JPH0228593U - - Google Patents
Info
- Publication number
- JPH0228593U JPH0228593U JP10676488U JP10676488U JPH0228593U JP H0228593 U JPH0228593 U JP H0228593U JP 10676488 U JP10676488 U JP 10676488U JP 10676488 U JP10676488 U JP 10676488U JP H0228593 U JPH0228593 U JP H0228593U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- vacuum pump
- flow path
- gas flow
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案にかかる渦流形真空ポンプの一
実施例を示す断面図、第２図はロータの平面図、
第３図は該ロータの断面図、第４図は該ロータの
要部の拡大側面図、第５図及び第６図はロータの
別の実施例を示す断面図、第７図は従来の渦流形
真空ポンプの一例を示す概略断面図である。
２……吸気口、３……排気口、７０……気体流
路、８，８００，８０１……ロータ、８０……羽
根、Ｓ１，Ｓ２……切欠部、Ｐ１，Ｐ２……板材
。
FIG. 1 is a sectional view showing an embodiment of the vortex vacuum pump according to the present invention, FIG. 2 is a plan view of the rotor,
FIG. 3 is a sectional view of the rotor, FIG. 4 is an enlarged side view of the main parts of the rotor, FIGS. 5 and 6 are sectional views showing another embodiment of the rotor, and FIG. 7 is a conventional vortex flow diagram. 1 is a schematic cross-sectional view showing an example of a vacuum pump. 2... Intake port, 3... Exhaust port, 70... Gas flow path, 8,800,801... Rotor, 80... Vane, S1, S2... Notch, P1, P2... Plate material.
Claims (1)
に羽根８０を配設するロータ８，８００，８０１
を設けた渦流形真空ポンプであつて、前記ロータ
８，８００，８０１を、前記羽根８０を形作る切
欠部Ｓ１，Ｓ２もつた複数枚の板材Ｐ１，Ｐ２を
積層して形成していることを特徴とする渦流形真
空ポンプ。 A rotor 8, 800, 801 in which a blade 80 is arranged in a gas flow path 70 between an intake port 2 and an exhaust port 3
The rotor 8, 800, 801 is formed by laminating a plurality of plate materials P1, P2 having notches S1, S2 forming the blades 80. A vortex vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10676488U JPH0228593U (en) | 1988-08-11 | 1988-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10676488U JPH0228593U (en) | 1988-08-11 | 1988-08-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0228593U true JPH0228593U (en) | 1990-02-23 |
Family
ID=31340571
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10676488U Pending JPH0228593U (en) | 1988-08-11 | 1988-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0228593U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004360697A (en) * | 2003-06-05 | 2004-12-24 | Varian Spa | Method for manufacturing fixed vane for vacuum pump and fixed vane obtained thereby |
-
1988
- 1988-08-11 JP JP10676488U patent/JPH0228593U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004360697A (en) * | 2003-06-05 | 2004-12-24 | Varian Spa | Method for manufacturing fixed vane for vacuum pump and fixed vane obtained thereby |