JPH02286B2 - - Google Patents

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Publication number
JPH02286B2
JPH02286B2 JP58022949A JP2294983A JPH02286B2 JP H02286 B2 JPH02286 B2 JP H02286B2 JP 58022949 A JP58022949 A JP 58022949A JP 2294983 A JP2294983 A JP 2294983A JP H02286 B2 JPH02286 B2 JP H02286B2
Authority
JP
Japan
Prior art keywords
silica
purity
particle size
flame
raw material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58022949A
Other languages
Japanese (ja)
Other versions
JPS59152215A (en
Inventor
Tadao Ito
Yoshizo Ishida
Kazuyoshi Pponda
Hisashi Uchida
Yasuo Kuroda
Shinichiro Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Aerosil Co Ltd
Mitsubishi Metal Corp
Original Assignee
Nippon Aerosil Co Ltd
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Aerosil Co Ltd, Mitsubishi Metal Corp filed Critical Nippon Aerosil Co Ltd
Priority to JP2294983A priority Critical patent/JPS59152215A/en
Publication of JPS59152215A publication Critical patent/JPS59152215A/en
Publication of JPH02286B2 publication Critical patent/JPH02286B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】[Detailed description of the invention]

本発明は高純度超微粒子状シリカを原料として
高純度シリカビーズを製造する方法に関するもの
である。 高純度シリカビーズはプラスチツク等の高濃度
充填材、石英硝子製品の原料などの特に高純度を
要する各種用途への利用があり、その安価な製造
方法の確立が注目されている。従来、これらの用
途の大半には天然石英もしくはケイ石から製造さ
れたシリカビーズが使用されているが、これらは
特に高純度を要する用途には不向きである。ま
た、一部の用途にはプラズマ法等の公知技術によ
る合成石英が利用されているが、高価であるので
汎用されるには至つていない。 本発明者等はこれらの背景を基に安価な高純度
シリカビーズの製造方法を確立すべく開発を行な
つた結果、ハロゲン化ケイ素化合物を原料とした
火炎中加水分解反応の生成物であり、一般に使用
されている高純度超微粒子状シリカを製造直後に
高温溶融して所望のシリカビーズとするのが有利
であることを見出した。 類似の方法が実験室規模で実施された例が報文
(Bull.Chem.Soc.Jpn.,53,26−29(1980))に記
載されているが、この方法は原料の超微粒子状シ
リカをあらかじめ1200℃で3時間焼成し、さらに
粒度調製を行なつている点が、本発明の方法と根
本的に異なる。 本発明の方法は、ハロゲン化ケイ素の火炎中加
水分解による高純度超微粒子状シリカを焼成等の
前処理をすることなく、燃料の気体もしくは液
体、または酸素または空気等の支燃ガスもしくは
不活性ガスに分散してバーナーに供給し、これを
火炎中で溶融し、気流中で急速に冷却することに
よつて0〜250μm以下の粒度を高純度シリカビー
ズを製造するものであり、これに用いる原料の高
純度超微粒子状シリカとしては本発明に適した凝
集粒子の大きさと分散性が要求されるため、ハロ
ゲン化ケイ素化合物の火炎加水分解による高純度
超微粒子状シリカの製造直後のものを使用するも
のである。高純度超微粒子状シリカを流体中に分
散させる方法にはスクリユーフイーダーを利用す
る方法、エジエクターを利用する方法等があり、
また本発明の方法に用いるバーナー、燃焼炉
(室)、シリカビーズ捕集装置等の構造も一般的な
ものであり、本明細書に記載の方法に限定される
ものではない。 本発明の方法の特徴は、この方法により製造さ
れるシリカビーズの粒度分布および粉体特性を火
炎中の原料の高純度超微粒子状シリカの粉体濃度
の調節により、その粒径が0〜250μm以下の範囲
で調節できることである。火炎中の原料高純度シ
リカ超微粒子の粉体濃度を増加するにともない、
生成するシリカビーズは粒径の大きなものとなつ
ていく。また、高温火炎中で原料の高純度シリカ
超微粒子の分散が良好でその溶融が完全になされ
ている場合、生成するシリカビーズは球状とな
り、その溶融が不完全である場合には不規則な形
状の融着物粒子となる。 この方法の特徴を生かし、所望の粒度分布およ
び粉体特性を有するシリカビーズを調製するため
には、火炎中に容易に分散して適当な大きさの溶
融粒子となる原料の高純度超微粒子状シリカが必
要である。原料が圧密や吸湿などにより生じた凝
集物を有する場合には、これらの凝集物が分散・
溶融することなく火炎中を通過して製品シリカビ
ーズ中に粗大凝集粒子として混入する一方、凝集
物に付着して火炎中を通過した原料超微粒子がサ
イクロン中で離散して捕集不可能となるため、著
るしい原料の損失(製品収率の低下)をもたら
す。また製品シリカビーズの粒度分布および粉体
特性はこれらの凝集物による原料粉体濃度の局在
化によつて粒度分布が所望する粒径よりも大きく
なる方向に拡がり、原料粉体濃度により調製でき
なくなる。火炎加水分解による高純度超微粒子状
シリカは、製造後放置し吸湿したものあるいは包
装されて一般に販売されているものには5〜10mm
程度の凝集物があり、本発明の方法によるシリカ
ビーズ製造のためには、先に引用した文献に記さ
れているようになんらかの前処理により適当な大
きさの凝集粒子に調整することが必要である。し
かし、この高純度超微粒子状シリカの生産設備に
本発明の方法によるシリカビーズ製造設備を直結
することにより、吸湿および圧密される以前の良
好な分散性を有する超微粒子状シリカを原料とし
て粒度分布および粉体特性の調整されたシリカビ
ーズを高収率で製造することができる。また、こ
れにより原料の高純度超微粒子状シリカの包装お
よび輸送のコストも削減される。 実施例 第1図に示すような装置を用いて高純度シリカ
ビーズの製造実験を行なつた。この装置では火炎
加水分解で得られた新鮮な高純度超微粒子シリカ
がホツパー1に供給される。このホツパー1より
スクリユーフイーダーを用いて高純度超微粒子状
シリカ(0.01μm)を導管10より供給される酸
素の気流中に定流量で供給する。この高純度超微
粒子状シリカはバーナーの管内での酸素の気流中
に分散される。バーナーは三重管式のもので、こ
の実施例では燃料に水素ガスを用いたが、水素は
導管11より供給され、その中心管13と外周管
14より燃焼部に送られる。内周管15より超微
粒子状シリカの分散した酸素が噴出する。これら
のガスは燃焼室で燃焼し、その酸水素炎(温度
3500℃)中で微粒子状シリカの溶融、シリカビー
ズの生成が行われる。この高温の燃焼ガスは、燃
焼室出口で導入口16から送風された二次空気に
より冷却される。シリカビーズはサイクロン5、
バツクフイルター6により捕集され、受器8,9
に集積する。分離された空気、水蒸気はブロアー
7によつて大気中に放出される。 各実施例の実施条件を表1に記載する。また、
サイクロンで得られたシリカビーズを100mesh
(147μm)、200mesh(74μm)、325mesh(44μm)
