JPH0241109U - - Google Patents
Info
- Publication number
- JPH0241109U JPH0241109U JP11951688U JP11951688U JPH0241109U JP H0241109 U JPH0241109 U JP H0241109U JP 11951688 U JP11951688 U JP 11951688U JP 11951688 U JP11951688 U JP 11951688U JP H0241109 U JPH0241109 U JP H0241109U
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic sensor
- film thickness
- substrate
- visualized
- measurement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000012790 confirmation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Description
第１図はこの考案の可視化型超音波センサの断
面で表した説明図、第２図は測定点の目視確認の
ようすを示す説明図、第３図は、測定した基板メ
ツキ厚分布を示す平面図である。
１，２……音響レンズ、３……レンズホルダー
、５……可視化型超音波センサー、７，８……圧
電体、９……光学レンズ、１４……高さ調節ネジ
、１６……被検体防護部、１８……センサ支え治
具、３０……膜、３２……基板、３４……被検体
、３６……測定点、４０……超音波伝搬体、５０
……水そう。
Figure 1 is an explanatory diagram showing a cross section of the visualized ultrasonic sensor of this invention, Figure 2 is an explanatory diagram showing visual confirmation of measurement points, and Figure 3 is a plane diagram showing the measured substrate plating thickness distribution. It is a diagram. 1, 2... Acoustic lens, 3... Lens holder, 5... Visualization type ultrasonic sensor, 7, 8... Piezoelectric body, 9... Optical lens, 14... Height adjustment screw, 16... Subject Protective part, 18... Sensor support jig, 30... Membrane, 32... Substrate, 34... Test object, 36... Measurement point, 40... Ultrasonic propagation body, 50
...So water.
Claims (1)
検体の膜厚を測定する超音波センサにおいて、光
学レンズよりなる窓が設けられ、これにより膜厚
測定中に測定点を見られるようにした可視化型超
音波センサ。 In an ultrasonic sensor for measuring the film thickness of an object having a solid substrate and a film formed on the substrate, a window made of an optical lens is provided so that the measurement point can be seen during film thickness measurement. Visualized ultrasonic sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11951688U JPH0241109U (en) | 1988-09-12 | 1988-09-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11951688U JPH0241109U (en) | 1988-09-12 | 1988-09-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0241109U true JPH0241109U (en) | 1990-03-22 |
Family
ID=31364817
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11951688U Pending JPH0241109U (en) | 1988-09-12 | 1988-09-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0241109U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120803A (en) * | 1984-07-10 | 1986-01-29 | Toppan Printing Co Ltd | Measuring method of film thickness |
| JPS61225611A (en) * | 1985-03-29 | 1986-10-07 | Agency Of Ind Science & Technol | Shape measuring composite head by combined application of light and supersonic wave |
| JPS6382312A (en) * | 1986-09-26 | 1988-04-13 | Toppan Printing Co Ltd | Method for measuring thickness of film |
-
1988
- 1988-09-12 JP JP11951688U patent/JPH0241109U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120803A (en) * | 1984-07-10 | 1986-01-29 | Toppan Printing Co Ltd | Measuring method of film thickness |
| JPS61225611A (en) * | 1985-03-29 | 1986-10-07 | Agency Of Ind Science & Technol | Shape measuring composite head by combined application of light and supersonic wave |
| JPS6382312A (en) * | 1986-09-26 | 1988-04-13 | Toppan Printing Co Ltd | Method for measuring thickness of film |
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