JPH02277249A - Sealing-resin coating of semiconductor element - Google Patents

Sealing-resin coating of semiconductor element

Info

Publication number
JPH02277249A
JPH02277249A JP9854189A JP9854189A JPH02277249A JP H02277249 A JPH02277249 A JP H02277249A JP 9854189 A JP9854189 A JP 9854189A JP 9854189 A JP9854189 A JP 9854189A JP H02277249 A JPH02277249 A JP H02277249A
Authority
JP
Japan
Prior art keywords
resin
sealing
sealing resin
semiconductor element
circuit substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9854189A
Other languages
Japanese (ja)
Inventor
Hiroshi Hirasawa
弘 平澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP9854189A priority Critical patent/JPH02277249A/en
Publication of JPH02277249A publication Critical patent/JPH02277249A/en
Pending legal-status Critical Current

Links

Landscapes

  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PURPOSE:To coat a sealing resin of a definite quantity by recovering an excess sealing resin when a circuit substrate is coated excessively. CONSTITUTION:A semiconductor element 2 which has been mounted on a circuit substrate 1 is coated excessively with a sealing resin 4 by using a dispenser 4. Simultaneously with a lowering operation of a resin recovery part 9 onto the circuit substrate 1 on a stage, the excess sealing resin 4 is sucked into a pipe; when the sealing resin 4 of a definite quantity is left, the resin recovery part 9 is raised. That is to say, only the sealing resin 4 sucked by using the resin recovery part 9 is returned to a resin recovery container. Thereby, it is possible to control a resin quantity to be left on the circuit substrate to a proper quantity and to coat the sealing resin of the definite quantity.

Description

【発明の詳細な説明】 【産業上の利用分野1 この発明は、回路基板上に実装された半導体素子を樹脂
で封止するための封止樹脂塗布方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to a sealing resin coating method for sealing with resin a semiconductor element mounted on a circuit board.

[発明の概要1 この発明は、半導体素子の封止樹脂塗布方法において1
回路基板上に過分に塗布したときの余分な封止樹脂を回
収することにより、一定1の封止樹脂の塗布を可能にす
るようにしたものである。
[Summary of the Invention 1 This invention provides a method for applying a sealing resin for a semiconductor element.
By collecting excess sealing resin when excessively applied onto the circuit board, it is possible to apply a constant amount of sealing resin.

[従来の技術] 従来、第2図で示すように、回路基板l上に実装された
半導体素子2上に、デイスペンサー装置8により吐出す
る封止樹脂4を封止グム3の枠内に塗布している。均一
に塗布するために、封止樹脂4を定量吐出する方法とし
て、分解能の高いデイスペンサーや温度コントロール付
デイスペンサーを使用し、一定量の樹脂を塗布する方法
が通常である。
[Prior Art] Conventionally, as shown in FIG. 2, a sealing resin 4 dispensed by a dispenser device 8 is applied within the frame of a sealing gum 3 onto a semiconductor element 2 mounted on a circuit board l. are doing. In order to uniformly apply the sealing resin 4, the usual method of dispensing the sealing resin 4 is to use a dispenser with high resolution or a dispenser with temperature control to apply a fixed amount of the resin.

〔発明膨解決しようとする問題点] しかし、上記したような従来の半導体素子の封止方法に
おいて、上記高性能デイスペンサーを用いても、温度環
境による樹脂そのものの粘度変化、シリンジ内の樹脂量
とエアー圧力とのバランスの変化等により、吐出量にバ
ラツキが生じるため、常に吐出条件をコントロールしな
ければならない、また、そのバラツキを少なくするため
に封止量を少な(すると、封止エリアの外周部まで封止
樹脂が流れずに、ワイヤーボンディングのワイヤーが露
出してくる等の問題がある。逆に封止樹脂の量が多過ぎ
ると1熱硬化させる際、樹脂の粘度が一時的に低下する
ため、封止ダムの表面張力限界を超え、封止ダム外に流
れ出す恐れがあり、樹脂の量を管理することは、非常に
困難を伴っていた。
[Problems to be solved by the invention] However, in the conventional semiconductor device sealing method as described above, even if the above-mentioned high-performance dispenser is used, the viscosity of the resin itself changes depending on the temperature environment, and the amount of resin in the syringe changes. Because variations in the discharge amount occur due to changes in the balance between There are problems such as the wire bonding wire being exposed because the sealing resin does not flow all the way to the outer periphery.On the other hand, if the amount of sealing resin is too large, the viscosity of the resin may temporarily decrease during heat curing. As a result, there is a risk that the surface tension of the sealing dam will exceed the surface tension limit and flowing out of the sealing dam, making it extremely difficult to control the amount of resin.

[問題点を解決するための手段] この発明は、上記問題点を解決するためになされたもの
で、デイスペンサーの吐出量バラツキがあっても、それ
に関係なく、予じめ過分に封止樹脂を塗布しておいて、
次の工程で、その過分の封止(b1脂を回収することに
より、適正な封止樹脂を回路基板上の半導体素子に塗布
することを可能にする。
[Means for Solving the Problems] This invention has been made to solve the above problems, and even if there is variation in the discharge amount of the dispenser, the sealing resin is Apply the
In the next step, by recovering the excess sealing (b1 fat), it becomes possible to apply an appropriate sealing resin to the semiconductor elements on the circuit board.

[作用] 上記のような本発明の封止樹脂の塗布方法にすることに
より、デイスペンサーで吐出された樹脂の量のバラツキ
を容易に吸収することが可能となり、しかも、樹脂回収
部の高さを変えることにより、狙いとする封止高さをコ
ントロールすることができる。
[Function] By using the sealing resin application method of the present invention as described above, it becomes possible to easily absorb variations in the amount of resin dispensed by the dispenser, and moreover, the height of the resin recovery section can be adjusted. By changing , the desired sealing height can be controlled.

