JPH02237675A - Coating method - Google Patents
Coating methodInfo
- Publication number
- JPH02237675A JPH02237675A JP5552889A JP5552889A JPH02237675A JP H02237675 A JPH02237675 A JP H02237675A JP 5552889 A JP5552889 A JP 5552889A JP 5552889 A JP5552889 A JP 5552889A JP H02237675 A JPH02237675 A JP H02237675A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- web
- tension
- width
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 88
- 239000011248 coating agent Substances 0.000 claims abstract description 84
- 238000003825 pressing Methods 0.000 claims abstract description 3
- 239000007788 liquid Substances 0.000 claims description 26
- 230000008719 thickening Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 19
- 230000001105 regulatory effect Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 6
- 239000011247 coating layer Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000003973 paint Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000007765 extrusion coating Methods 0.000 description 3
- 229920002799 BoPET Polymers 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007756 gravure coating Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000007962 solid dispersion Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Coating Apparatus (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、磁性塗料などをウェブに対して塗布する塗布
装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a coating device for coating a web with magnetic paint or the like.
磁気記録媒体を製造する際の磁性塗料の塗布、写真感光
材料液の塗布、感熱記録材料液の塗布などに際して、塗
布ヘッドから塗布液を押し出ししながらウェブに対して
塗布する押出し塗布方法（エクストルージョンコート法
）が知られている。When applying magnetic paint, photographic light-sensitive material liquid, heat-sensitive recording material liquid, etc. when manufacturing magnetic recording media, an extrusion coating method is used in which the coating liquid is applied to the web while extruding it from the coating head. Coat method) is known.
この押出し塗布方法は、ロールコート法、グラビアコー
ト法、スライドビードコート法、あるいはドクターコー
ト法を付加した方法などに対して膜厚制御性に優れるな
どの利点がある。This extrusion coating method has advantages such as superior film thickness controllability over roll coating, gravure coating, slide bead coating, or methods including doctor coating.
かかる押出し塗布方法において、塗布ヘッドをウェブに
対して押し付けながら塗布することでウェブを伸長させ
るけれども、一般的にウェブはその幅方向中心より両側
部の伸長度（張力）が小さい。したがって、両側部が中
央部より膜厚が厚くなる傾向があり補場方向の膜厚不均
一を招《。In such an extrusion coating method, the web is stretched by applying the coating while pressing the coating head against the web, but generally the degree of stretching (tension) of the web is smaller at both sides than at the center in the width direction. Therefore, the film thickness tends to be thicker on both sides than in the center, resulting in non-uniform film thickness in the complementary field direction.
また、通常所定塗布幅を得るべくフロントエッジ部材と
バックエッジ部材との間に塗布幅規制板を設けることが
行われているが、塗布の進行に伴って塗布ヘッドの両側
外方にベースの削りカスやウェブ表面の付着物が溜まり
、ウェブ両側部が塗布ヘッドから浮くようになる結果、
同様に両側部の膜厚が厚くなることがある。Furthermore, in order to obtain a predetermined coating width, a coating width regulating plate is usually provided between the front edge member and the back edge member, but as coating progresses, the base is scraped on both sides of the coating head. Debris and deposits on the web surface accumulate, causing both sides of the web to float away from the coating head.
Similarly, the film thickness on both sides may become thicker.
このような問題に対して、特開昭６１−２５７２６３号
、同６１−２５７２６８号、同６２−２４２５７４号に
かかる技術が提案されている。To solve this problem, techniques according to Japanese Patent Laid-open Nos. 61-257263, 61-257268, and 62-242574 have been proposed.
しかし、前記二者はウェブの両側外方に付着物が堆積す
ることに関するもので、実際的には、その要因はまれで
あり、それよりウェブの張力分布の幅方向に関しての不
均一性が支配的であることを本発明者らは知見した。However, the two cases mentioned above are related to the accumulation of deposits on both sides of the web, and in reality, this is a rare cause, and is more dominated by the non-uniformity of the web tension distribution in the width direction. The present inventors have found that this is true.
この点に関して、特開昭６２−２４１５７４号技術は、
塗布幅規制板の内側側縁を傾斜させることで塗布液の吐
出量をより少なくし、全体として吐出量を幅方向に均一
化させるもので、考え方としては優れている。In this regard, the technique of JP-A No. 62-241574 is
By slanting the inner side edge of the coating width regulating plate, the amount of coating liquid discharged is further reduced, and the overall amount of discharged amount is made uniform in the width direction, which is an excellent concept.
