JPH02296367A - Solid state image pick-up device - Google Patents
Solid state image pick-up deviceInfo
- Publication number
- JPH02296367A JPH02296367A JP1116772A JP11677289A JPH02296367A JP H02296367 A JPH02296367 A JP H02296367A JP 1116772 A JP1116772 A JP 1116772A JP 11677289 A JP11677289 A JP 11677289A JP H02296367 A JPH02296367 A JP H02296367A
- Authority
- JP
- Japan
- Prior art keywords
- solid
- resin
- image pick
- imaging device
- state imaging
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid State Image Pick-Up Elements (AREA)
Abstract
Description
【発明の詳細な説明】 〔発明の目的〕 (産業上の利用分野) 本発明は固体撮像装置に関するものである。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a solid-state imaging device.
(従来の技術) 一般に固体撮像装置は次のように製造される。(Conventional technology) Solid-state imaging devices are generally manufactured as follows.
まずセラミックまたはガラスエポキシ等で作られた半導
体外囲器の凹部の所定の場所にCCD等の固体撮像素子
をエポキシ系の樹脂からなるマウント剤を用いて固着さ
せる。そして、この固着された固体撮像素子の電極と上
記半導体外囲器のインナリードとをAuまたはA11等
の細線を用いてワイヤボンディング接続した後、樹脂材
1]−1する。その後、上記固体撮像素子を外力から保
護したり、光学経路を確保したりするために上記固体撮
像素子を透光性部材で覆うことによって得られる。First, a solid-state imaging device such as a CCD is fixed to a predetermined location in a recess of a semiconductor envelope made of ceramic or glass epoxy using a mounting agent made of epoxy resin. Then, the fixed electrodes of the solid-state image pickup device and the inner leads of the semiconductor envelope are connected by wire bonding using thin wires such as Au or A11, and then resin material 1]-1 is applied. Thereafter, the solid-state image sensor is covered with a light-transmitting member in order to protect the solid-state image sensor from external forces and ensure an optical path.
(発明が解決しようとする課題)
しかしながら、このようにして得られる従来の固体撮像
装置においては、マウント剤としてエポキシ系の樹脂を
用いているため次の問題点がある。(Problems to be Solved by the Invention) However, in the conventional solid-state imaging device obtained in this manner, since an epoxy resin is used as a mounting agent, there are the following problems.
a)エポキシ系樹脂は、高温硬化過程においてNaやC
g等のガス発生率が高く、1・111.樹脂内に硬化阻
害物となるNaやCg等の気泡を発生させやすい。この
ため半導体外囲器の凹部と接触密層している樹脂界面の
剥離を誘発させ、品質上あまり好ましくなかった。a) Epoxy resin is free from Na and C during the high temperature curing process.
The gas generation rate is high, such as 1.111. Bubbles of Na, Cg, etc., which become curing inhibitors, are likely to be generated in the resin. This induces peeling of the resin interface that is in close contact with the recess of the semiconductor envelope, which is not very desirable in terms of quality.
b)また、エポキシ系マウント剤は硬化するまでに1〜
2時間要し、固体撮像装置を量産するにはあまり好まし
いものではなかった。b) In addition, the epoxy mounting agent must be
It took two hours, which was not very desirable for mass production of solid-state imaging devices.
C)更にエポキシ系マウント剤は湿気を吸収しやすく、
吸収された湿気は封止樹脂の硬化阻害物である水分とな
る。このためa)項と同様に半導体外囲器の凹部と接触
密着している樹脂界面の、Al1離を誘発さぜ、品質上
あまり好ましいものではなかった。C) Furthermore, epoxy mounting agents easily absorb moisture;
The absorbed moisture becomes moisture that inhibits curing of the sealing resin. For this reason, as in item a), separation of Al1 was induced at the resin interface in close contact with the recess of the semiconductor envelope, which was not very desirable in terms of quality.
本発明は」二記問題点を考慮してなされたものであって
可及的に高品質でかつ生産性の高い固体撮像装置を提共
することを目的とする。The present invention has been made in consideration of the above two problems, and it is an object of the present invention to provide a solid-state imaging device with as high quality as possible and with high productivity.
