JPH0227645A - Electron beam radiation device - Google Patents

Abstract

PURPOSE:To prevent a roll and a shielding plate for shielding X-ray from being obstructive at the time of a batch process by moving the shielding plate from its position at a web process to a position under a conveyor. CONSTITUTION:At the time of a web process, a roll 9 is positioned over a conveyor 7, and so a web 8 is transferred contacting the roll 9. A shielding plate 13 is also positioned over the conveyor, where it prohibits X-ray from leaking out. At the time of a batch process, the roll 9 is moved to be under the conveyor 7, so it is not obstructive when a tray to be put on the conveyor 7 is transferred. Following this motion, the shielding plate 13 moves down as well. The roll 9 and the shielding plate 13 are prevented from being obstructive at the time of a batch process.

Description

[Detailed description of the invention] (Industrial application field) The present invention relates to an electron beam irradiation device.

(Prior Art wI) As is well known, an electron beam irradiation apparatus is mainly composed of a vacuum chamber containing an electron beam irradiation source and an irradiation chamber through which a workpiece to be irradiated with the electron beam passes.

By the way, there are two types of processing methods in electron beam irradiation processing: batch processing and web processing. Batch processing is mainly used when the object to be processed is a single object. This is done by installing a tray on a conveyor installed inside the irradiation chamber.
The object to be processed is placed on this tray and transported, and during the transport process it is irradiated with an electron beam.

For this treatment, preliminary chambers are provided on both sides of the irradiation chamber, a conveyor is installed inside each preliminary chamber, and the conveyor is used to transport the object to be treated into the irradiation chamber. Objects are carried out from inside the irradiation chamber to the outside.

Web processing is mainly used when the object to be processed is a continuous web such as a sheet or a steel plate. It passes continuously through an irradiation chamber, irradiating it with an electron beam in the process.

To do this, install a roll inside the irradiation chamber that will be used to guide the web while it is being conveyed, and the web will be conveyed continuously while being attached to it, and the electron beam will be irradiated in the process. .

In the past, batch and web processing methods were different, so irradiation equipment was used exclusively for each process, but recently there has been a demand for irradiation equipment that can be used for both processes. Ta.

For this purpose, the rolls required for web processing may be installed in the irradiation device for batch processing.

(Problem to be solved by the invention) However, the workpiece placed on the tray sent by the conveyor and the workpiece attached to the roll must be separated by the same distance from each other when viewed from the electron beam source. It is. For this reason, the roll must be installed at a higher position than the conveyor, but if it is installed at such a high position, it will become an obstacle to conveying the trays.

Furthermore, in order to carry the web into and out of the irradiation chamber during web processing, it is necessary to form a slit for the web to pass through. However, when such a slit is formed, there is a risk that X-rays generated within the irradiation chamber may leak to the outside through the slit.

To avoid this, a shield plate that blocks X-rays can be installed along the web conveyance path, but a shield plate installed in such a position will obstruct the conveyance of trays during batch processing. It's not convenient for me to do that.

This invention aims to prevent the presence of rolls and shielding plates from becoming any hindrance during batch processing when the irradiation chamber is used for both web and batch processing.

(Means for Solving the Problems) This invention provides a fulcrum shaft extending along the width direction of the web, and rotatably supports a roll for conveying the web by a metal fitting supported by the fulcrum shaft. This metal fitting can swing freely around the fulcrum shaft, and by swinging, the roll can be selectively positioned above and below the batch processing conveyor, and a shielding plate for X-ray shielding can be installed. , it is characterized in that it follows the swinging of the roll and moves from the shielding position during web processing to a position below the conveyor.

(Function) During web processing, the roll is located above the conveyor, so the web is conveyed in contact with the roll. At that time, the shielding plate is also placed above, which prevents the X-rays from leaking out.

When batch processing is performed, the rolls are moved below the conveyor. Due to this movement, the shielding plate does not become any hindrance during the conveyance of the trays placed on the conveyor.Following this movement, the shielding plate also moves downward.

