JPH0240033Y2 - - Google Patents

Description

[Detailed description of the invention] Industrial application field This invention has an extremely simple structure that uses the reciprocating linear motion of a table that performs various tasks and uses spring force to position objects placed on the table. That's what I'm trying to do.

Conventional technology and its problems Conventionally, in such cases, it has been common to separately provide a unique positioning mechanism using a cylinder, etc.
As a result, it has the drawbacks of being mechanically complex and expensive.

Means and Effects for Solving the Problems The present invention provides a rotatable first lever on the table, applies a spring force in the direction of pressing the article to the lever, and has a first lever on the opposite side holding the article. A guide is provided, and a second lever connected to the first lever is provided, and the second lever contacts the fixing member at the initial position of the table to open the first lever on the table to the article. The above problem was solved by doing the following.

At the initial position of the table, the first lever is open to the article, so the article can be transferred onto the table, and when the table starts moving, the second lever is opened to the article.
The lever is released from the fixing member, and the article can be positioned by the first lever pressing the article against the guide using a spring force.

Embodiment An embodiment will be described using a semiconductor wafer transfer apparatus as a specific example. The function of this device is to automatically transfer the wafer from a normal transport carrier to a cleaning carrier with excellent heat and chemical resistance before and after the wafer cleaning process.

In FIG. 1, when a carrier 1 containing a semiconductor wafer 3 is placed on a table 4, the table 4 moves in the X direction to a central transfer position of the present transfer apparatus.

Then, the push-up plate 5 pushes up all the wafers 3 at once through an opening provided in the table 4, and the wafers 3 are inserted into the wafer holding plate 6.

A holding plate 6 rotates around a rotating shaft 7 and holds the wafer 3 from below. In this state, the push-up plate 5 is lowered and the table 4 returns to its original position.

Next, the table 8 on which the empty carrier 2 is placed is moved to the central transfer position of the present transfer device, and the push-up plate 5 passes through the table 8 again and touches the wafer 3 supported by the holding plate 6. Contact.

Then, the holding plate 6 rotates, the wafer 3 is placed on the push-up plate 5, and the push-up plate 5 descends simultaneously and enters the carrier 2.

Then, the table 8 returns to its original position and the transfer is completed.

Note that any means such as an air cylinder or the like can be used as the means for moving the table, so a description thereof will be omitted.

In FIG. 2, the vertical positioning will first be explained. The first lever 11 is rotatably attached to the table 4 and biased in the direction of the arrow by a coil spring 12 whose one end is fixed to the table 4. When the table 4 is in the initial position, the second lever 9 is pressed against the side plate 10 (corresponding to the "fixing member" in the claims for utility model registration), and the first lever 9 is connected and fixed to the lever 9. Lever 1
1 is open to carrier 1 (or "article").

When the table 4 starts moving in the X direction, the second lever 9 separates from the side plate 10, and due to the spring force of the coil spring 12, the second lever 9 and the first lever 11 simultaneously rotate in the direction of the arrow, and the tip of the first lever 11 The carrier 1 is pressed against the positioning roller 13 (corresponding to the "guide" in the claims of the utility model registration) by the roller 14 supported by the carrier 1.

On the other hand, in the lateral direction, the second lever 15 is similarly pressed against the wedge-shaped dog 16 fixed to the lower frame 17 in the initial position, and the second lever 15 is connected and fixed to the second lever 15. 1 lever 18 is open.

When the table 4 starts moving in the X direction, the second lever 15 separates from the wedge-shaped dog 16, and the spring force of the coil spring 19 causes the second lever 15 and the first lever 18 to simultaneously rotate in the direction of the arrow, and the first lever 18 The carrier 1 is pressed against the guide 21 by a roller 20 supported at the tip of the roller 20.

At this time, the carrier 1 is positioned and fixed at the normal set position by the rotation of the positioning roller 13 and the lever tip roller 14.

The positioning device of the present invention has the feature that positioning is completed simultaneously with the reciprocating linear movement in any case in a mechanism where there is reciprocating linear movement by a table or the like.

There may be cases where positioning is performed only in the vertical or horizontal direction, so it is not always essential to perform positioning in both the vertical and horizontal directions at the same time.

Further, the rollers 13 and the guides 21 may be mutually exchanged in position, and only the rollers or only the guides may be used.

Effects of the invention Since the reciprocating linear movement of the table and spring force are used, there is no energy consumption such as air pressure or electricity, and the structure is extremely simple, so no maintenance is required.

It is possible to reduce the weight and size, is inexpensive, and because positioning is completed at the same time as the table movement starts, it is possible to realize a one-motion, two-mechanism system.

Furthermore, since positioning is completed while the table is moving, there is no loss time during the cycle. Due to its structure, there are very few sources of dust generation.

[Brief explanation of the drawing]

FIG. 1 is a perspective view of the embodiment, and FIG. 2 is a perspective view of essential parts, also showing the internal structure. 1... Goods, 4... Table, 11, 18...
First lever, 9,15...Second lever, 12,1
9... Spring, 13, 21... Guide, 10, 16
...Fixed member.

Claims (1)

[Scope of utility model registration request] A first lever is rotatably provided on the table, and a spring force is applied to the lever in the direction of pushing the article. A guide is provided on the opposite side of the lever, and a first lever is connected to the first lever. A positioning device comprising two levers, and the second lever comes into contact with a fixing member at the initial position of the table, thereby opening the first lever on the table to the article.