JPH02276008A - Perpendicular magnetic recording/reproducing head and manufacture of the same - Google Patents

Abstract

PURPOSE:To obtain a perpendicular magnetic recording/reproducing head with high magnetic recording/reproducing efficiency by preventing a magnetic substance from existing near a main magnetic pole in the medium sliding connection part of a second auxiliary magnetic pole, and providing the magnetic substance so as to make contact with a recording medium at least in one of the track width direction of the main magnetic pole. CONSTITUTION:A second auxiliary magnetic pole 12 consisting of the ferromagnetic oxide magnetic substance is faced and joined to a main magnetic pole 3, and functions as a return path core. A medium sliding connection surface 13 is magnetized in the magnetic recording/reproducing direction, and it is in the mode in which the partial magnetic substance of the auxiliary magnetic pole 12 to be the part facing the main magnetic pole 13 is eliminated. In addition a return path part 14 provided on the sliding connection surface of the auxiliary magnetic pole 12 in order to return the magnetic flux to the medium is formed at least on one side in the track width direction of the main magnetic pole 3. Ferromagnetic oxide magnetic substances 16 and 17 respectively constitute the main parts of the first and second auxiliary magnetic poles. Thus the perpendicular magnetic recording/reproducing head at the high magnetic recording/reproducing efficiency can be obtained.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention is used in a perpendicular magnetic recording/reproducing device (thin film type)
The present invention relates to a magnetic head and its manufacturing method.

[Conventional technology]

In the perpendicular magnetic recording/reproduction method, the shorter the recording wavelength, the smaller the influence of the demagnetizing field, and in principle there is no magnetic effect in the recording area as seen in recording in the longitudinal direction of magnetic tape, making it suitable for high density applications. Research is underway to put this method into practical use. Perpendicular magnetic recording/reproducing head (hereinafter simply referred to as "vertical head")
Various structures have been proposed in the past, and among them, the vertical helad structure with a return bus core is becoming more popular.

One way to improve the magnetic recording and reproducing efficiency of a vertical head is to bring the return bus core into contact with the medium. However, if the return bus core is exposed in the same direction as the magnetic recording/reproducing direction and brought into contact with the medium, the edges of the return bus core act as a pseudo magnetic recording/reproducing gap, causing waveform distortion in the signal output. This has the negative effect of causing In order to deal with this drawback, a vertical head in which a magnetic block serving as a return bus core is joined in the track width direction perpendicular to the recording track direction, or
For example, it is disclosed in Japanese Patent Application Laid-Open No. 63-70908.

Such a conventional example will be explained below with reference to FIG. FIG. 7 is an enlarged perspective view showing the structure of a typical conventional magnetic head 1, in which 2 is a magnetic material block, 3 is a main magnetic pole, 4 is an auxiliary magnetic pole, 5 is a coil, and 6 is a main magnetic head made of a non-magnetic material. In the magnetic pole holding portion, 7 is an opening, and 8 is an opposite prefix area. Main magnetic pole 3
Then, on the recording medium (not shown) side of the auxiliary magnetic pole (block) 4 equipped with the main magnetic pole clamping part 6 that clamps a part of the main magnetic pole 3, the thickness is set to a required thickness from the surface facing the recording medium. The main magnetic pole holding portion 6 of the auxiliary magnetic pole (block) 4 is
and a non-magnetic material, the magnetic material block 2 is adjacent to at least one of a support block sandwiching the entire main magnetic pole 3 and a support block in the track width direction perpendicular to the recording track direction of the recording medium. , auxiliary magnetic pole (
A non-magnetic material 6 is used to magnetically connect the main magnetic pole sandwiching section 6 of the block) 4, which is closer to the recording medium than the part around which the coil 5 is wound, to the magnetic block 2. By insulating it, a vertical head is constructed.