しかしながら、吐出量と塗布幅規制板の傾斜角度との関
係は微妙なものであり、その設計がきわめて難しいばか
りでなく、両側部の吐出量、換言すれば吐出圧力を故意
に低下させるものであるため、磁性塗料のような固体分
散系の塗布液においては、凝集物が傾斜部に堆積するこ
とによって、スジ故障の原因となったり、吐出圧力が小
さいため、経時的に塗布液の吐出が不安定、すなわち塗
布液が出なくなることがあり、膜厚の均一性を却って阻
害する問題がある。However, the relationship between the discharge amount and the inclination angle of the coating width regulating plate is delicate, and not only is its design extremely difficult, but the discharge amount on both sides, in other words, the discharge pressure, is intentionally lowered. Therefore, in solid dispersion type coating liquids such as magnetic paints, aggregates may accumulate on the slopes, causing streak failures, and the discharge pressure may be low, causing the coating liquid to become unstable over time. There is a problem that stability, that is, the coating liquid may not come out, which may actually impede the uniformity of the film thickness.
そこで、本発明の主たる目的は、ウェブの両側部におけ
る膜厚化を防止し、幅方向に均一な膜厚分布を得ること
ができる塗布方法を提供することにある。Therefore, the main object of the present invention is to provide a coating method that can prevent film thickness from increasing on both sides of a web and obtain a uniform film thickness distribution in the width direction.
上記課題は、走行するウェブの背面を支持しない状態で
このウェブに対して押出し型塗布ヘッドを相対的に押し
付けてその塗布ヘッドの少なくとも一つのスロットから
塗布液を押し出してウェブに塗布する装置であって；
ウェブの塗布部における張力が１４〜２８ｋｇ／ｍ幅と
することで解決できる。The above-mentioned problem is an apparatus that presses an extrusion-type coating head relatively against a running web without supporting the back surface of the web, pushes out a coating liquid from at least one slot of the coating head, and applies the coating liquid to the web. This problem can be solved by setting the tension at the applied part of the web to 14 to 28 kg/m width.
本発明にしたがって、ウェブの塗布部における張力を１
４ｋｇ／ｍ幅以上に大きくしたので、ウェブの両側部も
十分伸長され、ウェブと塗布ヘッドとの接触圧力が高い
条件のもとで、塗布が行われるため、両側部の膜厚化が
防止される。また、張力が２８ｋｇ／ｍ幅以下とされて
いるので、ウェブを強力に伸長することもなく、ウェブ
の伸びに伴うツレすじを防止できる。According to the invention, the tension in the applied part of the web is reduced to 1
Since the width is increased to 4 kg/m or more, both sides of the web are sufficiently stretched, and coating is performed under conditions where the contact pressure between the web and the coating head is high, which prevents the film from thickening on both sides. Ru. Further, since the tension is set to 28 kg/m width or less, the web is not stretched too much, and it is possible to prevent twisting lines caused by stretching of the web.
Ｃ発明の具体的構成〕 以下本発明をさらに詳説する。Specific configuration of invention C] The present invention will be explained in more detail below.
第１および２図は本発明を実施するための装置を示した
もので、ウェブｌはガイドロール２、サポートロール３
，４およびガイドロール５を通り後工程、たとえば乾燥
工程に導かれる。1 and 2 show an apparatus for carrying out the present invention, in which the web l has a guide roll 2 and a support roll 3.
, 4 and guide rolls 5, and is guided to a subsequent process, for example, a drying process.
サポートロール３，４間には、塗布ヘッド６がウェブ１
表面に対して押し付けられ、これによってウェブｌの塗
布部における張力が設定されるようになっている。この
設定には、塗布ヘッドｌの背後からたとえばスクリュー
ねじ７によって塗布ヘッド６をウェブ１に対しての押し
付け力を調整することで設定される。A coating head 6 is placed between the support rolls 3 and 4 to coat the web 1.
It is pressed against the surface, thereby setting the tension in the application part of the web I. This setting is made by adjusting the force with which the coating head 6 is pressed against the web 1 using, for example, a screw 7 from behind the coating head 1.