(課題を解決するための手段)
本発明は、半導体外囲器の凹部の所定の位置にマウント
剤を用いて固体撮像素子を固着させ、この固着された固
体撮像素子の電極と、半導体外囲器のインナリードとを
ワイヤボンディング接続した後に弾性体樹脂を用いて樹
脂月止し、固体撮像素子の感光部を透光性部材て覆うこ
とによって形成される固体撮像装置において、マウント
剤としてシリコン系樹脂を用いたことを特徴とする。(Means for Solving the Problems) The present invention fixes a solid-state image sensor to a predetermined position in a recess of a semiconductor envelope using a mounting agent, and connects electrodes of the fixed solid-state image sensor to a predetermined position of a recess of a semiconductor envelope. In a solid-state imaging device formed by connecting the inner lead of the device by wire bonding, using an elastic resin to fix the resin, and then covering the photosensitive part of the solid-state imaging device with a light-transmitting material, a silicon-based mounting agent is used. It is characterized by the use of resin.
(作 用)
このように構成された本発明の固体撮像装置によれば、
マウント剤としてシリコン系樹脂が用いられる。このシ
リコン系樹脂は従来使用されていたエポキン系に比べて
、高温硬化過程において硬化阻害物となるNaやCg等
のガスの発生率か低いとともに、湿気をほとんど吸わな
い。これにより半導体外囲器の凹部と接触密着している
樹脂界面の剥離の誘発を可及的に防止することか可能と
なり高品質の固体撮像装置を得ることができる。(Function) According to the solid-state imaging device of the present invention configured as described above,
Silicone resin is used as a mounting agent. This silicone-based resin has a lower rate of generation of gases such as Na and Cg that become curing inhibitors during the high-temperature curing process than conventionally used Epoquine-based resins, and also hardly absorbs moisture. This makes it possible to prevent as much as possible the occurrence of peeling of the resin interface that is in close contact with the concave portion of the semiconductor envelope, making it possible to obtain a high-quality solid-state imaging device.
また、シリコン系樹脂の硬化時間は30分以下であるこ
とによりエポキシ系樹脂を使用する従来の場合に比べて
生産性を可及的に向上させることができる。Furthermore, since the curing time of the silicone resin is 30 minutes or less, productivity can be improved as much as possible compared to the conventional case of using an epoxy resin.
(実施例)
第1図に本発明の固体撮像装置の一実施例を示す。この
実施例の固体撮像装置1は、セラミックまたはガラスエ
ポキシ等で作られた1(導体外囲器2の凹部の所定の場
所にシリコン系樹脂からなるマウント剤3をデイスペン
サあるいは転写技術により塗布する。次に、固体撮像素
子4をマウント剤上に位置決めして載置した後、オーブ
ン″、9を用いてマウント剤3を高温硬化させ、固体撮
像素r−4を半導体外囲器2の凹部に固ろ−さぜる。(Embodiment) FIG. 1 shows an embodiment of the solid-state imaging device of the present invention. In the solid-state imaging device 1 of this embodiment, a mounting agent 3 made of silicone resin is applied to a predetermined location of a recessed portion of a conductor envelope 2 made of ceramic or glass epoxy or the like using a dispenser or a transfer technique. Next, after positioning and placing the solid-state image sensor 4 on the mounting agent, the mount agent 3 is cured at high temperature using an oven'', 9, and the solid-state image sensor r-4 is placed in the recess of the semiconductor envelope 2. Stir and stir.
この後、固体撮像素子4の図示しない電極と半導体外囲
器2のインナリード5とをAuあるいはAβ等の細線(
ワイヤ)6を用いてワイヤボンディング接続する。そし
てシリコン系封IL樹脂7を用いて封止する。このとき
半導体外囲器2の凹部から封止樹脂7がはみ川さないよ
うにする。次に固体撮像素子4の感光部を覆うように真
空吸着法を用いて透光性部制8を封止樹脂7上に載せ、
オーブン等を用いて封止樹脂7を硬化させて透光性部材
8を固着する。After that, the electrodes (not shown) of the solid-state image sensor 4 and the inner leads 5 of the semiconductor envelope 2 are connected with a thin wire (such as Au or Aβ).
Connect by wire bonding using wire) 6. Then, sealing is performed using a silicon-based sealing IL resin 7. At this time, the sealing resin 7 is prevented from leaking out from the recessed portion of the semiconductor envelope 2. Next, a light-transmitting part 8 is placed on the sealing resin 7 using a vacuum suction method so as to cover the photosensitive part of the solid-state image sensor 4.
The sealing resin 7 is cured using an oven or the like, and the translucent member 8 is fixed.
このようにして形成される固体撮像装置によればマウン
ト剤としてシリコン樹脂が用いられる。According to the solid-state imaging device formed in this way, silicone resin is used as the mounting agent.
