JPS62110245A - 強二次電子引き出し電界を持つ二次電子分光装置 - Google Patents

強二次電子引き出し電界を持つ二次電子分光装置

Info

Publication number
JPS62110245A
JPS62110245A JP60249691A JP24969185A JPS62110245A JP S62110245 A JPS62110245 A JP S62110245A JP 60249691 A JP60249691 A JP 60249691A JP 24969185 A JP24969185 A JP 24969185A JP S62110245 A JPS62110245 A JP S62110245A
Authority
JP
Japan
Prior art keywords
secondary electron
sample
spectrometer
electric field
extraction electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60249691A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235421B2 (2
Inventor
Katsumi Ura
裏　克己
Hiroshi Fujioka
弘 藤岡
Koji Nakamae
中前　幸治
Susumu Takashima
進 高嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
University of Osaka NUC
Original Assignee
Jeol Ltd
Osaka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Osaka University NUC filed Critical Jeol Ltd
Priority to JP60249691A priority Critical patent/JPS62110245A/ja
Publication of JPS62110245A publication Critical patent/JPS62110245A/ja
Publication of JPH0235421B2 publication Critical patent/JPH0235421B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60249691A 1985-11-07 1985-11-07 強二次電子引き出し電界を持つ二次電子分光装置 Granted JPS62110245A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60249691A JPS62110245A (ja) 1985-11-07 1985-11-07 強二次電子引き出し電界を持つ二次電子分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60249691A JPS62110245A (ja) 1985-11-07 1985-11-07 強二次電子引き出し電界を持つ二次電子分光装置

Publications (2)

Publication Number Publication Date
JPS62110245A true JPS62110245A (ja) 1987-05-21
JPH0235421B2 JPH0235421B2 (2) 1990-08-10

Family

ID=17196766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60249691A Granted JPS62110245A (ja) 1985-11-07 1985-11-07 強二次電子引き出し電界を持つ二次電子分光装置

Country Status (1)

Country Link
JP (1) JPS62110245A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05502220A (ja) * 1989-12-07 1993-04-22 ザ ユニバーシティ オブ ブリティッシュ コロンビア チアルブリン抗真菌および抗生剤
WO2006016613A1 (ja) * 2004-08-11 2006-02-16 Hitachi High-Technologies Corporation 走査型電子顕微鏡

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871543A (ja) * 1981-09-30 1983-04-28 シ−メンス・アクチエンゲゼルシヤフト 静電逆電界型スペクトロメータ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871543A (ja) * 1981-09-30 1983-04-28 シ−メンス・アクチエンゲゼルシヤフト 静電逆電界型スペクトロメータ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05502220A (ja) * 1989-12-07 1993-04-22 ザ ユニバーシティ オブ ブリティッシュ コロンビア チアルブリン抗真菌および抗生剤
WO2006016613A1 (ja) * 2004-08-11 2006-02-16 Hitachi High-Technologies Corporation 走査型電子顕微鏡
JP2006054094A (ja) * 2004-08-11 2006-02-23 Hitachi High-Technologies Corp 走査型電子顕微鏡
US7459681B2 (en) 2004-08-11 2008-12-02 Hitachi High-Technologies Corporation Scanning electron microscope
US8698080B2 (en) 2004-08-11 2014-04-15 Hitachi High-Technologies Corporation Scanning electron microscope

Also Published As

Publication number Publication date
JPH0235421B2 (2) 1990-08-10

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