塗布ヘッド６は、フロントエッジ６Ａおよびパックエッ
ジ６Ｂを有し、これらの間に液溜め部６Ｃおよびこれに
幅が狭い連通ずるスロット６Ｄを有する。塗布液は、ボ
ンブ（図示せず）により、液溜め部６Ｃに圧送され、ス
ロット６Ｄを通ってウェブ１に対して塗布される。種々
の幅のウェブｌに対して共通的に当該塗布ヘッド６を使
用し、かつ所望の塗布幅を得るために、フロントエッジ
６Ａトパックエッジ６Ｂとの間の両側間隔には、薄い塗
布幅規制板８が介装されている。塗布ヘッド６の長手方
向両端は端板９，９により塞がれている。The coating head 6 has a front edge 6A and a pack edge 6B, and between these, a liquid reservoir 6C and a narrow slot 6D that communicates with the liquid reservoir 6C. The coating liquid is pumped to the liquid reservoir 6C by a bomb (not shown), and is applied to the web 1 through the slot 6D. In order to commonly use the coating head 6 for webs of various widths and to obtain a desired coating width, a thin coating width regulating plate is provided between the front edge 6A and the pack edge 6B on both sides. 8 is interposed. Both longitudinal ends of the coating head 6 are closed by end plates 9, 9.
サポートロール４とガイドロール５との間には好ましく
はウェブｌに対して塗布した塗布層の幅方向分布を検出
するための膜厚検出器１０が設けられており、この膜厚
検出器１０によって検出した塗布層の幅方向分布に基づ
いて前記スクリューねじ７によるウェブ１に対する進出
度を調整するようになっている。A film thickness detector 10 is preferably provided between the support roll 4 and the guide roll 5 to detect the widthwise distribution of the coating layer applied to the web l. The degree of advance of the screw 7 into the web 1 is adjusted based on the detected widthwise distribution of the coating layer.
かかる設備の下では、スロット６Ｄから塗布液がウェブ
１表面に塗布される。その際、予めあるいは膜厚検出器
ｌＯからの膜厚信号に基づいて塗布ヘッド６のウェブｌ
に対する進出度が調整されることでウェブ１の張力が調
整される。Under such equipment, the coating liquid is applied to the surface of the web 1 from the slot 6D. At that time, the web l of the coating head 6 is measured in advance or based on the film thickness signal from the film thickness detector lO.
The tension of the web 1 is adjusted by adjusting the degree of advancement.
このとき、ウェブｌの塗布部における張力としては、１
４〜２８ｋｇＺｍ幅とされる。１４ｋｇ／ｍ幅未満では
両側部での膜厚化を十分防止できず、２８ｋｇ／ｍ幅を
超えるとウェブ１に大きな伸長力が作用し主に幅中央部
に長手方向に沿ったツレすじが発生しウェブ１の平面性
を阻害するばかりでなく、塗布層の表面に凹凸ができ塗
布ムラを生じる。張力の調整にあたって、塗布ヘッドの
ウェブに対する押し付け量のほか、サポートロールの塗
布ヘッドがわへの位置によってもよい。At this time, the tension at the coated part of the web l is 1
The width is 4 to 28 kgZm. If the width is less than 14 kg/m, it is not possible to sufficiently prevent the film from thickening on both sides, and if the width exceeds 28 kg/m, a large elongation force acts on the web 1, causing warp lines along the longitudinal direction mainly in the center of the width. This not only impairs the flatness of the web 1, but also creates unevenness on the surface of the coating layer, resulting in uneven coating. In adjusting the tension, in addition to the amount of pressure of the coating head against the web, the position of the support roll next to the coating head may be used.
塗布膜厚の幅方向分布は上記ウェブの張力とともに、塗
布液の吐出圧力とも相関する。実際のスロット出口の吐
出圧力は、スロットの幅が狭いなどの理由によって検出
が困難である。しかし、液溜め部における圧力は検出で
きるので、これを指標とするとき、その圧力は、０．
０２ 〜０． ２ ｋｇｆ／ｃｄが好ましい。さらに好
ましくは０．０４〜０． １ ｋｇｆ／ａｌｌが良い。The widthwise distribution of the coating film thickness correlates with the web tension as well as the coating liquid discharge pressure. The actual discharge pressure at the slot outlet is difficult to detect due to reasons such as the narrow width of the slot. However, since the pressure in the liquid reservoir can be detected, when this is used as an index, the pressure is 0.
02 ~0. 2 kgf/cd is preferred. More preferably 0.04 to 0. 1 kgf/all is good.
かかる塗布液の吐出圧力Ｐについて、本発明者らは種々
実験を行ったところ、次のようなことを知見した。Regarding the discharge pressure P of the coating liquid, the present inventors conducted various experiments and found the following.
