JPH022535B2 - - Google Patents
Info
- Publication number
- JPH022535B2 JPH022535B2 JP56171416A JP17141681A JPH022535B2 JP H022535 B2 JPH022535 B2 JP H022535B2 JP 56171416 A JP56171416 A JP 56171416A JP 17141681 A JP17141681 A JP 17141681A JP H022535 B2 JPH022535 B2 JP H022535B2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- glass
- composition
- sensor
- gas sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000203 mixture Substances 0.000 claims description 19
- 239000011521 glass Substances 0.000 claims description 13
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims description 6
- 229910001887 tin oxide Inorganic materials 0.000 claims description 6
- 150000001875 compounds Chemical class 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- 229910000480 nickel oxide Inorganic materials 0.000 claims description 3
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims description 3
- 150000002484 inorganic compounds Chemical class 0.000 claims 1
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000007789 gas Substances 0.000 description 22
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 16
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 14
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 14
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 14
- 230000035945 sensitivity Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000008859 change Effects 0.000 description 8
- 239000001257 hydrogen Substances 0.000 description 7
- 229910052739 hydrogen Inorganic materials 0.000 description 7
- 230000007257 malfunction Effects 0.000 description 7
- 229910052697 platinum Inorganic materials 0.000 description 7
- 239000001294 propane Substances 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910006404 SnO 2 Inorganic materials 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052593 corundum Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- JQJCSZOEVBFDKO-UHFFFAOYSA-N lead zinc Chemical compound [Zn].[Pb] JQJCSZOEVBFDKO-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 229910001845 yogo sapphire Inorganic materials 0.000 description 2
- 241000877463 Lanio Species 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N Na2O Inorganic materials [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- 231100001261 hazardous Toxicity 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Non-Adjustable Resistors (AREA)
Description
本発明は、メタン、プロパン、水素等のガスを
検知する半導体式ガスセンサ組成物に関するもの
である。
従来半導体式ガスセンサ材料として使用されて
きたのは酸化スズ、酸化亜鉛、酸化鉄等である。
これらの材料はメタン、プロパン、水素等のガス
に触れると、そのガス濃度に応じて抵抗値が変動
するため、センサ材料として利用されてきてい
る。
しかし、これらのセンサは、(1)特性の経時変化
が大きい、(2)アルコール等の防害ガスにより誤動
するという欠点があつた。すなわち、上記(2)の現
象において、上記材料は、一般にメタン、プロパ
ン、水素等よりアルコールに対しての感度が高
い。即ち、アルコールによる抵抗値変動が他のガ
スによるものより大きい。
以上を要約すると、従来センサ材料は、信頼性
に乏しいという欠点を有している。これを解決す
るために各所で種々の改善策を模索しているが、
センサとしての改善はされていない。
本発明の目的は、上記した従来技術の欠点をな
くし、センサ材料としての経時安定性が優れ、し
かも防害ガスであるアルコールにより誤動作を起
こさないガスセンサ組成物を提供するにある。
ガスセンサ組成物として、(a)酸化スズに各種の
添加物を加えて検討してきた。その結果、酸化ス
ズ20〜80重量と酸化ニツケル、ニツケル酸ランタ
ンのうちから選ばれた少なくとも１種類の化合物
を20〜80重量％混合したもの60〜98重量％に、(b)
ガラス40〜２重量％を混合した組成物が、特性の
経時変化が少なく、しかもアルコールによる誤動
作を生じないことを見い出した。
酸化ニツケル、ニツケル酸ランタンのうちから
選ばれた１種類の化合物を20〜80重量％としたの
は、20重量％未満では、(1)特性の経時変化がまだ
大きい、(2)アルコールによる誤動作を生じる、(3)
固有抵抗が高く、実用的な数〜数＋KΩの素子を
作成する場合、素子形状が大形になる。という欠
点があるためであり、また80重量％を越えると、
ガスセンサとして、メタン、プロパン、水素等の
感度が小さくなるためである。
