JPH0240886A - Manufacture of ceramic heater - Google Patents

Manufacture of ceramic heater

Info

Publication number
JPH0240886A
JPH0240886A JP19063688A JP19063688A JPH0240886A JP H0240886 A JPH0240886 A JP H0240886A JP 19063688 A JP19063688 A JP 19063688A JP 19063688 A JP19063688 A JP 19063688A JP H0240886 A JPH0240886 A JP H0240886A
Authority
JP
Japan
Prior art keywords
resistor
sheet
ceramic powder
ceramic
stamped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19063688A
Other languages
Japanese (ja)
Other versions
JP2530209B2 (en
Inventor
Yukihiro Kimura
幸弘 木村
Kazuo Tatematsu
立松 一穂
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP63190636A priority Critical patent/JP2530209B2/en
Priority to DE19893924777 priority patent/DE3924777A1/en
Publication of JPH0240886A publication Critical patent/JPH0240886A/en
Application granted granted Critical
Publication of JP2530209B2 publication Critical patent/JP2530209B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Resistance Heating (AREA)

Abstract

PURPOSE:To reduce variation of the resistance value of a ceramic heater by forming conductive ceramic powder into a green sheet, stamping out the sheet into the specific form of a resistor, embedding the resistor into which the sheet is thus stamped out in ceramic powder of silicon nitride and sintering the resistor while pressed in the thickness direction thereof. CONSTITUTION:A green sheet made of conductive ceramic powder is stamped out into U-shape to be a stamped resistor 1. Organic binder for molding powder is applied to the resistor 1, then the binder is processed to adjust ceramic powder of silicon nitride. The ceramic powder is formed into two compacts 2 whose cross section is D-shape by means of a die. The plane portions of the compacts 2 are arranged to face each other and the sheet stamped resistor 1 is disposed therebetween to press them to be integrated. Hot press sintering is then applied to the integrated body with changing pressing direction. Variation of the resistance value of a ceramic heater is thus reduced.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 本発明はセラミックグロープラグのように急速に昇温さ
せる発熱体のヒータ部を構成するセラミックヒータに関
するものである。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a ceramic heater that constitutes a heater section of a heating element that rapidly raises temperature, such as a ceramic glow plug.

〈従来の技術〉 近時セラミックグロープラグが開発され、ディーゼル機
関等のプラグとして用いられてきている。
<Prior Art> Ceramic glow plugs have recently been developed and are being used as plugs for diesel engines and the like.

ここに用いられるヒータ部は、抵抗体としてT i+ 
Z r、 If f * L a、 v、 N b+ 
Ta、Cr。
The heater section used here has T i+ as a resistor.
Z r, If f * L a, v, N b+
Ta, Cr.

Mo、Wより選ばれた金属の1種以上の窒化物の如きm
電性セラミックが用いられるとともに絶縁体としても高
温特性のより優れた窒化珪素系の磁器が提案されている
。このように導電性セラミックが抵抗体に用いられる理
由は、主として従来より汎用されているW、Mo等の高
融点金属製のコイル抵抗体を磁器に埋設したものと異な
り、抵抗体と磁器との熱膨張差を小さくするところにあ
る。
m such as a nitride of one or more metals selected from Mo and W
In addition to using electrically conductive ceramics, silicon nitride-based porcelain has been proposed as an insulator and has better high-temperature properties. The reason why conductive ceramic is used as a resistor is that unlike conventional coil resistors made of high-melting point metals such as W and Mo embedded in porcelain, the reason why conductive ceramics are used as resistors is that they Its purpose is to reduce the difference in thermal expansion.