[Problem to be solved by the invention]

Regarding the effect of the return bus core, it was reported at the 1986 National Conference of the Television Society that the smaller the distance between the main magnetic pole 3 and the return bus core, the better the sensitivity. However, in the conventional vertical head 1,
In order to reduce the distance between the main magnetic pole 3 and the magnetic block 2, which is the return bus core, it is necessary to cut or polish the distance between the main magnetic pole 3 and the magnetic block 2 to a predetermined dimension. , it is difficult to process with high precision, and variations occur in the recording and reproducing sensitivity of the vertical head 1. Also, when trying to manufacture a 1FF4 head with return bus cores joined to both sides of the support block, if the distance between the main magnetic pole 3 and the return bus core is made small, the thickness of the support block will be insufficient, making it difficult to process. There is a risk of internal damage, making it difficult to manufacture heads with good yield.

Further, in the conventional head structure, since the number of parts constituting the vertical head is large, the number of manufacturing steps is also increased, resulting in an increase in cost and a problem of poor mass productivity.

[Means to solve the problem]

The present invention provides a perpendicular magnetic recording/reproducing head comprising a main magnetic pole, a first auxiliary magnetic pole that holds the main magnetic pole, and a second auxiliary magnetic pole that returns magnetic flux, in which the medium sliding contact portion of the second auxiliary magnetic pole is No magnetic material is present near the main magnetic pole,
The above-mentioned problems have been solved by providing a perpendicular magnetic recording/reproducing head and a method for manufacturing the same, in which a magnetic material is present in contact with a recording medium on at least one side of the main pole in the track width direction.

[Embodiment] A first embodiment of the perpendicular magnetic recording/reproducing head of the present invention will be described with reference to FIG. Figure 1 shows vertical head 1
0 is an (enlarged) perspective view of the conventional vertical head 1 shown in FIG. 7, and in this figure, the same components as those of the conventional vertical head 1 shown in FIG. Reference numeral 11 denotes a first auxiliary magnetic pole made of a ferromagnetic oxide magnetic material coated with a non-magnetic agent, and the main magnetic pole 3 is held in this auxiliary magnetic pole 11 . 1
Reference numeral 2 denotes a second auxiliary a-pole made of a ferromagnetic oxide magnetic material, and this auxiliary magnetic pole 12 is joined to face the main magnetic pole 3, and functions as a return bus core. In addition, in the medium sliding contact surface 13, in the magnetic recording/reproducing direction, a portion of the auxiliary magnetic pole 12 facing the main magnetic pole 3 is partially cut off, in order to return the magnetic flux to the medium. A return bus portion 14 provided on the sliding surface of the auxiliary magnetic pole 12 is formed on at least one side of the main magnetic pole 3 in the track width direction. 16 and 17 are ferromagnetic oxide magnetic materials (hereinafter also simply referred to as "magnetic materials"), and 1. It forms the main part of the second auxiliary magnetic pole.

18 is a winding guide formed on a part of the magnetic body 16; 19;
2 is a winding window formed in a part of the magnetic body 17, and 21 is a glass molded between the magnetic bodies 16 and 17 in order to fix the main magnetic pole 3. Note that the illustration of the coil is omitted.

Next, a method for manufacturing the vertical head 10 of the present invention will be explained with reference to FIG. First, as shown in FIG. 2(A), the non-magnetic material 6 is bonded or deposited on the end surface of the ferromagnetic oxide magnetic material 16 on the medium facing surface 13 side, and the first auxiliary magnetic pole block 11 is formed. ′ is formed. Subsequently, as shown in FIG. 2B, a magnetic material 16 is applied from the non-magnetic material 6 to the side surface 15 of the first auxiliary magnetic pole block 11' on the side facing the second auxiliary magnetic pole 12.
The main magnetic pole 3 is formed astride. Next, as shown in FIG. 3C, at least near the medium sliding contact surface 13 of the first auxiliary magnetic pole block 11' and on both sides of the main magnetic pole 3 are cut off to form a protrusion with a predetermined width. 22 to form the first auxiliary magnetic pole 11. Further, although a winding guide 18 is formed on the side opposite to the side surface 15, this winding guide 18 may be omitted.

On the other hand, a ferromagnetic oxide magnetic material 17 as shown in FIG.
(second auxiliary magnetic pole block 12') is prepared, and its first
A winding groove 19' is formed on the auxiliary magnetic pole facing surface 25. Subsequently, as shown in FIG.
A groove 23 of a desired width is provided at the location where the second auxiliary magnetic pole 12 is formed.

