JPH0238469U - - Google Patents
Info
- Publication number
- JPH0238469U JPH0238469U JP11467388U JP11467388U JPH0238469U JP H0238469 U JPH0238469 U JP H0238469U JP 11467388 U JP11467388 U JP 11467388U JP 11467388 U JP11467388 U JP 11467388U JP H0238469 U JPH0238469 U JP H0238469U
- Authority
- JP
- Japan
- Prior art keywords
- electrode plate
- magnets
- glow discharge
- gas
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000000354 decomposition reaction Methods 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11467388U JPH0238469U (2) | 1988-08-31 | 1988-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11467388U JPH0238469U (2) | 1988-08-31 | 1988-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0238469U true JPH0238469U (2) | 1990-03-14 |
Family
ID=31355638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11467388U Pending JPH0238469U (2) | 1988-08-31 | 1988-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0238469U (2) |
-
1988
- 1988-08-31 JP JP11467388U patent/JPH0238469U/ja active Pending
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