〈発明が解決しようとする課題〉 しかし、これまで導電性セラミックを用いたヒータ部は
特開昭57−106586号公報に見られるように、抵
抗粉末を含むペーストをセラミック未焼成成形体の表面
に塗布することによって製造する方法が知られているが
、塗布厚さにバラツキを生じ易く、この結果抵抗値が変
動し易く、又、塗布方法によるためにQ、1mm以上の
厚さの抵抗体を得るためには、数回に亘り塗布、乾燥を
繰り返す必要があり、工数の点で不利なことは否めない
<Problems to be Solved by the Invention> However, until now, heater parts using conductive ceramics have been developed by applying a paste containing resistance powder to the surface of an unfired ceramic body, as seen in Japanese Patent Application Laid-open No. 57-106586. A method of manufacturing by coating is known, but it tends to cause variations in coating thickness, and as a result, the resistance value tends to fluctuate. In order to obtain this, it is necessary to repeat coating and drying several times, which is undeniably disadvantageous in terms of man-hours.

又はぼU字型に打ち抜いた抵抗体を円柱状セラミック中
に埋設すると、抵抗体シートの幅とシート厚さの比が極
めて大きくなり、この結果、セラミックヒータの径方向
の温度ムラが大きくなる欠点がある。なおこのことは前
述の塗布法に於ても見られる欠点である。
Alternatively, if a U-shaped resistor is punched out and buried in a cylindrical ceramic, the ratio of the width of the resistor sheet to the sheet thickness becomes extremely large, resulting in large temperature irregularities in the radial direction of the ceramic heater. There is. Note that this is a drawback also seen in the above-mentioned coating method.

く課題を解決するための手段〉 本発明は前記の課題を解決するためになされたもので、
その概要は導電性セラミックを主体とする粉体よりグリ
ーンシートを形成する工程と、それを所定の抵抗体の形
状に打ち抜く工程と、打ち抜かれた抵抗体を窒化珪素質
セラミック粉体中に埋設し、この1氏抗体の幅方向から
圧力を加えながら焼成する工程よりなるセラミックヒー
タの製造方法である。
Means for Solving the Problems> The present invention has been made to solve the above problems,
The outline of the process is to form a green sheet from powder mainly made of conductive ceramic, punch it into the shape of a predetermined resistor, and embed the punched resistor in silicon nitride ceramic powder. , is a method for manufacturing a ceramic heater, which comprises a step of firing the monomer antibody while applying pressure from the width direction.

く作 用〉 本発明によれば■シート成形法により任意の厚さ(0,
05〜数龍)の抵抗体が得られる。しかも厚さの寸法の
バラツキが少ないために結果的に最終製品のセラミック
ヒータの抵抗値のバラツキが減少する。
Effects> According to the present invention, ■ any thickness (0, 0,
05 to Kazuryu) are obtained. Moreover, since there is little variation in the thickness dimension, the variation in resistance value of the ceramic heater as a final product is reduced as a result.

■金型打抜きプレスにより成形する為、寸法精度が高く
抵抗値のバラツキが減少する。
■Since it is formed using a die punch press, dimensional accuracy is high and variations in resistance values are reduced.

■シート面の幅方向から加圧しながらホットプレス焼成
するので、抵抗体シート成形体の面方向のみに50〜6
5%に焼成収縮を起す。
■Since hot press firing is performed while applying pressure from the width direction of the sheet surface, 50 to 6
Firing shrinkage of 5% occurs.

この結果焼結体中の抵抗体は抵抗体幅/抵抗体厚さの比
が未焼成成形体に対し50〜65%に低減し、セラミッ
クヒータの径方向の温度分布のバラツキが減少する。
As a result, the ratio of resistor width/resistor thickness of the resistor in the sintered body is reduced to 50 to 65% of that of the green molded body, and the variation in temperature distribution in the radial direction of the ceramic heater is reduced.

