JPH0227727U - - Google Patents

Info

Publication number
JPH0227727U
JPH0227727U JP10575288U JP10575288U JPH0227727U JP H0227727 U JPH0227727 U JP H0227727U JP 10575288 U JP10575288 U JP 10575288U JP 10575288 U JP10575288 U JP 10575288U JP H0227727 U JPH0227727 U JP H0227727U
Authority
JP
Japan
Prior art keywords
camera
plate
semiconductor device
centrifugal direction
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10575288U
Other languages
English (en)
Other versions
JPH075638Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10575288U priority Critical patent/JPH075638Y2/ja
Publication of JPH0227727U publication Critical patent/JPH0227727U/ja
Application granted granted Critical
Publication of JPH075638Y2 publication Critical patent/JPH075638Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す側面図、第２
図は本考案の他の実施例を示す側面図、第３図は
従来例を説明する図である。 １……プレート、２……上下移動カム、３……
遠心方向移動カム、４……カメラ、５……バネ、
６……ウオームホイール、７……ウオーム、８…
…上下移動ハンドル、９……遠心方向移動ハンド
ル、１０……ベースプレート、１１……スライド
テーブル、１２……レーザ出射光学系、１４……
Ｙステージ、１５……θステージ、１６……フオ
ーカス調整用ステージ、１７……測定プローブ。

Claims (1)

    【実用新案登録請求の範囲】
  1. 被対象物の半導体素子に多数点を加工する場合
    において、位置合わせ用のカメラとそのカメラと
    １体で動作する数台の加工ヘツドを上下動させる
    プレートとそのプレートのセンターを中心に遠心
    方向に移動させる機構とを含むことを特徴とする
    半導体素子組立装置。
JP10575288U 1988-08-09 1988-08-09 半導体素子組立装置 Expired - Lifetime JPH075638Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10575288U JPH075638Y2 (ja) 1988-08-09 1988-08-09 半導体素子組立装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10575288U JPH075638Y2 (ja) 1988-08-09 1988-08-09 半導体素子組立装置

Publications (2)

Publication Number Publication Date
JPH0227727U true JPH0227727U (ja) 1990-02-22
JPH075638Y2 JPH075638Y2 (ja) 1995-02-08

Family

ID=31338651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10575288U Expired - Lifetime JPH075638Y2 (ja) 1988-08-09 1988-08-09 半導体素子組立装置

Country Status (1)

Country Link
JP (1) JPH075638Y2 (ja)

Also Published As

Publication number Publication date
JPH075638Y2 (ja) 1995-02-08

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