JPH02289464A - Electrically conductive ceramics - Google Patents
Electrically conductive ceramicsInfo
- Publication number
- JPH02289464A JPH02289464A JP1110385A JP11038589A JPH02289464A JP H02289464 A JPH02289464 A JP H02289464A JP 1110385 A JP1110385 A JP 1110385A JP 11038589 A JP11038589 A JP 11038589A JP H02289464 A JPH02289464 A JP H02289464A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- carbide powder
- sintered body
- weight
- parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 38
- 239000000843 powder Substances 0.000 claims abstract description 28
- 239000000203 mixture Substances 0.000 claims abstract description 15
- 238000005245 sintering Methods 0.000 claims abstract description 13
- 238000005452 bending Methods 0.000 claims abstract description 9
- 239000011261 inert gas Substances 0.000 claims abstract description 5
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 15
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 13
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 9
- 238000003754 machining Methods 0.000 abstract description 5
- 229910052593 corundum Inorganic materials 0.000 abstract 2
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 2
- 238000010892 electric spark Methods 0.000 abstract 1
- 238000009760 electrical discharge machining Methods 0.000 description 12
- 239000002245 particle Substances 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000013001 point bending Methods 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- -1 aluminum compound Chemical class 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 239000005011 phenolic resin Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 238000001272 pressureless sintering Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000012258 stirred mixture Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Abstract
Description
【発明の詳細な説明】
ｍ発明の目的
［産業上の利用分野］
本発明は、導電性セラミックスに関し、特に、電気比抵
抗が十分に低減せしめられることにより放電加工が可能
とされかつ機械的強度が確保せしめられることにより構
造材料としても利用可能とされてなる導電性セラミック
スに関するものである。[Detailed Description of the Invention] Purpose of the Invention [Field of Industrial Application] The present invention relates to conductive ceramics, and in particular, the present invention relates to conductive ceramics that can be sufficiently reduced in electrical resistivity to enable electric discharge machining and have high mechanical strength. This invention relates to conductive ceramics that can be used as structural materials by ensuring the following properties.
［従来の技術］
従来、この種の導電性セラミックスとしては、（ｉｆ炭
化珪素粉末と炭化チタン粉末との配合物に対し焼結助剤
としてホウ素および炭素を適当量だけ添加して焼結する
もの（窯業協会年会要旨集第２６８頁；昭和６２年）が
提案されており、また１ｉｉ１炭化珪素粉末と炭化チタ
ン粉末との配合物に対し焼結助剤としてアルミニウム化
合物を適当量たけ添加して焼結するものく特開昭５５−
１１６６６８］が提案されていた。[Prior Art] Conventionally, this type of conductive ceramic is produced by adding appropriate amounts of boron and carbon as sintering aids to a mixture of silicon carbide powder and titanium carbide powder and sintering the mixture. (Ceramics Association Annual Conference Abstracts, p. 268; 1986) has been proposed, and it has also been proposed that an appropriate amount of an aluminum compound be added as a sintering aid to a mixture of silicon carbide powder and titanium carbide powder. Sintered Monoku 1977-
116668] was proposed.
［解決すべき問題点］
しかしながら、従来の導電性セラミックスでは、ホウ素
および炭素を焼結助剤として添加する場合、炭化チタン
粉末の配合量が増加するに伴なって焼結性が徐々に低下
してしまうので、（１）無加圧焼結では十分な機械的強
度を達成できない欠点があり、このためｆｉｉ）ホット
プレス法によって焼結せざるを得ない欠点があり、結果
的に（ｉｉｉｌ複雑な形状の焼結体を製造できない欠点
があって、（１ｖ）工業的利用が大幅に制約される欠点
があった。[Problems to be solved] However, in conventional conductive ceramics, when boron and carbon are added as sintering aids, the sinterability gradually decreases as the amount of titanium carbide powder increases. (1) Pressureless sintering has the disadvantage that sufficient mechanical strength cannot be achieved; therefore, fii) sintering must be performed using the hot press method, resulting in (iii) complex There is a drawback that a sintered body having a specific shape cannot be manufactured, and (1v) there is a drawback that industrial use is severely restricted.