The main magnetic pole 3 is formed spanning from the non-magnetic material 6 to the magnetic material 16.

Finally, as shown in FIG.
facing each other and abutting each other, and inserting the winding groove of the second auxiliary magnetic pole 12 (
A glass 21 having a low melting point is filled into the end portion of the winding window (one winding window) on the side of the medium sliding surface 13 and integrated. Thereafter, the medium sliding contact surface 13 is processed into a desired shape, and the perpendicular magnetic recording/reproducing head 10 having the shape shown in FIG. 1 is completed.

Next, a second embodiment of the perpendicular magnetic recording/reproducing head of the present invention will be described with reference to FIG.

FIG. 3 is an enlarged perspective view of the vertical head 20, and in this figure, the same components as those of the vertical head 10 of the first embodiment shown in FIG. . Note that the illustration of the coil is also omitted in this figure.

As is clear from comparing FIGS. 1 and 3, 1.
The structures of the two hemispheres 10 and 20 are substantially the same except for the abutment state of the second auxiliary magnetic poles 11 and 12, but the manufacturing methods are quite different. Hereinafter, a specific manufacturing method will be explained with reference to FIG. 4.

First, as shown in FIG. 4(A), a desired number of 7R24 having a predetermined width and depth are formed on a ferromagnetic oxide magnetic substrate 26 at a predetermined pitch. Next, the same figure (B)
As shown in Figure (C), after applying the non-magnetic material 6 to the surface on which the grooves 24 are formed on the magnetic substrate 26, the non-magnetic material 6 is removed from areas other than the grooves 24, as shown in Figure (C). The surface of the substrate 26 is made flat.

Next, a plurality of main magnetic poles 3 having a shape as shown in FIG. 2D are formed on the surface of the substrate 26, with the non-magnetic material 6 buried at the tip. Thereafter, a plurality of (two blocks in this figure) first auxiliary magnetic pole blocks 11'' each equipped with the main magnetic pole 3 are manufactured by cutting along the E-ro, H-, and H-planes in the figure.Furthermore,
As shown in the same figure (E), the first auxiliary magnetic pole block 11
Protrusions 2 of a predetermined width are cut out at least at a plurality of locations at equal intervals on the medium facing surface 13' and sandwiching the main pole 3.
2 to form the first auxiliary magnetic pole shaping body 28. In this figure, the winding guide 18 is formed on the side opposite to the main magnetic pole 3, but this winding guide 18 is not necessarily necessary and may be omitted.

On the other hand, a ferromagnetic oxide magnetic material 17 as shown in the figure ()
(Two second auxiliary magnetic pole shaping bodies) are prepared, and a winding groove 19' is formed in the first auxiliary magnetic pole opposing surface 25 thereof. moreover,
A groove 23 of a desired width is provided at a depth reaching the winding groove 19' from the recording medium facing surface 13' to form two second auxiliary magnetic pole shaping bodies. Finally, as shown in the figure (G), after abutting the first and second auxiliary magnetic pole shaping bodies 28 and 29 with the main magnet [3 and the main magnet 23 facing each other], the winding groove 19' The end of the media sliding contact surface 13 side (medium facing surface 13') of (one winding window) is filled with low melting point glass 21 and integrated.Then, the media sliding contact surface 13 is processed into a desired shape. At this time, a desired amount of a portion of the ferromagnetic oxide magnetic material 16 appearing on the medium sliding contact surface 13 of the first auxiliary magnetic pole shaping body 28 is removed and retreated from the medium sliding contact surface 13. By sandwiching the magnetic pole 3 and cutting it to a predetermined thickness, a perpendicular magnetic recording/reproducing head 20 having a shape as shown in FIG. 3 is completed.

