JPS63110567U - - Google Patents
Info
- Publication number
- JPS63110567U JPS63110567U JP45587U JP45587U JPS63110567U JP S63110567 U JPS63110567 U JP S63110567U JP 45587 U JP45587 U JP 45587U JP 45587 U JP45587 U JP 45587U JP S63110567 U JPS63110567 U JP S63110567U
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- sensor
- power supply
- set value
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 4
- 238000010884 ion-beam technique Methods 0.000 claims 3
- 230000008021 deposition Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 230000000903 blocking effect Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45587U JPS63110567U (sr) | 1987-01-06 | 1987-01-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45587U JPS63110567U (sr) | 1987-01-06 | 1987-01-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110567U true JPS63110567U (sr) | 1988-07-15 |
Family
ID=30777444
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45587U Pending JPS63110567U (sr) | 1987-01-06 | 1987-01-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110567U (sr) |
-
1987
- 1987-01-06 JP JP45587U patent/JPS63110567U/ja active Pending
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