JPH02283635A - UV Transparent Fluorinate Glass - Google Patents
UV Transparent Fluorinate GlassInfo
- Publication number
- JPH02283635A JPH02283635A JP32398688A JP32398688A JPH02283635A JP H02283635 A JPH02283635 A JP H02283635A JP 32398688 A JP32398688 A JP 32398688A JP 32398688 A JP32398688 A JP 32398688A JP H02283635 A JPH02283635 A JP H02283635A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- short wavelength
- wavelength region
- fluorinate
- baf2
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/12—Silica-free oxide glass compositions
- C03C3/23—Silica-free oxide glass compositions containing halogen and at least one oxide, e.g. oxide of boron
- C03C3/247—Silica-free oxide glass compositions containing halogen and at least one oxide, e.g. oxide of boron containing fluorine and phosphorus
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Compositions (AREA)
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は、波長200*mから300mmにかけての短
波長域において高い光透過性を持つフッリン酸塩ガラス
に関するものである。 本発明の紫外線透過フッリン酸
塩ガラスは短波長領域において使用される各種光学機器
、あるいは医療機器のレンズ、プリズムなどの光学部品
や導光路としてのファイバに有用である。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a fluorinate glass having high light transmittance in the short wavelength range from 200*m to 300 mm. The ultraviolet-transmissive fluorinate glass of the present invention is useful for various optical devices used in the short wavelength region, optical parts such as lenses and prisms of medical devices, and fibers as light guide paths.
[従来の技術]
近年、半導体製造装置に見られるような極めて短波長の
光を用いる高度な技術が、−膜化されつつある。 こ
のようなことに関連して、極めて短い波長領域において
使用することが可能な光学材料に対する要求が大きくな
っている。 短波長領域において、高い透過性を有する
ガラス材料としてよく知られているのは石英ガラスであ
る。 また、他の材料では結晶質であるアルカリハロゲ
ン化物、アルカリ土類ハロゲン化物は、その物質の特性
上非常に良い透過性を持つ、 しかしこれらの結晶物
質は光学的均質性が低く、また化学的耐久性も十分では
ないので、高性能、高精密な光学系においてはレンズな
どの光学部品とは成りにくい、 石英ガラス以外の紫外
線透過ガラスとしては、リン酸カルシウム系ガラス、ホ
ウ酸塩系ガラス、ホウケイ酸塩系ガラスなどが使用され
ている。[Prior Art] In recent years, advanced technology that uses extremely short wavelength light, such as that seen in semiconductor manufacturing equipment, is being applied to films. In connection with this, there is a growing demand for optical materials that can be used in extremely short wavelength regions. Silica glass is well known as a glass material that has high transparency in the short wavelength region. In addition, alkali halides and alkaline earth halides, which are crystalline in other materials, have very good transmittance due to their material properties, but these crystalline materials have low optical homogeneity and chemical Because it is not durable enough, it is difficult to use as optical components such as lenses in high-performance, high-precision optical systems. Other UV-transmitting glasses other than quartz glass include calcium phosphate glass, borate glass, and borosilicate glass. Salt-based glass is used.
これらの酸化物ガラスは紫外線の吸収に大きな影響を与
える、いわゆる非架橋酸素を少なくさせる考え方に基づ
いている。 しかしながら、これらの酸化物ガラスは
、波長300am以下の紫外線領域においては十分な透
過性を持たず、また光学的均質性にも大きな問題がある
。 さらに、このようなガラスにおいては、紫外線領域
において吸収を持つ重金属イオンの影響も大きく、その
除去に関しても問題がある。These oxide glasses are based on the idea of reducing so-called non-bridging oxygen, which has a large effect on the absorption of ultraviolet rays. However, these oxide glasses do not have sufficient transparency in the ultraviolet region having a wavelength of 300 am or less, and also have a major problem in optical homogeneity. Furthermore, in such glasses, the influence of heavy metal ions that absorb in the ultraviolet region is significant, and there are also problems with their removal.