の篩にかけ、得られた結果を表2に記載する。
The present invention relates to a method for producing high-purity silica beads using high-purity ultrafine particulate silica as a raw material. High-purity silica beads are used in various applications requiring particularly high purity, such as high-concentration fillers for plastics and raw materials for quartz glass products, and the establishment of inexpensive manufacturing methods is attracting attention. Traditionally, silica beads made from natural quartz or silica have been used for most of these applications, but these are particularly unsuitable for applications requiring high purity. Furthermore, although synthetic quartz produced by known techniques such as a plasma method is used for some purposes, it has not been widely used because it is expensive. Based on these backgrounds, the present inventors conducted development to establish an inexpensive manufacturing method for high-purity silica beads, and as a result, they discovered that they are products of hydrolysis reaction in a flame using a halogenated silicon compound as a raw material. It has been found that it is advantageous to melt commonly used high-purity ultrafine particulate silica at a high temperature immediately after production to obtain desired silica beads. An example of a similar method carried out on a laboratory scale is described in a paper (Bull.Chem.Soc.Jpn., 53, 26-29 (1980)), but this method uses ultrafine silica as a raw material This method is fundamentally different from the method of the present invention in that it is pre-calcined at 1200°C for 3 hours and the particle size is further adjusted. In the method of the present invention, high-purity ultrafine particulate silica produced by hydrolyzing silicon halide in a flame is processed into gas or liquid fuel, combustion-supporting gas such as oxygen or air, or inert gas without pretreatment such as firing. Highly purified silica beads with a particle size of 0 to 250 μm are manufactured by dispersing it in a gas and supplying it to a burner, melting it in a flame, and rapidly cooling it in an air stream. As the raw material, high-purity ultra-fine particulate silica, is required to have agglomerated particle size and dispersibility suitable for the present invention, so high-purity ultra-fine particulate silica is used immediately after production by flame hydrolysis of a silicon halide compound. It is something to do. There are two methods for dispersing high-purity ultrafine particulate silica in a fluid, such as using a screw feeder and using an ejector.
Furthermore, the structures of the burner, combustion furnace (chamber), silica bead collection device, etc. used in the method of the present invention are also common, and are not limited to the method described in this specification. The feature of the method of the present invention is that the particle size distribution and powder characteristics of the silica beads produced by this method can be adjusted to a particle size of 0 to 250 μm by adjusting the powder concentration of high-purity ultrafine particulate silica as a raw material in a flame. This can be adjusted within the following range. As the powder concentration of the raw material high-purity ultrafine silica particles in the flame increases,
