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Ulvac Inc
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Ulvac Inc
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Application filed by Ulvac IncfiledCriticalUlvac Inc
Priority to JP13090084ApriorityCriticalpatent/JPS6111049A/ja
Publication of JPS6111049ApublicationCriticalpatent/JPS6111049A/ja
Publication of JPH0237183B2publicationCriticalpatent/JPH0237183B2/ja
Method of killing microorganisms in the inside of a container utilizing a plasma initiated by a focused laser beam and sustained by an electromagnetic field