JPH02265802A - Stocker device - Google Patents

Abstract

PURPOSE:To facilitate the stock control and to enhance the quality of products by constituting a stocker for masks which are used for manufacturing semiconductors, with a storage rack, a conveying section for setting a mask on the storage rack and taking up the same from the rack, an air-conditioning section for the conveying section and a control section having a stock controlling function. CONSTITUTION:Upon introduction of a mask 1, the mask 1 is set on a delivery section 2 so as to identify the identification number of the mask 1, and is are then stored on a rack 3 at vacant address by means of a conveyer robot 4. Upon delivery of a mask 1, the above-mentioned steps are carried out in the reverse order. Data of both masks 1 and rack 3 relating to the introduction and delivery are processed and controlled by a control section which is not shown. Meanwhile, an air circulation pump 6 is driven so as to feed clean primary air from a primary air intake port 5 to the rack 3 by way of a filter 7. A part of air having passed the rack 3 is discharged from a discharge port 9, and the remainder of the air is circulated in the stocker device. Thus, it is possible to facilitate the stock control and to enhance the quality of products.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a stocker device for storing a plurality of reticles or masks (hereinafter referred to as masks) used in semiconductor manufacturing equipment.

BACKGROUND OF THE INVENTION Conventionally, masks have been stored using a stocker device that is only air-conditioned, but the judgment and work of loading and unloading masks into the stocker device requires manpower.

Problems to be Solved by the Invention Manually loading and unloading masks causes the following problems.

First, human-generated dust adheres to masks, degrading the quality of semiconductor devices.

Second, it takes time and effort to search for a specific mask required for manufacturing in the semiconductor manufacturing equipment from among the group of masks stocked in the stocker device.

In order to solve the above-mentioned problems, the present invention first aims to provide a stocker device that automatically transports masks within the stocker device and facilitates mask inventory management within the stocker device.

Means for Solving the Problems In order to achieve the above object, the stocker device of the present invention is equipped with a vertical coordinate thread robot inside itself for automatically transporting masks, and also has a method for managing mask inventory within the stocker device. The device is equipped with a control section to perform the following steps.

Effect: With this configuration, the transportation of the mass inside the stocker device requires no human intervention, thereby reducing the contamination of the masks by dust.The lateral airflow prevents dust from contaminating the masks while they are being stored on the shelf. Become protected from pollution.

The stocker device manages information about which masks are stored on which shelves among the masks existing in the stocker device, and has a function to notify people of this management information, making it easier for people to wear masks. It assists in the operation of processes that use

Further, by combining a transport unit that automatically transports masks with a control unit that manages stocker inventory, it becomes easier for humans to insert and take out masks from the stocker device.

Example Hereinafter, one embodiment of the present invention will be described based on the drawings.

FIG. 1 is a perspective view showing the structure of the stocker device.

In FIG. 1, 1 is a mask, 2 is a part of the transport unit and is a transfer section that transfers masks between people and the stocker device, 3 is a shelf for storing masks, and 4 is a transfer section 2 and a shelf. 3
This is a transport robot that transports masks between.

To explain the stocker device configured as described above, first, when the mask 1 is stored in the stocker device, the mask 1 is installed at the delivery 82. After recognizing the mask identification number shown on the stocker device mask 1, an empty address on the shelf section 3 is found, and the mask 1 is stored at the empty address using the transport robot 4.

Next, when taking out the masks 1 from the stocker device, after the worker specifies the mask 1 to be taken out to the stocker device, the stocker device transfers the mask 1 from the shelf section 3 to the delivery section using the transfer robot 4. Transport to 2. After that, the operator takes out the mask 1 from the delivery section 2.

Note that the operator's operation may be replaced by a transport system managed by a host combination coater.

FIG. 2 is a sectional view of the stocker device explaining the air conditioning relationship.

The air conditioning relationship will be explained based on FIG. 2.

5 is the primary air intake, and the secondary air is the air in the clean room: J! It shall be supplied by the equipment.

6 is a pump for air circulation, 7 is a filter, 8 is a shelf, 9
is an exhaust port.

The air introduced into the stocker device from the air intake port 5 by the air circulation pump 6 passes through the shelf section 8 after dust is removed by the filter 7 . At this point, the shelf 8 becomes a side flow airflow. The air that has passed through the shelf section 8 flows downward, a portion of which is exhausted to the outside through the exhaust port 9, and the remaining air is circulated within the stocker device again by the circulation pump 6.

Effects of the Invention The stocker device of the present invention prevents dust generated by humans from contaminating the masks by keeping the masks as far away from human hands as possible, thereby improving the quality of semiconductor devices.

It also has the effect of improving the work efficiency of processes that use masks.

[Brief explanation of drawings]

FIG. 1 is a perspective sectional view showing the structure of a stocker device according to an embodiment of the present invention, and FIG. 2 is a sectional view for explaining the air conditioning inside the stocker device. 1...Mask, 2...Delivery department, 3.
... Shelf section, 4 ... Transfer robot, 5 ...
... Air intake, 6 ... Air circulation pump, 7 ... Filter, 8 ... Shelf,
9...Exhaust port. Name of agent, patent attorney, lawyer Shigetaka Awano, etc. -
m- Mask small delivery port 11- Air intake air v11 ring pump filter shelf air outlet

Claims (1)

[Claims] a shelf section for storing a plurality of reticles or masks (hereinafter referred to as masks), a transport section for loading and unloading the masks to and from the shelf section, and an air conditioning section for air conditioning the shelf section and the transport section; A stocker device equipped with a control section that has an inventory management function.