The silica beads that are generated become larger in particle size. In addition, if the high-purity silica ultrafine particles used as raw materials are well dispersed and completely melted in a high-temperature flame, the silica beads produced will be spherical; if the melting is incomplete, the silica beads will have an irregular shape. becomes fused particles. In order to take advantage of the characteristics of this method and prepare silica beads with the desired particle size distribution and powder properties, it is necessary to use high-purity ultrafine particles of the raw material that can be easily dispersed in a flame and become molten particles of an appropriate size. Silica is required. If the raw material contains aggregates caused by compaction or moisture absorption, these aggregates may be dispersed or
It passes through the flame without melting and mixes into the product silica beads as coarse aggregated particles, while the raw material ultrafine particles that adhere to the aggregates and pass through the flame become dispersed in the cyclone and cannot be collected. This results in significant raw material loss (decreased product yield). In addition, the particle size distribution and powder properties of the product silica beads are expanded in the direction where the particle size becomes larger than the desired particle size due to the localization of the raw material powder concentration due to these aggregates, and it is not possible to adjust the particle size distribution by changing the raw material powder concentration. It disappears. High-purity ultrafine particulate silica produced by flame hydrolysis is 5 to 10 mm thick after being left to absorb moisture or packaged and sold to the public.
In order to produce silica beads by the method of the present invention, it is necessary to adjust the particles to an appropriate size by some pretreatment as described in the literature cited above. be. However, by directly connecting the silica bead manufacturing equipment according to the method of the present invention to the production equipment for this high-purity ultrafine particulate silica, the particle size distribution can be improved by using the ultrafine particulate silica, which has good dispersibility before moisture absorption and compaction, as a raw material. and silica beads with controlled powder properties can be produced in high yield. This also reduces the cost of packaging and transporting the raw material, high-purity ultrafine particulate silica. Example An experiment was conducted to produce high-purity silica beads using an apparatus as shown in FIG. In this device, fresh high-purity ultrafine particle silica obtained by flame hydrolysis is supplied to a hopper 1. From this hopper 1, high-purity ultrafine particulate silica (0.01 μm) is fed at a constant flow rate into the oxygen airflow supplied from the conduit 10 using a screw feeder. This high purity ultra-fine particulate silica is dispersed in a stream of oxygen within the burner tube. The burner is of a triple tube type, and hydrogen gas is used as fuel in this embodiment. Hydrogen is supplied through a conduit 11 and sent to the combustion section through a central tube 13 and an outer circumferential tube 14. Oxygen in which ultrafine silica particles are dispersed is ejected from the inner tube 15. These gases are burned in a combustion chamber and their oxyhydrogen flame (temperature
At 3500℃), fine particulate silica is melted and silica beads are produced. This high-temperature combustion gas is cooled by secondary air blown from the inlet 16 at the exit of the combustion chamber. Silica beads are Cyclone 5,
Collected by back filter 6, receivers 8, 9
Accumulate in The separated air and water vapor are discharged into the atmosphere by a blower 7. The implementation conditions of each example are listed in Table 1. Also,
100mesh silica beads obtained by cyclone
(147μm), 200mesh (74μm), 325mesh (44μm)
The results obtained are listed in Table 2.