Next, a third embodiment of the perpendicular magnetic recording/reproducing head of the present invention will be described with reference to FIGS. 5 and 6. Fifth
The figure is an enlarged perspective view of the vertical head 20, and FIGS.
) is the manufacturing process diagram. Vertical head 30 of this embodiment
The above 1. Vertical head 10 of the second embodiment. ．． Although the structure is slightly different from No. 20 and is a thin film type, No. 5. In both Figures 6 and 6, the 1. Components that are the same as those of the vertical heads 10 and 20 of the second embodiment are given the same reference numerals, and detailed description thereof will be omitted. In Figure 5, 3
1 is the junction of the first and second auxiliary magnetic poles 11.12, 32
33 and 34 are blanks, 35 is a protective material, and 36 is a non-magnetic material.

Hereinafter, a specific manufacturing method will be explained with reference to FIG. 6.

First, as shown in FIG. 6FA), grooves 33 and 34 having different (or the same) predetermined widths and depths are formed on the ferromagnetic oxide magnetic substrate 26 at desired pitches. Form as many as . Note that although the groove 34 may be omitted, the recording and reproducing efficiency of the magnetic head is improved if it is present.

Below, the magnetic substrate 26 is shown in the same figure (^) as shown in the plane A^'BB.
Cross-sectional view taken at ' ((B) to (F), (H) in the same figure)
I will explain.

As shown in FIG. 3B, the grooves 33 and 34 formed on the surface of the magnetic substrate 26 are coated (filled) with non-magnetic materials 6 and 36, and the non-magnetic materials 6 and 36 are applied to the grooves 33 and 34 formed on the surface of the magnetic substrate 26. .36 is removed to make the surface of the substrate 26 flat and uniform. Next, as shown in FIG. 3C, an insulating film 37 is formed to a desired thickness on the surface of the substrate 26 (and the nonmagnetic material 6.36). Thereafter, a conductive film is formed on the surface of the insulating film 37, and a thin film coil 40 having a desired shape is formed by etching, as shown in FIG. In this case, the thin film coil 40 is arranged so that the portion sandwiched between the ferromagnetic oxide magnetic substrate 26 (later to become the second auxiliary magnet [i12] and the first auxiliary magnetic pole 11) is correctly placed on the groove 34. shall be formed.

Next, the space between the lines of the thin film coil 40 is filled with an insulating material 39 as shown in FIG.

After that, the first auxiliary magnetic pole 11 and the magnetic substrate 26 (later the second
A contact through hole 41 is formed by etching away the insulating film 38 and the insulator 39 at a portion corresponding to the joint with the auxiliary magnetic pole 12. The first auxiliary magnetic pole 11 and the second
The auxiliary magnetic pole 12 is completely connected to at least one side of the arm 33 through the contact through hole 41. Note that a contact hole 42 (see fG in the same figure) between the innermost peripheral end of the coil and the lead wire 32 may be formed at the same time in this step.

Next, as shown in the same figure (G), 1 magnet @3 is formed at the position corresponding to the groove 33, and as shown in the same figure (H),
The first auxiliary magnetic pole 11 made of a metal magnetic film is placed at a position recessed by a predetermined amount from the recording medium sliding contact surface (13) through an insulating film 38 in such a manner as to cover the rear part of the magnetic field 1@3, using, for example, photolithography. The film is formed by film formation and etching using technology.

Note that the order of forming the main magnetic pole 3 and the first auxiliary magnetic pole 11 may be reversed.

Furthermore, there may be no particular insulating film between the main magnetic pole 3 and the first auxiliary magnetic pole 11. Finally, a lead wire 32 is formed, and a non-magnetic protective material (not shown) for protecting the main magnetic pole 3 and the first auxiliary magnetic pole 11 is deposited. Then, by cutting out each head chip and processing the medium sliding surface into a desired shape, a thin film type perpendicular magnetic recording/reproducing head 30 as shown in FIG. 5 is completed.

FIG. 8 shows an example of use of the perpendicular magnetic recording/reproducing head according to the present invention. That is, the tracking servo signal is detected as a change in capacitance value from a magnetic recording medium on which PIF2 pits have been formed in advance, as shown by f + f in the figure, and information is transmitted while applying tracking servo. A signal with a large number of pits f
The tracking servo signal is used in a magnetic recording and reproducing device configured to record on and reproduce from a magnetic recording medium as a.
) of the main magnetic pole 3 of the same magnetic head while recording and reproducing information signals while applying tracking servo.
It should be done as it should be done. The width of main magnetic pole 3 is T V+
Assuming that the pit interval of the tracking servo signal is pP, it is desirable that both values do not satisfy the following equation (1) in order to perform high-quality magnetic recording and reproduction.