また、従来の導電性セラミックスでは、アルミニウム化
合物を焼結助剤として用いる場合、炭化チタン粉末の配
合量がさほど多くない範囲においては無加圧焼結が可能
であるが、導電性を十分に確保でき放電加工が可能であ
る炭化チタン粉末の配合範囲においては、焼結性が著し
く低下してしまうので、ホウ素および炭素を焼結助剤と
して添加する場合と同様に、（ｉ＋無加圧焼結では十分
な機械的強度を達成できない欠点があり、このため（ｉ
ｉ）ホットプレス法によって焼結せざるを得ない欠点が
あり、結果的に（ｉｉｉ）複雑な形状の焼結体を製造で
きない欠点があって、（１ｖ）工業的利用が大幅に制約
される欠点があった。In addition, in conventional conductive ceramics, when aluminum compounds are used as sintering aids, pressureless sintering is possible as long as the amount of titanium carbide powder is not too large, but sufficient conductivity is ensured. In the blending range of titanium carbide powder that can be processed by electric discharge machining, the sintering property is significantly reduced. has the disadvantage of not being able to achieve sufficient mechanical strength, and for this reason (i
i) It has the disadvantage that it must be sintered by the hot press method, and as a result, (iii) it has the disadvantage that it cannot produce sintered bodies with complex shapes, and (1v) its industrial use is greatly restricted. There were drawbacks.
したがって、従来の導電性セラミックスは、総じて、無
加圧焼結導電性の確保と機械的強度の確保とを同時に達
成できない欠点があった。Therefore, conventional conductive ceramics generally have the drawback that they cannot simultaneously achieve pressureless sintering conductivity and mechanical strength.
そこで、本発明は、これらの欠点を除去するために、無
加圧焼結と導電性の確保と機械的強度の確保とを同時に
達成してなる導電性セラミックスを提供せんとするもの
である。Therefore, in order to eliminate these drawbacks, the present invention aims to provide conductive ceramics that are sintered without pressure, ensure conductivity, and ensure mechanical strength at the same time.
（２）発明の構成
［問題点の解決手段１
本発明により提供される解決手段は、
「炭化珪素粉末２０〜５２重量部と炭化チタン粉末４６
〜７０重量部と酸化アルミニウム粉末２〜３０重量部と
の配合物を不活性ガス雰囲気下で１８００〜２１００℃
の温度にて焼結することにより作成されており、室温に
おける電気比抵抗がｌロー２Ωｃｍ以下でかつ曲げ強さ
が４００１ＪＰａ以上である導電性セラミックス」
である。(2) Structure of the invention [Means for solving problems 1 The means for solving problems provided by the present invention is as follows: ``20 to 52 parts by weight of silicon carbide powder and 46 parts by weight of titanium carbide powder.
A blend of ~70 parts by weight and 2 to 30 parts by weight of aluminum oxide powder was heated at 1800 to 2100°C under an inert gas atmosphere.
conductive ceramics, which are produced by sintering at a temperature of
［作用］
本発明にかかる導電性セラミックスは、上述の構成を有
するので、
１ｉ）電気比抵抗を低減せしめて導電性を確保し、放電
加工を容易とする作用
をなし、また
（ｉｉ）機械的強度を確保し、構造材料とじての利用を
可能とする作用
をなす。[Function] Since the conductive ceramic according to the present invention has the above-mentioned configuration, it has the following functions: 1i) reducing electrical specific resistance to ensure conductivity and facilitating electrical discharge machining; and (ii) mechanical properties. Its function is to ensure strength and enable its use as a structural material.
［実施例］
次に、本発明にかかる導電性セラミックスについて、好
ましい実施例を挙げ、具体的に説明する。[Examples] Next, the conductive ceramics according to the present invention will be specifically described by giving preferred examples.
まず、本発明にかかる導電性セラミックスの一実施例に
ついて、その構成および作用を詳細に説明する。First, the structure and operation of an embodiment of the conductive ceramic according to the present invention will be described in detail.
本発明にかかる導電性セラミックスは、炭化珪素粉末２
０〜５２重量部と炭化チタン粉末４６〜７０重量部と酸
化アルミニウム粉末２〜３０重量部との配合物を不活性
ガス雰囲気下で１８００〜２１００℃の温度にて焼結す
ることにより作成されており、室温における電気比抵抗
が１０−２Ωｃｍ以下でかつ曲げ強さが４００ＭＰａ以
上である。The conductive ceramic according to the present invention is made of silicon carbide powder 2
It is made by sintering a blend of 0 to 52 parts by weight, 46 to 70 parts by weight of titanium carbide powder, and 2 to 30 parts by weight of aluminum oxide powder at a temperature of 1800 to 2100°C under an inert gas atmosphere. The electrical resistivity at room temperature is 10 −2 Ωcm or less, and the bending strength is 400 MPa or more.
