JPH0227727U - - Google Patents
Info
- Publication number
- JPH0227727U JPH0227727U JP10575288U JP10575288U JPH0227727U JP H0227727 U JPH0227727 U JP H0227727U JP 10575288 U JP10575288 U JP 10575288U JP 10575288 U JP10575288 U JP 10575288U JP H0227727 U JPH0227727 U JP H0227727U
- Authority
- JP
- Japan
- Prior art keywords
- camera
- plate
- semiconductor device
- centrifugal direction
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
第１図は本考案の一実施例を示す側面図、第２
図は本考案の他の実施例を示す側面図、第３図は
従来例を説明する図である。
１……プレート、２……上下移動カム、３……
遠心方向移動カム、４……カメラ、５……バネ、
６……ウオームホイール、７……ウオーム、８…
…上下移動ハンドル、９……遠心方向移動ハンド
ル、１０……ベースプレート、１１……スライド
テーブル、１２……レーザ出射光学系、１４……
Ｙステージ、１５……θステージ、１６……フオ
ーカス調整用ステージ、１７……測定プローブ。
Figure 1 is a side view showing one embodiment of the present invention;
The figure is a side view showing another embodiment of the present invention, and FIG. 3 is a diagram illustrating a conventional example. 1...Plate, 2...Vertical movement cam, 3...
Centrifugal direction moving cam, 4...camera, 5...spring,
6... Worm wheel, 7... Worm, 8...
... Vertical movement handle, 9 ... Centrifugal direction movement handle, 10 ... Base plate, 11 ... Slide table, 12 ... Laser emission optical system, 14 ...
Y stage, 15...θ stage, 16... Focus adjustment stage, 17... Measurement probe.
Claims (1)
において、位置合わせ用のカメラとそのカメラと
１体で動作する数台の加工ヘツドを上下動させる
プレートとそのプレートのセンターを中心に遠心
方向に移動させる機構とを含むことを特徴とする
半導体素子組立装置。 When processing multiple points on a semiconductor device to be processed, a camera for positioning and a plate that moves up and down several processing heads that operate together with the camera, and a centrifugal direction centering on the center of the plate, are used. 1. A semiconductor device assembly apparatus, comprising: a moving mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10575288U JPH075638Y2 (en) | 1988-08-09 | 1988-08-09 | Semiconductor device assembly equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10575288U JPH075638Y2 (en) | 1988-08-09 | 1988-08-09 | Semiconductor device assembly equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0227727U true JPH0227727U (en) | 1990-02-22 |
| JPH075638Y2 JPH075638Y2 (en) | 1995-02-08 |
Family
ID=31338651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10575288U Expired - Lifetime JPH075638Y2 (en) | 1988-08-09 | 1988-08-09 | Semiconductor device assembly equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH075638Y2 (en) |
-
1988
- 1988-08-09 JP JP10575288U patent/JPH075638Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH075638Y2 (en) | 1995-02-08 |
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