光学的均質性を持ち紫外線透過性の良いガラスとしては
、yG学ガラスの中ではフッリン酸塩系ガラスが最も優
れていると考えられている。 このガラスには、酸素
イオンよりも紫外線吸収が短波長にあるフッ素が大量に
含有されているため、酸化物ガラスよりもはるかに優れ
た紫外線透過性を有することが予想される。 しかし
ながら、大量のフン素を含有したフッリン酸塩ガラスは
、その光学的均質性を得ることが非常に難しく、現在工
業的規模で生産可能なガラスとしては、わずかに特開昭
63− INNi号公報などに見られるフッリン酸塩ガ
ラスが知られている。 ところが、このようなフッ素
イオンを大量に含有したガラスにおいても、波長300
nm以下の領域では十分な透過性が得られず、したがっ
てより紫外線透過性の良いガラス材料の開発は、今後大
きな重要性を持ってくることが考えられる。Fluorinate glass is considered to be the most excellent glass among YG glasses with optical homogeneity and good UV transmittance. Since this glass contains a large amount of fluorine, which absorbs ultraviolet light at shorter wavelengths than oxygen ions, it is expected to have much better ultraviolet transmittance than oxide glass. However, it is very difficult to obtain optical homogeneity in fluorinate glass containing a large amount of fluorine, and there are only a few glasses that can be produced on an industrial scale at present, as disclosed in Japanese Patent Application Laid-Open No. 63-INNi. Fluorinate glasses, such as those found in However, even in glass containing large amounts of fluorine ions, wavelengths of 300
Sufficient transmittance cannot be obtained in the nm or less region, and therefore the development of glass materials with better ultraviolet transmittance is thought to become of great importance in the future.
[発明が解決しようとする課題]
本発明の目的は、従来より知られているフッリン酸塩ガ
ラスよりも酸素イオン含有最が少なくまた溶融中に貴金
属容器からの金属のガラス融液への混入がない、結晶化
しに(く、工業的に生産可能な新たな紫外線透過ガラス
を提供することにある。[Problems to be Solved by the Invention] The object of the present invention is to reduce the oxygen ion content compared to conventionally known fluorinate glasses, and to prevent metals from being mixed into the glass melt from the precious metal container during melting. The purpose of the present invention is to provide a new ultraviolet-transmitting glass that is resistant to crystallization and can be produced industrially.
[課題を解決する手段]
上記のような点を十分に考慮して1本発明者らはP2O
5−Al2O3−8JO−^IF3RP2 1]*cl
z (R=Mg+Cs十Sr)を基本とするガラス系に
おいて、波長200nlから30On11にかけての短
波長域で高い光透過性を有し、かつ非常に安定なフッリ
ン酸塩ガラスを見いだした。[Means for solving the problem] Taking into full consideration the above points, the present inventors have developed a P2O
5-Al2O3-8JO-^IF3RP2 1]*cl
In the glass system based on z (R=Mg+Cs+Sr), we have found a very stable fluorinate glass that has high light transmittance in the short wavelength range from 200nl to 30On11.
ガラス成分割合としてモル%でP2O5が0.5〜a、
0%、 Al2O,が01〜20%、BaOが02〜7
0%、^lF3が29.0−42.0%1M区F2が5
.0〜13.0へ、ClF3が15.0〜30.5%、
5rP2がIQ、o−22,0%、B*C12が05
−16.5%、BaF2が0〜11,0%及びNiFが
0〜7.5%の組成範囲にあることを特徴とする本発明
のガラスは、各々の成分が以下のような働きをする。P2O5 is 0.5 to a in mol% as a glass component ratio,
0%, Al2O, 01-20%, BaO 02-7
0%, ^lF3 is 29.0-42.0% 1M section F2 is 5
.. 0 to 13.0, ClF3 15.0 to 30.5%,
5rP2 is IQ, o-22,0%, B*C12 is 05
-16.5%, BaF2 is in the composition range of 0 to 11.0%, and NiF is in the composition range of 0 to 7.5%. .
P2O5はガラス形成にかかわる成分であるが、80%
よりも多くなると紫外線透過性が悪くなり、05蔦より
も少ないとガラス形成が容易でなくなる。P2O5 is a component involved in glass formation, but 80%
When the amount is more than 05, the ultraviolet transmittance deteriorates, and when it is less than 05 tsuta, glass formation becomes difficult.
Al2O3はガラス融液の粘性を高める働きをするが
上記範囲外ではP2O5と同様の効果をもたらす。Al2O3 works to increase the viscosity of glass melt, but
Outside the above range, it brings about the same effect as P2O5.
LOは液相温度を低下させるために必要な成分であるが
、上記範囲外では紫外線透過性が低下する。LO is a necessary component for lowering the liquidus temperature, but if it is outside the above range, the ultraviolet transmittance decreases.
