JPH022652U

JPH022652U -

Info

Publication number: JPH022652U
Application number: JP8040188U
Authority: JP
Priority date: 1988-06-17
Filing date: 1988-06-17
Publication date: 1990-01-09

Description

[Brief explanation of drawings]

第１図ないし第４図はこの考案の第１実施例を
説明するための図であつて、第１図は斜視図、第
２図は断面図、第３図は積み重ねた状態の正面図
、第４図はウエハを取り出す場合の説明図である
。第５図および第６図はこの考案の第２実施例を
説明するための図であつて、第５図は斜視図、第
６図はウエハを取り出す場合の説明図である。第
７図は、この考案の第３実施例を説明するための
断面図である。第８図は従来のウエハトレイの説
明図である。２……ウエハ、１１……キヤリア本体、１２…
…凹部、１３……切欠き部、１４……取つ手、１
５……凸部、１６……脚、１７……凹部。 1 to 4 are diagrams for explaining the first embodiment of this invention, in which FIG. 1 is a perspective view, FIG. 2 is a sectional view, and FIG. 3 is a front view of the stacked state. FIG. 4 is an explanatory diagram when taking out a wafer. 5 and 6 are views for explaining a second embodiment of this invention, in which FIG. 5 is a perspective view and FIG. 6 is an explanatory view when taking out a wafer. FIG. 7 is a sectional view for explaining a third embodiment of this invention. FIG. 8 is an explanatory diagram of a conventional wafer tray. 2...Wafer, 11...Carrier body, 12...
...Recess, 13...Notch, 14...Handle, 1
5... Convex portion, 16... Leg, 17... Concave portion.

Claims

[Scope of Claim for Utility Model Registration] A wafer dust evaluation carrier on which a wafer for dust inspection is placed, a recess in which the wafer fits while being placed is provided on the upper surface of the carrier body, and the recess is provided in the carrier body. a notch extending from the inside of the carrier body to the periphery of the carrier body, and an engagement recess provided in one of the upper and lower parts of the carrier body that come into contact with each other when the carrier bodies are stacked one above the other; A wafer dust evaluation carrier characterized in that an engagement protrusion that engages with the engagement recess is provided on the other side of the wafer dust evaluation carrier.