すなわち、ウェブの搬送速度を１５０ｍ，張力を１６ｋ
ｇｌｍ幅、塗布量を７５０ｇ／分、塗布幅を４５０Ｍ、
この塗布幅を塗布幅規制板にて規制した条件下で、吐出
圧力Ｐを種々変化させて塗布性を調べた。In other words, the web conveyance speed is 150 m, and the tension is 16 k.
glm width, coating amount 750g/min, coating width 450M,
The coating properties were examined by variously changing the discharge pressure P under the condition that the coating width was regulated by a coating width regulating plate.
その結果、吐出圧力Ｐが０．０２未満であると、第８図
のように、ウェブがバックエッジ面の終端から離れる傾
向がみられ、塗布液がウェブとパックエッジ面の全面と
の間に封じ込まれず、図示のＡ部分からエアが混入する
とともに、膜厚が不安定になる。また、吐出圧力Ｐがｏ
． ２ｋｇｆ ／ａｄを超えると、第１０図のように、
ウェブがパックエッジ面の終端部に近接し塗布液が封じ
込まれる傾向があり、その結果塗布液がパックエッジ面
の終端からの流出性が悪くなり、薄膜になったり、フロ
ントエッジ面側に食み出してしまったり、塗布幅方向に
塗布液が広がって塗布ヘッドから食み出す事態を招く。As a result, when the discharge pressure P is less than 0.02, as shown in Fig. 8, there is a tendency for the web to separate from the end of the back edge surface, and the coating liquid is spread between the web and the entire surface of the pack edge surface. It is not sealed, and air gets mixed in from the part A shown in the figure, and the film thickness becomes unstable. Also, the discharge pressure P is o
．． If it exceeds 2kgf/ad, as shown in Figure 10,
The web tends to get close to the end of the pack edge surface and the coating liquid tends to be trapped, resulting in poor flow of the coating liquid from the end of the pack edge surface, resulting in a thin film or erosion on the front edge side. This may cause the coating liquid to overflow, or the coating liquid to spread in the coating width direction and to protrude from the coating head.
これに対して、上記吐出圧力範囲とすると、第９図のよ
うに、正常な塗布状態を得ることができる。On the other hand, if the discharge pressure is within the above range, a normal coating state can be obtained as shown in FIG.
上記例において、塗布幅規制板はエッジ形成部材と一体
に当初から形成したものでもよい。塗布幅規制板の内側
縁は出側に幅広に傾斜してもよいし、好ましくは両側部
に膜厚の乱れを生じさせないために、ウェブと実質的に
直行していることが好ましい。In the above example, the coating width regulating plate may be formed integrally with the edge forming member from the beginning. The inner edge of the coating width regulating plate may be inclined broadly toward the exit side, and is preferably substantially perpendicular to the web in order to prevent disturbances in film thickness on both sides.
本発明におけるウェブとしては、裸の支持体のほかその
支持体に塗布層を有し＝その塗布層に塗布する際にも本
発明を適用できる。塗布ヘッドには、１つのスロットの
ほか複数のスロットを有していてもよい。本発明は、磁
性塗料の塗布のほか写真感光材料または感熱記録材料の
塗布にも適用できる。支持体の材質としては、ポリエチ
レンテレフタレート、ポリカーボネート、アクリルなど
のプラスチック、紙、アルミなどの金属板、あるいはそ
れらの積層体などを用い．ることができる。As for the web in the present invention, in addition to a bare support, the present invention can also be applied to a support having a coating layer and coating the coating layer. The coating head may have a plurality of slots in addition to one slot. The present invention can be applied not only to the coating of magnetic paint but also to the coating of photographic light-sensitive materials or heat-sensitive recording materials. The material used for the support includes plastics such as polyethylene terephthalate, polycarbonate, and acrylic, paper, metal plates such as aluminum, or laminates thereof. can be done.
次に実施例を示し本発明の効果を明らかにする。 Next, Examples will be shown to clarify the effects of the present invention.
厚み７５（ｔｍ，幅５００ｍｎ（７）ＰＥＴフィルムを
１５０ｍ／分で走行させながら、磁性塗料を７５０ｇ／
分の塗布量および４５０Ｍの塗布幅をもって上記例にし
たがって塗布した。その際、張力の大きさおよび塗布幅
規制板の有無によって膜厚がどのように変化するかを調
べたところ、第３〜７図の結果が得られた。塗布装置の
寸法は第２図に示した。膜厚基準値は３μｍとした。While running the PET film (thickness 75 tm, width 500 m) at 150 m/min, apply 750 g/min of magnetic paint.