【表】【table】

【表】 表2に示した各実施例の粒度分布より粒径と累
積重量分率の関係を第2図に示す。 上記の実施例と第2図から、酸素ガス中の超微
粒子状シリカの粉体濃度とシリカビーズの粒度分
布が強い相関を示すことがわかる。 実施例3で得られたシリカビーズの顕微鏡写真
を第3図に示す。 火炎中の原料高純度超微粒子状シリカの粉体濃
度を酸素ガス中に空気を混入することにより調節
した実験を行ない、それらは実施例7、8、9と
してその実施条件及び結果を表3、4および第4
図に示す。
[Table] Figure 2 shows the relationship between particle size and cumulative weight fraction based on the particle size distribution of each example shown in Table 2. From the above examples and FIG. 2, it can be seen that there is a strong correlation between the powder concentration of ultrafine particulate silica in oxygen gas and the particle size distribution of silica beads. A micrograph of the silica beads obtained in Example 3 is shown in FIG. Experiments were conducted in which the powder concentration of the raw material high-purity ultrafine particulate silica in the flame was adjusted by mixing air into oxygen gas, and the conditions and results are shown in Table 3 as Examples 7, 8, and 9. 4 and 4th
As shown in the figure.

【表】【table】

【表】 液体燃料を使用した実験結果を実施例10、11と
して示す。液体燃料としては灯油を用い、酸素と
空気の混合ガス中に原料高純度超微粒子状シリカ
を分散して火炎中に供給した。
[Table] Experimental results using liquid fuel are shown as Examples 10 and 11. Kerosene was used as the liquid fuel, and raw material high-purity ultrafine particulate silica was dispersed in a mixed gas of oxygen and air and then supplied into the flame.

【表】【table】

【表】 表5、6および第5図に実験結果を示す。 比較例 比較のため原料の超微粒子状シリカとして製造
後圧密・包装され、1日放置により約2%の水分
を吸湿したものを用いて実験を行なつた。実験条
件を表7に、得られた実験結果を表8に、それぞ
れ示した。また表中に本発明方法に従つて同一条
件で実験した実施例3、4の値を再掲した。
[Table] Tables 5 and 6 and FIG. 5 show the experimental results. Comparative Example For comparison, an experiment was conducted using ultrafine particulate silica as a raw material, which had been manufactured, compressed and packaged, and had absorbed about 2% moisture by being left for one day. The experimental conditions are shown in Table 7, and the obtained experimental results are shown in Table 8. In addition, the values of Examples 3 and 4, which were conducted under the same conditions according to the method of the present invention, are also listed in the table.

【表】【table】

【表】 なお比較例1、2の場合、サイクロンによるシ
リカビーズの捕集率は約70%(原料SiO2基準)
で、実施例3、4の場合の捕集率約95%に対して
著るしい損失が見られた。また捕集したシリカビ
ーズ中粒径147〔μm〕以上のものには目的とする
溶融・融着により生成したシリカビーズは見られ
ず、ほとんど全量が原料超微粒子状シリカの粗大
凝集物あるいは焼結物のもろい粒子だつた。 これらのもろい凝集粒子は、全ての粒度分布範
囲においても観察され、プラスチツク等への充填
の際不均一な分散の因となつた。 また、全般に粒度分布が製造直後の圧密・吸湿
されていない分散性良好の原料を用いて同条件で
行なつたもの(実施例3、4)よりも粒径の大き
な方向にひろがる傾向が見られた。
[Table] In the case of Comparative Examples 1 and 2, the collection rate of silica beads by the cyclone was approximately 70% (based on raw material SiO 2 )
In contrast to the collection rate of about 95% in Examples 3 and 4, a significant loss was observed. In addition, among the collected silica beads with a medium particle size of 147 [μm] or more, no silica beads generated by the intended melting and fusion were found, and almost all of the silica beads were coarse aggregates or sintered particles of the raw ultrafine silica particles. They were fragile particles of matter. These brittle agglomerated particles were also observed in all particle size distribution ranges and caused non-uniform dispersion during filling into plastics and the like. In addition, there was a general tendency for the particle size distribution to expand in the direction of larger particle sizes than in cases conducted under the same conditions (Examples 3 and 4) using raw materials with good dispersibility that had not been consolidated or moisture-absorbed immediately after production. It was done.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の方法の製造工程の概略を示
したものである。 1……原料ホツパー、2……スクリユーフイー
ダー、3……バーナー、4……燃焼室、5……サ
イクロン、6……バツグフイルター、7……ブロ
ワー、8……製品バンカー、9……回収原料バン
カー、 第2図は実施例1〜6のシリカビーズの粒度分
布を表2のデーターをもとに粒径と累積重量分率
との関係として表わしたものである。第3図は実
施例3で得られたシリカビーズの粒子の構造を示
す顕微鏡写真である。第4図は実施例7〜9のシ
リカビーズの粒度分布、第5図は実施例9、10の
シリカビーズの粒度分布を表わしたものである。
FIG. 1 shows an outline of the manufacturing process of the method of the present invention. 1... Raw material hopper, 2... Screw feeder, 3... Burner, 4... Combustion chamber, 5... Cyclone, 6... Bag filter, 7... Blower, 8... Product bunker, 9... Recovered Raw Material Bunker FIG. 2 shows the particle size distribution of the silica beads of Examples 1 to 6 as a relationship between particle size and cumulative weight fraction based on the data in Table 2. FIG. 3 is a micrograph showing the structure of the silica beads obtained in Example 3. FIG. 4 shows the particle size distribution of the silica beads of Examples 7 to 9, and FIG. 5 shows the particle size distribution of the silica beads of Examples 9 and 10.