ガラス量を２〜40重量％としたのは、２重量％
未満では、特性の経時変化が大きく、40重量％を
越えると、(1)特性の経時変化が大きい、(2)ガスセ
ンサとしてメタン、プロパン、水素等の感度が小
さくなる。という欠点が表われてくるためであ
る。
ここで、ガラス添加による効果を述べる。上記
の酸化スズ等にガラスを添加すると、ガラスは焼
成時に一部が溶解して、それに接している酸化ス
ズ等の酸化物粒子に付着し、酸化物粒子同志の接
合を促進すると同時に、焼結助剤的な作用によ
り、酸化物粒子間の接触部を点から面へと広げる
効果があるため、ガラスを添加することにより、
センサ材料の比表面積が大きく、機械的に安定な
酸化物粉体のマトリツクス構造ができ、特性の経
時変化の抑制、電気的特性（特に抵抗値の安定
性、再現性）の向上、及びアルコールに対する感
度に比べ、メタン、プロパン、水素等に対する感
度の高い組成物を得ることができる。
ガラス材料としては、種々のものが適用できる
が、特にホウケイ酸鉛系、ホウケイ酸鉛亜鉛系、
ケイ酸アルカリ系、CaO−ZnO−PbO−TiO2−
SiO2系が適している。またガラス材料として無
定形のSiO2、SnO2、Al2O3等の酸化物を用いて
も同様の効果が得られる。
さらに、ガス感度を変えたり、ガス応答時間を
制御したり、素子の焼結を制御する目的のために
金属や、金属酸化物を微量添加することも可能で
あり、本発明の効果をそこなうものではないこと
は当然である。
以下、本発明を実施例により詳細に説明する。
実施例 １
第１図に示すように90％純度のアルミナ基板１
の裏面に白金ペーストを用いて加熱ヒータパター
ンを印刷する。これを乾燥後アルミナ基板表面に
同一の白金ペーストを用いて、一対の電極を印刷
する。この基板を乾燥後、電気炉を用いて1200℃
２時間で焼成し白金ヒータ４、白金電極２を形成
する。一対の白金電極間２間に、SnO2、NiO、
LaNiO3およびCaO−ZnO−PbO−TiO2−SiO2系
ガラスを第１表に示すように所定量秤量混合し厚
膜ペーストとしたものを印刷する。これを乾燥
後、ベルト炉を用い、最高温度900℃で10分間焼
成しガスセンサ組成物層３を形成する。
The present invention relates to a semiconductor gas sensor composition for detecting gases such as methane, propane, and hydrogen. Tin oxide, zinc oxide, iron oxide, etc. have been conventionally used as semiconductor gas sensor materials.
When these materials come into contact with a gas such as methane, propane, or hydrogen, their resistance changes depending on the gas concentration, so they have been used as sensor materials. However, these sensors have the disadvantages of (1) large changes in characteristics over time, and (2) malfunction due to harmful gases such as alcohol. That is, in the phenomenon (2) above, the above materials are generally more sensitive to alcohol than methane, propane, hydrogen, etc. That is, the resistance value variation due to alcohol is larger than that due to other gases. In summary, conventional sensor materials suffer from poor reliability. In order to solve this problem, various improvement measures are being sought in various places, but
No improvements have been made as a sensor. An object of the present invention is to eliminate the drawbacks of the prior art described above, to provide a gas sensor composition that has excellent stability over time as a sensor material, and that does not cause malfunctions due to alcohol, which is a harmful gas. Various additives have been added to (a) tin oxide as gas sensor compositions. As a result, 60-98% by weight of a mixture of 20-80% by weight of tin oxide and 20-80% by weight of at least one compound selected from nickel oxide and lanthanum nickelate, (b)
It has been found that a composition containing 40 to 2% by weight of glass exhibits little change in properties over time and does not cause malfunctions due to alcohol. The reason why one type of compound selected from nickel oxide and lanthanum nickelate is set at 20 to 80% by weight is because if it is less than 20% by weight, (1) the characteristics will change significantly over time, and (2) malfunctions due to alcohol will occur. (3)
When creating an element with a high specific resistance of several to several +KΩ for practical use, the element shape becomes large. This is because there is a drawback that, if it exceeds 80% by weight,
This is because the sensitivity of the gas sensor to methane, propane, hydrogen, etc. is reduced. The amount of glass is 2% to 40% by weight.
