JPH0235421B2 - - Google Patents

Info

Publication number
JPH0235421B2
JPH0235421B2 JP60249691A JP24969185A JPH0235421B2 JP H0235421 B2 JPH0235421 B2 JP H0235421B2 JP 60249691 A JP60249691 A JP 60249691A JP 24969185 A JP24969185 A JP 24969185A JP H0235421 B2 JPH0235421 B2 JP H0235421B2
Authority
JP
Japan
Prior art keywords
secondary electron
sample
spectrometer
extraction electrode
auxiliary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60249691A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62110245A (ja
Inventor
Katsumi Ura
Hiroshi Fujioka
Koji Nakamae
Susumu Takashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Osaka NUC
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Osaka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Osaka University NUC filed Critical Nippon Telegraph and Telephone Corp
Priority to JP60249691A priority Critical patent/JPS62110245A/ja
Publication of JPS62110245A publication Critical patent/JPS62110245A/ja
Publication of JPH0235421B2 publication Critical patent/JPH0235421B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60249691A 1985-11-07 1985-11-07 強二次電子引き出し電界を持つ二次電子分光装置 Granted JPS62110245A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60249691A JPS62110245A (ja) 1985-11-07 1985-11-07 強二次電子引き出し電界を持つ二次電子分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60249691A JPS62110245A (ja) 1985-11-07 1985-11-07 強二次電子引き出し電界を持つ二次電子分光装置

Publications (2)

Publication Number Publication Date
JPS62110245A JPS62110245A (ja) 1987-05-21
JPH0235421B2 true JPH0235421B2 (2) 1990-08-10

Family

ID=17196766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60249691A Granted JPS62110245A (ja) 1985-11-07 1985-11-07 強二次電子引き出し電界を持つ二次電子分光装置

Country Status (1)

Country Link
JP (1) JPS62110245A (2)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5202348A (en) * 1989-12-07 1993-04-13 The University Of British Columbia Thiarubrine antifungal agents
JP4519567B2 (ja) * 2004-08-11 2010-08-04 株式会社日立ハイテクノロジーズ 走査型電子顕微鏡およびこれを用いた試料観察方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3138901A1 (de) * 1981-09-30 1983-04-14 Siemens AG, 1000 Berlin und 8000 München Verbessertes gegenfeld-spektrometer fuer die elektronenstrahl-messtechnik

Also Published As

Publication number Publication date
JPS62110245A (ja) 1987-05-21

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