Claims (1)

【特許請求の範囲】 1 高純度超微粒子状シリカを高温溶融して高純
度シリカビーズを製造する方法において、ハロゲ
ン化ケイ素の火炎中気相加水分解によつて生成す
る高純度超微粒子状シリカを製造直後に気体もし
くは液体燃料または酸素、空気等の支燃性ガスに
分散させてバーナに導入し、火炎中で溶融した後
に気流中で急冷することにより、250μm以下の粒
度を有する高純度シリカビーズを製造する方法。 2 火炎中の原料粉体濃度を空気または窒素等の
不活性ガスで調整することにより、粒度分布を調
整することを特徴とする特許請求の範囲第1項記
載の方法。
[Claims] 1. High-purity ultra-fine particulate silica produced by flame-gas phase hydrolysis of silicon halide in a method for producing high-purity silica beads by melting high-purity ultra-fine particulate silica at high temperature. Immediately after production, high-purity silica with a particle size of 250 μm or less is produced by dispersing it in a gas or liquid fuel or combustion-supporting gas such as oxygen or air, introducing it into a burner, melting it in a flame, and then rapidly cooling it in an air stream. How to make beads. 2. The method according to claim 1, wherein the particle size distribution is adjusted by adjusting the raw material powder concentration in the flame with air or an inert gas such as nitrogen.
JP2294983A 1983-02-16 1983-02-16 Production of high-purity silica beads Granted JPS59152215A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2294983A JPS59152215A (en) 1983-02-16 1983-02-16 Production of high-purity silica beads

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2294983A JPS59152215A (en) 1983-02-16 1983-02-16 Production of high-purity silica beads

Publications (2)

Publication Number Publication Date
JPS59152215A JPS59152215A (en) 1984-08-30
JPH02286B2 true JPH02286B2 (en) 1990-01-05

Family

ID=12096862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2294983A Granted JPS59152215A (en) 1983-02-16 1983-02-16 Production of high-purity silica beads

Country Status (1)

Country Link
JP (1) JPS59152215A (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07115939B2 (en) * 1987-05-30 1995-12-13 新日本製鐵株式会社 Method for producing spherical ceramic particles
JP2510928B2 (en) * 1992-05-27 1996-06-26 日本アエロジル株式会社 High-purity silica beads manufacturing method
DE19962452B4 (en) * 1999-12-22 2004-03-18 Heraeus Quarzglas Gmbh & Co. Kg Process for the production of opaque quartz glass
DE10211958A1 (en) 2002-03-18 2003-10-16 Wacker Chemie Gmbh High-purity silica powder, process and device for its production
DE10358065A1 (en) * 2003-12-11 2005-07-28 Wacker-Chemie Gmbh Device for producing fused silica
JPWO2007086183A1 (en) * 2006-01-27 2009-06-18 イビデン株式会社 Honeycomb structure and manufacturing method thereof
JP5612425B2 (en) * 2010-10-01 2014-10-22 大阪瓦斯株式会社 Powder heating device
CN104556070B (en) * 2014-12-26 2017-01-11 中天科技精密材料有限公司 Method and device for recycling high-purity silica

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS521719B2 (en) * 1973-06-28 1977-01-17
JPS5795877A (en) * 1980-12-04 1982-06-14 Nippon Steel Corp Manufacture of spherical ceramic particle

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Publication number Publication date
JPS59152215A (en) 1984-08-30

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