Coating was carried out according to the above example with a coating weight of 450M and a coating width of 450M. At that time, we investigated how the film thickness changes depending on the magnitude of the tension and the presence or absence of the coating width regulating plate, and the results shown in Figs. 3 to 7 were obtained. The dimensions of the coating device are shown in FIG. The film thickness standard value was 3 μm.
以上のとおり、本発明によれば、ウェブの両側部におけ
る膜厚化を防止し、幅方向に均一な膜厚分布を得ること
ができる。As described above, according to the present invention, it is possible to prevent film thickness from increasing on both sides of the web and obtain a uniform film thickness distribution in the width direction.
第１図は本発明を実施するための塗布装置の概要図、第
２図はその要部斜視図、第３〜７図は実施例の結果を示
すグラフ、第８〜１０図は塗布状態を示す図である。
１・・・ウェブ ３，４・・・サポートロール６・・
・塗布ヘッド
第
図
第
図
塗Ｊｐ情
（ｍｍｌ
ｔ岬場
＋ｍｍ＋
玄＃幡（ｍｍｌ
第
図
第
図
第
図
６艮力（ｋｇ沖鴫）Fig. 1 is a schematic diagram of a coating device for carrying out the present invention, Fig. 2 is a perspective view of its main parts, Figs. 3 to 7 are graphs showing the results of the examples, and Figs. FIG. 1... Web 3, 4... Support role 6...
・Applying head fig.
Claims (2)
ェブに対して押出し型塗布ヘッドを相対的に押し付けて
その塗布ヘッドの少なくとも一つのスロットから塗布液
を押し出してウェブに塗布する装置であつて； ウェブの塗布部における張力が１４〜２８ｋｇ／ｍ幅と
することを特徴とする塗布方法。(1) A device for applying a coating liquid onto the web by pressing an extrusion-type coating head relatively against the running web without supporting the back side of the web, and extruding the coating liquid from at least one slot of the coating head. ; A coating method characterized in that the tension in the coating portion of the web is 14 to 28 kg/m width.
２〜０．２ｋｇｆ／ｃｍ＾２である請求項１記載の塗布
方法。(2) The pressure of the coating liquid in the liquid pool of the coating head is 0.0
The coating method according to claim 1, wherein the coating amount is 2 to 0.2 kgf/cm^2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1055528A JP2875543B2 (en) | 1989-03-08 | 1989-03-08 | Application method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1055528A JP2875543B2 (en) | 1989-03-08 | 1989-03-08 | Application method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02237675A true JPH02237675A (en) | 1990-09-20 |
| JP2875543B2 JP2875543B2 (en) | 1999-03-31 |
Family
ID=13001229
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1055528A Expired - Fee Related JP2875543B2 (en) | 1989-03-08 | 1989-03-08 | Application method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2875543B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000051767A (en) * | 1998-08-05 | 2000-02-22 | Tdk Corp | Coating device and coating method |
| JP2009291737A (en) * | 2008-06-06 | 2009-12-17 | Hitachi Maxell Ltd | Die coating method |
| JP2010274241A (en) * | 2009-06-01 | 2010-12-09 | Furukawa Electric Co Ltd:The | Thin film forming method and thin film forming apparatus |
| JP2013211082A (en) * | 2012-03-30 | 2013-10-10 | Fujifilm Corp | Coating apparatus and coating method |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60150865A (en) * | 1984-01-17 | 1985-08-08 | Konishiroku Photo Ind Co Ltd | Coating method |
| JPS62117666A (en) * | 1985-11-15 | 1987-05-29 | Fuji Photo Film Co Ltd | Coating method |
-
1989
- 1989-03-08 JP JP1055528A patent/JP2875543B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60150865A (en) * | 1984-01-17 | 1985-08-08 | Konishiroku Photo Ind Co Ltd | Coating method |
| JPS62117666A (en) * | 1985-11-15 | 1987-05-29 | Fuji Photo Film Co Ltd | Coating method |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000051767A (en) * | 1998-08-05 | 2000-02-22 | Tdk Corp | Coating device and coating method |
| JP2009291737A (en) * | 2008-06-06 | 2009-12-17 | Hitachi Maxell Ltd | Die coating method |
| JP2010274241A (en) * | 2009-06-01 | 2010-12-09 | Furukawa Electric Co Ltd:The | Thin film forming method and thin film forming apparatus |
| JP2013211082A (en) * | 2012-03-30 | 2013-10-10 | Fujifilm Corp | Coating apparatus and coating method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2875543B2 (en) | 1999-03-31 |
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