^lF3はガラス形成及びフン素イオンの供給源として
必要な成分であるが、上記範囲外ではガラスの結晶化傾
向を大きくする。^lF3 is a necessary component for glass formation and as a source of fluorine ions, but outside the above range it increases the crystallization tendency of the glass.
M(F2は130%を超えると結晶化傾向が大きくなり
、5.0へよりも少ないと溶融温度が高(なり、部の成
分の揮発を引き起こす。When M(F2) exceeds 130%, the crystallization tendency increases, and when it is less than 5.0, the melting temperature becomes high, causing volatilization of the components.
C*Fzは上記範囲外であると結晶化傾向が大きくなる
。When C*Fz is outside the above range, the crystallization tendency increases.
BaF2は22.0%を超えると結晶化傾向が大きくな
す、10.0%よりも少ないと液相温度が高くなり、粘
性が低下しガラスの均質性が悪くなる。If BaF2 exceeds 22.0%, it tends to crystallize; if it is less than 10.0%, the liquidus temperature increases, the viscosity decreases, and the homogeneity of the glass deteriorates.
BJC12をフッリン酸塩ガラス中に導入することによ
り、ガラス化範囲が格段に広がり、ガラス中の酸素イオ
ン濃度を低減する効果を持つ、 また、BaC1□は
溶融の容器である白金とのぬれ性を低下させ、白金の混
入を防ぐ、 しかし、165%を超えると結晶化傾向
が大きくなり、0.5%より少ないと上記効果が得られ
ない。By introducing BJC12 into fluorinate glass, the range of vitrification is greatly expanded, and it has the effect of reducing the oxygen ion concentration in the glass.In addition, BaC1□ improves the wettability with platinum, which is the melting container. However, if it exceeds 165%, the crystallization tendency increases, and if it is less than 0.5%, the above effect cannot be obtained.
B&F2は、110%を超えるとガラスが得られにくい
。When B&F2 exceeds 110%, it is difficult to obtain glass.
LPは、ガラス融液の溶融温度を低下させると共に、特
に揮発に対して大きな効果を持つ成分であるが、7.5
%を超えると結晶化しやすくなる。LP is a component that lowers the melting temperature of the glass melt and has a particularly large effect on volatilization, but it has a 7.5
%, crystallization tends to occur.
アルカリ金属、アルカリ土類金属のフン化物はいずれも
ガラスの溶融性を向上させる目的で使用される。Both alkali metal and alkaline earth metal fluorides are used for the purpose of improving the meltability of glass.
本発明によると上記範囲内にあるガラスは波長10II
nから30haにかけての短波長域において高い光透過
性を持ち、またガラスとして比較的安定に得ることがで
き、工業的規模での生産が可能である。According to the present invention, the glass within the above range has a wavelength of 10II.
It has high light transmittance in the short wavelength range from n to 30 ha, can be obtained relatively stably as glass, and can be produced on an industrial scale.
このガラスを製造する方法は、原料を所定の割合で混合
し、900〜1100℃の温度で溶融し、通常のキャス
トを行なえば容易にガラスとして得ることが出きる。This glass can be easily produced by mixing raw materials in a predetermined ratio, melting at a temperature of 900 to 1100°C, and performing normal casting.
[実施例]
以下、表により実施例を説明する。 第1表に実施例1
及び実施例2〜8のガラス組成を示す。[Example] Examples will be described below with reference to tables. Example 1 in Table 1
and glass compositions of Examples 2 to 8 are shown.
実施例1
第2表に示した化合物を出発原料とし、N001のよう
な重fik¥A合l二混合したものをqu〜1100℃
の温度で溶融し、鉄またはカーボン製の型に流しだして
成型した。 ガラスは比較的安定に得られた。Example 1 Using the compounds shown in Table 2 as starting materials, a mixture of heavy fik\A compound such as N001 was heated to qu~1100°C.
It was melted at a temperature of 100 mL and poured into molds made of iron or carbon. The glass was obtained relatively stably.
第1図(a)にここで得られたガラスの透過率曲線と、
(c)に比較例Iの透過率曲線を示した。Figure 1(a) shows the transmittance curve of the glass obtained here,
(c) shows the transmittance curve of Comparative Example I.
実施例2〜S
第2表のNo、2〜8の重量割合の混合物を実施例と同
様な方法で溶融し、ガラスを得た。Examples 2 to S Glasses were obtained by melting mixtures of Nos. 2 to 8 in Table 2 at weight ratios in the same manner as in Examples.
