It is tiltably supported via a support shaft 59 by a holding bracket 61 fixed to the illumination main body 51 of the support frame 3I.

In this embodiment, when the illumination means 5o is driven in the downward direction from the illustrated state by the action of the lift r4 driving means 40, the cam follower 86 moves along the cam surface 87A, and the cam follower 86 moves along the shaft portion. Support shaft 5 via 58A
It rotates clockwise in the figure around 9. As a result, the mirror holder 58 also rotates clockwise, and the inclination angle of the reflective surface of the movable mirror 57 held by the mirror holder 58 is also changed, and the angle of the illumination light is also close to the horizontal direction as in the previous embodiment. It changes as follows. In this embodiment as well, the same effects as in the previous embodiment can be achieved, and furthermore, since the angle changing means 70 is composed of one cam mechanism 85, the structure can be simplified and the device can be simplified. An added effect is that it can be provided at a low price.

FIG. 7 shows a third embodiment of the present invention, in which the illumination angle is changed by electrical control. That is, in FIG. 7, a sector gear 95 is fixed to the mirror holder 58, and an output gear 97 is meshed with the sector gear 95 via an intermediate gear 96. This output gear 97 is fixed to the output shaft of a moke 98 for changing the angle, and the sector gear 95, the intermediate gear 96, the output gear 97, and the motor 98 for changing the angle constitute the angle changing means 70 of this embodiment. ing. The motor 98 of this angle changing means 70 is connected to the control ITH of the image display device 90.
The drive is controlled by a device 92. The control device 92 also controls the drive of the motor 46 of the lifting drive means 40, and controls the moke 98 so as to maintain a predetermined relationship with the drive control of the motor 46. The control of the motor 98 by the control device 92 is such that the angle at which the mirror holder 58 is rotated via the spindle 59 via the output gear 97, the intermediate gear 96, and the sector gear 95 by driving the motor 98 is set to the first angle, The control is such that it has the same relationship as the second embodiment. In this embodiment as well, the angle of the movable mirror 57 is changed according to the elevation of the illumination means 50, and the irradiation angle to the object to be measured 25 can be changed to an appropriate angle. A similar effect can be obtained, and
An additional effect can be added that the control can be made extremely simple.

It should be noted that the present invention is not limited to the configurations of the embodiments described above, and various improvements and design changes can be made without departing from the gist of the present invention.

For example, in the first embodiment, the cam plate 78 in the first cam mechanism 75 is provided on the rotating body 72 side, and the cam follower 7
7 may be provided on the support frame 3l side, in short, this first
The cam mechanism 75 is provided between the rotating body 72' and the shape recognition stage 30, and the illumination means 5 for the shape recognition stage 30 is provided.
Any cam with a structure that can convert the vertical movement of 0 into the rotational movement of the rotating body 72 may be used. The concept of the first cam mechanism 75 can also be applied to the second cam mechanism 80, and it goes without saying that the cam plate 82 may be provided on the shaft portion 58A side and the cam follower 81 may be provided on the rotating body 72 side. It is.

Further, in the third embodiment, the control of the motor 98 for changing the angle is controlled by the drive control 13' of the motor 46 of the elevating means 40.
Although it is related to the drive control I of the motor 46,
For example, as shown by the two-dot chain line in FIG. The detection signal from the detector 99 may be input to the control device 92, and the drive of the motor 98 may be controlled based on this detection signal. In short, the motor 98 only needs to be driven in conjunction with the raising and lowering of the illumination means 50. Furthermore, in each of the embodiments described above, the fixed mirror 56 may also be provided rotatably, and both mirrors 56 and 57 may be driven together. Furthermore, the four light sources 54 do not need to be able to control the light amount independently, and the whole light source may be used as one light source, but if they are independently controllable as in the above embodiment, the shape of the object 25 to be measured can be controlled. It has the advantage of being able to control the amount of light according to the situation.

