JPH0224537U - - Google Patents
Info
- Publication number
- JPH0224537U JPH0224537U JP10113988U JP10113988U JPH0224537U JP H0224537 U JPH0224537 U JP H0224537U JP 10113988 U JP10113988 U JP 10113988U JP 10113988 U JP10113988 U JP 10113988U JP H0224537 U JPH0224537 U JP H0224537U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- support
- locking shoulder
- periphery
- protruded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001154 acute effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
図面は本考案の実施例を示し、第１図は断面図
、第２図は支持片の拡大斜視図、第３図はチヤツ
クプレートの平面図、第４図は端板部分の断面図
、第５図は検出板部分の平面図である。
１……チヤツクプレート、６……支持片、９…
…支承縁、１２……回転軸。
The drawings show an embodiment of the present invention; FIG. 1 is a sectional view, FIG. 2 is an enlarged perspective view of the support piece, FIG. 3 is a plan view of the chuck plate, and FIG. 4 is a sectional view of the end plate. FIG. 5 is a plan view of the detection plate portion. 1...chuck plate, 6...support piece, 9...
...Supporting edge, 12...Rotating shaft.
Claims (1)
エハの外周を取り囲むよう複数の支持片を突設し
、該支持片にウエハの周縁を担持するよう係止肩
を形成し、該係止肩の側方に先端が鋭角の支承縁
を形成した両面スクラバにおけるウエハ支持装置
。 A plurality of support pieces are protruded from the surface of a rotatably provided chuck plate so as to surround the outer periphery of the wafer, a locking shoulder is formed on the support piece to support the periphery of the wafer, and a locking shoulder is formed on the side of the locking shoulder. A wafer support device in a double-sided scrubber that has a bearing edge with an acute angle on both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10113988U JPH0224537U (en) | 1988-08-01 | 1988-08-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10113988U JPH0224537U (en) | 1988-08-01 | 1988-08-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0224537U true JPH0224537U (en) | 1990-02-19 |
Family
ID=31329861
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10113988U Pending JPH0224537U (en) | 1988-08-01 | 1988-08-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0224537U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58217184A (en) * | 1982-06-09 | 1983-12-17 | 三菱電機株式会社 | Wafer drier |
| JPS63178531A (en) * | 1987-01-20 | 1988-07-22 | Fujitsu Ltd | Washing type intermediate stage |
-
1988
- 1988-08-01 JP JP10113988U patent/JPH0224537U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58217184A (en) * | 1982-06-09 | 1983-12-17 | 三菱電機株式会社 | Wafer drier |
| JPS63178531A (en) * | 1987-01-20 | 1988-07-22 | Fujitsu Ltd | Washing type intermediate stage |