JPH0228882A - Mask data editing method - Google Patents

Abstract

PURPOSE:To prepare and edit mask data which do not cause an error on circuit expression by displaying a mask pattern based on the mask data and a circuit pattern data based on circuit data relatedly on the same screen. CONSTITUTION:Mask patterns 1 and 2 of wiring and wirings 4 and 5 on the circuit data corresponding to them are displayed relatedly on the same screen. Then, since the wirings 1 and 2 are erroneously connected by a mask pattern 3 of erroneous contact, a pattern 6 to show the erroneous connection is displayed with a dotted line in a circuit pattern display part and the erroneously connected wiring parts 1, 2, 3 and 4 are flashingly displayed. Thus, the occurrence of the error of the preparing and editing of the mask data are its place can be confirmed.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a mask data editing method for creating and displaying mask data.

2. Description of the Related Art In recent years, the degree of integration of semiconductor devices has increased dramatically, and the complexity of their circuit configurations has also continued to increase.

Mask data, which is the basis for creating semiconductor devices, has also become large and complex. For this reason, a dedicated mask data editing device is often used to create and edit mask data.

Conventional mask data editing involves inputting mask data into a mask data editing device and displaying only a mask pattern based on this mask data on a screen. A conventional mask data editing method will be explained below.

FIG. 3 shows a mask pattern display screen in a conventional mask data editing method. For example, in FIG. 3, 1 and 2 are wiring patterns of different layers, and 3
is the contact pattern that connects the wiring. FIG. 4 shows circuit data that the mask data displayed as a mask pattern in FIG. 3 is originally intended to express. Fourth
The part marked 4.5 in the figure is the wiring part in the circuit,
The portions corresponding to 1 and 2 in FIG. 3 are shown. Each mask pattern is displayed on the screen based on the input mask data, and you can create and create mask data while checking the mask data on this mask pattern display.
Edit.

Problems to be Solved by the Invention However, although it is possible to check the mask data graphically with the above-described conventional method, it is difficult to check whether the mask data represents the designed circuit.

In the examples shown in Figures 3 and 4, the circuit data includes wiring data 4,
Although there is no connection between 5 and 5, due to an error when creating the mask data, the 3rd
These two wiring lines are connected by the contact 3 shown in the figure. It is difficult to discover and confirm such errors in creating and editing mask data using conventional methods.

The present invention solves the problems of the conventional method described above, and aims to provide a mask data editing method that makes it possible to create and edit mask data without causing errors in circuit representation.

Means for Solving the Problem In order to achieve this object, the mask data editing method of the present invention inputs circuit data in addition to the mask data, and creates data based on the mask data (mask pattern and circuit data). The circuit pattern data is displayed in association with the circuit pattern data on the same screen, and mask data creation support information is provided.

Function: By visually displaying the relationship between mask data and circuit data, this method provides easy-to-understand information on whether the mask data correctly represents the circuit, and ensures that there are no errors in the circuit representation. Mask data can be created.

EXAMPLE Hereinafter, an example of the present invention will be described with reference to the drawings. FIG. 1 is an example of display of errors in circuit representation of mask data in one embodiment of the present invention. A mask pattern based on the mask data and a circuit pattern based on the circuit data used to create the mask data are displayed on the same screen. In Figure 1, ■ and 2 are wiring mask patterns of different layers, respectively. , 3 are mask patterns of contacts that connect the wiring. 4 and 5 are wirings on the circuit data corresponding to mask patterns 1 and 2, respectively. Here, mask pattern 3 of the incorrect contact
As a result, the wirings 1 and 2 are connected incorrectly, so a pattern 6 indicating the incorrect connection is displayed as a dotted line in the circuit pattern display area, and the incorrectly connected wiring portions 1, 2, and 3 are displayed as dotted lines.
．． 4 will be displayed blinking. These displays make it possible to confirm the occurrence and location of errors in mask data creation/editing. FIG. 2 is an example of a display of the correspondence between mask data and circuit data in an embodiment similar to that in FIG. 1. When you want to know which part of the circuit a certain pattern on the mask data corresponds to, if you specify that pattern on the mask pattern display using an appropriate instruction method, the corresponding part on the circuit pattern will be displayed blinking. In FIG. 2, 1 is a designated mask pattern and 4 is a corresponding circuit pattern, which are displayed blinking. The display as shown in FIG. 2 makes it possible to check the correspondence with circuit data one by one during creation and editing of mask data. Note that in this embodiment, the part where the dotted line display and one blinking display are used merely shows an example of a display method for calling attention, and in this part, the brightness is changed.

Other display methods such as changing the color may also be used. Further, in FIGS. 1 and 2 showing the embodiment, the mask pattern and the circuit pattern are displayed by dividing the screen into left and right halves, but the screen may be divided into upper and lower halves or other suitable screen halves.

Effects of the Invention As described above, according to the present invention, by displaying mask data and circuit data in relation to each other, errors in circuit expression can be avoided (and mask data can be created and created correctly).
This makes it possible to realize an excellent mask data editing method that allows editing.

[Brief explanation of the drawing]

FIG. 1 is a screen diagram displaying an error in the connection of mask data in an embodiment of the present invention, FIG. 2 is a screen diagram displaying the correspondence between mask data and circuit data in an embodiment similar to FIG. 1, Figure 3 shows mask pattern tables in the conventional mask data editing method.
4, 5...Wiring on the circuit data, 6...Indication of incorrect connection.

Claims (1)

[Claims] 1. A mask data editing method comprising inputting mask data and circuit data from which the mask data was created into a mask data editing device, and displaying both data in association with each other.