If it is less than 40% by weight, the characteristics will change significantly over time, and if it exceeds 40% by weight, (1) the characteristics will change significantly over time, and (2) the sensitivity of the gas sensor to methane, propane, hydrogen, etc. will decrease. This is because the shortcomings become apparent. Here, the effects of glass addition will be described. When glass is added to the above-mentioned tin oxide, etc., part of the glass melts during firing and adheres to the oxide particles such as tin oxide that are in contact with it, promoting bonding between the oxide particles and at the same time, sintering. Due to its auxiliary action, it has the effect of expanding the contact area between oxide particles from a point to a surface, so by adding glass,
The sensor material has a large specific surface area and a mechanically stable oxide powder matrix structure, which suppresses changes in characteristics over time, improves electrical characteristics (especially stability and reproducibility of resistance values), and improves resistance to alcohol. A composition with high sensitivity to methane, propane, hydrogen, etc. can be obtained compared to the sensitivity. Various glass materials can be used, but lead borosilicate, lead zinc borosilicate, and
Alkaline silicate, CaO−ZnO−PbO−TiO 2 −
SiO 2 system is suitable. Similar effects can also be obtained by using amorphous oxides such as SiO 2 , SnO 2 , Al 2 O 3 and the like as the glass material. Furthermore, it is also possible to add trace amounts of metals or metal oxides for the purpose of changing gas sensitivity, controlling gas response time, or controlling sintering of the element, which would impair the effects of the present invention. Of course not. Hereinafter, the present invention will be explained in detail with reference to Examples. Example 1 Alumina substrate 1 with 90% purity as shown in Figure 1
A heater pattern is printed on the back side of the board using platinum paste. After drying this, a pair of electrodes are printed on the surface of the alumina substrate using the same platinum paste. After drying this substrate, heat it to 1200℃ using an electric furnace.
It is fired for 2 hours to form a platinum heater 4 and a platinum electrode 2. Between a pair of platinum electrodes, SnO 2 , NiO,
LaNiO 3 and CaO-ZnO-PbO-TiO 2 -SiO 2 glass were mixed in predetermined amounts as shown in Table 1 to form a thick film paste and printed. After drying this, it is fired for 10 minutes at a maximum temperature of 900° C. using a belt furnace to form the gas sensor composition layer 3.
【表】【table】
【表】【table】
【表】
以上の様にして作成したセンサの特性をまとめ
て第１表に示す。
組成は40点あり、三角図で示すと、第２図に示
す点に相当する（第１表中のNo.と第２図中の番号
は対応している）。各組成での試料数は約10個で
ある。第２表中の表示特性値は約10個の試料の平
均値である。抵抗値の経時変化は、センサを400
℃に加熱し、素子にD.C.6Vを印加した状態で
1000時間経過した後の素子抵抗値を初期値と比較
した場合の抵控変化率である。感度は、センサを
400℃に加熱し、1000PPmの各ガスに触れさせた
場合の抵抗変化率を表わしたものである。
なお、ガラスの組成は、下記のとおりである。
ZnO：5wt％、PbO：5wt％、CaO：16wt％、
SiO2：45wt％、Al2O3：13wt％、TiO2：16wt
％。
第１表中、No.１、２、17、28のセンサは、抵抗
の経時変化が大きいという欠点がある。またNo.
２、６、17、23は、エタノールの感度が大きく、
エタノールにより誤動作を越こすことが予想でき
る。またNo.２のセンサは、固有抵抗が高すぎると
いう欠点もある。
しかし、上記No.１、２、６、17、23、28を除い
た34種の組成は、(1)固有抵抗値が適切である。(2)
抵抗の経時変化率が小さく、特性が安定である。
(3)メタン、プロパン、水素の感度が高い割にエタ
ノールの感度が低く、エタノールによる誤動作が
防止できる。という利点があり、前記目標を達成
できていることがわかる。なお、目標を達成した
上記組成は、第２図において、ハツチング内部の
組成に対応している。
実施例 ２
第１表中、No.20の組成（SnO2：45wt％、
NiO：45wt％、ガラス：10wt％）で、ガラスを
(1) ホウケイ酸鉛系（PbO：54wt％、SiO2：
35wt％、B2O3：11wt％）。
(2) ホウケイ酸鉛亜鉛系（ZnO：15wt％、
PbO：20wt％、SiO2：40wt％、B2O3：15wt
％、Al2O3：10wt％）。
(3) ケイ酸アルカリ系（SiO2：62wt％、Al2O3：
2wt％、CaO：6wt％、MgO：5wt％、Na2O：
3wt％、K2O：10wt％、SrO：8wt％、BaO：
4wt％）。
とした場合にセンサを作成し、諸特性を調べた。
作成方法は、実施例１と同様である。測定結果を
第２表に示す。第２表から、ガラスの種類が異な
ると、固有抵抗値が多少異なるものの、安定性や
感度の点では、本質的な差はないことがわかる。
以上述べたように、本発明の組成物を用いて作
成したガスセンサは、特性の経時安定性が優れ、
しかも防害ガスであるアルコールにより誤動作を
起こさない。したがつて本発明は従来品と比較し
て大幅に信頼性の高いガスセンサを達成すること
ができる。[Table] Table 1 summarizes the characteristics of the sensor created as described above. There are 40 composition points, and when shown in a triangular diagram, they correspond to the points shown in Figure 2 (No. in Table 1 and numbers in Figure 2 correspond). The number of samples for each composition is approximately 10. The characteristic values shown in Table 2 are average values of about 10 samples. The change in resistance value over time is 400
While heating to ℃ and applying DC6V to the element.