'rv≦pp ・・・・・・・・・・・・・・・・・・
(1) Note that if the second auxiliary magnetic pole 12 of the magnetic head of the present invention is formed of a high-resistance ferromagnetic oxide magnetic material such as NiZn ferrite, the return path portion of the second auxiliary magnetic pole Since the main magnetic pole 14 does not detect the tracking servo signal as a change in capacitance value, the main magnetic pole 3 does not act as a detection element for the tracking servo signal, and accurate tracking servo can be performed.

〔effect〕

As described above, the perpendicular magnetic recording/reproducing device and the manufacturing method thereof according to the present invention have various excellent features as described below.

(1) In the medium sliding contact area, the return path portion of the second auxiliary magnetic pole, which faces the main magnetic pole in the recording/reproducing track direction, is removed, so the main magnetic pole and the return path portion do not face each other in the recording/reproducing direction, and the signal There is no possibility of waveform distortion occurring in the output, and the return path portion of the second auxiliary magnetic pole is arranged in the track width direction perpendicular to the recording/reproducing track and is in contact with the recording medium, which improves magnetic recording/reproducing efficiency. A high perpendicular magnetic recording/reproducing head can be provided.

(2) In the medium sliding contact portion, in the recording/reproducing track direction, so that there is no return path portion facing the main magnetic pole, the medium sliding contact portion of the second auxiliary magnetic pole is connected to the return path portion at the location facing the main magnetic pole. Since the desired width and depth are cut out, by setting the width appropriately, the distance between the main magnetic pole held by the first auxiliary magnetic pole can be set arbitrarily in the track width direction, and the main magnetic pole When the first auxiliary magnetic pole holding the auxiliary magnetic pole and the second auxiliary magnetic pole having the return path portion are butted and integrated, the distance between the main magnetic pole and the return path portion is set to a desired dimension in the track width direction. Positioning bonding is also possible, and a perpendicular magnetic recording/reproducing head with high magnetic recording/reproducing efficiency can be easily produced.

(3) In order to bring the main magnetic pole and the return path part of the return bus core closer together, the width of the groove provided in the medium sliding contact part of the second auxiliary magnetic pole should be narrowed, or the first auxiliary magnetic pole holding the main magnetic pole should be , the second auxiliary magnetic pole only needs to be aligned and positioned so that they are close to each other, and there is no need to cut the support block thin as in the conventional example, and there is no risk of damaging the magnetic head during machining. , it is possible to realize a method of manufacturing a magnetic head with a high yield and high efficiency.

(4) The perpendicular magnetic recording/reproducing head of the present invention includes a main pole;
Since it is composed of the minimum basic parts of the first auxiliary magnetic pole that holds (forms) the magnetic flux and the second auxiliary magnetic pole that returns the magnetic flux, it can be manufactured at a considerably low cost.

(5) Tracking servo signals are detected as changes in capacitance from a magnetic recording medium on which pits have been formed in advance, and information signals are recorded and reproduced on the magnetic recording medium while applying tracking servo. If the magnetic head of the present invention is used in the magnetic recording/reproducing device configured, the main magnetic pole will simultaneously have the functions of both a tracking servo signal detection element and a magnetic head for recording and reproducing information signals. Therefore, the tracking servo signal can be detected and the information signal recorded,
Since reproduction and reproduction can be performed at the same time and at the same position, tracking accuracy is improved and high-density magnetic recording and reproduction can be realized.

(6) If the second auxiliary magnetic pole of the magnetic head of the present invention is formed of a high-resistance ferromagnetic oxide magnetic material, the return path portion of the second auxiliary magnetic pole detects the tracking servo signal as a change in capacitance value. Since it does not act as a detection element for tracking, accurate tracking servo can be performed, and the address signal (which uses a higher frequency than the tracking servo signal) representing the track position for each track can be detected on the recording medium in the same way as the tracking servo signal. Even if pits are formed in advance in the magnetic head, if the magnetic head of the present invention is configured as described above, only the main magnetic pole with a thin film thickness will detect the tracking servo signal and the address signal, resulting in highly accurate detection. Tracking and accurate address detection will be possible.

