JPH0225563U - - Google Patents
Info
- Publication number
- JPH0225563U JPH0225563U JP1988102418U JP10241888U JPH0225563U JP H0225563 U JPH0225563 U JP H0225563U JP 1988102418 U JP1988102418 U JP 1988102418U JP 10241888 U JP10241888 U JP 10241888U JP H0225563 U JPH0225563 U JP H0225563U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- target
- metal layer
- supporting
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988102418U JPH0225563U (sr) | 1988-08-03 | 1988-08-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988102418U JPH0225563U (sr) | 1988-08-03 | 1988-08-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0225563U true JPH0225563U (sr) | 1990-02-20 |
Family
ID=31332312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988102418U Pending JPH0225563U (sr) | 1988-08-03 | 1988-08-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0225563U (sr) |
-
1988
- 1988-08-03 JP JP1988102418U patent/JPH0225563U/ja active Pending
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