このシリコン系樹脂は従来使用されていたエポキシ系樹
脂に比べて高温硬化過程において硬化阻害物となるNa
やCg等のガスの発生率が低いとともに湿気をほとんど
吸わない。このため半導体外囲器2の凹部と接触密着し
ている樹脂界面の剥離を可及的に防止することができる
。更に、封止樹脂7にマウント剤3と同系のシリコン樹
脂を用いたことによりマウント剤3と封止樹脂7との間
の膨張係数にほとんど差はなく、このため樹脂界面の剥
離は一層生じにくくなる。Compared to conventionally used epoxy resins, this silicone resin contains Na, which is a curing inhibitor during the high temperature curing process.
The generation rate of gases such as and Cg is low, and it absorbs almost no moisture. Therefore, peeling of the resin interface that is in close contact with the recessed portion of the semiconductor envelope 2 can be prevented as much as possible. Furthermore, because the sealing resin 7 uses a silicone resin similar to the mounting agent 3, there is almost no difference in expansion coefficient between the mounting agent 3 and the sealing resin 7, and therefore peeling at the resin interface is less likely to occur. Become.
また、シリコン系樹脂の硬化時間は30分以下であるた
め、エポキシ系樹脂を用いた従来のものに比べて生産性
を可及的に向上させることができる。Furthermore, since the curing time of silicone resin is 30 minutes or less, productivity can be improved as much as possible compared to conventional products using epoxy resin.
以上説明したように本実施例によれば++J及的に高品
質であってかつ生産性の同い固体撮像装置を得ることか
できる。As explained above, according to this embodiment, it is possible to obtain a solid-state imaging device with substantially higher quality and productivity.
本発明によれば、可及的に高品質であってかつ生産性の
高い固体撮像装置を得ることかできる。According to the present invention, it is possible to obtain a solid-state imaging device with as high quality as possible and with high productivity.
第1図は本発明による固体撮像装置の一実施例を示す断
面図である。
1・・・固体撮像装置、2・・半導外囲器、3・・・マ
ウント剤、4 ・固体撮像素子、5・・インナリード、
6・・・細線(ワイヤ)、7・・封止樹脂、8・・・透
光性材料。
出願人代理人 佐 藤 −雄FIG. 1 is a sectional view showing an embodiment of a solid-state imaging device according to the present invention. 1... Solid-state imaging device, 2... Semiconductor envelope, 3... Mounting agent, 4 - Solid-state imaging device, 5... Inner lead,
6...Thin wire (wire), 7...Sealing resin, 8...Translucent material. Applicant's agent Mr. Sato
Claims (1)
いて固体撮像素子を固着させ、この固着された固体撮像
素子の電極と前記半導体外囲器のインナリードとをワイ
ヤボンディング接続した後に弾性体樹脂を用いて樹脂封
止し、前記固体撮像素子の感光部を透光性部材で覆うこ
とによって形成される固体撮像装置において、 前記マウント剤としてシリコン系樹脂を用いたことを特
徴とする固体撮像装置。 2、前記弾性体樹脂としてシリコン系樹脂を用いたこと
を特徴とする請求項1記載の固体撮像装置。[Claims] 1. A solid-state image sensor is fixed to a predetermined position in a recess of a semiconductor envelope using a mounting agent, and the electrodes of the fixed solid-state image sensor are connected to the inner leads of the semiconductor envelope. In the solid-state imaging device formed by connecting the solid-state imaging device by wire bonding and then resin-sealing using an elastic resin, and covering the photosensitive part of the solid-state imaging device with a light-transmitting member, a silicon-based resin is used as the mounting agent. A solid-state imaging device characterized by: 2. The solid-state imaging device according to claim 1, wherein a silicon resin is used as the elastic resin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1116772A JPH02296367A (en) | 1989-05-10 | 1989-05-10 | Solid state image pick-up device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1116772A JPH02296367A (en) | 1989-05-10 | 1989-05-10 | Solid state image pick-up device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02296367A true JPH02296367A (en) | 1990-12-06 |
Family
ID=14695344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1116772A Pending JPH02296367A (en) | 1989-05-10 | 1989-05-10 | Solid state image pick-up device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02296367A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5019436A (en) * | 1973-04-20 | 1975-02-28 | ||
| JPS62273768A (en) * | 1986-05-21 | 1987-11-27 | Toshiba Corp | Solid-state image sensing device |
-
1989
- 1989-05-10 JP JP1116772A patent/JPH02296367A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5019436A (en) * | 1973-04-20 | 1975-02-28 | ||
| JPS62273768A (en) * | 1986-05-21 | 1987-11-27 | Toshiba Corp | Solid-state image sensing device |
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