(Example) An example of the present invention will be described with reference to the drawings. 1 is a vacuum chamber containing an electron beam irradiation source 2, and 3 is an irradiation chamber through which a processed object to be irradiated with the electron beam from the electron beam irradiation source 2 passes. Preliminary chambers 4 are arranged on both sides of the irradiation chamber 3, in which a conveyor 5 for transporting trays during batch processing is arranged. 6 is a door that opens and closes the entrance and exit of the tray. In addition, in FIG. 1, the auxiliary chamber on the left side is omitted.

A conveyor 7 used during batch processing is installed inside the irradiation chamber 3, and is driven in the direction of the arrow by a drive source (not shown). conveyor 7
A tray is placed on the tray, and the workpiece is placed on the tray and transported. During the transportation process, it is irradiated with an electron beam.

The above configuration is not particularly different from the conventional configuration for batch processing.According to the present invention, in order to make this configuration also used for web processing, a roll 9 to which the web 8 is attached is installed. The roll 9 is vertically swingable.

For this purpose, a fulcrum shaft 10 extending along the width direction of the web 8
is prepared, and the swinging metal fittings 11 are fixed to both ends thereof. The swinging metal fitting 11 is connected to a cylinder 12, and is caused to swing about the axis of the fulcrum shaft 10 by the cylinder 12. This rocking also causes the fulcrum shaft 10 to rotate.

A roll 9 is rotatably supported by the swinging metal fittings 1.

The length of the rolls 9 is narrower than the distance between the pair of conveyors 7. When the swing fitting 11 swings upward, the roll 9 is moved above the conveyor 7. As a result, the web 8 attached to the roll 9 and the workpiece on the tray placed on the conveyor 7 are positioned at the same distance from the electron beam irradiation wX2.

Further, when the swinging metal fitting 11 swings downward, the roll 9 is moved to a position lower than the conveyor 7, as shown by the chain line in FIG. This moves it out of the path of movement of the conveyor 7 during batch processing, so it does not interfere with the batch processing.

The shielding plate 13 is also configured to move in the vertical direction following the swinging of the roll 9. For this purpose, for example, the mounting bracket 14 is fixed to the fulcrum shaft 10.

The shielding plate 13 is fixed.

When the roll 9 is moved upward, the shielding plate 13 also moves upward and cooperates with another shielding plate 15 to shield Xm and prevent it from leaking outside. The web 8 passes through the gap between the two shielding plates 13, 15. When the roll 9 is moved downward, the shielding plate 13 also moves downward following this movement.

In the figure, 16 is a shielding plate, and 17 is a guide roll.

(Effects of the Invention) As detailed above, according to the present invention, when the irradiation chamber is configured to be used for both web processing and batch processing, the presence of rolls and shielding plates necessary for web processing is eliminated. , does not become an obstacle during batch processing, and therefore has the effect of making it easy to perform both types of processing.

[Brief explanation of the drawing]

FIG. 1 is a front view showing an embodiment of the invention, FIG. 2 is a perspective view of essential parts, and FIG. 3 is a partially enlarged front view. 1... Vacuum chamber, 2... Electron beam irradiation source, 3...
・Irradiation chamber, 4... Preliminary room, 7... Conveyor,
8... Web, 9... Roll, 10... Fulcrum shaft,
11... Rocking metal fitting, 12... Cylinder, 13...
Shield.

Claims (1)

[Scope of Claims] An electron beam irradiation apparatus comprising a vacuum chamber containing an electron beam irradiation source and an irradiation chamber through which a workpiece to be irradiated with the electron beam passes, comprising: a web inside the irradiation chamber; A fulcrum shaft extending along the width direction is provided, and a swinging metal fitting supported by the fulcrum shaft rotatably supports a roll for conveying the web, and the swinging metal fitting is oscillated about the fulcrum shaft. The roll can be moved freely, and by its swinging, the roll can be selectively positioned above and below the batch processing conveyor, and the shielding plate for X-ray shielding can follow the swinging of the roll. The electron beam irradiation device is movable from a shielding position during web processing to a position below the conveyor.