第1図(b)に実施例2の透過率曲線を示した。FIG. 1(b) shows the transmittance curve of Example 2.
[発明の効果]
本発明の紫外線透過フッリン酸温ガラスは、大変容易に
ガラスが得られ、工業的規模での生産が可能であるため
、短波長領域において使用される各種光学機器、あるい
は医療機器のレンズ、プリズムなどの光学部品、及び導
光路としてのファイバに使用できる。[Effects of the Invention] The ultraviolet-transmitting fluoric acid glass of the present invention can be obtained very easily and can be produced on an industrial scale, so it can be used in various optical devices or medical devices used in the short wavelength region. It can be used for optical components such as lenses and prisms, and fibers as light guides.
第1図の(a>は実施例1の透過率曲線、(b)は実施
例2の透過率曲線、(c)は比較例1である。
特許出願人 株式会社 住田光学ガラス第1表
(100%)In Figure 1, (a> is the transmittance curve of Example 1, (b) is the transmittance curve of Example 2, and (c) is Comparative Example 1. Patent applicant Sumita Optical Glass Co., Ltd. Table 1 ( 100%)
Claims (1)
_3が0.1〜2.0%、BaOが0.5〜7.0%、
AlF_3が29.0〜42.0%、MgF_2が5.
0〜13.0%、CaF_2が15.0〜30.5%、
SrF_2が10.0〜22.0%、BaCl_2が0
.5〜16.5%、BaF_2が0〜11.0%及びN
aFが0〜7.5%から成る紫外線透過フツリン酸塩ガ
ラス。P_2O_5 is 0.5-8.0% in mol%, Al_2O
_3 is 0.1-2.0%, BaO is 0.5-7.0%,
AlF_3 is 29.0-42.0%, MgF_2 is 5.
0-13.0%, CaF_2 15.0-30.5%,
SrF_2 is 10.0-22.0%, BaCl_2 is 0
.. 5-16.5%, BaF_2 0-11.0% and N
UV-transparent fluorophosphate glass consisting of 0-7.5% aF.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32398688A JPH02283635A (en) | 1988-12-22 | 1988-12-22 | UV Transparent Fluorinate Glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32398688A JPH02283635A (en) | 1988-12-22 | 1988-12-22 | UV Transparent Fluorinate Glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02283635A true JPH02283635A (en) | 1990-11-21 |
Family
ID=18160846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32398688A Pending JPH02283635A (en) | 1988-12-22 | 1988-12-22 | UV Transparent Fluorinate Glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02283635A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008004648A1 (en) * | 2006-07-03 | 2008-01-10 | Hoya Corporation | Phosphate glass, fluorophosphate glass, preforms for precision press molding, optical elements, and processes for the production of them |
| JP2008094650A (en) * | 2006-10-10 | 2008-04-24 | Ohara Inc | Optical glass |
| WO2011108577A1 (en) * | 2010-03-02 | 2011-09-09 | 独立行政法人産業技術総合研究所 | Optical glass |
-
1988
- 1988-12-22 JP JP32398688A patent/JPH02283635A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2008004648A1 (en) * | 2006-07-03 | 2008-01-10 | Hoya Corporation | Phosphate glass, fluorophosphate glass, preforms for precision press molding, optical elements, and processes for the production of them |
| JP2008013378A (en) * | 2006-07-03 | 2008-01-24 | Hoya Corp | Phosphate glass, fluorophosphate glass, precision press-molding preform, optical element and manufacturing method thereof |
| US8183169B2 (en) | 2006-07-03 | 2012-05-22 | Hoya Corporation | Phosphate glass, fluorophosphate glass, preform for precision press-molding, optical element and process for the production of thereof |
| US8476176B2 (en) | 2006-07-03 | 2013-07-02 | Hoya Corporation | Phosphate glass, fluorophosphate glass, preform for precision press-molding, optical element and process for the production of thereof |
| JP2008094650A (en) * | 2006-10-10 | 2008-04-24 | Ohara Inc | Optical glass |
| US7838450B2 (en) | 2006-10-10 | 2010-11-23 | Ohara Inc. | Optical glass |
| WO2011108577A1 (en) * | 2010-03-02 | 2011-09-09 | 独立行政法人産業技術総合研究所 | Optical glass |
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