JPH0233261U - - Google Patents
Info
- Publication number
- JPH0233261U JPH0233261U JP10998588U JP10998588U JPH0233261U JP H0233261 U JPH0233261 U JP H0233261U JP 10998588 U JP10998588 U JP 10998588U JP 10998588 U JP10998588 U JP 10998588U JP H0233261 U JPH0233261 U JP H0233261U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- slow
- wave circuit
- microwave
- comb
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図ａは本考案の一実施例を示す断面図、第
１図ｂは第１図ａの実施例の効果を示す断面図、
第２図ａ，ｂは本考案の他の実施例の効果を示す
断面図、第３図ａ，ｂ，ｃは電界の集中を防ぐの
に有利な遅波回路の歯部分の形状の例を示す断面
図、第４図ａ，ｂ，ｃは従来のこの種プラズマ発
生装置の例を示す断面図、平面図、第５図ａ，ｂ
は第４図の装置の問題を示す断面図である。
１……プラズマ発生容器、１１……試料台、１
２……マイクロ波遅波回路、１３……ガス供給パ
イプ、１４……排気孔、１５……マイクロ波供給
孔、１７……誘電体物質、２０……導波管、３０
……試料、４０……プラズマ領域、なお図中同一
符号は同一または相当する部分を示す。
FIG. 1a is a sectional view showing an embodiment of the present invention, FIG. 1b is a sectional view showing the effect of the embodiment of FIG. 1a,
Figures 2a and b are cross-sectional views showing the effects of other embodiments of the present invention, and Figures 3a, b, and c are examples of the shape of the teeth of the slow-wave circuit that are advantageous in preventing concentration of electric fields. 4a, b, and c are cross-sectional views and plan views showing examples of conventional plasma generators of this type, and FIGS. 5a, b,
4 is a sectional view showing a problem with the device of FIG. 4. FIG. 1... Plasma generation container, 11... Sample stage, 1
2... Microwave slow wave circuit, 13... Gas supply pipe, 14... Exhaust hole, 15... Microwave supply hole, 17... Dielectric material, 20... Waveguide, 30
. . . Sample, 40 . . . Plasma region, and the same reference numerals in the drawings indicate the same or corresponding parts.
Claims (1)
台の面に対向する内壁面に１列または複数列のく
し形のマイクロ波遅波回路を設け、マイクロ波発
振器からのマイクロ波が上記遅波回路に供給され
る各位置にマイクロ波供給孔を設けたプラズマ発
生容器内で上記マイクロ波遅波回路に沿つて発生
するプラズマにより試料の表面処理や試料の表面
への薄膜形成などを行うプラズマ発生装置におい
て、上記くし型のマイクロ波遅波回路 を誘電体物質で覆つたことを特徴とするプラズ
マ発生装置。[Claims for Utility Model Registration] A sample stand on which a sample is placed is installed inside, and one or more rows of comb-shaped microwave slow wave circuits are provided on the inner wall surface opposite to the surface of the sample stand. Microwaves from an oscillator are supplied to the slow-wave circuit in a plasma generation container with microwave supply holes at each position, and the plasma generated along the microwave slow-wave circuit can be used to treat the surface of the sample or the surface of the sample. 1. A plasma generation device for forming a thin film on a substrate, characterized in that the comb-shaped microwave slow wave circuit is covered with a dielectric material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998588U JPH0623570Y2 (en) | 1988-08-24 | 1988-08-24 | Plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10998588U JPH0623570Y2 (en) | 1988-08-24 | 1988-08-24 | Plasma generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0233261U true JPH0233261U (en) | 1990-03-01 |
| JPH0623570Y2 JPH0623570Y2 (en) | 1994-06-22 |
Family
ID=31346731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10998588U Expired - Lifetime JPH0623570Y2 (en) | 1988-08-24 | 1988-08-24 | Plasma generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623570Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0627871A (en) * | 1992-07-06 | 1994-02-04 | Mitsuru Ito | Driving operation practice board for automobile |
-
1988
- 1988-08-24 JP JP10998588U patent/JPH0623570Y2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0627871A (en) * | 1992-07-06 | 1994-02-04 | Mitsuru Ito | Driving operation practice board for automobile |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623570Y2 (en) | 1994-06-22 |
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