[Brief explanation of drawings]

1, 3, and 5 are perspective views of perpendicular magnetic recording/reproducing heads according to the first to third embodiments of the present invention, FIG. 2, and FIG.
4 and 6 are manufacturing process diagrams of heads according to the first to third embodiments of the present invention, FIG. 7 is a perspective view of a typical conventional magnetic head, and FIG. 8 is a vertical view of the present invention. FIG. 3 is a principle diagram showing an example of use of a magnetic recording/reproducing head. 3... Main magnetic pole, 5... Coil, 6.36... Nonmagnetic material, 10... Magnetic head, 11... First auxiliary magnetic pole, 12... Second auxiliary magnetic pole, 13... ...Medium sliding contact surface, 1
3'...Medium facing surface, 14...Return path section, 1
6.17...Ferromagnetic oxide magnetic material, 18...Winding guide, one...Winding window, 19'...Winding groove, 21...
...Glass, 22...Protrusion, 2324.3334.
...Groove, 25...First auxiliary magnetic pole opposing surface, 28...First auxiliary magnetic pole shaping body, 2...Second sleeve auxiliary magnetic pole shaping body, 3
0... Thin film type perpendicular magnetic recording/reproducing head, 31... Joint portion, 32... Leading line, 35... Protective material, 37.
38... Insulating film, 3... Insulator, 40... Thin film coil, 41... Contact through hole, 42...
- Contact hole, D...magnetic recording medium. Patent applicant Kunio Umiki, representative of Victor Japan Co., Ltd. Procedural amendment (Part 1, January 17, 1990 1, Case description 1999 Patent Application No. 98127 2, Title of invention: Perpendicular magnetic recording/reproducing head and its manufacture Method 3: Relationship with the case of the person making the amendment Patent applicant address: 3-12-4 Moriya-cho, Kanayō-ku, Yokohama-shi, Kanagawa Prefecture Date of amendment order Voluntary amendment 5: Detailed description of the invention in the specification to be amended Column and Drawing 6, Contents of amendment B (1) "Non-magnetic agent" on page 9, line 17 of the specification is amended to "non-magnetic material". (2) Same, page 11, lines 19 to 20 "Non-magnetic
··do. ” to be deleted. (3) "Coating" on page 13, line 5 of the same document is corrected to "film formation." (4) r37 between "insulating film" and "38" on page 17, line 2. Insert J. (5) Correct "38" in line 13 of the same page to "(not shown)". (6) Same, page 18, line 8, ``...f p2J'' and the address signal is f + l + f a in the figure.
J and correction Pl'P2 Correct. (7) Delete "many...stitches" in line 12 of the same page. (8) Correct Figure 3, Figure 4 ([), and Figure 5 as shown in the attached revised drawings6 Figure 4

Claims (5)