などの作用がある。There are effects such as

本発明の実施態様中打ち抜かれた抵抗体を窒化珪素質セ
ラミック粉体中に埋設する工程は、一般には窒化珪素質
セラミック粉末に所定の焼結助剤を加え、第1図に示す
ように金型プレスにより断面り型の2枚の成形体2を作
成し、その平面側を内側にして対向させ、その間に打抜
抵抗体1を挟んで金型プレスして成形される。
In the embodiment of the present invention, the step of embedding the punched resistor in silicon nitride ceramic powder is generally carried out by adding a predetermined sintering aid to the silicon nitride ceramic powder, and then adding a sintering agent to the silicon nitride ceramic powder as shown in FIG. Two cross-section shaped molded bodies 2 are created by a mold press, and the flat sides thereof are placed inside to face each other, and the punching resistor 1 is sandwiched between them, and the molded body 2 is molded by mold pressing.

この場合、焼成、加圧の仕方により製品は収縮方向が異
なり本発明のように抵抗体の幅方向から加圧しながらホ
ットプレスすると、温度分布が小さく、抵抗値のバラツ
キの少ないセラミックヒータが得られる。
In this case, the shrinkage direction of the product differs depending on the method of firing and pressurization, and if hot pressing is performed while applying pressure from the width direction of the resistor as in the present invention, a ceramic heater with a small temperature distribution and little variation in resistance value can be obtained. .

〈実施例〉 次に本発明の実施例及び比較例について述べる。<Example> Next, examples and comparative examples of the present invention will be described.

平均粒径 0.5μmのWC70重量% 及び平均粒径
 1.5μmの5izNa 30重量%に対しポリビニ
ルブチラール(有機バインダー)7重量%を加え、更に
トルエン、エチルアルコールを溶剤として混合し、流動
性のあるスラリー状とし、平板上にドクターブレード法
により流し出して溶剤を揮散させ、厚さ0.4鰭の抵抗
体からなるグリーンシートを作成した。
To 70% by weight of WC with an average particle size of 0.5 μm and 30% by weight of 5izNa with an average particle size of 1.5 μm, 7% by weight of polyvinyl butyral (organic binder) was added, and further mixed with toluene and ethyl alcohol as a solvent to improve fluidity. A slurry was prepared and poured onto a flat plate using a doctor blade method to volatilize the solvent, thereby creating a green sheet consisting of a resistor with a thickness of 0.4 fins.

次に金型にて第2図のように略U字型に打抜いて、打ち
抜き抵抗体1を作成した。一方平均粒径0.1am、の
Sj+Na 90重1%、Ah(h 5重量%、Y!(
h 5重量%にエチルアルコールを加えて湿式混合し、
例えばエチルセルロースの如き粉末成形用:0′機バイ
ンダーを添加した後、エチルアルコールを渾1iJ1.
させ、セラミック粉末を調整した。
Next, the resistor 1 was punched out using a mold into a substantially U-shape as shown in FIG. On the other hand, the average particle size is 0.1 am, Sj+Na 90% by weight, Ah(h 5% by weight, Y!(
h Add ethyl alcohol to 5% by weight and wet mix,
After adding a binder for powder molding, such as ethyl cellulose, 1iJ1.
to prepare ceramic powder.

ついで第1図に示すようにセラミック粉末を金型により
断面路り型の成形体2に成形し、その成形体2ケの平面
部を向い合せ、中間に前記したシート打ち抜き抵抗体1
を挟んで一体にプレス成形を行なった。3は抵抗体の電
極部である。
Next, as shown in FIG. 1, the ceramic powder is molded into a molded body 2 with a cross-sectional shape using a mold, and the flat parts of the two molded bodies are placed facing each other.
Press molding was performed in one piece with the two in between. 3 is an electrode portion of the resistor.

次にこのようにしたものを第3図の(la)、 (lb
)(本発明)、及び(3a) 、 (3b ) (比較
例)のように加圧方向を変えてホットプレス焼成を行っ
た。このものは加圧方向にのみ収縮し、厚さの方向には
収縮しないものであった。
Next, in Figure 3, (la) and (lb
) (present invention), and (3a) and (3b) (comparative examples), hot press firing was performed by changing the pressing direction. This material contracted only in the direction of pressure, but not in the direction of thickness.