Further, the light source 54 is not limited to being directly attached to the illumination body 51 as in the above embodiment, but may be installed at a separate position from the illumination body 5l and guided to the position of the illumination body 51 using an optical fiber or the like. In short, any material that can make a predetermined amount of light enter the fixed mirror 56 may be used. Furthermore, lighting means 5
The light source 54 is not necessarily limited to the one using the mirrors 56 and 57, and the light source 54 is provided so as to be tiltable directly with respect to the illumination main body 51, and by tilting the light source 54, the proboscis 25 to be measured is
Alternatively, the illumination angle may be changed.

Furthermore, the illumination means 50 does not need to be moved up and down with respect to the shape recognition means 30 in a state where the illumination steps 50 are directly supported by the shape recognition means 30.
0 is supported movably up and down on the support stand 2l, and the illumination means 5
0 to the support base 21 results in the shape recognition means 3
It may also be something that can be raised or lowered relative to 0. Furthermore, the configuration of the shape recognition means 30 is not limited to the configuration of the above embodiment, and for example, CO
The D camera 36 may be an image orthicon or the like. Furthermore, the image processing type measuring machine according to the present invention is not limited to one applied to a tool microscope as in the above embodiment, but can also be applied to other types of optical measuring machines such as projectors and coordinate measuring machines. It is also applicable. [Effects of the Invention] According to the present invention as described above, the M
Even when measuring an object, a clear image can be obtained, the structure is simple, and the entire apparatus can be provided at a low cost.

[Brief explanation of drawings]

Figures 1 to 5 show an embodiment in which the present invention is applied to a tool microscope. Figure 1 is a perspective view with the cover removed, and Figure 2 is an enlarged view of the illumination means portion of Figure 1. Cross section, 3rd
The figure is an enlarged perspective view with a part of the illumination device section cut away, FIG. 4 is an exploded perspective view of the rotating body section, FIG. FIG. 7 is an enlarged sectional view of essential parts showing a second embodiment of the invention, and FIG. 7 is an enlarged sectional view of essential parts showing a third embodiment of the invention. 10... Image processing type measuring device, 2o... Microscope, 21
. . . Support stand, 22 . . . Load stage, 25 .
5o... Illumination means, 51... Illumination body, 54...
Light source, 56...Fixed mirror 57...Movable mirror
7o... Angle changing means, 72... Rotating body, 75...
・First cam mechanism, 8o...Second cam mechanism, 85・
...Cam mechanism, 9o...Image display device.

Claims (4)

[Claims] (1) A workpiece stand on which the object to be measured is placed; a support stand erected on one side of the workpiece stand; means for recognizing the shape of the object disposed on the support stand; and this shape. An illumination means that is arranged to be movable up and down with respect to the recognition means, and that emits illumination light from a direction inclined at a predetermined angle to the object to be measured, and that is capable of changing the illumination angle; and an angle changing means that is driven in conjunction with the lifting and lowering of the illumination means by the lifting driving means and that changes the irradiation angle of the illumination means. Image processing type measuring machine. (2) In claim 1, the illumination means includes a light source provided on the illumination body, a fixed mirror provided on the illumination body that reflects light from the light source at a predetermined angle, and a reflection from the fixed mirror. An image processing type measuring device comprising a movable mirror that reflects light at a predetermined angle and is tiltably supported with respect to an illumination main body. (3) In claim 1 or 2, the angle changing means includes a rotating body rotatably supported by the illumination means;
A first cam mechanism is provided between the rotary body and the shape recognition means and converts the vertical movement of the illumination means with respect to the shape recognition means into rotational movement of the rotary body; An image processing type measuring instrument comprising: a second cam mechanism that converts the rotational movement of the rotating body into a movement that changes the illumination angle of the illumination means. (4) In claim 1 or 2, the angle changing means is provided between the illumination means and the shape recognition means,
An image processing type measuring instrument comprising a cam mechanism that directly converts the vertical movement of the illumination means with respect to the shape recognition means into the movement of changing the illumination angle of the illumination means.