This is the resistance change rate when comparing the element resistance value after 1000 hours with the initial value. Sensitivity is the sensor
It shows the rate of change in resistance when heated to 400°C and exposed to 1000PPm of each gas. Note that the composition of the glass is as follows.
ZnO: 5wt%, PbO: 5wt%, CaO: 16wt%,
SiO2 : 45wt%, Al2O3 : 13wt%, TiO2 : 16wt
%. Sensors No. 1, 2, 17, and 28 in Table 1 have the disadvantage that the resistance changes over time. Also No.
2, 6, 17, and 23 have high ethanol sensitivity;
It is expected that ethanol will overcome the malfunction. Sensor No. 2 also has the disadvantage that its specific resistance is too high. However, the 34 compositions excluding Nos. 1, 2, 6, 17, 23, and 28 have (1) appropriate resistivity values. (2)
The rate of change in resistance over time is small and the characteristics are stable.
(3) Although the sensitivity of methane, propane, and hydrogen is high, the sensitivity of ethanol is low, and malfunctions caused by ethanol can be prevented. It can be seen that this has the advantage of achieving the above-mentioned goal. Note that the above composition that achieved the target corresponds to the composition inside the hatching in FIG. Example 2 Composition of No. 20 in Table 1 (SnO 2 : 45wt%,
NiO: 45wt%, glass: 10wt%) and glass (1) lead borosilicate system (PbO: 54wt%, SiO 2 :
35wt% , B2O3 : 11wt%). (2) Lead zinc borosilicate system (ZnO: 15wt%,
PbO: 20wt%, SiO2 : 40wt%, B2O3 : 15wt
%, Al2O3 : 10wt%) . (3) Alkaline silicate (SiO 2 : 62wt%, Al 2 O 3 :
2wt%, CaO: 6wt%, MgO: 5wt%, Na2O :
3wt%, K2O : 10wt%, SrO: 8wt%, BaO:
4wt%). In this case, we created a sensor and investigated its characteristics.
The manufacturing method is the same as in Example 1. The measurement results are shown in Table 2. From Table 2, it can be seen that although different types of glass have somewhat different specific resistance values, there is no essential difference in terms of stability and sensitivity. As described above, the gas sensor made using the composition of the present invention has excellent stability over time, and
Moreover, alcohol, which is a hazardous gas, does not cause malfunctions. Therefore, the present invention can achieve a gas sensor that is significantly more reliable than conventional products.
第１図は、本発明に基ずき作成したガスセンサ
の構造を示し、第２図は、本発明のガスセンサ組
成物の範囲を示す図である。
１：アルミナ基板、２：白金電極、３：ガスセ
ンサ組成物層、４：白金ヒータ。
FIG. 1 shows the structure of a gas sensor made according to the present invention, and FIG. 2 is a diagram showing the range of the gas sensor composition of the present invention. 1: Alumina substrate, 2: Platinum electrode, 3: Gas sensor composition layer, 4: Platinum heater.
Claims (1)
ツケル酸ランタンのうち選ばれた少なくとも１種
類の化合物80〜20重量％から成る無機化合物の組
成物60〜98重量％と、(b)ガラス40〜２重量％より
なることを特徴とするガスセンサ組成物。1 (a) 60-98% by weight of an inorganic compound composition consisting of 20-80% by weight of tin oxide, 80-20% by weight of at least one compound selected from nickel oxide and lanthanum nickelate, and (b) A gas sensor composition comprising 40 to 2% by weight of glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56171416A JPS5873853A (en) | 1981-10-28 | 1981-10-28 | gas sensor composition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56171416A JPS5873853A (en) | 1981-10-28 | 1981-10-28 | gas sensor composition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5873853A JPS5873853A (en) | 1983-05-04 |
| JPH022535B2 true JPH022535B2 (en) | 1990-01-18 |
Family
ID=15922726
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56171416A Granted JPS5873853A (en) | 1981-10-28 | 1981-10-28 | gas sensor composition |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5873853A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59168352A (en) * | 1983-03-15 | 1984-09-22 | Hitachi Ltd | Gas detection element and gas leak alarm |
| JPS60227160A (en) * | 1984-04-25 | 1985-11-12 | Shinkosumosu Denki Kk | Carbon monoxide detecting element |
-
1981
- 1981-10-28 JP JP56171416A patent/JPS5873853A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5873853A (en) | 1983-05-04 |
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