第2図(la)、 (lb)は打ち抜きシート抵抗体の
幅方向から加圧してホットプレスを行なったものであり
、第2図の(2a)、 (2h)は加圧することなく単
に普通焼成をしたものであり等友釣に収縮するものであ
った。
Figures 2 (la) and (lb) are punched sheet resistors that were hot-pressed by applying pressure from the width direction, and Figure 2 (2a) and (2h) were simply fired normally without applying pressure. It was the result of a similar situation, and it was a contraction of Tomotsuri.

又、第2図(3a)、(3b)に示すようシートの厚さ
の方向に加圧しながらホットプレスするものでは厚みが
益々薄くなることが認められた。
Furthermore, as shown in FIGS. 2(3a) and 2(3b), it was observed that the thickness of the sheet becomes thinner and thinner when hot pressing is performed while applying pressure in the direction of the thickness of the sheet.

又透過X線にて内部に埋設された抵抗体の形状を透過X
線で看察した。
In addition, the shape of the resistor buried inside is transmitted through X-rays.
I watched him on the line.

以上によれば、第2図(1a)、(1b)の本発明の実
施例に相当するものはシートの面方向に57%の焼成収
縮が起き、シートの幅は同一割合で収縮が起き、シート
の厚さは殆んど変化しなかった為、抵抗体の全幅/I″
7−さの比が57%に減少した。
According to the above, in the case corresponding to the embodiments of the present invention shown in FIGS. 2(1a) and 2(1b), 57% of the firing shrinkage occurred in the plane direction of the sheet, and the width of the sheet contracted at the same rate. Since the sheet thickness hardly changed, the total width of the resistor /I''
7-sa ratio decreased to 57%.

上記の焼結体をφ3.5 x l 40 (mm)の円
筒状に研磨し、研磨によって露出した電極部にメタライ
ズを施した後電流を印加すべく金属部品をロウ付して通
電加熱を行なった結果、径方向の温度差は550℃であ
り良好であった。
The above sintered body was polished into a cylindrical shape of φ3.5 x l 40 (mm), and the electrode parts exposed by polishing were metallized, and then the metal parts were brazed and electrically heated in order to apply an electric current. As a result, the temperature difference in the radial direction was 550°C, which was good.

これに対し比較例では抵抗体の全幅/厚さの比は普通焼
成(第2図(2))では変化せず、シートの厚さの方向
から圧力を加えてホットプレス焼成したものでは1.7
3(110,57)に拡大し°ζしまった。
On the other hand, in the comparative example, the ratio of the total width/thickness of the resistor does not change when normally fired (Fig. 2 (2)), but when hot press firing is performed by applying pressure from the direction of the thickness of the sheet, the ratio is 1. 7
It expanded to 3 (110, 57) and became smaller.

これを本発明の実施例と同様にして通電加熱を行なった
ところ、温度差は各々〜150℃、〜300℃と到底実
用に耐えるものではではなかった。
When electrical heating was carried out in the same manner as in the examples of the present invention, the temperature differences were 150 DEG C. and 300 DEG C., respectively, which were completely unacceptable for practical use.

(なお比較例の如きものを使用する場合は焼成時の収縮
率を勘案して未焼成プレス成形体の形状を変更したもの
で実施している。) 更に本発明の実施例によるセラミックヒータの3σ 抵抗のバラツキを確認したところ−1−=2.7%と極
めて安定していることが判明した。
(When using a comparative example, the shape of the unfired press molded body was changed in consideration of the shrinkage rate during firing.) Furthermore, the 3σ of the ceramic heater according to the example of the present invention was When the variation in resistance was checked, it was found to be extremely stable with -1-=2.7%.

〈発明の効果〉 本発明によれば温度分布の範囲が小さく、また抵抗値の
バラツキも少ないセラミックヒータの製造が可能である
<Effects of the Invention> According to the present invention, it is possible to manufacture a ceramic heater with a narrow range of temperature distribution and less variation in resistance value.