ここで、炭化チタン粉末の配合量が４６〜７０重量部と
されている根拠は、ｆｉｔ ４６重量部未満となると焼
結体の導電性が十分でな（、経済的な加工速度で放電加
工できないことにあり、また（ｆｉｌ ７０重量部を超
えると焼結性が低下し焼結体の機械的強度を確保できな
いことにある。Here, the reason why the blending amount of titanium carbide powder is 46 to 70 parts by weight is that if the content is less than 46 parts by weight, the conductivity of the sintered body is insufficient (and electric discharge machining cannot be performed at an economical machining speed). In particular, if the amount of fil exceeds 70 parts by weight, the sinterability decreases and the mechanical strength of the sintered body cannot be ensured.
また、酸化アルミニウム粉末の配合量が２〜３０重量部
とされている根拠は、（ｉ）２重量部未満では焼結性が
十分でなく、また（ｉｉｌ ３０重量部を超えると、焼
結性が低下し焼結体の機械的強度を確保できないことに
ある。ちなみに酸化アルミニウム粉末は、必ずしもＡｌ
オ０３粉末として添加する必要はなく、アルミニウムア
ルコキシド、有機酸塩。The reason why the amount of aluminum oxide powder is 2 to 30 parts by weight is that (i) less than 2 parts by weight does not provide sufficient sinterability, and (i) if it exceeds 30 parts by weight, sinterability decreases. The problem is that the mechanical strength of the sintered body cannot be ensured due to the decrease in the aluminum oxide powder.
There is no need to add aluminum alkoxide or organic acid salt as O03 powder.
無機酸塩あるいはコロイド状アルミナなどの形態で添加
し焼結までの間に適宜の処理を施して酸化アルミニウム
Ａｌ２Ｏ５に変換してもよい。It may be added in the form of an inorganic acid salt or colloidal alumina, and converted into aluminum oxide Al2O5 by performing appropriate treatment before sintering.
加えて、本発明にかかる導電性セラミックスには、焼結
性を改善して機械的強度を向上せしめるために、炭化珪
素粉末、炭化チタン粉末および酸化アルミニウム粉末の
合計配合量に対し、６重量部以下の炭素を配合してもよ
い。ここで、炭素の配合量を６重量部以下に制限する根
拠は、６重量部を超えると焼結体の機械的強度が低下し
てしまうことにある。In addition, in order to improve sinterability and improve mechanical strength, the conductive ceramic according to the present invention contains 6 parts by weight based on the total amount of silicon carbide powder, titanium carbide powder, and aluminum oxide powder. The following carbons may be blended. Here, the basis for restricting the blending amount of carbon to 6 parts by weight or less is that if it exceeds 6 parts by weight, the mechanical strength of the sintered body will decrease.
次いで、上述した本発明にかかる導電性セラミックスの
一実施例の理解を一層謀めるために、数値などを挙げて
具体的に説明する。Next, in order to further improve the understanding of one embodiment of the conductive ceramic according to the present invention described above, numerical values and the like will be given and concretely explained.
１叉亘丞ユニ
平均粒径０．５ＬＬｍの炭化珪素粉末４２ｇは、平均粒
径２．Ｏａｍの炭化チタン粉末４６ｇと平均粒径００２
μｍのアルミナゾル９ｇとが添加配合されたのち、更に
炭化度５０％のフェノール樹脂６ｇを含むエタノール？
８液１５０ｍ１が添加配合され、プラスチック類のボッ
トミル（すなわちポリポットおよびアルミナボール）を
用いて２４時間にわたって攪拌混合された。42 g of silicon carbide powder with an average particle size of 0.5 LLm has an average particle size of 2. Oam titanium carbide powder 46g and average particle size 002
After 9g of μm alumina sol is added and blended, ethanol further contains 6g of phenolic resin with a carbonization degree of 50%?
150 ml of the 8 liquids were added and mixed using a plastic bot mill (ie, polypot and alumina ball) for 24 hours.
次いで、撹拌混合物は、乾燥により溶媒が除去されたの
ち、造粒されて造粒混合物とされた。Next, the stirred mixture was dried to remove the solvent, and then granulated to obtain a granulated mixture.
