JPH0229366U - - Google Patents

Info

Publication number
JPH0229366U
JPH0229366U JP10781988U JP10781988U JPH0229366U JP H0229366 U JPH0229366 U JP H0229366U JP 10781988 U JP10781988 U JP 10781988U JP 10781988 U JP10781988 U JP 10781988U JP H0229366 U JPH0229366 U JP H0229366U
Authority
JP
Japan
Prior art keywords
blocks
piezo stack
mass flow
flow controller
fuses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10781988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10781988U priority Critical patent/JPH0229366U/ja
Publication of JPH0229366U publication Critical patent/JPH0229366U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP10781988U 1988-08-15 1988-08-15 Pending JPH0229366U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10781988U JPH0229366U (cs) 1988-08-15 1988-08-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10781988U JPH0229366U (cs) 1988-08-15 1988-08-15

Publications (1)

Publication Number Publication Date
JPH0229366U true JPH0229366U (cs) 1990-02-26

Family

ID=31342576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10781988U Pending JPH0229366U (cs) 1988-08-15 1988-08-15

Country Status (1)

Country Link
JP (1) JPH0229366U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020089037A (ja) * 2018-11-22 2020-06-04 株式会社堀場エステック ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6396377A (ja) * 1986-10-14 1988-04-27 Hitachi Metals Ltd 圧電弁駆動回路

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6396377A (ja) * 1986-10-14 1988-04-27 Hitachi Metals Ltd 圧電弁駆動回路

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020089037A (ja) * 2018-11-22 2020-06-04 株式会社堀場エステック ピエゾアクチュエータ、流体制御バルブ、及び、流体制御装置

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