又、抵抗体の厚さや形状は任意であり、必要な昇温特性
を有するヒータの作成が容易である。
Further, the thickness and shape of the resistor can be set arbitrarily, making it easy to create a heater having the necessary temperature-raising characteristics.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はグリーンシート打抜き法で製造された抵抗体を
D型セラミックで挟んで一体化する工程を示す斜視図、
第2図は成形体中の抵抗体形状を示す縦断面図、第3図
(la) 、 (lb)は本発明の一例、第3図(2a
) 、 (2b)は普通焼成の場合の一例、第3図(3
a) 、 (3b)は厚み方向に加圧しながらホットプ
レスする場合の一例を示す縦断面図および横断面図を示
す。 l・・・打抜抵抗体、2・・・窒化珪素質セラミックス
3・・・電極部
Figure 1 is a perspective view showing the process of sandwiching and integrating a resistor manufactured by the green sheet punching method between D-type ceramics;
Fig. 2 is a vertical cross-sectional view showing the shape of the resistor in the molded body, Fig. 3 (la) and (lb) are examples of the present invention, Fig. 3 (2a)
), (2b) is an example of normal firing, Figure 3 (3
a) and (3b) show a longitudinal cross-sectional view and a cross-sectional view showing an example of hot pressing while applying pressure in the thickness direction. l...Punching resistor, 2...Silicon nitride ceramics 3...Electrode part

Claims (1)

【特許請求の範囲】[Claims] 導電性セラミックを主体とする粉体と、シート成形用の
有機質粘結剤とを混練してペースト状となし、これを平
板状に流してグリーンシートを形成する工程と、該グリ
ーンシートを所定の抵抗体の形状に打ち抜く工程と、打
ち抜かれた抵抗体を窒化珪素質セラミック粉体中に埋設
し、前記抵抗体の幅方向から圧力を加えながら焼成する
工程とからなることを特徴とするセラミックヒータの製
造法
A process of kneading powder mainly made of conductive ceramic and an organic binder for sheet forming into a paste, and forming a green sheet by pouring this into a flat plate; A ceramic heater comprising the steps of punching into the shape of a resistor, embedding the punched resistor in silicon nitride ceramic powder, and firing while applying pressure from the width direction of the resistor. manufacturing method
JP63190636A 1988-07-26 1988-08-01 Ceramic heater manufacturing method Expired - Fee Related JP2530209B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP63190636A JP2530209B2 (en) 1988-08-01 1988-08-01 Ceramic heater manufacturing method
DE19893924777 DE3924777A1 (en) 1988-07-26 1989-07-26 Ceramic heating plug using embedded ceramic resistor - has improved resistance to thermal cycling as result of material selection and dimensions

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63190636A JP2530209B2 (en) 1988-08-01 1988-08-01 Ceramic heater manufacturing method

Publications (2)

Publication Number Publication Date
JPH0240886A true JPH0240886A (en) 1990-02-09
JP2530209B2 JP2530209B2 (en) 1996-09-04

Family

ID=16261370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63190636A Expired - Fee Related JP2530209B2 (en) 1988-07-26 1988-08-01 Ceramic heater manufacturing method

Country Status (1)

Country Link
JP (1) JP2530209B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100588004B1 (en) * 1999-07-02 2006-06-08 베루 악티엔게젤샤프트 Ceramic heating rod, glow plug containing the ceramic heating rod, and process for their manufacture
JP2009525570A (en) * 2006-01-30 2009-07-09 ライスター プロセス テクノロジーズ Heating element of hot air device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100588004B1 (en) * 1999-07-02 2006-06-08 베루 악티엔게젤샤프트 Ceramic heating rod, glow plug containing the ceramic heating rod, and process for their manufacture
JP2009525570A (en) * 2006-01-30 2009-07-09 ライスター プロセス テクノロジーズ Heating element of hot air device

Also Published As

Publication number Publication date
JP2530209B2 (en) 1996-09-04

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