造粒混合物は、金型ブレスおよびラバープレスによって
、５ ｍｍＸ ５ ｍｍＸ ６０ｍｍの成形体とされた
。The granulated mixture was made into a molded body of 5 mm x 5 mm x 60 mm using a mold press and a rubber press.
成形体は、グラファイト製容器に収容されたのち、アル
ゴンガス雰囲気下において１９００℃の温度で焼結され
、セラミックス焼結体とされた。The molded body was placed in a graphite container and then sintered at a temperature of 1900° C. in an argon gas atmosphere to obtain a ceramic sintered body.
セラミックス焼結体は、相対密度、電気比抵抗および曲
げ強さ（室温における３点曲げ強さ）について測定され
た（第１表参照）。第１表によれば、電気比抵抗が１．
ＯＸ １０−”０ｃｍと小さかったので、セラミックス
焼結体の放電加工速度は、４０〜８０ｍｍ” ７分と超
硬合金の放電加工速度に実質的に匹敵する値となってお
り、工業化に適した速度で加工できた。The ceramic sintered bodies were measured for relative density, electrical resistivity, and bending strength (3-point bending strength at room temperature) (see Table 1). According to Table 1, the electrical resistivity is 1.
Since the ceramic sintered body was small at OX 10-"0cm, the electrical discharge machining speed of the ceramic sintered body was 40-80mm"7 minutes, a value that is substantially comparable to the electrical discharge machining speed of cemented carbide, making it suitable for industrialization. It was possible to process at high speed.
ユ大亘五呈り
炭化珪素粉末および炭化チタン粉末の配合添加量が、そ
れぞれ３５ｇおよび５３ｇとされたことを除き、実施例
１が反復された。Example 1 was repeated except that the blended amounts of silicon carbide powder and titanium carbide powder were 35 g and 53 g, respectively.
セラミックス焼結体は、相対密度、電気比抵抗および曲
げ強さ（室温における３点曲げ強さ）について測定され
た（第１表参照）。第１表によれば、電気比抵抗が４．
５Ｘ １０−’Ωｃｍと小さかったので、セラミックス
焼結体の放電加工速度は、４０〜８０ｍが７分と超硬合
金の放電加工速度に実質的に匹敵する値となっており、
工業化に適した速度で加工できた。The ceramic sintered bodies were measured for relative density, electrical resistivity, and bending strength (3-point bending strength at room temperature) (see Table 1). According to Table 1, the electrical resistivity is 4.
Since the diameter was as small as 5X 10-'Ωcm, the electrical discharge machining speed for ceramic sintered bodies is 7 minutes for 40 to 80 m, which is a value that is substantially comparable to the electrical discharge machining speed for cemented carbide.
Processing was possible at a speed suitable for industrialization.
ユ夾立±１１
炭化珪素粉末、炭化チタン粉末およびフェノール樹脂の
添加配合量が、それぞれ２７ｇ、６２ｇおよび４ｇとさ
れたことを除き、実施例１が反復された。Example 1 was repeated except that the added amounts of silicon carbide powder, titanium carbide powder, and phenolic resin were 27 g, 62 g, and 4 g, respectively.
セラミックス焼結体は、相対密度、ｉｉ電気比抵抗よび
曲げ強さ（室温における３点曲げ強さ）について測定さ
れた（第１表参照）、第１表によれば、電気比抵抗が２
．６ｘｌＯ−“０ｃｍと小さがったので、セラミックス
焼結体の放電加工速度は、４０〜８０ｍｍ２／分と超硬
合金の放電加工速度に実質的に匹敵する値となっており
、工業化に適した速度で加工できた。The ceramic sintered body was measured for relative density, electrical resistivity and bending strength (3-point bending strength at room temperature) (see Table 1). According to Table 1, the electrical resistivity was 2.
