JPH0225857U - - Google Patents
Info
- Publication number
- JPH0225857U JPH0225857U JP10373488U JP10373488U JPH0225857U JP H0225857 U JPH0225857 U JP H0225857U JP 10373488 U JP10373488 U JP 10373488U JP 10373488 U JP10373488 U JP 10373488U JP H0225857 U JPH0225857 U JP H0225857U
- Authority
- JP
- Japan
- Prior art keywords
- heater
- gas
- gas detection
- detection section
- gas sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 3
- 239000011521 glass Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Description
第１図は実施例に用いたガスセンサの要部平面
図、第２図は第１図の要部拡大平面図、第３図は
第２図の―方向断面図、第４図は実施例に用
いたガスセンサの全体構造を表す断面図である。
第５図は他のガスセンサの平面図、第６図はその
断面図である。第７図は、実施例の回路図、第８
図１，２はその動作波形図である。第９図は、従
来例のガスセンサの平面図である。
図において、２…耐熱絶縁性基板、４…ガラス
層、６…ガスセンサ本体、８…ヒータ膜、１０…
ヒータ電極、１２…絶縁膜、１４…金属酸化物半
導体膜、１６…検出電極、２０，２１…外部電極
、２２…Ｆ型リード、２４，２５…カバー、２６
，２７…ガス導入孔、２９…プリント基板、３６
…スイツチ、３８…サンプルホールド回路。
Fig. 1 is a plan view of the main part of the gas sensor used in the example, Fig. 2 is an enlarged plan view of the main part of Fig. 1, Fig. 3 is a sectional view in the - direction of Fig. 2, and Fig. 4 is a plan view of the main part of the gas sensor used in the example. FIG. 2 is a cross-sectional view showing the overall structure of the gas sensor used.
FIG. 5 is a plan view of another gas sensor, and FIG. 6 is a sectional view thereof. FIG. 7 is a circuit diagram of the embodiment;
FIGS. 1 and 2 are operational waveform diagrams. FIG. 9 is a plan view of a conventional gas sensor. In the figure, 2... heat-resistant insulating substrate, 4... glass layer, 6... gas sensor body, 8... heater film, 10...
Heater electrode, 12... Insulating film, 14... Metal oxide semiconductor film, 16... Detection electrode, 20, 21... External electrode, 22... F-type lead, 24, 25... Cover, 26
, 27... Gas introduction hole, 29... Printed circuit board, 36
...Switch, 38...Sample and hold circuit.
Claims (1)
、膜状のヒータと膜状のガス検出部とを備えたガ
スセンサ本体を設けて、この基板をガスセンサの
ベースに兼用し、 スイツチを介してヒータを電源に接続すると共
に、このスイツチを制御するタイマを設け、ヒー
タに間欠的に電力を加えてガス検出部を間欠的に
加熱し、 かつガス検出部の電気的特性からガスを検出す
るための手段を設けた、ガス検出装置。[Scope of Claim for Utility Model Registration] A gas sensor body having a film-like heater and a film-like gas detection section is provided on a heat-resistant insulating substrate whose surface material is glass, and this substrate is used as the base of the gas sensor. In addition to connecting the heater to the power supply via a switch, a timer is provided to control this switch, and the heater is intermittently supplied with power to intermittently heat the gas detection section, and the gas detection section's electrical A gas detection device equipped with means for detecting gas based on its characteristics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988103734U JPH0710286Y2 (en) | 1988-08-05 | 1988-08-05 | Gas detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988103734U JPH0710286Y2 (en) | 1988-08-05 | 1988-08-05 | Gas detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0225857U true JPH0225857U (en) | 1990-02-20 |
| JPH0710286Y2 JPH0710286Y2 (en) | 1995-03-08 |
Family
ID=31334829
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988103734U Expired - Lifetime JPH0710286Y2 (en) | 1988-08-05 | 1988-08-05 | Gas detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0710286Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002046734A1 (en) * | 2000-12-07 | 2002-06-13 | Matsushita Electric Industrial Co., Ltd. | Gas sensor and detection method and device for gas.concentration |
| JP2002303598A (en) * | 2001-04-05 | 2002-10-18 | Denso Corp | Gas detection method using gas sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55159151A (en) * | 1979-05-31 | 1980-12-11 | Matsushita Electric Ind Co Ltd | Detector |
| JPS56109048U (en) * | 1980-01-24 | 1981-08-24 | ||
| JPS61201149A (en) * | 1985-03-04 | 1986-09-05 | Ricoh Co Ltd | Sensor driving method |
| JPS61201150A (en) * | 1985-03-04 | 1986-09-05 | Ricoh Co Ltd | Detection device |
| JPH01313751A (en) * | 1988-06-13 | 1989-12-19 | Figaro Eng Inc | Gas sensor |
-
1988
- 1988-08-05 JP JP1988103734U patent/JPH0710286Y2/en not_active Expired - Lifetime
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55159151A (en) * | 1979-05-31 | 1980-12-11 | Matsushita Electric Ind Co Ltd | Detector |
| JPS56109048U (en) * | 1980-01-24 | 1981-08-24 | ||
| JPS61201149A (en) * | 1985-03-04 | 1986-09-05 | Ricoh Co Ltd | Sensor driving method |
| JPS61201150A (en) * | 1985-03-04 | 1986-09-05 | Ricoh Co Ltd | Detection device |
| JPH01313751A (en) * | 1988-06-13 | 1989-12-19 | Figaro Eng Inc | Gas sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002046734A1 (en) * | 2000-12-07 | 2002-06-13 | Matsushita Electric Industrial Co., Ltd. | Gas sensor and detection method and device for gas.concentration |
| JP2002303598A (en) * | 2001-04-05 | 2002-10-18 | Denso Corp | Gas detection method using gas sensor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0710286Y2 (en) | 1995-03-08 |