[Claims] (1) In a perpendicular magnetic recording/reproducing head consisting of a main magnetic pole, a first auxiliary magnetic pole that holds the main magnetic pole, and a second auxiliary magnetic pole that returns magnetic flux, the medium sliding contact portion of the second auxiliary magnetic pole is A perpendicular magnetic recording/reproducing head characterized in that no magnetic material is present in the vicinity of the main magnetic pole, but a magnetic material is present in contact with a recording medium on at least one side of the main magnetic pole in the track width direction. (2) forming a first auxiliary magnetic pole block by depositing a non-magnetic material on one side of the first ferromagnetic oxide magnetic body; , forming a main magnetic pole spanning the ferromagnetic oxide magnetic material from the non-magnetic material; and cutting off both sides of at least the medium sliding contact portion of the first auxiliary magnetic pole block by sandwiching the main magnetic pole. A step of forming a first auxiliary magnetic pole by providing a protrusion with a desired width, and forming a winding groove on the surface of the second auxiliary magnetic pole block made of a second ferromagnetic oxide magnetic material facing the first auxiliary magnetic pole. forming a second auxiliary magnetic pole by providing a groove in at least the medium sliding contact portion of the second auxiliary magnetic pole block with a depth reaching the winding groove; Abutting the two auxiliary magnetic poles so that the main pole and the groove face each other, and then filling the groove of the second auxiliary magnetic pole with low melting point glass at a position reaching the winding groove from the medium sliding contact surface. 2. A method of manufacturing a perpendicular magnetic recording/reproducing head according to claim 1, comprising the steps of: integrating both auxiliary magnetic poles, and processing a medium sliding surface into a desired shape. (3) Forming a desired number of grooves with a desired width and depth at a desired pitch on a ferromagnetic oxide magnetic substrate, and after filling the grooves with a non-magnetic material, excess non-magnetic material is removed. a step of removing and flattening the ferromagnetic oxide magnetic substrate, a step of forming a main pole from the non-magnetic material embedded in the groove across the ferromagnetic oxide magnetic substrate, and a step of forming the ferromagnetic oxide magnetic substrate at a predetermined location. A step of cutting to produce a first auxiliary magnetic pole block having a plurality of main magnetic poles, and cutting off both sides of at least the medium sliding contact portion of the first auxiliary magnetic pole block by sandwiching the main magnetic pole to form a desired shape. forming a first auxiliary magnetic pole shaping body by providing a protrusion with a width;
forming a winding groove on a surface of a second auxiliary magnetic pole block made of a second ferromagnetic oxide magnetic material facing the first auxiliary magnetic pole shaping body; forming a second auxiliary magnetic pole shaping body by providing a plurality of grooves with a depth that reaches the winding groove; Then, both auxiliary magnetic poles are integrated by filling each groove of the second auxiliary magnetic pole shaping body with low melting point glass at a position that reaches the winding groove from the medium sliding contact surface. a step of cutting the integrated first and second auxiliary magnetic pole shaping bodies at predetermined locations to separate them into a plurality of magnetic heads; and processing the sliding surfaces of the magnetic heads into a desired shape. A method for manufacturing a perpendicular magnetic recording/reproducing head, comprising the steps of: removing a desired amount of the ferromagnetic oxide magnetic material appearing on the medium sliding contact surface of the first auxiliary magnetic pole and retreating from the medium sliding contact surface. (4) In a perpendicular magnetic recording/reproducing head consisting of a main magnetic pole, a first auxiliary magnetic pole that holds the main magnetic pole, and a second auxiliary magnetic pole that returns magnetic flux, the second auxiliary magnetic pole is made of a ferromagnetic oxide magnetic material. A first auxiliary magnetic pole made of a main magnetic pole and a metal magnetic film is formed on the second auxiliary magnetic pole, and a thin film coil is sandwiched between these two auxiliary magnetic poles by etching through an insulating film. A thin film type perpendicular magnetic recording/reproducing head characterized by the following: (5) forming a groove in a direction substantially perpendicular to a surface of the ferromagnetic oxide magnetic material that is the second auxiliary magnetic pole block that corresponds to the main pole formation surface and corresponds to the medium sliding contact surface; After filling the groove with a non-magnetic material, a step of removing unnecessary non-magnetic material and flattening the groove, and a step of depositing an insulating film to a desired thickness on the surface corresponding to the main pole forming surface. , after forming a conductor film on the surface of the insulating film, forming a thin film coil in a desired shape by etching; and after filling the spaces between the wires of the thin film coil with an insulating material, flattening the upper surface of the coil. , after covering the thin film coil with an insulating film, forming a through hole by etching away the insulating film and the insulator at a portion corresponding to the joint between the first auxiliary magnetic pole and the second auxiliary magnetic pole; forming a main magnetic pole at a position corresponding to the groove, and forming a first auxiliary magnetic pole made of a metal magnetic film so as to cover the rear part of the main magnetic pole at a position recessed by an arbitrary amount from the medium sliding contact surface; and a step of depositing and forming a non-magnetic protective material to protect the main magnetic pole and the first auxiliary magnetic pole.
A method for manufacturing a thin film perpendicular magnetic recording/reproducing head according to claim 4.