．． Since the diameter is as small as 6xlO-0cm, the electrical discharge machining speed of the ceramic sintered body is 40 to 80 mm2/min, which is substantially comparable to the electrical discharge machining speed of cemented carbide, which is a speed suitable for industrialization. I was able to process it with
ユｍ引先と
平均粒径０，５μｍの炭化珪素粉末４６ｇは、平均粒径
２０μｍの炭化チタン粉末４６ｇと平均粒径０．０２ｕ
ｍのアルミナゾル８ｇとが添加配合されたのち、更にポ
リビニルアセテート２．５ｇを含むアセトン溶液２００
ｍ１が添加配合され、プラスチック類のボットミル（す
なわ、ちポリポットおよびアルミナボール）を用いて２
４時間にわたって撹拌）程合された。46 g of silicon carbide powder with an average particle size of 0.5 μm is combined with 46 g of titanium carbide powder with an average particle size of 20 μm and an average particle size of 0.02 μm.
After adding and blending 8 g of alumina sol, 200 g of acetone solution containing 2.5 g of polyvinyl acetate was added.
m1 was added and mixed using a plastic bot mill (i.e. polypot and alumina ball).
(stirred for 4 hours).
次いで、撹拌混合物は、乾燥により溶媒が除去されたの
ち、造粒されて造粒混合物とされた。Next, the stirred mixture was dried to remove the solvent, and then granulated to obtain a granulated mixture.
造粒混合物は、金型ブレスおよびラバープレスによって
、５ ｍｍＸ ５ ｍｍＸ ６０ｍｍの成形体とされた
。The granulated mixture was made into a molded body of 5 mm x 5 mm x 60 mm using a mold press and a rubber press.
成形体は、グラファイト製容器に収容されたのち、アル
ゴンガス雰囲気下において１９００℃の温度で焼結され
、セラミックス焼結体とされた。The molded body was placed in a graphite container and then sintered at a temperature of 1900° C. in an argon gas atmosphere to obtain a ceramic sintered body.
セラミックス焼結体は、相対密度、電気比抵抗および曲
げ強さ（室温における３点曲げ強さ）について測定され
た（第１表参照）、、第１表によれば、電気比抵抗が１
．２ＸｌＯ−”０ｃｍと小さかったので、セラミックス
焼結体の放電加工速度は４０〜８０ｍｍ２／分と超硬合
金の放電加工速度に実質的に匹敵する値となっており、
工業化に適した速度で加工できた。The ceramic sintered body was measured for relative density, electrical resistivity, and bending strength (3-point bending strength at room temperature) (see Table 1). According to Table 1, the electrical resistivity was 1.
．． Since it was as small as 2XlO-"0cm, the electrical discharge machining speed of the ceramic sintered body was 40 to 80 mm2/min, a value that is substantially comparable to the electrical discharge machining speed of cemented carbide.
Processing was possible at a speed suitable for industrialization.
−けＵ基ジー
平均粒径０．５ｕｍの炭化珪素粉末６５ｇは、平均粒径
２．Ｏａｍの炭化チタン粉末２４ｇと平均粒径口９口２
ｕｍのアルミナゾル８ｇとが添加配合されたのち、更に
炭化度５０％のフェノール樹脂６ｇを含むエタノール溶
液１５０ｍ１が添加配合され、プラスチック製のボット
ミル（すなわちポリポットおよびアルミナボール）を用
いて２４時間にわたって攪拌混合された。65 g of silicon carbide powder with an average particle size of 0.5 um has an average particle size of 2. Oam titanium carbide powder 24g and average particle size 9 mouths 2
After 8 g of um alumina sol was added and blended, 150 ml of an ethanol solution containing 6 g of phenolic resin with a degree of carbonization of 50% was added and blended, and the mixture was stirred and mixed for 24 hours using a plastic bot mill (i.e., polypot and alumina ball). It was done.
次いで、攪拌混合物は、乾燥により溶媒が除去されたの
ち、造粒されて造粒混合物とされた。Next, the stirred mixture was dried to remove the solvent, and then granulated to obtain a granulated mixture.
造粒混合物は、金型ブレスおよびラバープレスによって
、５ ｍｍＸ ５ ｍｍＸ ６０ｍｍの成形体とされた
。The granulated mixture was made into a molded body of 5 mm x 5 mm x 60 mm using a mold press and a rubber press.
成形体は、グラファイト製容器に収容されたのち、アル
ゴンガス雰囲気下において１９００℃の温度で焼結され
、セラミックス焼結体とされた。The molded body was placed in a graphite container and then sintered at a temperature of 1900° C. in an argon gas atmosphere to obtain a ceramic sintered body.
