JPH0241109U - - Google Patents

Info

Publication number
JPH0241109U
JPH0241109U JP11951688U JP11951688U JPH0241109U JP H0241109 U JPH0241109 U JP H0241109U JP 11951688 U JP11951688 U JP 11951688U JP 11951688 U JP11951688 U JP 11951688U JP H0241109 U JPH0241109 U JP H0241109U
Authority
JP
Japan
Prior art keywords
ultrasonic sensor
film thickness
substrate
visualized
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11951688U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11951688U priority Critical patent/JPH0241109U/ja
Publication of JPH0241109U publication Critical patent/JPH0241109U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Description

【図面の簡単な説明】
第１図はこの考案の可視化型超音波センサの断
面で表した説明図、第２図は測定点の目視確認の
ようすを示す説明図、第３図は、測定した基板メ
ツキ厚分布を示す平面図である。 １，２……音響レンズ、３……レンズホルダー
、５……可視化型超音波センサー、７，８……圧
電体、９……光学レンズ、１４……高さ調節ネジ
、１６……被検体防護部、１８……センサ支え治
具、３０……膜、３２……基板、３４……被検体
、３６……測定点、４０……超音波伝搬体、５０
……水そう。

Claims (1)

    【実用新案登録請求の範囲】
  1. 固体基板と基板上に形成された膜とを有する被
    検体の膜厚を測定する超音波センサにおいて、光
    学レンズよりなる窓が設けられ、これにより膜厚
    測定中に測定点を見られるようにした可視化型超
    音波センサ。
JP11951688U 1988-09-12 1988-09-12 Pending JPH0241109U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11951688U JPH0241109U (ja) 1988-09-12 1988-09-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11951688U JPH0241109U (ja) 1988-09-12 1988-09-12

Publications (1)

Publication Number Publication Date
JPH0241109U true JPH0241109U (ja) 1990-03-22

Family

ID=31364817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11951688U Pending JPH0241109U (ja) 1988-09-12 1988-09-12

Country Status (1)

Country Link
JP (1) JPH0241109U (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120803A (ja) * 1984-07-10 1986-01-29 Toppan Printing Co Ltd 膜厚測定方法
JPS61225611A (ja) * 1985-03-29 1986-10-07 Agency Of Ind Science & Technol 光・超音波併用形測定用複合ヘツド
JPS6382312A (ja) * 1986-09-26 1988-04-13 Toppan Printing Co Ltd 膜厚測定方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6120803A (ja) * 1984-07-10 1986-01-29 Toppan Printing Co Ltd 膜厚測定方法
JPS61225611A (ja) * 1985-03-29 1986-10-07 Agency Of Ind Science & Technol 光・超音波併用形測定用複合ヘツド
JPS6382312A (ja) * 1986-09-26 1988-04-13 Toppan Printing Co Ltd 膜厚測定方法

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