[実施例] 以下に、この発明の実施例を図面にもとづいて説明する
。第1図は本発明の封止樹脂塗布方法の工程を説明する
ものであるが、第1図(a)は回路基板l上に実装され
た半導体素子2上に、デイスペンサー8で過分に封止樹
脂4を塗布する工程、第1図(b)(c)は、次のステ
ージ上で樹脂回収部9が回路基板1上に降下すると同時
に、余分な封止樹脂をバイブ9Aに吸収する工程、第1
図(d)は、一定量の封止樹脂を残した時点で、樹脂回
収部9が上昇する工程を示し、各(a)、(b)、(c
)、 (d)の各工程を経て塗布工程は終了する。
[Example] Below, an example of the present invention will be described based on the drawings. FIG. 1 explains the steps of the sealing resin application method of the present invention. FIG. 1(a) shows excessive sealing with a dispenser 8 on the semiconductor element 2 mounted on the circuit board The step of applying the sealing resin 4, shown in FIGS. 1(b) and 1(c), is the step of absorbing the excess sealing resin into the vibrator 9A at the same time as the resin collecting section 9 descends onto the circuit board 1 on the next stage. , 1st
Figure (d) shows a process in which the resin recovery section 9 rises when a certain amount of sealing resin remains, and each of (a), (b), and (c)
) and (d), the coating process is completed.

更に、封止tM脂の回収機構について詳細に説明するた
めに、第3図の説明図を参明して説明すると、図の状態
は回路基板1上に、ワイヤーボンディングされた半導体
素子2があり、その上に予しめ過分な封止樹脂4を供給
しておき、その後樹脂回収部9を押し下げてバイブ9A
を通して余分な封止樹脂を回収する。余分な封止樹脂は
樹脂回収容器6に吸収される。
Furthermore, in order to explain in detail the recovery mechanism of the sealing tM fat, referring to the explanatory diagram in FIG. , an excessive amount of sealing resin 4 is supplied on top of it in advance, and then the resin recovery part 9 is pushed down to remove the vibrator 9A.
Collect excess sealing resin through the tube. Excess sealing resin is absorbed into the resin recovery container 6.

この発明では、樹脂回収部9により吸収される封止tB
4脂4のみが、樹脂回収容器6に収速されるため、回路
基板1に残る樹脂量は、適正な量にコントロールされた
状態になる。
In this invention, the sealing tB absorbed by the resin recovery section 9
Since only the resin 4 is collected in the resin recovery container 6, the amount of resin remaining on the circuit board 1 is controlled to an appropriate amount.

[発明の効果1 この発明は、以上説明したように、封止ダムのエリア内
に十分樹脂がいきわたるように、過分に塗布した封止樹
脂を供給して後、次の工程で余分な量を回収するという
簡単な方法で、封止樹脂量を適正コントロールする効果
がある。
[Effect of the invention 1] As explained above, the present invention supplies an excessively applied sealing resin so that the resin is sufficiently spread within the area of the sealing dam, and then removes the excess amount in the next step. The simple method of recovery has the effect of appropriately controlling the amount of sealing resin.

体素子の封止樹脂塗布装置の説明図。FIG. 2 is an explanatory diagram of a sealing resin coating device for body elements.

・・回路基板 半導体素子 封止ダム ・・封止樹脂 樹脂回収容器 キャリアテープ デイスペンサ 樹脂回収部 以上 出願人 セイコー電子工業株式会社 代理人 弁理士  林   敗 之 助・・Circuit board semiconductor element sealing dam ・Sealing resin resin collection container carrier tape dispenser Resin recovery department that's all Applicant: Seiko Electronics Industries Co., Ltd. Agent Patent Attorney Hayashi Nosuke

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の封止1fi4脂塗布方法の工程説明
図である、第2図は従来の半導体素子の樹脂塗布方法の
説明図であり、第3図はこの発明の半導8テ゛ンスl\
゛ンサー 従来の半導林凛子11討脂塗昂方沫j駁明図第  2 
 図
Fig. 1 is a process explanatory diagram of the sealing 1fi4 resin coating method of the present invention, Fig. 2 is an explanatory diagram of the conventional resin coating method for semiconductor elements, and Fig. 3 is a process explanatory diagram of the sealing 1fi4 resin coating method of the present invention. \
2nd edition of Rinko Handobayashi's traditional Rinko 11 anti-grease coating
figure

Claims (1)

【特許請求の範囲】 回路基板上に設けられた半導体素子の封止樹脂塗布方法
において、 (イ)回路基板上に過分な量の封止樹脂を塗布する工程
。 (ロ)塗布された封止樹脂の過分な量を回収する工程。 とからなることを特徴とする半導体素子の封止樹脂塗布
方法。
[Claims] A method for applying a sealing resin to a semiconductor element provided on a circuit board, including (a) a step of applying an excessive amount of the sealing resin onto the circuit board. (b) A step of recovering an excessive amount of the applied sealing resin. A method for applying a sealing resin for a semiconductor element, comprising:
JP9854189A 1989-04-18 1989-04-18 Sealing-resin coating of semiconductor element Pending JPH02277249A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9854189A JPH02277249A (en) 1989-04-18 1989-04-18 Sealing-resin coating of semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9854189A JPH02277249A (en) 1989-04-18 1989-04-18 Sealing-resin coating of semiconductor element

Publications (1)

Publication Number Publication Date
JPH02277249A true JPH02277249A (en) 1990-11-13

Family

ID=14222546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9854189A Pending JPH02277249A (en) 1989-04-18 1989-04-18 Sealing-resin coating of semiconductor element

Country Status (1)

Country Link
JP (1) JPH02277249A (en)

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