セラミックス焼結体は、相対密度、電気比抵抗および曲
げ強さ（室温における３点曲げ強さ）について測定され
る（第１表参解）。第１表によれば、電気比抵抗が５．
２Ｘ１０−２Ωｃｍと大きかったので、セラミックス焼
結体の放電加工速度は５ｍｍ”７分と小さ（、工業化に
適した速度では加工できなかった。The ceramic sintered body is measured for relative density, electrical resistivity, and bending strength (3-point bending strength at room temperature) (see Table 1). According to Table 1, the electrical resistivity is 5.
Since the diameter was as large as 2×10 −2 Ωcm, the electrical discharge machining speed for the ceramic sintered body was as low as 5 mm” and 7 minutes (it was not possible to process the ceramic sintered body at a speed suitable for industrialization).
第１表を参照すれば明らかなように、本発明によれば、
セラミックス焼結体の電気比抵抗をｌロー２ΩｃｌＴ１
以下とでき、併せて曲げ強さを４００ＭＰａ以上と大き
くできる。このため、本発明によれば、セラミックス焼
結体の放電加工を容易化でき、深度の大きな形状であっ
ても短時間で加工でき、ひいては高強度および高靭性を
確保できる。As is clear from Table 1, according to the present invention,
The electrical resistivity of the ceramic sintered body is llow2ΩclT1
At the same time, the bending strength can be increased to 400 MPa or more. Therefore, according to the present invention, electrical discharge machining of a ceramic sintered body can be facilitated, even a shape with a large depth can be machined in a short time, and high strength and high toughness can be ensured.
なお、上述の実施例においては、炭化珪素粉末の粒径が
０５μｍとされていたが、本発明は、これに限定される
ものではない。しかしながら、セラミックス焼結体の機
械的強度などを考慮すると、本発明では、炭化珪素粉末
の粒径が２μｍ以下であることが好ましい。In addition, in the above-mentioned example, the particle size of the silicon carbide powder was 05 μm, but the present invention is not limited to this. However, in consideration of the mechanical strength of the ceramic sintered body, etc., in the present invention, it is preferable that the particle size of the silicon carbide powder is 2 μm or less.
（３）発明の効果
上述より明らかなように、本発明にかかる導電性セラミ
ックスは、
ｆｉｔ電気比抵抗を低減せしめて導電性を確保し、放電
加工を容易とできる効
果
を有し、また
しての利用を可能とできる効果
を有する。(3) Effects of the Invention As is clear from the above, the conductive ceramics of the present invention have the effect of reducing the electrical resistivity of the fit, ensuring conductivity, and facilitating electrical discharge machining. It has the effect of enabling the use of
Claims (1)
〜７０重量部と酸化アルミニウム粉末２〜３０重量部と
の配合物を不活性ガス雰囲気下で１８００〜２１００℃
の温度にて焼結することにより作成されており、室温に
おける電気比抵抗が１０＾−＾２Ωｃｍ以下でかつ曲げ
強さが４００ＭＰａ以上である導電性セラミックス。20 to 52 parts by weight of silicon carbide powder and 46 parts by weight of titanium carbide powder
A blend of ~70 parts by weight and 2 to 30 parts by weight of aluminum oxide powder was heated at 1800 to 2100°C under an inert gas atmosphere.
An electrically conductive ceramic which is produced by sintering at a temperature of 10-2 Ωcm or less and has a bending strength of 400 MPa or more at room temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1110385A JPH02289464A (en) | 1989-04-28 | 1989-04-28 | Electrically conductive ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1110385A JPH02289464A (en) | 1989-04-28 | 1989-04-28 | Electrically conductive ceramics |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02289464A true JPH02289464A (en) | 1990-11-29 |
Family
ID=14534466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1110385A Pending JPH02289464A (en) | 1989-04-28 | 1989-04-28 | Electrically conductive ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02289464A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05219603A (en) * | 1992-02-05 | 1993-08-27 | Toyo Electric Mfg Co Ltd | Current collector |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6445755A (en) * | 1987-08-12 | 1989-02-20 | Hitachi Ltd | Ceramic dull roll for rolling, its production and rolling mill using said roll |
-
1989
- 1989-04-28 JP JP1110385A patent/JPH02289464A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6445755A (en) * | 1987-08-12 | 1989-02-20 | Hitachi Ltd | Ceramic dull roll for rolling, its production and rolling mill using said roll |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05219603A (en) * | 1992-02-05 | 1993-08-27 | Toyo Electric Mfg Co Ltd | Current collector |
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